DE69627086D1 - Wellenlängenselektive Bauteile mit SOI-Halbleiter - Google Patents

Wellenlängenselektive Bauteile mit SOI-Halbleiter

Info

Publication number
DE69627086D1
DE69627086D1 DE69627086T DE69627086T DE69627086D1 DE 69627086 D1 DE69627086 D1 DE 69627086D1 DE 69627086 T DE69627086 T DE 69627086T DE 69627086 T DE69627086 T DE 69627086T DE 69627086 D1 DE69627086 D1 DE 69627086D1
Authority
DE
Germany
Prior art keywords
wavelength
selective components
soi
semiconductors
soi semiconductors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69627086T
Other languages
English (en)
Other versions
DE69627086T2 (de
Inventor
Farid Agahi
Bardia Pezeshki
Jeffrey Alan Kash
Jeffrey John Welser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69627086D1 publication Critical patent/DE69627086D1/de
Publication of DE69627086T2 publication Critical patent/DE69627086T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31—Digital deflection, i.e. optical switching
    • G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
    • G02F1/3132—Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type
    • G02F1/3133—Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type the optical waveguides being made of semiconducting materials
DE69627086T 1995-09-15 1996-08-19 Wellenlängenselektive Bauteile mit SOI-Halbleiter Expired - Lifetime DE69627086T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US529933 1990-05-29
US08/529,933 US5559912A (en) 1995-09-15 1995-09-15 Wavelength-selective devices using silicon-on-insulator

Publications (2)

Publication Number Publication Date
DE69627086D1 true DE69627086D1 (de) 2003-05-08
DE69627086T2 DE69627086T2 (de) 2004-02-26

Family

ID=24111799

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69627086T Expired - Lifetime DE69627086T2 (de) 1995-09-15 1996-08-19 Wellenlängenselektive Bauteile mit SOI-Halbleiter

Country Status (4)

