DE69532668D1 - Herstellungsvervahren einer elektronen emittierende Einrichtung mit Oberflächenleitung - Google Patents

Herstellungsvervahren einer elektronen emittierende Einrichtung mit Oberflächenleitung

Info

Publication number
DE69532668D1
DE69532668D1 DE69532668T DE69532668T DE69532668D1 DE 69532668 D1 DE69532668 D1 DE 69532668D1 DE 69532668 T DE69532668 T DE 69532668T DE 69532668 T DE69532668 T DE 69532668T DE 69532668 D1 DE69532668 D1 DE 69532668D1
Authority
DE
Germany
Prior art keywords
electron
emitting device
manufacturing process
surface conduction
conduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69532668T
Other languages
English (en)
Other versions
DE69532668T2 (de
Inventor
Yoshikazu Banno
Etsuro Kishi
Mitsutoshi Hasegawa
Kazuhiro Sando
Kazuya Shigeoka
Masahiko Miyamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69532668D1 publication Critical patent/DE69532668D1/de
Publication of DE69532668T2 publication Critical patent/DE69532668T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/316—Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/027—Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/316—Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
    • H01J2201/3165—Surface conduction emission type cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
DE1995632668 1994-12-16 1995-12-15 Herstellungsvervahren einer elektronen emittierende Einrichtung mit Oberflächenleitung Expired - Lifetime DE69532668T2 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP31344094 1994-12-16
JP31344094 1994-12-16
JP31442094 1994-12-19
JP31442094 1994-12-19
JP458195 1995-01-17
JP458195 1995-01-17
JP15632195 1995-06-22
JP15632195 1995-06-22
JP32092795A JP3241251B2 (ja) 1994-12-16 1995-12-11 電子放出素子の製造方法及び電子源基板の製造方法
JP32092795 1995-12-11

Publications (2)

Publication Number Publication Date
DE69532668D1 true DE69532668D1 (de) 2004-04-15
DE69532668T2 DE69532668T2 (de) 2005-01-13

Family

ID=27518508

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1995632668 Expired - Lifetime DE69532668T2 (de) 1994-12-16 1995-12-15 Herstellungsvervahren einer elektronen emittierende Einrichtung mit Oberflächenleitung

Country Status (8)

Country Link
US (8) US6060113A (de)
EP (1) EP0717428B1 (de)
JP (1) JP3241251B2 (de)
KR (1) KR100229232B1 (de)
CN (1) CN1130747C (de)
AU (1) AU707487B2 (de)
CA (1) CA2165409C (de)
DE (1) DE69532668T2 (de)

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CN1130747C (zh) 2003-12-10
EP0717428A3 (de) 1997-03-19
US6390873B1 (en) 2002-05-21
KR960025997A (ko) 1996-07-20
AU4048695A (en) 1996-06-27
US20020098766A1 (en) 2002-07-25
US20040146637A1 (en) 2004-07-29
US6511545B2 (en) 2003-01-28
US6511358B2 (en) 2003-01-28
US6060113A (en) 2000-05-09
JP3241251B2 (ja) 2001-12-25
US20020007786A1 (en) 2002-01-24
US6761925B2 (en) 2004-07-13
JPH0969334A (ja) 1997-03-11
EP0717428B1 (de) 2004-03-10
US6419746B1 (en) 2002-07-16
EP0717428A2 (de) 1996-06-19
US20020028285A1 (en) 2002-03-07
US20030010287A1 (en) 2003-01-16
DE69532668T2 (de) 2005-01-13
CA2165409C (en) 2001-05-29
KR100229232B1 (ko) 1999-11-01
CN1131305A (zh) 1996-09-18
AU707487B2 (en) 1999-07-08
CA2165409A1 (en) 1996-06-17

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