DE69535712D1 - Methode zur Herstellung eines Halbleiterchipträgers - Google Patents

Methode zur Herstellung eines Halbleiterchipträgers

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Publication number
DE69535712D1
DE69535712D1 DE69535712T DE69535712T DE69535712D1 DE 69535712 D1 DE69535712 D1 DE 69535712D1 DE 69535712 T DE69535712 T DE 69535712T DE 69535712 T DE69535712 T DE 69535712T DE 69535712 D1 DE69535712 D1 DE 69535712D1
Authority
DE
Germany
Prior art keywords
producing
semiconductor chip
chip carrier
carrier
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69535712T
Other languages
English (en)
Other versions
DE69535712T2 (de
Inventor
Stanford W Crane
Maria M Portuondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IQLP LLC
Original Assignee
Quantum Leap Packaging Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quantum Leap Packaging Inc filed Critical Quantum Leap Packaging Inc
Publication of DE69535712D1 publication Critical patent/DE69535712D1/de
Application granted granted Critical
Publication of DE69535712T2 publication Critical patent/DE69535712T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H01L23/053Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12044OLED
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1515Shape
    • H01L2924/15153Shape the die mounting substrate comprising a recess for hosting the device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16195Flat cap [not enclosing an internal cavity]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3421Leaded components
    • H05K3/3426Leaded components characterised by the leads
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49146Assembling to base an electrical component, e.g., capacitor, etc. with encapsulating, e.g., potting, etc.
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49147Assembling terminal to base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49147Assembling terminal to base
    • Y10T29/49151Assembling terminal to base by deforming or shaping
    • Y10T29/49153Assembling terminal to base by deforming or shaping with shaping or forcing terminal into base aperture

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Lead Frames For Integrated Circuits (AREA)
DE69535712T 1994-03-11 1995-03-09 Methode zur Herstellung eines Halbleiterchipträgers Expired - Fee Related DE69535712T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/208,586 US6339191B1 (en) 1994-03-11 1994-03-11 Prefabricated semiconductor chip carrier
US208586 1994-03-11
PCT/US1995/002675 WO1995024733A1 (en) 1994-03-11 1995-03-09 Prefabricated semiconductor chip carrier

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Publication Number Publication Date
DE69535712D1 true DE69535712D1 (de) 2008-04-03
DE69535712T2 DE69535712T2 (de) 2009-02-12

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US (5) US6339191B1 (de)
EP (1) EP0749633B1 (de)
JP (2) JPH10504934A (de)
KR (1) KR100363004B1 (de)
AU (1) AU2115795A (de)
DE (1) DE69535712T2 (de)
TW (1) TW242697B (de)
WO (1) WO1995024733A1 (de)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6072228A (en) * 1996-10-25 2000-06-06 Micron Technology, Inc. Multi-part lead frame with dissimilar materials and method of manufacturing
WO1999023700A1 (en) * 1997-11-05 1999-05-14 Martin Robert A Chip housing, methods of making same and methods for mounting chips therein
