DE69627045D1 - Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung - Google Patents

Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung

Info

Publication number
DE69627045D1
DE69627045D1 DE69627045T DE69627045T DE69627045D1 DE 69627045 D1 DE69627045 D1 DE 69627045D1 DE 69627045 T DE69627045 T DE 69627045T DE 69627045 T DE69627045 T DE 69627045T DE 69627045 D1 DE69627045 D1 DE 69627045D1
Authority
DE
Germany
Prior art keywords
manufacturing
same
ink jet
recording head
jet recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69627045T
Other languages
English (en)
Other versions
DE69627045T2 (de
Inventor
Yoshinao Miyata
Tsutomu Nishiwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9401995A external-priority patent/JPH08281945A/ja
Priority claimed from JP9401795A external-priority patent/JP3384184B2/ja
Priority claimed from JP32085895A external-priority patent/JP3407514B2/ja
Priority claimed from JP32265695A external-priority patent/JPH09156098A/ja
Priority claimed from JP32265795A external-priority patent/JPH09156099A/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69627045D1 publication Critical patent/DE69627045D1/de
Publication of DE69627045T2 publication Critical patent/DE69627045T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
DE69627045T 1995-04-19 1996-04-19 Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung Expired - Fee Related DE69627045T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP9401995A JPH08281945A (ja) 1995-04-19 1995-04-19 インクジェットヘッド及びインクジェットヘッドの製造方法
JP9401795A JP3384184B2 (ja) 1995-04-19 1995-04-19 インクジェットプリントヘッド
JP32085895A JP3407514B2 (ja) 1995-12-08 1995-12-08 液体吐出装置
JP32265695A JPH09156098A (ja) 1995-12-12 1995-12-12 インクジェットプリントヘッド及びその製造方法
JP32265795A JPH09156099A (ja) 1995-12-12 1995-12-12 インクジェットプリントヘッド及びその製造方法

Publications (2)

Publication Number Publication Date
DE69627045D1 true DE69627045D1 (de) 2003-04-30
DE69627045T2 DE69627045T2 (de) 2003-09-25

Family

ID=27525672

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69624282T Expired - Fee Related DE69624282T2 (de) 1995-04-19 1996-04-19 Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung
DE69627045T Expired - Fee Related DE69627045T2 (de) 1995-04-19 1996-04-19 Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69624282T Expired - Fee Related DE69624282T2 (de) 1995-04-19 1996-04-19 Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung

Country Status (3)

Country Link
US (2) US5754205A (de)
EP (2) EP0974466B1 (de)
DE (2) DE69624282T2 (de)

