DE69604733T2 - Diamantbeschichteter Gegenstand und Verfahren zu seiner Herstellung - Google Patents

Diamantbeschichteter Gegenstand und Verfahren zu seiner Herstellung

Info

Publication number
DE69604733T2
DE69604733T2 DE69604733T DE69604733T DE69604733T2 DE 69604733 T2 DE69604733 T2 DE 69604733T2 DE 69604733 T DE69604733 T DE 69604733T DE 69604733 T DE69604733 T DE 69604733T DE 69604733 T2 DE69604733 T2 DE 69604733T2
Authority
DE
Germany
Prior art keywords
manufacture
coated article
diamond coated
diamond
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69604733T
Other languages
English (en)
Other versions
DE69604733D1 (de
Inventor
Hiroshi Yamamoto
Takashi Okamura
Satoshi Iio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Publication of DE69604733D1 publication Critical patent/DE69604733D1/de
Application granted granted Critical
Publication of DE69604733T2 publication Critical patent/DE69604733T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/274—Diamond only using microwave discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/279—Diamond only control of diamond crystallography
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
DE69604733T 1995-07-05 1996-07-04 Diamantbeschichteter Gegenstand und Verfahren zu seiner Herstellung Expired - Fee Related DE69604733T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19423495 1995-07-05
JP19539496A JP3675577B2 (ja) 1995-07-05 1996-07-04 ダイヤモンド被覆物品の製造方法

Publications (2)

Publication Number Publication Date
DE69604733D1 DE69604733D1 (de) 1999-11-25
DE69604733T2 true DE69604733T2 (de) 2000-05-31

Family

ID=26508385

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69604733T Expired - Fee Related DE69604733T2 (de) 1995-07-05 1996-07-04 Diamantbeschichteter Gegenstand und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (2) US5851658A (de)
EP (1) EP0752293B1 (de)
JP (1) JP3675577B2 (de)
DE (1) DE69604733T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
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DE102010060563A1 (de) * 2010-11-15 2012-05-16 Technische Universität Dresden Verfahren zur spektroskopischen Bestimmung der Konzentration von Inhaltsstoffen in Papieren oder Folien und Probenhalter zur Durchführung des Verfahrens

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US6387502B1 (en) 1998-09-04 2002-05-14 Ngk Spark Plug Co., Ltd. Diamond-coated hard metal member
GB9819732D0 (en) * 1998-09-11 1998-11-04 Renishaw Plc Tool conditioning monitoring
US6416865B1 (en) 1998-10-30 2002-07-09 Sumitomo Electric Industries, Ltd. Hard carbon film and surface acoustic-wave substrate
DE19914585C1 (de) * 1999-03-31 2000-09-14 Cemecon Ceramic Metal Coatings Diamantbeschichtetes Werkzeug und Verfahren zu seiner Herstellung
US6605352B1 (en) * 2000-01-06 2003-08-12 Saint-Gobain Ceramics & Plastics, Inc. Corrosion and erosion resistant thin film diamond coating and applications therefor
JP4562844B2 (ja) 2000-02-23 2010-10-13 浜松ホトニクス株式会社 光電陰極及び電子管
GB0005542D0 (en) * 2000-03-09 2000-04-26 Pace Micro Tech Plc Control system for storage means
DE10027427B4 (de) * 2000-06-02 2005-09-29 Freistaat Bayern, vertreten durch die Friedrich-Alexander-Universität Erlangen-Nürnberg Verfahren zur Herstellung eines Substrats mit einer an dessen Oberfläche fest anhaftenden polykristallinen Diamantschicht und beschichtetes Substrat
US7007294B1 (en) 2000-10-30 2006-02-28 Koninklijke Philips Electronics N.V. Method and apparatus for automatic generation of query search terms for a program recommender
DE10056242A1 (de) * 2000-11-14 2002-05-23 Alstom Switzerland Ltd Kondensationswärmeübertrager
US20040141867A1 (en) 2001-05-16 2004-07-22 Klaus Dreyer Composite material and method for production thereof
US6633379B2 (en) 2001-06-08 2003-10-14 Semiconductor 300 Gmbh & Co. Kg Apparatus and method for measuring the degradation of a tool
US7445817B2 (en) * 2002-05-08 2008-11-04 Btu International Inc. Plasma-assisted formation of carbon structures
AT413036B (de) * 2004-06-02 2005-10-15 Boehlerit Gmbh & Co Kg Hartmetallwendeschneidplatte mit diamantschicht
TWI411710B (zh) * 2004-09-10 2013-10-11 Carnegie Inst Of Washington 超韌化學蒸氣沉積（ｃｖｄ）之單一結晶鑽石及其三維生長方法
US20060147631A1 (en) * 2005-01-04 2006-07-06 Lev Leonid C Method for making diamond coated substrates, articles made therefrom, and method of drilling
US8216639B2 (en) * 2005-12-16 2012-07-10 Qimonda Ag Methods for elimination or reduction of oxide and/or soot deposition in carbon containing layers
KR20110073461A (ko) * 2008-09-24 2011-06-29 쿠리타 고교 가부시키가이샤 다이아몬드 전극 및 다이아몬드 전극의 제조 방법
EP2495081B1 (de) * 2011-03-01 2014-05-07 GFD Gesellschaft für Diamantprodukte mbH Schneidewerkzeug mit Klinge aus feinkristallinem Diamant
JP5708075B2 (ja) * 2011-03-15 2015-04-30 三菱マテリアル株式会社 耐剥離性と耐摩耗性にすぐれたダイヤモンド被覆エンドミル
JP5885198B2 (ja) * 2012-02-28 2016-03-15 国立大学法人九州大学 グラフェン薄膜の製造方法及びグラフェン薄膜
DE102012215191A1 (de) * 2012-03-14 2013-09-19 Friedrich-Alexander-Universität Erlangen-Nürnberg Werkzeug für Ultraschallschweißvorrichtung
EP2832899A1 (de) * 2013-08-02 2015-02-04 The Swatch Group Research and Development Ltd. Diamantbeschichtung und Beschichtungsverfahren zur Aufbringung einer solchen Beschichtung
GB201322837D0 (en) * 2013-12-23 2014-02-12 Element Six Ltd Polycrystalline chemical vapour deposited diamond tool parts and methods of fabricating mounting and using the same
JP6390151B2 (ja) * 2014-04-30 2018-09-19 住友電気工業株式会社 複合焼結体
US10066443B2 (en) 2014-12-22 2018-09-04 Haliburton Energy Services, Inc. Chemically strengthened bond between thermally stable polycrystalline hard materials and braze material
US10662523B2 (en) 2015-05-27 2020-05-26 John Crane Inc. Extreme durability composite diamond film
US10907264B2 (en) 2015-06-10 2021-02-02 Advanced Diamond Technologies, Inc. Extreme durability composite diamond electrodes
US10662550B2 (en) 2016-11-03 2020-05-26 John Crane Inc. Diamond nanostructures with large surface area and method of producing the same