US6016256A (en) * 1997-11-14 2000-01-18 The Panda Project Multi-chip module having interconnect dies
US6141869A (en) * 1998-10-26 2000-11-07 Silicon Bandwidth, Inc. Apparatus for and method of manufacturing a semiconductor die carrier
US6246566B1 (en) 1999-02-08 2001-06-12 Amkor Technology, Inc. Electrostatic discharge protection package and method
US6305987B1 (en) 1999-02-12 2001-10-23 Silicon Bandwidth, Inc. Integrated connector and semiconductor die package
US6331452B1 (en) 1999-04-12 2001-12-18 Verdicom, Inc. Method of fabricating integrated circuit package with opening allowing access to die
KR20010036142A (ko) * 1999-10-06 2001-05-07 윤종용 다층 리드를 갖는 반도체 칩 패키지
US6809348B1 (en) * 1999-10-08 2004-10-26 Denso Corporation Semiconductor device and method for manufacturing the same
US20090100295A1 (en) * 2000-01-06 2009-04-16 Super Talent Electronics, Inc. Reliable memory module testing and manufacturing method
US6683375B2 (en) * 2001-06-15 2004-01-27 Fairchild Semiconductor Corporation Semiconductor die including conductive columns
US6511866B1 (en) * 2001-07-12 2003-01-28 Rjr Polymers, Inc. Use of diverse materials in air-cavity packaging of electronic devices
US6826830B2 (en) * 2002-02-05 2004-12-07 International Business Machines Corporation Multi-layered interconnect structure using liquid crystalline polymer dielectric
US6734546B2 (en) * 2002-02-26 2004-05-11 Silicon Bandwidth, Inc. Micro grid array semiconductor die package
US7750446B2 (en) 2002-04-29 2010-07-06 Interconnect Portfolio Llc IC package structures having separate circuit interconnection structures and assemblies constructed thereof
CN1659810B (zh) * 2002-04-29 2012-04-25 三星电子株式会社 直接连接信号传送系统
US6891272B1 (en) 2002-07-31 2005-05-10 Silicon Pipe, Inc. Multi-path via interconnection structures and methods for manufacturing the same
US7014472B2 (en) * 2003-01-13 2006-03-21 Siliconpipe, Inc. System for making high-speed connections to board-mounted modules
US6907659B2 (en) * 2003-02-05 2005-06-21 Advanced Connection Technology Inc. Method for manufacturing and packaging integrated circuit
US20040188863A1 (en) * 2003-03-24 2004-09-30 Wang Zhong Cheng Substrate for semiconductor package and method of making same
US7744802B2 (en) * 2004-06-25 2010-06-29 Intel Corporation Dielectric film with low coefficient of thermal expansion (CTE) using liquid crystalline resin
US20060011710A1 (en) * 2004-07-13 2006-01-19 Asm Technology Singapore Pte Ltd Formation of a wire bond with enhanced pull
JP4877455B2 (ja) * 2005-03-28 2012-02-15 ミツミ電機株式会社 二次電池保護モジュールおよびリード実装方法
US7280181B2 (en) * 2005-06-30 2007-10-09 Intel Corporation Liquid crystal polymer optical filter carrier
CN100555643C (zh) * 2005-08-12 2009-10-28 鸿富锦精密工业(深圳)有限公司 影像感测芯片封装结构及应用该结构的数码相机模组
JP4965573B2 (ja) 2005-09-08 2012-07-04 カルドラブ・エーピーエス ダイナミックトランザクションカードおよびそれに情報を書込む方法
US7466016B2 (en) * 2007-04-07 2008-12-16 Kevin Yang Bent lead transistor
US8225475B2 (en) * 2008-12-10 2012-07-24 Omnetics Connector Corporation Alignment device for fine pitch connector leads
US8759713B2 (en) * 2009-06-14 2014-06-24 Terepac Corporation Methods for interconnecting bonding pads between components
TWI411139B (zh) 2009-07-16 2013-10-01 Cheng Kung Capital Llc 上下電極led封裝
JP5574667B2 (ja) * 2009-10-21 2014-08-20 キヤノン株式会社 パッケージ、半導体装置、それらの製造方法及び機器
TWI405313B (zh) * 2010-03-31 2013-08-11 Quanta Comp Inc 具側邊接腳之積體電路封裝元件