Families Citing this family (80)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3379106B2 (ja) * 1992-04-23 2003-02-17 セイコーエプソン株式会社 液体噴射ヘッド
JP3386099B2 (ja) * 1995-07-03 2003-03-10 セイコーエプソン株式会社 インクジェット式記録ヘッド用ノズルプレート、これの製造方法、及びインクジェット式記録ヘッド
EP1104698B1 (de) * 1995-09-05 2003-07-02 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
US6729002B1 (en) 1995-09-05 2004-05-04 Seiko Epson Corporation Method of producing an ink jet recording head
JP3460218B2 (ja) * 1995-11-24 2003-10-27 セイコーエプソン株式会社 インクジェットプリンタヘッドおよびその製造方法
US7003857B1 (en) 1995-11-24 2006-02-28 Seiko Epson Corporation Method of producing an ink-jet printing head
JP3503386B2 (ja) 1996-01-26 2004-03-02 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
US6305791B1 (en) * 1996-07-31 2001-10-23 Minolta Co., Ltd. Ink-jet recording device
US6290341B1 (en) 1996-10-18 2001-09-18 Seiko Epson Corporation Ink jet printing head which prevents the stagnation of ink in the vicinity of the nozzle orifices
JP3713921B2 (ja) * 1996-10-24 2005-11-09 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
JP2861980B2 (ja) * 1997-01-30 1999-02-24 日本電気株式会社 インク滴噴射装置
JPH10305578A (ja) * 1997-03-03 1998-11-17 Seiko Epson Corp インクジェット式記録ヘッド
JPH10264374A (ja) * 1997-03-27 1998-10-06 Seiko Epson Corp インクジェット式記録ヘッド
DE69810691T2 (de) 1997-04-30 2003-08-07 Seiko Epson Corp Tintenstrahlaufzeichnungskopf
DE69810835T2 (de) * 1997-04-30 2003-08-07 Seiko Epson Corp Tintenstrahlaufzeichnungskopf
US6460971B2 (en) 1997-07-15 2002-10-08 Silverbrook Research Pty Ltd Ink jet with high young's modulus actuator
US6254793B1 (en) * 1997-07-15 2001-07-03 Silverbrook Research Pty Ltd Method of manufacture of high Young's modulus thermoelastic inkjet printer
JPH1191102A (ja) * 1997-09-25 1999-04-06 Nec Corp 固体アクチュエータおよびインクジェットヘッド
JP3521708B2 (ja) * 1997-09-30 2004-04-19 セイコーエプソン株式会社 インクジェット式記録ヘッドおよびその製造方法
US6322203B1 (en) * 1998-02-19 2001-11-27 Seiko Epson Corporation Ink jet recording head and ink jet recorder
AU739877B2 (en) * 1998-04-02 2001-10-25 Nec Corporation Ink-jet print head, driving method thereof and ink-jet printer using the same
JP2940544B1 (ja) * 1998-04-17 1999-08-25 日本電気株式会社 インクジェット記録ヘッド
JP2000033713A (ja) 1998-07-17 2000-02-02 Seiko Epson Corp インクジェット印刷ヘッド及びインクジェットプリンタ
JP3422364B2 (ja) * 1998-08-21 2003-06-30 セイコーエプソン株式会社 インクジェット式記録ヘッド及びインクジェット式記録装置
US6616270B1 (en) 1998-08-21 2003-09-09 Seiko Epson Corporation Ink jet recording head and ink jet recording apparatus comprising the same
US6478412B1 (en) * 1999-01-22 2002-11-12 Kansai Research Institute Piezoelectric thin film device, its production method, and ink-jet recording head
US6505919B1 (en) 1999-02-18 2003-01-14 Seiko Epson Corporation Ink jet recording head and ink jet recording apparatus incorporating the same
JP3868143B2 (ja) 1999-04-06 2007-01-17 松下電器産業株式会社 圧電体薄膜素子及びこれを用いたインクジェット式記録ヘッド並びにこれらの製造方法
US6617098B1 (en) 1999-07-13 2003-09-09 Input/Output, Inc. Merged-mask micro-machining process
US6502930B1 (en) * 1999-08-04 2003-01-07 Seiko Epson Corporation Ink jet recording head, method for manufacturing the same, and ink jet recorder
US6312110B1 (en) 1999-09-28 2001-11-06 Brother International Corporation Methods and apparatus for electrohydrodynamic ejection
JP3389987B2 (ja) * 1999-11-11 2003-03-24 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
US6774541B1 (en) * 1999-11-18 2004-08-10 Kri, Inc. Piezoelectric element, process for producing the piezoelectric element, and head for ink-jet printer using the piezoelectric element
US6958125B2 (en) * 1999-12-24 2005-10-25 Canon Kabushiki Kaisha Method for manufacturing liquid jet recording head
JP4221929B2 (ja) * 2000-03-31 2009-02-12 富士フイルム株式会社 マルチノズルインクジエットヘッド
US6526658B1 (en) * 2000-05-23 2003-03-04 Silverbrook Research Pty Ltd Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator
WO2001089840A1 (en) * 2000-05-24 2001-11-29 Silverbrook Research Pty. Ltd. Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator
US6416169B1 (en) 2000-11-24 2002-07-09 Xerox Corporation Micromachined fluid ejector systems and methods having improved response characteristics
US6409311B1 (en) 2000-11-24 2002-06-25 Xerox Corporation Bi-directional fluid ejection systems and methods
US6419335B1 (en) 2000-11-24 2002-07-16 Xerox Corporation Electronic drive systems and methods
US6350015B1 (en) 2000-11-24 2002-02-26 Xerox Corporation Magnetic drive systems and methods for a micromachined fluid ejector
US6367915B1 (en) 2000-11-28 2002-04-09 Xerox Corporation Micromachined fluid ejector systems and methods
US6472332B1 (en) 2000-11-28 2002-10-29 Xerox Corporation Surface micromachined structure fabrication methods for a fluid ejection device
US6783588B2 (en) * 2000-12-15 2004-08-31 Canon Kabushiki Kaisha BaTiO3-PbTiO3 series single crystal and method of manufacturing the same piezoelectric type actuator and liquid discharge head using such piezoelectric type actuator
US6406130B1 (en) 2001-02-20 2002-06-18 Xerox Corporation Fluid ejection systems and methods with secondary dielectric fluid
US6629756B2 (en) 2001-02-20 2003-10-07 Lexmark International, Inc. Ink jet printheads and methods therefor
JP3603828B2 (ja) * 2001-05-28 2004-12-22 富士ゼロックス株式会社 インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
JP2003022892A (ja) 2001-07-06 2003-01-24 Semiconductor Energy Lab Co Ltd 発光装置の製造方法
US6953241B2 (en) 2001-11-30 2005-10-11 Brother Kogyo Kabushiki Kaisha Ink-jet head having passage unit and actuator units attached to the passage unit, and ink-jet printer having the ink-jet head
US6979077B2 (en) 2002-02-20 2005-12-27 Brother Kogyo Kabushiki Kaisha Ink-jet head and ink-jet printer having ink-jet head
TWI221322B (en) * 2002-02-26 2004-09-21 Benq Corp Manufacturing method of fluid spraying apparatus
US6520624B1 (en) * 2002-06-18 2003-02-18 Hewlett-Packard Company Substrate with fluid passage supports
JP4209144B2 (ja) * 2002-06-21 2009-01-14 パナソニック株式会社 圧電アクチュエータ、インクジェットヘッド及びインクジェット式記録装置
US20040134881A1 (en) * 2002-07-04 2004-07-15 Seiko Epson Corporation Method of manufacturing liquid jet head
US7381341B2 (en) * 2002-07-04 2008-06-03 Seiko Epson Corporation Method of manufacturing liquid jet head
US7063407B2 (en) * 2002-08-21 2006-06-20 Matsushita Electric Industrial Co., Ltd. Piezoelectric actuator, method for manufacturing the same, ink jet head, and ink jet recording apparatus
JP3729190B2 (ja) * 2002-08-23 2005-12-21 セイコーエプソン株式会社 液体噴射ヘッドおよびその製造方法
TWI222408B (en) * 2002-12-03 2004-10-21 Nanodynamics Inc Pressure chamber of a piezoelectric ink jet print head and fabrication method thereof
US7419252B2 (en) * 2004-07-13 2008-09-02 Brother Kogyo Kabushiki Kaisha Ink jet head, piezo-electric actuator, and method of manufacturing them
JP4595418B2 (ja) * 2004-07-16 2010-12-08 ブラザー工業株式会社 インクジェットヘッド
US7549223B2 (en) * 2004-09-28 2009-06-23 Fujifilm Corporation Method for manufacturing a liquid ejection head
US7283030B2 (en) 2004-11-22 2007-10-16 Eastman Kodak Company Doubly-anchored thermal actuator having varying flexural rigidity
US7175258B2 (en) 2004-11-22 2007-02-13 Eastman Kodak Company Doubly-anchored thermal actuator having varying flexural rigidity
US7188931B2 (en) 2004-11-22 2007-03-13 Eastman Kodak Company Doubly-anchored thermal actuator having varying flexural rigidity
JP4096318B2 (ja) * 2005-03-15 2008-06-04 富士フイルム株式会社 液体吐出ヘッド及びその製造方法
DE602006018214D1 (de) * 2005-03-22 2010-12-30 Brother Ind Ltd Piezoelektrischer Aktuator, Vorrichtung um Flüssigkeit zu transportieren, Verfahren um piezoelektrischen Aktuator herzustellen
US7998362B2 (en) * 2005-08-23 2011-08-16 Canon Kabushiki Kaisha Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, liquid discharge apparatus, and production method of piezoelectric element
JP2008049531A (ja) * 2006-08-23 2008-03-06 Canon Inc インクジェット記録ヘッド
JP5103951B2 (ja) * 2007-03-08 2012-12-19 ブラザー工業株式会社 駆動装置及び液滴吐出ヘッド
US8313174B2 (en) * 2008-08-06 2012-11-20 Xerox Corporation Method for reducing mechanical cross-talk between array structures on a substrate mounted to another substrate by an adhesive
US8287094B2 (en) 2009-07-27 2012-10-16 Zamtec Limited Printhead integrated circuit configured for backside electrical connection
US8323993B2 (en) * 2009-07-27 2012-12-04 Zamtec Limited Method of fabricating inkjet printhead assembly having backside electrical connections
WO2012001954A1 (ja) * 2010-06-30 2012-01-05 Ｎｅｃカシオモバイルコミュニケーションズ株式会社 発振装置および電子機器
US8864287B2 (en) * 2011-04-19 2014-10-21 Eastman Kodak Company Fluid ejection using MEMS composite transducer
US9590587B1 (en) 2011-07-07 2017-03-07 Analog Devices, Inc. Compensation of second order temperature dependence of mechanical resonator frequency
US9214623B1 (en) 2012-01-18 2015-12-15 Analog Devices, Inc. Doped piezoelectric resonator
JP6061088B2 (ja) * 2013-03-28 2017-01-18 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP6314519B2 (ja) * 2014-02-10 2018-04-25 セイコーエプソン株式会社 導通構造、導通構造の製造方法、液滴吐出ヘッドおよび印刷装置
JP6609943B2 (ja) * 2015-03-12 2019-11-27 セイコーエプソン株式会社 タンク、タンクユニットおよび液体噴射システム
JP7214468B2 (ja) * 2018-12-25 2023-01-30 キヤノン株式会社 液体吐出ヘッド

