DE69625684D1 - Verfahren und Vorrichtung für eine organische Gasphasenbeschichtung zur Erzeugung organischer Filme mit hoher optischer Nonlinearität - Google Patents

Verfahren und Vorrichtung für eine organische Gasphasenbeschichtung zur Erzeugung organischer Filme mit hoher optischer Nonlinearität

Info

Publication number
DE69625684D1
DE69625684D1 DE69625684T DE69625684T DE69625684D1 DE 69625684 D1 DE69625684 D1 DE 69625684D1 DE 69625684 T DE69625684 T DE 69625684T DE 69625684 T DE69625684 T DE 69625684T DE 69625684 D1 DE69625684 D1 DE 69625684D1
Authority
DE
Germany
Prior art keywords
gas phase
high optical
phase coating
optical nonlinearity
organic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69625684T
Other languages
English (en)
Other versions
DE69625684T2 (de
Inventor
Stephen R Forrest
Vladimir S Ban
Paul E Burrows
Jeffrey Schwartz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Princeton University
Original Assignee
Princeton University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Princeton University filed Critical Princeton University
Publication of DE69625684D1 publication Critical patent/DE69625684D1/de
Application granted granted Critical
Publication of DE69625684T2 publication Critical patent/DE69625684T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/54—Organic compounds
DE69625684T 1995-05-19 1996-05-13 Verfahren und Vorrichtung für eine organische Gasphasenbeschichtung zur Erzeugung organischer Filme mit hoher optischer Nonlinearität Expired - Lifetime DE69625684T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/444,252 US5554220A (en) 1995-05-19 1995-05-19 Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities
PCT/US1996/006768 WO1996037639A2 (en) 1995-05-19 1996-05-13 Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities

Publications (2)

Publication Number Publication Date
DE69625684D1 true DE69625684D1 (de) 2003-02-13
DE69625684T2 DE69625684T2 (de) 2003-10-23

Family

ID=23764114

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69625684T Expired - Lifetime DE69625684T2 (de) 1995-05-19 1996-05-13 Verfahren und Vorrichtung für eine organische Gasphasenbeschichtung zur Erzeugung organischer Filme mit hoher optischer Nonlinearität

Country Status (6)

Country Link
US (1) US5554220A (de)
EP (1) EP0828867B1 (de)
JP (1) JP2000504298A (de)
CA (1) CA2220354C (de)
DE (1) DE69625684T2 (de)
WO (1) WO1996037639A2 (de)

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Also Published As

Publication number Publication date
JP2000504298A (ja) 2000-04-11
CA2220354A1 (en) 1996-11-28
WO1996037639A2 (en) 1996-11-28
DE69625684T2 (de) 2003-10-23
EP0828867B1 (de) 2003-01-08
EP0828867A4 (de) 1999-10-27
CA2220354C (en) 2002-12-10
EP0828867A2 (de) 1998-03-18
WO1996037639A3 (en) 1997-01-16
US5554220A (en) 1996-09-10

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