DE69607551D1 - Piezoeletrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren - Google Patents

Piezoeletrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren

Info

Publication number
DE69607551D1
DE69607551D1 DE69607551T DE69607551T DE69607551D1 DE 69607551 D1 DE69607551 D1 DE 69607551D1 DE 69607551 T DE69607551 T DE 69607551T DE 69607551 T DE69607551 T DE 69607551T DE 69607551 D1 DE69607551 D1 DE 69607551D1
Authority
DE
Germany
Prior art keywords
piezoelectric
thin film
manufacturing process
film element
electrostrictive thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69607551T
Other languages
English (en)
Other versions
DE69607551T2 (de
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Koji Kimura
Nobuo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69607551D1 publication Critical patent/DE69607551D1/de
Application granted granted Critical
Publication of DE69607551T2 publication Critical patent/DE69607551T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/486—Fine ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/486—Fine ceramics
    • C04B35/488—Composites
    • C04B35/4885—Composites with aluminium oxide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62625—Wet mixtures
    • C04B35/6264—Mixing media, e.g. organic solvents
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C04B2235/6025—Tape casting, e.g. with a doctor blade
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
    • H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24322—Composite web or sheet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24322—Composite web or sheet
    • Y10T428/24331—Composite web or sheet including nonapertured component
DE1996607551 1995-09-27 1996-09-26 Piezoeletrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren Expired - Lifetime DE69607551T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24930295A JP3320596B2 (ja) 1995-09-27 1995-09-27 圧電／電歪膜型素子及びその製造方法

Publications (2)

Publication Number Publication Date
DE69607551D1 true DE69607551D1 (de) 2000-05-11
DE69607551T2 DE69607551T2 (de) 2000-11-02

Family

ID=17190966

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1996607551 Expired - Lifetime DE69607551T2 (de) 1995-09-27 1996-09-26 Piezoeletrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren

Country Status (4)