US8692366B2 (en) * 2010-09-30 2014-04-08 Analog Device, Inc. Apparatus and method for microelectromechanical systems device packaging
CN102779765B (zh) 2011-05-13 2016-08-17 飞思卡尔半导体公司 具有交错引线的半导体器件
US9007783B2 (en) * 2011-05-31 2015-04-14 Sony Corporation Memory device and receptacle for electronic devices
US20130178080A1 (en) * 2012-01-09 2013-07-11 Kostal Of America, Inc. Soldered electronic components mounted solely on the top surface of a printed circuit board
US8836132B2 (en) 2012-04-03 2014-09-16 Analog Devices, Inc. Vertical mount package and wafer level packaging therefor
US9475694B2 (en) 2013-01-14 2016-10-25 Analog Devices Global Two-axis vertical mount package assembly
CN104241238B (zh) 2013-06-09 2018-05-11 恩智浦美国有限公司 基于引线框的半导体管芯封装
US9287200B2 (en) * 2013-06-27 2016-03-15 Freescale Semiconductor, Inc. Packaged semiconductor device
JP6204088B2 (ja) * 2013-07-02 2017-09-27 エスアイアイ・セミコンダクタ株式会社 半導体装置
JP2015111623A (ja) * 2013-12-06 2015-06-18 株式会社東海理化電機製作所 実装ユニット
EP3035230A1 (de) 2014-12-19 2016-06-22 Cardlab ApS Verfahren und Anordnung zum Erzeugen eines Magnetfeldes
SG11201704445XA (en) 2014-12-19 2017-07-28 Cardlab Aps A method and an assembly for generating a magnetic field and a method of manufacturing an assembly
JP2016197636A (ja) * 2015-04-02 2016-11-24 株式会社デンソー モールドパッケージ
EP3082071A1 (de) 2015-04-17 2016-10-19 Cardlab ApS Vorrichtung und verfahren zur ausgabe eines magnetfelds
US11647678B2 (en) 2016-08-23 2023-05-09 Analog Devices International Unlimited Company Compact integrated device packages
US10629574B2 (en) 2016-10-27 2020-04-21 Analog Devices, Inc. Compact integrated device packages
US10697800B2 (en) 2016-11-04 2020-06-30 Analog Devices Global Multi-dimensional measurement using magnetic sensors and related systems, methods, and integrated circuits
EP3795076B1 (de) 2018-01-31 2023-07-19 Analog Devices, Inc. Elektronische vorrichtungen
KR20200002194A (ko) * 2018-06-29 2020-01-08 엘지디스플레이 주식회사 집적회로, 집적회로를 갖는 회로보드 및 이를 이용한 표시장치
JP7166874B2 (ja) * 2018-10-25 2022-11-08 古河電気工業株式会社 光モジュール実装基板および容器実装基板
CN216873443U (zh) 2019-01-04 2022-07-01 恩格特公司 精确对准的组件

Family Cites Families (120)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US472750A (en) * 1892-04-12 Lamp-wick
US2156558A (en) * 1939-05-02 Cover feeding and folding mecha
US615549A (en) * 1898-12-06 Mud and scale receptacle for steam-boilers
US123560A (en) * 1872-02-13 Improvement in washing-machines
US1205456A (en) * 1913-11-15 1916-11-21 Cable Co Tracker-board and music-sheet.
US2301182A (en) * 1939-12-01 1942-11-10 Raymond F Schutz Receptacle
US3151686A (en) * 1962-05-14 1964-10-06 Lamphere Jean K Hydraulic weight control and compensating apparatus
BE639646A (de) * 1962-11-08
US3337838A (en) * 1964-12-16 1967-08-22 Burndy Corp Wiping contact
NL137793B (de) * 1967-06-05 1900-01-01
US3516156A (en) * 1967-12-11 1970-06-23 Ibm Circuit package assembly process
US3545606A (en) * 1968-06-11 1970-12-08 Benny Morris Bennett Flexible tape terminal assembly
JPS5332233B1 (de) 1968-12-25 1978-09-07
US3676748A (en) 1970-04-01 1972-07-11 Fuji Electrochemical Co Ltd Frame structures for electronic circuits
US3676993A (en) 1970-08-13 1972-07-18 Hamilton Watch Co Electronic watch
US3875479A (en) * 1973-05-07 1975-04-01 Gilbert R Jaggar Electrical apparatus
US4167647A (en) 1974-10-02 1979-09-11 Santa Barbara Research Center Hybrid microelectronic circuit package
