DE69530248T2 - Planarer galvanospiegel mit verschiebungsdetektor - Google Patents

Planarer galvanospiegel mit verschiebungsdetektor

Info

Publication number
DE69530248T2
DE69530248T2 DE69530248T DE69530248T DE69530248T2 DE 69530248 T2 DE69530248 T2 DE 69530248T2 DE 69530248 T DE69530248 T DE 69530248T DE 69530248 T DE69530248 T DE 69530248T DE 69530248 T2 DE69530248 T2 DE 69530248T2
Authority
DE
Germany
Prior art keywords
galvano mirror
sliding detector
planar galvano
planar
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69530248T
Other languages
English (en)
Other versions
DE69530248D1 (de
Inventor
Masayoshi Esashi
Norihiro Asada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Signal Co Ltd
Original Assignee
Nippon Signal Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Signal Co Ltd filed Critical Nippon Signal Co Ltd
Publication of DE69530248D1 publication Critical patent/DE69530248D1/de
Application granted granted Critical
Publication of DE69530248T2 publication Critical patent/DE69530248T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors
DE69530248T 1994-01-31 1995-01-23 Planarer galvanospiegel mit verschiebungsdetektor Expired - Lifetime DE69530248T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6009824A JP2657769B2 (ja) 1994-01-31 1994-01-31 変位検出機能を備えたプレーナー型ガルバノミラー及びその製造方法
PCT/JP1995/000066 WO1995020774A1 (fr) 1994-01-31 1995-01-23 Miroir galvanoplastique de type plan presentant une fonction de detection et procede de production de celui-ci

Publications (2)

Publication Number Publication Date
DE69530248D1 DE69530248D1 (de) 2003-05-15
DE69530248T2 true DE69530248T2 (de) 2003-12-11

Family

ID=11730891

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530248T Expired - Lifetime DE69530248T2 (de) 1994-01-31 1995-01-23 Planarer galvanospiegel mit verschiebungsdetektor

Country Status (7)

Country Link
US (1) US5767666A (de)
EP (1) EP0692729B1 (de)
JP (1) JP2657769B2 (de)
KR (1) KR100232692B1 (de)
DE (1) DE69530248T2 (de)
TW (1) TW255064B (de)
WO (1) WO1995020774A1 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006029627B4 (de) * 2006-06-28 2015-05-13 Robert Bosch Gmbh Mikromechanisches System mit einstellbarem Schwingungsverhalten und Verfahren zu seinem Betrieb
DE102016200599A1 (de) * 2016-01-19 2017-07-20 Robert Bosch Gmbh MEMS-Vorrichtung und Betriebsverfahren für eine MEMS-Vorrichtung
DE102016111531A1 (de) * 2016-06-23 2018-01-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optischer Scanner
DE102020116511A1 (de) 2020-06-23 2021-12-23 OQmented GmbH Glassubstratbasierte MEMS-Spiegelvorrichtung und Verfahren zu ihrer Herstellung
DE102020008076A1 (de) 2020-06-23 2021-12-23 OQmented GmbH Glassubstratbasierte mems-spiegelvorrichtung und verfahren zu ihrer herstellung

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US6803938B2 (en) * 2002-05-07 2004-10-12 Texas Instruments Incorporated Dynamic laser printer scanning alignment using a torsional hinge mirror
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006029627B4 (de) * 2006-06-28 2015-05-13 Robert Bosch Gmbh Mikromechanisches System mit einstellbarem Schwingungsverhalten und Verfahren zu seinem Betrieb
DE102016200599A1 (de) * 2016-01-19 2017-07-20 Robert Bosch Gmbh MEMS-Vorrichtung und Betriebsverfahren für eine MEMS-Vorrichtung
DE102016111531A1 (de) * 2016-06-23 2018-01-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optischer Scanner
DE102016111531B4 (de) 2016-06-23 2022-02-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optischer Scanner
DE102020116511A1 (de) 2020-06-23 2021-12-23 OQmented GmbH Glassubstratbasierte MEMS-Spiegelvorrichtung und Verfahren zu ihrer Herstellung
DE102020008076A1 (de) 2020-06-23 2021-12-23 OQmented GmbH Glassubstratbasierte mems-spiegelvorrichtung und verfahren zu ihrer herstellung
DE102020008076B4 (de) 2020-06-23 2022-03-24 OQmented GmbH Glassubstratbasierte mems-spiegelvorrichtung und verfahren zu ihrer herstellung
DE102020116511B4 (de) 2020-06-23 2022-03-24 OQmented GmbH Glassubstratbasierte MEMS-Spiegelvorrichtung und Verfahren zu ihrer Herstellung

Also Published As

Publication number Publication date
DE69530248D1 (de) 2003-05-15
JP2657769B2 (ja) 1997-09-24
EP0692729B1 (de) 2003-04-09
JPH07218857A (ja) 1995-08-18
KR960702116A (ko) 1996-03-28
EP0692729A1 (de) 1996-01-17
KR100232692B1 (ko) 1999-12-01
TW255064B (de) 1995-08-21
US5767666A (en) 1998-06-16
EP0692729A4 (de) 1995-11-23
WO1995020774A1 (fr) 1995-08-03

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