Country Link
US (2) US5853514A (de)
EP (1) EP0766325B1 (de)
JP (1) JP3320596B2 (de)
DE (1) DE69607551T2 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993022140A1 (en) * 1992-04-23 1993-11-11 Seiko Epson Corporation Liquid jet head and production thereof
US6004644A (en) * 1994-07-26 1999-12-21 Ngk Insulators, Ltd. Zirconia diaphragm structure and piezoelectric/electrostrictive film element having the zirconia diaphragm structure
JP3419219B2 (ja) * 1996-09-24 2003-06-23 株式会社村田製作所 圧電磁器組成物及びそれを用いた圧電装置
US6247371B1 (en) * 1997-04-04 2001-06-19 Ngk Insulators, Ltd. Three-axis sensor
DE69916956T2 (de) * 1998-01-19 2004-09-02 Seiko Epson Corp. Verfahren zur herstellung von dünnfilmen aus oxidischer keramik
EP1724750B1 (de) * 1999-01-29 2008-08-27 Seiko Epson Corporation Piezoelektrischer Transducer und Anzeigevorrichtung mit elektrophoretischer Tinte, die den piezoelektrischen Transducer benutzt
DE10149165A1 (de) * 2001-10-04 2003-04-30 Bircher Ag Beringen Verfahren zur Herstellung eines Sensorelementes, insbesondere Schaltelementes
AU2003201862A1 (en) * 2002-01-11 2003-07-30 Ngk Insulators, Ltd. Piezoelectric/ electrostrictive device and its production method
US20050035688A1 (en) * 2002-01-11 2005-02-17 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
DE60326822D1 (de) * 2002-02-08 2009-05-07 Ngk Insulators Ltd Mehrschichtiges piezoelektrisches element und herstellungsverfahren dafür
US7009328B2 (en) * 2003-06-20 2006-03-07 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film and manufacturing method
JP2006049806A (ja) * 2004-03-18 2006-02-16 Nec Tokin Corp 積層圧電セラミックス構造体及びその製造方法
EP2104154B1 (de) * 2004-04-27 2015-06-03 NGK Insulators, Ltd. Verfahren zur Inspektion eines piezoelektrischen/elektrostriktiven Aktuators sowie Auslenkungsvorhersageprogramm
JP4280198B2 (ja) * 2004-04-30 2009-06-17 株式会社東芝 薄膜圧電共振器
US7332851B2 (en) 2004-09-29 2008-02-19 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film type device and method of manufacturing the same
WO2007026736A1 (ja) * 2005-08-31 2007-03-08 Nec Corporation 圧電アクチュエータ、音響素子、及び電子機器
US7605686B2 (en) * 2006-11-16 2009-10-20 Motorola, Inc. Alerting system for a communication device
US7888844B2 (en) * 2009-06-30 2011-02-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Temperature control of micromachined transducers
JP5413131B2 (ja) * 2009-11-03 2014-02-12 セイコーエプソン株式会社 センサーアレイ及び圧力センサーの製造方法
DE102010022911B4 (de) * 2010-06-07 2017-01-19 Continental Automotive Gmbh Verfahren zum Herstellen eines Piezoaktors und Piezoaktor
US20120025337A1 (en) * 2010-07-28 2012-02-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd Mems transducer device having stress mitigation structure and method of fabricating the same
WO2012036103A1 (en) * 2010-09-15 2012-03-22 Ricoh Company, Ltd. Electromechanical transducing device and manufacturing method thereof, and liquid droplet discharging head and liquid droplet discharging apparatus
JP5754145B2 (ja) * 2011-01-25 2015-07-29 セイコーエプソン株式会社 超音波センサーおよび電子機器
US9391258B2 (en) * 2011-02-18 2016-07-12 Panasonic Intellectual Property Management Co., Ltd. Piezoelectric element
DE102012105287B4 (de) * 2012-06-18 2020-07-02 Tdk Electronics Ag Verfahren zur Herstellung eines elektrischen Bauelements und Elektrisches Bauelement
DE102016201718B4 (de) 2016-02-04 2022-02-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pumpe mit polygonförmigem Piezo-Membranwandler
CH713460A2 (de) * 2017-02-15 2018-08-15 Digi Sens Ag Schwingsaitensensor und Schwingsaite für einen Schwingsaitensensor.
US11858850B2 (en) * 2020-07-14 2024-01-02 Leatec Fine Ceramics Co., Ltd. High-strength zirconia-alumina composite ceramic substrate applied to semiconductor device and manufacturing method thereof

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS591232B2 (ja) * 1979-09-28 1984-01-11 住友アルミニウム製錬株式会社 ジルコニア焼結体の製造方法
US4360598A (en) * 1980-03-26 1982-11-23 Ngk Insulators, Ltd. Zirconia ceramics and a method of producing the same
GB2161647A (en) * 1984-07-10 1986-01-15 Gen Electric Co Plc Piezoelectric devices
JPS62213399A (ja) * 1986-03-12 1987-09-19 Omron Tateisi Electronics Co 圧電磁器
JP2842448B2 (ja) * 1989-07-11 1999-01-06 日本碍子株式会社 圧電／電歪膜型アクチュエータ
DE69026765T2 (de) * 1989-07-11 1996-10-24 Ngk Insulators Ltd Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb
US5089455A (en) * 1989-08-11 1992-02-18 Corning Incorporated Thin flexible sintered structures
JPH07108102B2 (ja) * 1990-05-01 1995-11-15 日本碍子株式会社 圧電／電歪膜型アクチュエータの製造方法
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
JP2693291B2 (ja) * 1990-07-26 1997-12-24 日本碍子株式会社 圧電／電歪アクチュエータ
DE69223096T2 (de) * 1991-07-18 1998-05-28 Ngk Insulators Ltd Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid
JP2665106B2 (ja) * 1992-03-17 1997-10-22 日本碍子株式会社 圧電／電歪膜型素子
DE69413619T2 (de) * 1993-07-27 1999-04-01 Ngk Insulators Ltd Membranstruktur aus Zirkoniumoxid, Verfahren zu ihrer Herstellung und eine piezoelektrische/elektrostriktive Schichtenanordnung mit der Membranstruktur aus Zirkoniumoxid
JP3280799B2 (ja) * 1993-10-14 2002-05-13 日本碍子株式会社 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電／電歪膜型素子
US5545461A (en) * 1994-02-14 1996-08-13 Ngk Insulators, Ltd. Ceramic diaphragm structure having convex diaphragm portion and method of producing the same
JP3162584B2 (ja) * 1994-02-14 2001-05-08 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
US6049158A (en) * 1994-02-14 2000-04-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
JP3128681B2 (ja) 1994-07-08 2001-01-29 新日本製鐵株式会社 可動モールド式連続鋳造機のモールド用コーティング剤
US5634999A (en) * 1994-09-06 1997-06-03 Ngk Insulators, Ltd. Method of producing ceramic diaphragm structure having convex diaphragm portion

