DE69608722D1 - Verfahren zur Herstellung eines piezoelektrischen Schichtelementes - Google Patents

Verfahren zur Herstellung eines piezoelektrischen Schichtelementes

Info

Publication number
DE69608722D1
DE69608722D1 DE69608722T DE69608722T DE69608722D1 DE 69608722 D1 DE69608722 D1 DE 69608722D1 DE 69608722 T DE69608722 T DE 69608722T DE 69608722 T DE69608722 T DE 69608722T DE 69608722 D1 DE69608722 D1 DE 69608722D1
Authority
DE
Germany
Prior art keywords
producing
piezoelectric layer
layer element
piezoelectric
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69608722T
Other languages
English (en)
Other versions
DE69608722T2 (de
Inventor
Yasuo Okawa
Yasuji Chikaoka
Atsuo Sakaida
Yoshihumi Suzuki
Yoshiyuki Ikezaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Publication of DE69608722D1 publication Critical patent/DE69608722D1/de
Application granted granted Critical
Publication of DE69608722T2 publication Critical patent/DE69608722T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
DE69608722T 1995-03-16 1996-03-15 Verfahren zur Herstellung eines piezoelektrischen Schichtelementes Expired - Lifetime DE69608722T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5701995A JPH08252920A (ja) 1995-03-16 1995-03-16 積層型圧電素子の製造方法

Publications (2)

Publication Number Publication Date
DE69608722D1 true DE69608722D1 (de) 2000-07-13
DE69608722T2 DE69608722T2 (de) 2000-10-05

Family

ID=13043732

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69608722T Expired - Lifetime DE69608722T2 (de) 1995-03-16 1996-03-15 Verfahren zur Herstellung eines piezoelektrischen Schichtelementes

Country Status (4)

Country Link
US (1) US5639508A (de)
EP (1) EP0732209B1 (de)
JP (1) JPH08252920A (de)
DE (1) DE69608722T2 (de)

Families Citing this family (38)

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Publication number Priority date Publication date Assignee Title
JPH08187848A (ja) * 1995-01-12 1996-07-23 Brother Ind Ltd 積層式圧電素子およびその製造方法
JP3663652B2 (ja) * 1995-02-13 2005-06-22 ブラザー工業株式会社 インクジェットプリンタヘッド
JP3267171B2 (ja) * 1996-09-12 2002-03-18 株式会社村田製作所 圧電共振子およびそれを用いた電子部品
JP3365224B2 (ja) * 1996-10-24 2003-01-08 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
KR100209515B1 (ko) * 1997-02-05 1999-07-15 윤종용 자성잉크를 이용한 잉크젯 프린터의 분사 장치 및 방법
JP3271540B2 (ja) * 1997-02-06 2002-04-02 ミノルタ株式会社 インクジェット記録装置
US6053602A (en) * 1997-02-28 2000-04-25 Hitachi Koki Company Ltd. On-demand multi-nozzle ink jet head
JP3575239B2 (ja) * 1997-08-05 2004-10-13 ブラザー工業株式会社 インクジェットヘッド及びその製造方法
EP0908961B1 (de) * 1997-10-13 2003-06-04 Sagem S.A. Verstärker-Antrieb mit aktiven Materialien
US6291932B1 (en) * 1998-02-17 2001-09-18 Canon Kabushiki Kaisha Stacked piezoelectric element and producing method therefor
CN1329196C (zh) * 1998-02-18 2007-08-01 索尼株式会社 压电致动器及其制造方法和喷墨打印头
JP3780700B2 (ja) * 1998-05-26 2006-05-31 セイコーエプソン株式会社 パターン形成方法、パターン形成装置、パターン形成用版、パターン形成用版の製造方法、カラーフィルタの製造方法、導電膜の製造方法及び液晶パネルの製造方法
US6367132B2 (en) * 1998-08-31 2002-04-09 Eastman Kodak Company Method of making a print head
US6592696B1 (en) 1998-10-09 2003-07-15 Motorola, Inc. Method for fabricating a multilayered structure and the structures formed by the method
US6572830B1 (en) 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
DE19850610A1 (de) * 1998-11-03 2000-05-04 Bosch Gmbh Robert Verfahren zur Herstellung piezoelektrischer Aktoren
JP4240245B2 (ja) * 1998-12-15 2009-03-18 富士フイルム株式会社 インクジェットプリンタヘッド及びインクジェットプリンタ
JP2000270574A (ja) * 1999-03-16 2000-09-29 Seiko Instruments Inc 圧電アクチュエータおよびその製造方法
US6447887B1 (en) 1999-09-14 2002-09-10 Virginia Tech Intellectual Properties, Inc. Electrostrictive and piezoelectric thin film assemblies and method of fabrication therefor
JP3716724B2 (ja) * 1999-09-30 2005-11-16 ブラザー工業株式会社 圧電式インクジェットプリンタヘッドの圧電アクチュエータ及びその製造方法
JP3956607B2 (ja) * 2000-10-26 2007-08-08 ブラザー工業株式会社 圧電式インクジェットプリンタヘッド及び圧電式インクジェットプリンタヘッドの製造方法
JP4042442B2 (ja) * 2001-03-29 2008-02-06 ブラザー工業株式会社 圧電トランスデューサおよび液滴噴射装置
JP4296738B2 (ja) * 2001-11-30 2009-07-15 ブラザー工業株式会社 インクジェットヘッド
JP4059116B2 (ja) * 2003-03-20 2008-03-12 ブラザー工業株式会社 インクジェットヘッド及びその製造方法
JP4842520B2 (ja) * 2003-05-30 2011-12-21 日本碍子株式会社 セル駆動型圧電／電歪アクチュエータ及びその製造方法
JP2005014506A (ja) * 2003-06-27 2005-01-20 Ricoh Printing Systems Ltd インクジェットヘッド及びインクジェット式記録装置
US7201473B2 (en) * 2003-06-30 2007-04-10 Brother Kogyo Kabushiki Kaisha Inkjet printing head
JP4525094B2 (ja) * 2004-01-30 2010-08-18 ブラザー工業株式会社 インクジェットヘッドの製造方法
JP5512065B2 (ja) * 2005-02-08 2014-06-04 Ｔｄｋ株式会社 圧電セラミック素子
US20070093698A1 (en) * 2005-10-20 2007-04-26 Glucon Inc. Apparatus and methods for attaching a device to a body
US20070093717A1 (en) * 2005-10-20 2007-04-26 Glucon Inc. Wearable glucometer configurations
US8113635B2 (en) * 2007-01-16 2012-02-14 Brother Kogyo Kabushiki Kaisha Liquid discharge apparatus and check method of the same
JP5181914B2 (ja) * 2008-08-08 2013-04-10 ブラザー工業株式会社 位置決め方法
US8813324B2 (en) 2010-03-24 2014-08-26 Western Digital (Fremont), Llc Method for providing a piezoelectric multilayer
DE102011003680A1 (de) 2011-02-07 2012-08-09 Robert Bosch Gmbh Verfahren zur Herstellung von piezoelektrischen Werkstücken
KR101328345B1 (ko) * 2011-08-29 2013-11-11 삼성전기주식회사 압전체 조성물, 압전 소자, 잉크젯 프린트 헤드 및 압전 소자와 잉크젯 프린터 헤드의 제조방법
KR101537939B1 (ko) * 2013-12-04 2015-07-20 한국세라믹기술원 압전 세라믹 파이버 적층형 복합소자 및 그 제조방법
US10680161B1 (en) 2017-03-29 2020-06-09 Apple Inc. Electronic Devices with Piezoelectric Ink