Country Link
US (1) US5559912A (de)
EP (1) EP0763757B1 (de)
JP (1) JP3474059B2 (de)
DE (1) DE69627086T2 (de)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2746511B1 (fr) * 1996-03-20 1998-04-24 Bosc Dominique Coupleur directif actif mixte silice/polymere, en optique integree
US5986331A (en) * 1996-05-30 1999-11-16 Philips Electronics North America Corp. Microwave monolithic integrated circuit with coplaner waveguide having silicon-on-insulator composite substrate
JP2910696B2 (ja) * 1996-09-20 1999-06-23 日本電気株式会社 半導体光検出器
US5721801A (en) * 1996-12-17 1998-02-24 Texas Instruments Incorporated Membrane optical waveguide device and method of fabrication
US5847865A (en) * 1997-02-18 1998-12-08 Regents Of The University Of Minnesota Waveguide optical amplifier
US5838870A (en) * 1997-02-28 1998-11-17 The United States Of America As Represented By The Secretary Of The Air Force Nanometer-scale silicon-on-insulator photonic componets
US6201914B1 (en) * 1997-04-15 2001-03-13 UNIVERSITé LAVAL Tapered waveguide for optical dispersion compensation
GB2314643B (en) * 1997-06-11 1998-06-17 Bookham Technology Ltd Integrated light absorber
GB2320104B (en) * 1997-10-16 1998-11-18 Bookham Technology Ltd Thermally isolated silicon layer
GB2333851B (en) * 1999-02-16 2000-01-19 Bookham Technology Ltd An optical waveguide
JP2000321452A (ja) * 1999-05-11 2000-11-24 Oki Electric Ind Co Ltd 光導波路素子及び光導波路素子の製造方法
US7058245B2 (en) * 2000-04-04 2006-06-06 Waveguide Solutions, Inc. Integrated optical circuits
FR2812405B1 (fr) * 2000-07-27 2003-06-20 Centre Nat Rech Scient Systeme d'interconnexion optique pour circuit integre realise sur un substrat soi
US6490393B1 (en) * 2000-11-27 2002-12-03 Advanced Interfaces, Llc Integrated optical multiplexer and demultiplexer for wavelength division transmission of information
US7050675B2 (en) * 2000-11-27 2006-05-23 Advanced Interfaces, Llc Integrated optical multiplexer and demultiplexer for wavelength division transmission of information
GB2370372A (en) * 2000-12-22 2002-06-26 Bookham Technology Plc Coupled optical waveguide system with grating and stress controlling layer
FR2819594B1 (fr) * 2001-01-15 2003-05-16 Opsitech Optical System Chip Structure optique a poutre isolee et son procede de fabrication
SE0100611L (sv) * 2001-02-22 2002-08-23 Altitun Ab Förfarande för att förlustkompensera ett avstämbart filter för en laser, jämte ett dylikt filter
SE518476C2 (sv) 2001-02-22 2002-10-15 Altitun Ab Metod för att förbättra selektiviteten i ett avstämbart vågledarfilter
GB0108126D0 (en) * 2001-03-31 2001-05-23 Bookham Technology Plc Optoelectronic filters
US20020154387A1 (en) * 2001-04-20 2002-10-24 Kenji Mori Gain equalizer, collimator with gain equalizer and method of manufacturing gain equalizer
US6690844B2 (en) 2001-05-17 2004-02-10 Optronx, Inc. Optical fiber apparatus and associated method
US6748125B2 (en) 2001-05-17 2004-06-08 Sioptical, Inc. Electronic semiconductor control of light in optical waveguide
US6654511B2 (en) 2001-05-17 2003-11-25 Sioptical, Inc. Optical modulator apparatus and associated method
WO2002093203A2 (en) * 2001-05-17 2002-11-21 Optronx, Inc Integrated optical/electronic circuits and associated methods of simultaneous generation thereof
US6947615B2 (en) 2001-05-17 2005-09-20 Sioptical, Inc. Optical lens apparatus and associated method
US6625348B2 (en) 2001-05-17 2003-09-23 Optron X, Inc. Programmable delay generator apparatus and associated method
US6912330B2 (en) * 2001-05-17 2005-06-28 Sioptical Inc. Integrated optical/electronic circuits and associated methods of simultaneous generation thereof
US6608945B2 (en) 2001-05-17 2003-08-19 Optronx, Inc. Self-aligning modulator method and associated apparatus
US20020197016A1 (en) * 2001-06-20 2002-12-26 Sethumadhavan Chandrasekhar Photodetector having a waveguide and resonant coupler and a method of manufacture therefor
US7501303B2 (en) * 2001-11-05 2009-03-10 The Trustees Of Boston University Reflective layer buried in silicon and method of fabrication
US6864758B2 (en) * 2002-04-30 2005-03-08 Freescale Semiconductor, Inc. Apparatus and resonant circuit employing a varactor diode in parallel with a transmission line and method thereof
US20040120649A1 (en) * 2002-12-20 2004-06-24 Motorola, Inc. Optical coupling interface for optical waveguide and optical fiber
US6961495B2 (en) * 2003-01-27 2005-11-01 Intel Corporation Heating optical devices
FR2851826B1 (fr) * 2003-02-27 2005-06-10 Centre Nat Rech Scient Coupleur optique pour circuits integres a guide d'onde optique
FR2861854B1 (fr) * 2003-10-30 2006-01-13 Centre Nat Rech Scient Dispositif de couplage-decouplage de lumiere selectif en frequence
US7773836B2 (en) 2005-12-14 2010-08-10 Luxtera, Inc. Integrated transceiver with lightpipe coupler
US7251386B1 (en) * 2004-01-14 2007-07-31 Luxtera, Inc Integrated photonic-electronic circuits and systems
US7649916B2 (en) * 2004-06-30 2010-01-19 Finisar Corporation Semiconductor laser with side mode suppression
KR100759805B1 (ko) * 2005-12-07 2007-09-20 한국전자통신연구원 광증폭 듀플렉서
US7532784B2 (en) * 2006-07-31 2009-05-12 Onechip Photonics Inc. Integrated vertical wavelength (de)multiplexer
US7902620B2 (en) * 2008-08-14 2011-03-08 International Business Machines Corporation Suspended germanium photodetector for silicon waveguide
JP5831165B2 (ja) * 2011-11-21 2015-12-09 富士通株式会社 半導体光素子
WO2014023804A2 (en) * 2012-08-08 2014-02-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Directional coupler and optical waveguide
US9529150B2 (en) 2013-10-22 2016-12-27 Massachusetts Institute Of Technology Waveguide formation using CMOS fabrication techniques
US9772463B2 (en) 2014-09-04 2017-09-26 International Business Machines Corporation Intra chip optical interconnect structure
KR102290188B1 (ko) * 2015-01-30 2021-08-20 한국전자통신연구원 파장 결합 장치 및 이를 구비한 배열 도파로 격자
US10431253B1 (en) 2016-05-19 2019-10-01 Seagate Technology, Llc Waveguide input coupler with asymmetric taper
US10197818B2 (en) * 2016-10-24 2019-02-05 Electronics & Telecommunications Research Institute Thermo-optic optical switch

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3864019A (en) * 1973-11-15 1975-02-04 Bell Telephone Labor Inc Optical film-fiber coupler
US3912363A (en) * 1974-01-29 1975-10-14 Rca Corp Optical fiber to planar waveguide coupler
DE2442724A1 (de) * 1974-09-06 1976-03-18 Siemens Ag Integriert optischer wellenleiter mit einem filter
US4159452A (en) * 1978-01-13 1979-06-26 Bell Telephone Laboratories, Incorporated Dual beam double cavity heterostructure laser with branching output waveguides
US4701009A (en) * 1985-02-04 1987-10-20 Hughes Aircraft Company Spectral filter for integrated optics
US4728167A (en) * 1986-02-24 1988-03-01 The United States Of America As Represented By The Secretary Of The Air Force. Electrically controlled integrated optical switch
US4857973A (en) * 1987-05-14 1989-08-15 The United States Of America As Represented By The Secretary Of The Air Force Silicon waveguide with monolithically integrated Schottky barrier photodetector
EP0431527B1 (de) * 1989-12-04 1995-03-15 Canon Kabushiki Kaisha Optisches Kopplergerät mit wellenlängeselektivem optischem Koppler
US5078516A (en) * 1990-11-06 1992-01-07 Bell Communications Research, Inc. Tapered rib waveguides
US5182787A (en) * 1991-04-29 1993-01-26 At&T Bell Laboratories Optical waveguide structure including reflective asymmetric cavity
JP2871893B2 (ja) * 1991-06-03 1999-03-17 古河電気工業株式会社 フィルタ付き分岐結合器
DE4130047A1 (de) * 1991-09-10 1993-03-18 Standard Elektrik Lorenz Ag Verfahren zum betreiben eines halbleiterbauelements als optisches filter und halbleiterbauelement zur durchfuehrung des verfahrens
US5253314A (en) * 1992-01-31 1993-10-12 At&T Bell Laboratories Tunable optical waveguide coupler
US5265177A (en) * 1992-05-08 1993-11-23 At&T Bell Laboratories Integrated optical package for coupling optical fibers to devices with asymmetric light beams
US5343542A (en) * 1993-04-22 1994-08-30 International Business Machines Corporation Tapered fabry-perot waveguide optical demultiplexer
US5502783A (en) * 1994-08-18 1996-03-26 Northern Telecom Limited Polarization independent optical directional coupler wavelength tunable filters/receivers

Also Published As

Publication number Publication date
JP3474059B2 (ja) 2003-12-08
EP0763757B1 (de) 2003-04-02
DE69627086T2 (de) 2004-02-26
US5559912A (en) 1996-09-24
EP0763757A2 (de) 1997-03-19
JPH0980243A (ja) 1997-03-28
EP0763757A3 (de) 1998-04-01

Similar Documents

Publication Publication Date Title
DE69627086D1 (de) Wellenlängenselektive Bauteile mit SOI-Halbleiter
DE69533127D1 (de) Kühlkörper
NO962381L (no) Spiss-beskytter-innretning
DE69610457T2 (de) Halbleitervorrichtung
KR970004020A (ko) 반도체장치
KR970005998A (ko) 반도체 장치
DE69840690D1 (de) Selbst-zwischengitterdominiertes Silizium mit niedriger Fehlerdichte
DE69612975D1 (de) Schalteinrichtung
DE69631940D1 (de) Halbleitervorrichtung
DE69615301T2 (de) Strombegrenzungsvorrichtung
DE69622915D1 (de) Halbleiterschaltvorrichtung
DE59611147D1 (de) Flugzeugtragelement
DE69616296D1 (de) Armaturvorrichtung
DE69626679D1 (de) Vermittlungseinrichtung
DE69521029T2 (de) Vermittlungsvorrichtung
DE29511267U1 (de) Armstütze
FI954547A (fi) Asemointilaite
DE69635334D1 (de) Halbleiteranordnung
DE59602190D1 (de) Hohlleiteroszillator
KR970025773U (ko) 반도체 장치
DE69620938D1 (de) Schichtfolie
FI954919A (fi) Helikopteri-lentokone
DE29515708U1 (de) Umschaltvorrichtung
KR970003228U (ko) 반도체 장치
FI945273A0 (fi) Pienpakkaus

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8328 Change in the person/name/address of the agent

Representative=s name: DUSCHER, R., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 7