Also Published As

Publication number Publication date
JPH0992896A (ja) 1997-04-04
US5853514A (en) 1998-12-29
DE69607551T2 (de) 2000-11-02
US6217979B1 (en) 2001-04-17
EP0766325B1 (de) 2000-04-05
JP3320596B2 (ja) 2002-09-03
EP0766325A1 (de) 1997-04-02

Similar Documents

Publication Publication Date Title
DE69505430D1 (de) Piezoelektrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren
DE69607551D1 (de) Piezoeletrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren
DE69610758D1 (de) Piezoelektrisches/Elektrostriktives Element vom Dünnschicht-Typ und Verfahren zu seiner Herstellung
DE69714909D1 (de) Piezoelektrisches Element des Dünnschichttyps
DE69510108D1 (de) Piezoelektrisches/elektrostriktives Dünnfilmelement mit convexem Membran und Verfahren zu seiner Herstellung
DE69410918D1 (de) Zirconiummembranstruktur, Herstellungsverfahren hierfür, und Piezoelektrisch/Elektrostriktives Dünnfilmelement mit dieser Struktur
DE69725910D1 (de) Piezoelektrische Dünnschichtanordnung
DE69611046T2 (de) Piezoelektrischer Oszillator, spannungsgesteuerter Ozillator, und Herstellungsverfahren derselben
DE69610183D1 (de) Piezoelektrische quarz-mikrowaage
DE69430501D1 (de) Dielektrische Dünnfilmanordnung und Herstellungsverfahren
DE59602993D1 (de) Halteelement aus Kunststoff
EP0973256A4 (de) Piezoelektrische dünnschichtanordnung
DE69424067D1 (de) Ultraschallwandlerarray und Herstellungsverfahren
KR950026041A (ko) 박막센서소자 및 그제조방법
DE69629882D1 (de) Dünnfilm-Mehrschichtelektrode und deren Herstellungsverfahren
DE69431971T2 (de) Dünnschichtkondensator und Herstellungsverfahren
DE69610453T2 (de) Weichmagnetischer dünner Film und Dünnfilmmagnetelement unter Verwendung desselben
DE69604023D1 (de) Hochpräziser piezoelektrischer Antrieb
DE69603687T2 (de) Piezoelektrisches material, piezoelektrisches element und herstellungsverfahren
ATA42293A (de) Piezoelektrisches kristallelement
DE69510758T2 (de) Piezoelektrische betätigungseinrichtung
NL1003282C1 (nl) Ferro-elektrisch keramisch materiaal.
DE69524178T2 (de) Dünnfilmtransistor und dessen Herstellungsverfahren
DE59608831D1 (de) Halteelement aus Kunststoff
DE69604645D1 (de) Chip des piezoelektrischen/elektrostriktiven types

Legal Events

Date Code Title Description
8364 No opposition during term of opposition