DE69622427T2 - Herstellungsüberwachung und analyse mittels statistischer simulation mit einzelschritt-feedback - Google Patents

Herstellungsüberwachung und analyse mittels statistischer simulation mit einzelschritt-feedback

Info

Publication number
DE69622427T2
DE69622427T2 DE69622427T DE69622427T DE69622427T2 DE 69622427 T2 DE69622427 T2 DE 69622427T2 DE 69622427 T DE69622427 T DE 69622427T DE 69622427 T DE69622427 T DE 69622427T DE 69622427 T2 DE69622427 T2 DE 69622427T2
Authority
DE
Germany
Prior art keywords
analysis
manufacturing monitoring
statistical simulation
step feedback
feedback
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69622427T
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English (en)
Other versions
DE69622427D1 (de
Inventor
Chun Chen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
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Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of DE69622427D1 publication Critical patent/DE69622427D1/de
Application granted granted Critical
Publication of DE69622427T2 publication Critical patent/DE69622427T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
DE69622427T 1995-12-04 1996-09-27 Herstellungsüberwachung und analyse mittels statistischer simulation mit einzelschritt-feedback Expired - Fee Related DE69622427T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/566,529 US5719796A (en) 1995-12-04 1995-12-04 System for monitoring and analyzing manufacturing processes using statistical simulation with single step feedback
PCT/US1996/015511 WO1997021244A1 (en) 1995-12-04 1996-09-27 A system for monitoring and analyzing manufacturing processes using statistical simulation with single step feedback

Publications (2)

Publication Number Publication Date
DE69622427D1 DE69622427D1 (de) 2002-08-22
DE69622427T2 true DE69622427T2 (de) 2003-03-20

Family

ID=24263283

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69622427T Expired - Fee Related DE69622427T2 (de) 1995-12-04 1996-09-27 Herstellungsüberwachung und analyse mittels statistischer simulation mit einzelschritt-feedback

Country Status (6)

Country Link
US (2) US5719796A (de)
EP (1) EP0865666B1 (de)
JP (1) JP2000517473A (de)
KR (1) KR19990071784A (de)
DE (1) DE69622427T2 (de)
WO (1) WO1997021244A1 (de)

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EP0865666B1 (de) 2002-07-17
EP0865666A1 (de) 1998-09-23
DE69622427D1 (de) 2002-08-22
US5719796A (en) 1998-02-17
WO1997021244A1 (en) 1997-06-12
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