US4147660A (en) * 1976-12-22 1979-04-03 Osaka Gas Company, Ltd. Method for reactivation of platinum group metal catalyst with aqueous alkaline and/or reducing solutions
US4205548A (en) * 1978-07-03 1980-06-03 Plessey, Inc. Stamping tools
US4237154A (en) * 1979-08-16 1980-12-02 Garrison William H Improved galvanizing method [and apparatus]
US4423468A (en) 1980-10-01 1983-12-27 Motorola, Inc. Dual electronic component assembly
US4331831A (en) 1980-11-28 1982-05-25 Bell Telephone Laboratories, Incorporated Package for semiconductor integrated circuits
GB2091036B (en) * 1981-01-13 1985-06-26 Int Computers Ltd Integrated circuit carrier assembly
JPS5866344A (ja) 1981-10-16 1983-04-20 Hitachi Ltd 集積回路パツケ−ジ
US4433886A (en) * 1981-12-17 1984-02-28 Elco Corporation Connector mounting for integrated circuit chip packages
US4437718A (en) 1981-12-17 1984-03-20 Motorola Inc. Non-hermetically sealed stackable chip carrier package
US4572604A (en) * 1982-08-25 1986-02-25 Elfab Corp. Printed circuit board finger connector
JPS5954249A (ja) 1982-09-22 1984-03-29 Fujitsu Ltd 半導体装置
US4487463A (en) 1983-02-22 1984-12-11 Gulf & Western Manufacturing Company Multiple contact header assembly
JPS59174220A (ja) * 1983-03-22 1984-10-02 Fujitsu Ltd 折返し曲げ金型
JPS6016453A (ja) * 1983-07-08 1985-01-28 Fujitsu Ltd 集積回路装置用パツケ−ジ
JPS6028256A (ja) 1983-07-26 1985-02-13 Fujitsu Ltd 半導体装置
DE3337796A1 (de) 1983-10-18 1985-04-25 Metz Apparatewerke Inh. Paul Metz, 8510 Fürth Integrierter baustein
US4660069A (en) 1983-12-08 1987-04-21 Motorola, Inc. Device with captivate chip capacitor devices and method of making the same
LU85135A1 (fr) 1983-12-14 1985-09-12 Bonameau Jean Marie Dispositif de protection contre les perturbations et/ou des parasites au voisinage de circuits integres
US4677526A (en) 1984-03-01 1987-06-30 Augat Inc. Plastic pin grid array chip carrier
JPS60254641A (ja) * 1984-05-31 1985-12-16 Fujitsu Ltd 液体封入型パツケ−ジ
JPS615549A (ja) 1984-06-20 1986-01-11 Hitachi Micro Comput Eng Ltd 半導体装置
DE3430849A1 (de) 1984-08-22 1986-03-06 Gerd 7742 St Georgen Kammerer Verfahren zur raeumlichen ausweitung der elektrischen verbindung zwischen den anschlusskontakten hochintegrierter elektronischer bauelemente und den kontaktstellen einer elektrischen anschlussvorrichtung auf einem bauelementetraeger
US4655526A (en) * 1984-08-31 1987-04-07 Amp Incorporated Limited insertion force contact terminals and connectors
US4616406A (en) 1984-09-27 1986-10-14 Advanced Micro Devices, Inc. Process of making a semiconductor device having parallel leads directly connected perpendicular to integrated circuit layers therein
GB2174538A (en) 1985-04-24 1986-11-05 Stanley Bracey Semiconductor package
JPS6221249A (ja) * 1985-07-22 1987-01-29 Hitachi Ltd 半導体装置
US4705917A (en) 1985-08-27 1987-11-10 Hughes Aircraft Company Microelectronic package
JPH069223B2 (ja) 1985-10-05 1994-02-02 山一電機工業株式会社 Icパッケ−ジ
JPS62229896A (ja) * 1986-03-29 1987-10-08 株式会社東芝 印刷配線基板
JPS62248243A (ja) 1986-04-21 1987-10-29 Matsushita Electronics Corp 半導体パツケ−ジ
US4675472A (en) * 1986-08-04 1987-06-23 Beta Phase, Inc. Integrated circuit package and seal therefor
JPH0777247B2 (ja) 1986-09-17 1995-08-16 富士通株式会社 半導体装置の製造方法
GB2196178B (en) 1986-10-09 1990-04-11 Amp Inc Semiconductor chip carrier system
US4766479A (en) 1986-10-14 1988-08-23 Hughes Aircraft Company Low resistance electrical interconnection for synchronous rectifiers
US4715829A (en) 1986-11-13 1987-12-29 Amp Incorporated High density electrical connector system
US4734042A (en) 1987-02-09 1988-03-29 Augat Inc. Multi row high density connector
US5138438A (en) 1987-06-24 1992-08-11 Akita Electronics Co. Ltd. Lead connections means for stacked tab packaged IC chips
JPS6423560A (en) * 1987-07-20 1989-01-26 Olympus Optical Co Semiconductor device and method of mounting same
KR920000829B1 (ko) * 1987-07-21 1992-01-30 스미도모덴기고오교오 가부시가가이샤 반도체 장치
JPH0452997Y2 (de) * 1987-09-12 1992-12-14
JPS6474795A (en) 1987-09-17 1989-03-20 Matsushita Electronics Corp Method of mounting semiconductor device
JPH01205456A (ja) * 1988-02-10 1989-08-17 Nec Corp Lsi用多ピンケース
FR2629665B1 (fr) 1988-03-30 1991-01-11 Bendix Electronics Sa Boitier pour circuit electronique
US4985747A (en) 1988-06-09 1991-01-15 Oki Electric Industry Co., Ltd. Terminal structure and process of fabricating the same
IT1221258B (it) * 1988-06-22 1990-06-27 Sgs Thomson Microelectronics Contenitore plastico a cavita' per dispositivi semiconduttore
JPH0221249A (ja) * 1988-07-08 1990-01-24 Matsushita Electric Ind Co Ltd 電子部品の外観検査方法
US4897055A (en) * 1988-11-28 1990-01-30 International Business Machines Corp. Sequential Connecting device
JPH02156558A (ja) * 1988-12-08 1990-06-15 Sharp Corp 半導体装置のリードフレームおよびこれを用いた半導体装置の製造方法
US5022144A (en) 1989-03-02 1991-06-11 Explosive Fabricators, Inc. Method of manufacture power hybrid microcircuit
US5037311A (en) 1989-05-05 1991-08-06 International Business Machines Corporation High density interconnect strip
US5049974A (en) 1989-05-15 1991-09-17 Roger Corporation Interconnect device and method of manufacture thereof
JPH02301182A (ja) 1989-05-16 1990-12-13 Matsushita Electric Ind Co Ltd 薄型実装構造の回路基板
JP2598129B2 (ja) 1989-05-18 1997-04-09 三菱電機株式会社 半導体装置
US4975066A (en) * 1989-06-27 1990-12-04 Amp Incorporated Coaxial contact element
JP2544977B2 (ja) * 1989-10-13 1996-10-16 ケル株式会社 表面実装用電子部品
IT1237135B (it) 1989-10-30 1993-05-24 Pirelli Cavi Spa Gruppo di amplificazione ottico a basso rumore, con riflessione della potenza di pompaggio.
JPH03151686A (ja) 1989-11-08 1991-06-27 Nec Corp プリント配線基板
US4943846A (en) 1989-11-09 1990-07-24 Amp Incorporated Pin grid array having seperate posts and socket contacts
US5123164A (en) 1989-12-08 1992-06-23 Rockwell International Corporation Hermetic organic/inorganic interconnection substrate for hybrid circuit manufacture
US5008734A (en) 1989-12-20 1991-04-16 National Semiconductor Corporation Stadium-stepped package for an integrated circuit with air dielectric
US4991291A (en) * 1989-12-29 1991-02-12 Isotronics, Inc. Method for fabricating a fold-up frame
JPH0783080B2 (ja) 1990-01-18 1995-09-06 株式会社東芝 半導体装置用部品
US4997376A (en) * 1990-03-23 1991-03-05 Amp Incorporated Paired contact electrical connector system
JPH03291869A (ja) 1990-04-09 1991-12-24 Hitachi Ltd 電子装置
US5030144A (en) * 1990-04-13 1991-07-09 North American Specialties Corporation Solder-bearing lead
US5071363A (en) 1990-04-18 1991-12-10 Minnesota Mining And Manufacturing Company Miniature multiple conductor electrical connector
US5081563A (en) 1990-04-27 1992-01-14 International Business Machines Corporation Multi-layer package incorporating a recessed cavity for a semiconductor chip
FR2664097A1 (fr) 1990-06-28 1992-01-03 Sgs Thomson Microelectronics Boitier de circuit integre et son procede de fabrication.