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SE442305B (sv) * 1984-06-27 1985-12-16 Santrade Ltd Forfarande for kemisk gasutfellning (cvd) for framstellning av en diamantbelagd sammansatt kropp samt anvendning av kroppen
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US5284709A (en) * 1987-03-30 1994-02-08 Crystallume Diamond materials with enhanced heat conductivity
US5271971A (en) * 1987-03-30 1993-12-21 Crystallume Microwave plasma CVD method for coating a substrate with high thermal-conductivity diamond material
US5432003A (en) * 1988-10-03 1995-07-11 Crystallume Continuous thin diamond film and method for making same
US4988421A (en) * 1989-01-12 1991-01-29 Ford Motor Company Method of toughening diamond coated tools
US5173089A (en) * 1990-03-30 1992-12-22 Sumitomo Electric Industries, Ltd. Method for producing the polycrystalline diamond tool
DE69112465T2 (de) * 1990-03-30 1996-03-28 Sumitomo Electric Industries Polykristallines Diamantwerkzeug und Verfahren für seine Herstellung.
US5114696A (en) * 1990-08-06 1992-05-19 Texas Instruments Incorporated Diamond growth method
CA2044543C (en) * 1990-08-10 1999-12-14 Louis Kimball Bigelow Multi-layer superhard film structure
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JP2780495B2 (ja) * 1991-01-21 1998-07-30 トヨタ自動車株式会社 ＣＶＤ法によるＳｉ基板へのダイヤモンド膜形成方法
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JP3416967B2 (ja) * 1992-12-10 2003-06-16 日本精工株式会社 人工ダイヤモンド被覆膜及びその形成方法
US5433977A (en) * 1993-05-21 1995-07-18 Trustees Of Boston University Enhanced adherence of diamond coatings by combustion flame CVD
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010060563A1 (de) * 2010-11-15 2012-05-16 Technische Universität Dresden Verfahren zur spektroskopischen Bestimmung der Konzentration von Inhaltsstoffen in Papieren oder Folien und Probenhalter zur Durchführung des Verfahrens

Also Published As

Publication number Publication date
DE69604733D1 (de) 1999-11-25
EP0752293A2 (de) 1997-01-08
EP0752293B1 (de) 1999-10-20
EP0752293A3 (de) 1997-10-22
US5955155A (en) 1999-09-21
JPH0971498A (ja) 1997-03-18
US5851658A (en) 1998-12-22
JP3675577B2 (ja) 2005-07-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee