DE69603857T2 - Herstellungsverfahren und vorrichtung für einen lichtschalter mit ebenen beugungsgitter - Google Patents

Herstellungsverfahren und vorrichtung für einen lichtschalter mit ebenen beugungsgitter

Info

Publication number
DE69603857T2
DE69603857T2 DE69603857T DE69603857T DE69603857T2 DE 69603857 T2 DE69603857 T2 DE 69603857T2 DE 69603857 T DE69603857 T DE 69603857T DE 69603857 T DE69603857 T DE 69603857T DE 69603857 T2 DE69603857 T2 DE 69603857T2
Authority
DE
Germany
Prior art keywords
layer
etched
conducting layer
substrate
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69603857T
Other languages
English (en)
Other versions
DE69603857D1 (de
Inventor
Jonathan Bornstein
William Banyai
David Bloom
Ralph Whitten
Bryan Staker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silicon Light Machines Inc
Original Assignee
Silicon Light Machines Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silicon Light Machines Inc filed Critical Silicon Light Machines Inc
Application granted granted Critical
Publication of DE69603857D1 publication Critical patent/DE69603857D1/de
Publication of DE69603857T2 publication Critical patent/DE69603857T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror
DE69603857T 1995-06-07 1996-06-05 Herstellungsverfahren und vorrichtung für einen lichtschalter mit ebenen beugungsgitter Expired - Lifetime DE69603857T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/480,459 US5661592A (en) 1995-06-07 1995-06-07 Method of making and an apparatus for a flat diffraction grating light valve
PCT/US1996/009255 WO1996041226A1 (en) 1995-06-07 1996-06-05 A method of making and an apparatus for a flat diffraction grating light valve

Publications (2)

Publication Number Publication Date
DE69603857D1 DE69603857D1 (de) 1999-09-23
DE69603857T2 true DE69603857T2 (de) 2000-01-13

Family

ID=23908065

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69603857T Expired - Lifetime DE69603857T2 (de) 1995-06-07 1996-06-05 Herstellungsverfahren und vorrichtung für einen lichtschalter mit ebenen beugungsgitter

Country Status (10)

Country Link
US (1) US5661592A (de)
EP (1) EP0830629B1 (de)
JP (1) JP3016871B2 (de)
KR (1) KR100306085B1 (de)
CN (1) CN1153081C (de)
AT (1) ATE183590T1 (de)
AU (1) AU6156496A (de)
DE (1) DE69603857T2 (de)
NO (1) NO975695L (de)
WO (1) WO1996041226A1 (de)

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CN1187249A (zh) 1998-07-08
NO975695D0 (no) 1997-12-05
ATE183590T1 (de) 1999-09-15
AU6156496A (en) 1996-12-30
WO1996041226A1 (en) 1996-12-19
EP0830629A1 (de) 1998-03-25
JP3016871B2 (ja) 2000-03-06
DE69603857D1 (de) 1999-09-23
KR100306085B1 (ko) 2001-11-02
KR19990022268A (ko) 1999-03-25
JPH10510375A (ja) 1998-10-06
EP0830629B1 (de) 1999-08-18
NO975695L (no) 1997-12-05
US5661592A (en) 1997-08-26

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