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0094078B1 (de) * 1982-05-11 1988-11-02 Nec Corporation Elektrostriktives Vielschichtelement welches wiederholter Pulsanwendung widersteht
JPS6127688A (ja) * 1984-07-02 1986-02-07 Nec Corp 電歪効果素子およびその製造方法
JPS62133777A (ja) * 1985-12-05 1987-06-16 Hitachi Metals Ltd 積層型圧電素子およびその製造方法
EP0427901B1 (de) * 1989-11-14 1996-04-03 Battelle Memorial Institute Verfahren zur Herstellung einer piezoelektrischen Stapelantriebsvorrichtung
JP3041952B2 (ja) * 1990-02-23 2000-05-15 セイコーエプソン株式会社 インクジェット式記録ヘッド、圧電振動体、及びこれらの製造方法
US5402159A (en) * 1990-03-26 1995-03-28 Brother Kogyo Kabushiki Kaisha Piezoelectric ink jet printer using laminated piezoelectric actuator
JP2913806B2 (ja) * 1990-09-14 1999-06-28 ブラザー工業株式会社 圧電式インクジェットプリンタヘッド
JP3045531B2 (ja) * 1990-10-01 2000-05-29 日立金属株式会社 積層型変位素子
JP2836332B2 (ja) * 1991-12-20 1998-12-14 日本電気株式会社 積層圧電アクチュエータ素子の製造方法
JP3257151B2 (ja) * 1993-06-18 2002-02-18 東ソー株式会社 熱可塑性エラストマー組成物及びその製造法
JPH0757545B2 (ja) * 1993-07-19 1995-06-21 セイコーエプソン株式会社 インクジェットヘッド及びその製造方法
JP3088890B2 (ja) * 1994-02-04 2000-09-18 日本碍子株式会社 圧電／電歪膜型アクチュエータ

Also Published As

Publication number Publication date
US5639508A (en) 1997-06-17
EP0732209A2 (de) 1996-09-18
EP0732209B1 (de) 2000-06-07
EP0732209A3 (de) 1998-01-07
DE69608722T2 (de) 2000-10-05
JPH08252920A (ja) 1996-10-01

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