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5511811A (en) * 1978-07-10 1980-01-28 Seiko Epson Corp Liquid jet device
US4516140A (en) * 1983-12-27 1985-05-07 At&T Teletype Corporation Print head actuator for an ink jet printer
DE3917434A1 (de) * 1989-05-29 1989-11-09 Siemens Ag Mehrschichtig aufgebauter tintendruckkopf mit durch selektives aetzen erzeugten tintenkanaelen
EP0408306B1 (de) * 1989-07-11 1996-05-01 Ngk Insulators, Ltd. Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb
US5534900A (en) * 1990-09-21 1996-07-09 Seiko Epson Corporation Ink-jet recording apparatus
US5265315A (en) * 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head
JPH05177831A (ja) * 1991-12-27 1993-07-20 Rohm Co Ltd インクジェットプリントヘッド及びそれを備える電子機器
JP3147132B2 (ja) * 1992-03-03 2001-03-19 セイコーエプソン株式会社 インクジェット記録ヘッド、インクジェット記録ヘッド用振動板、及びインクジェット記録ヘッド用振動板の製造方法
JP3379106B2 (ja) * 1992-04-23 2003-02-17 セイコーエプソン株式会社 液体噴射ヘッド
JP3168713B2 (ja) * 1992-08-06 2001-05-21 セイコーエプソン株式会社 インクジェットヘッド及びその製造方法
US5896150A (en) * 1992-11-25 1999-04-20 Seiko Epson Corporation Ink-jet type recording head
JP3235630B2 (ja) * 1993-11-05 2001-12-04 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP3109703B2 (ja) * 1993-12-21 2000-11-20 キヤノン株式会社 メンブレン構造体及びその製造方法及びそれを用いたマイクロデバイス