DE4021872C2 (de) 1990-07-09 1994-07-28 Lsi Logic Products Gmbh Hochintegriertes elektronisches Bauteil
JPH0472750A (ja) * 1990-07-13 1992-03-06 Nec Corp ガラス封止型半導体装置
DE4022829A1 (de) * 1990-07-18 1992-01-23 Werner Vogt Tragbare speicherkarte
CA2023361A1 (en) 1990-07-20 1992-01-21 Robert L. Barnhouse Printed circuit boards
JP2866465B2 (ja) 1990-10-09 1999-03-08 三菱電機株式会社 電子部品
JPH0732042B2 (ja) 1990-10-11 1995-04-10 富士通株式会社 スルーホール接続形電子デバイスとその実装方法
JP2876773B2 (ja) 1990-10-22 1999-03-31 セイコーエプソン株式会社 プログラム命令語長可変型計算装置及びデータ処理装置
JPH04171969A (ja) 1990-11-06 1992-06-19 Fujitsu Ltd 実装icチップ樹脂封止構造及び樹脂封止方法
JPH04179264A (ja) 1990-11-14 1992-06-25 Hitachi Ltd 樹脂封止型半導体装置
JPH04237154A (ja) 1991-01-22 1992-08-25 Sumitomo Electric Ind Ltd 半導体パッケージ
JPH04256203A (ja) * 1991-02-07 1992-09-10 Mitsubishi Electric Corp マイクロ波帯ic用パッケージ
US5107328A (en) * 1991-02-13 1992-04-21 Micron Technology, Inc. Packaging means for a semiconductor die having particular shelf structure
US5351393A (en) 1991-05-28 1994-10-04 Dimensonal Circuits Corporation Method of mounting a surface-mountable IC to a converter board
JPH05160292A (ja) 1991-06-06 1993-06-25 Toshiba Corp 多層パッケージ
JP2966972B2 (ja) 1991-07-05 1999-10-25 株式会社日立製作所 半導体チップキャリアとそれを実装したモジュール及びそれを組み込んだ電子機器
US5226803A (en) * 1991-07-22 1993-07-13 Martin Thomas B Vane-type fuel pump
JP3014503B2 (ja) * 1991-08-05 2000-02-28 日本特殊陶業株式会社 集積回路用パッケージ
US5403784A (en) * 1991-09-03 1995-04-04 Microelectronics And Computer Technology Corporation Process for manufacturing a stacked multiple leadframe semiconductor package using an alignment template
JPH0595079A (ja) 1991-10-02 1993-04-16 Ibiden Co Ltd リードフレーム、半導体集積回路搭載用基板及び半導体装置並びにそれらの製造方法
JPH05121142A (ja) * 1991-10-31 1993-05-18 Yazaki Corp 基板用端子の製造方法
US5137456A (en) 1991-11-04 1992-08-11 International Business Machines Corporation High density, separable connector and contact for use therein
JPH05226803A (ja) 1992-02-10 1993-09-03 Matsushita Electric Works Ltd 実装回路基板
JPH0677632A (ja) 1992-02-24 1994-03-18 Matsushita Electric Ind Co Ltd 回路基板
US5438224A (en) 1992-04-23 1995-08-01 Motorola, Inc. Integrated circuit package having a face-to-face IC chip arrangement
JPH05335465A (ja) * 1992-05-27 1993-12-17 Mitsubishi Electric Corp 半導体装置
US5283717A (en) 1992-12-04 1994-02-01 Sgs-Thomson Microelectronics, Inc. Circuit assembly having interposer lead frame
US5342999A (en) 1992-12-21 1994-08-30 Motorola, Inc. Apparatus for adapting semiconductor die pads and method therefor
US5371404A (en) 1993-02-04 1994-12-06 Motorola, Inc. Thermally conductive integrated circuit package with radio frequency shielding
US5327325A (en) 1993-02-08 1994-07-05 Fairchild Space And Defense Corporation Three-dimensional integrated circuit package
US5390412A (en) 1993-04-08 1995-02-21 Gregoire; George D. Method for making printed circuit boards
US5422514A (en) * 1993-05-11 1995-06-06 Micromodule Systems, Inc. Packaging and interconnect system for integrated circuits
US5541449A (en) * 1994-03-11 1996-07-30 The Panda Project Semiconductor chip carrier affording a high-density external interface
US5543586A (en) * 1994-03-11 1996-08-06 The Panda Project Apparatus having inner layers supporting surface-mount components
JP3401522B2 (ja) * 1998-07-06 2003-04-28 日本電気株式会社 ヒューズ回路及び冗長デコーダ回路
US6474795B1 (en) * 1999-12-21 2002-11-05 Eastman Kodak Company Continuous ink jet printer with micro-valve deflection mechanism and method of controlling same

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US20050280158A1 (en) 2005-12-22
US6339191B1 (en) 2002-01-15
US6828511B2 (en) 2004-12-07
DE69535712T2 (de) 2009-02-12
EP0749633A1 (de) 1996-12-27
KR100363004B1 (ko) 2003-02-26
US20020053455A1 (en) 2002-05-09
US6977432B2 (en) 2005-12-20
US20040140542A1 (en) 2004-07-22
JP2007294993A (ja) 2007-11-08
JPH10504934A (ja) 1998-05-12
TW242697B (en) 1995-03-11
EP0749633B1 (de) 2008-02-20
WO1995024733A1 (en) 1995-09-14
US5819403A (en) 1998-10-13
AU2115795A (en) 1995-09-25

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