Also Published As

Publication number Publication date
DE69627045T2 (de) 2003-09-25
US5922218A (en) 1999-07-13
EP0974466A1 (de) 2000-01-26
EP0738599A2 (de) 1996-10-23
DE69624282D1 (de) 2002-11-21
EP0738599A3 (de) 1997-09-10
US5754205A (en) 1998-05-19
EP0738599B1 (de) 2002-10-16
EP0974466B1 (de) 2003-03-26
DE69624282T2 (de) 2003-07-03

Similar Documents

Publication Publication Date Title
DE69627045D1 (de) Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
DE69628954D1 (de) Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
DE69718410T2 (de) Tintenstrahlkopf und Verfahren zu dessen Herstellung
DE69510502D1 (de) Tintenstrahlaufzeichnungsblatt und Verfahren zur seiner Herstellung
DE69515247T2 (de) Mehrschichtiger Tintenstrahlaufzeichnungskopf und Verfahren zur Herstellung desselben
DE69310107D1 (de) Aufzeichnungsblatt für Tintenstrahlschreiber und Verfahren zu seiner Herstellung
DE69418782T2 (de) Tintenstrahlkopf und Verfahren zur Herstellung
DE69636021D1 (de) Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
DE69504493D1 (de) Tintenstrahlkopf und verfahren zu dessen herstellung
DE69739387D1 (de) Tintenstrahlaufzeichnungsgerät und Verfahren zu seiner Herstellung
DE69314315D1 (de) Tintenstrahlkopf und verfahren zur herstellung
DE69526547T2 (de) Tintenstrahlaufzeichnungsgerät und Verfahren
DE69815470T2 (de) Tintenstrahlaufzeichnungskopf, Verfahren zu dessen Herstellung und damit versehendem Aufzeichnungsgerät
DE69427926T2 (de) Tintenstrahlkopf und Verfahren zu seiner Herstellung und zu seiner Steuerung
DE69515227D1 (de) Tintenstrahlaufzeichnungskopf und dessen Herstellungsverfahren
DE69623167D1 (de) Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
DE69727255D1 (de) Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
DE69717746T2 (de) Tintenstrahldruckkopf und Verfahren zur Herstellung desselben
DE69710984T2 (de) Tintenstrahlaufzeichnungskopf und Verfahren zur Herstellung dieses Tintenstrahlaufzeichnungskopfes
DE60024926D1 (de) Tintenstrahlkopf und Verfahren zu seiner Herstellung
DE69609549T2 (de) Tintenstrahlkopf und Verfahren zu dessen Herstellung
DE69819414D1 (de) Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung
DE69800538D1 (de) Tintenstrahldruckkopf, Verfahren zu seiner Herstellung, und Tintenstrahlaufzeichnungsgerät
DE69707811D1 (de) Elektrostatischer Tintenstrahldruckkopf und Verfahren zur Herstellung seiner Kopfeinheit

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee