DE69725071D1 - Vorrichtung zur Detektion der Position - Google Patents
Vorrichtung zur Detektion der PositionInfo
- Publication number
- DE69725071D1 DE69725071D1 DE69725071T DE69725071T DE69725071D1 DE 69725071 D1 DE69725071 D1 DE 69725071D1 DE 69725071 T DE69725071 T DE 69725071T DE 69725071 T DE69725071 T DE 69725071T DE 69725071 D1 DE69725071 D1 DE 69725071D1
- Authority
- DE
- Germany
- Prior art keywords
- detection device
- position detection
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19168796 | 1996-07-22 | ||
JP19168796A JPH1038508A (ja) | 1996-07-22 | 1996-07-22 | 位置検出装置及び位置決め装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69725071D1 true DE69725071D1 (de) | 2003-10-30 |
DE69725071T2 DE69725071T2 (de) | 2004-07-22 |
Family
ID=16278797
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69725071T Expired - Fee Related DE69725071T2 (de) | 1996-07-22 | 1997-07-21 | Vorrichtung zur Detektion der Position |
Country Status (4)
Country | Link |
---|---|
US (1) | US5861754A (de) |
EP (1) | EP0821216B1 (de) |
JP (1) | JPH1038508A (de) |
DE (1) | DE69725071T2 (de) |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3474402B2 (ja) * | 1997-07-17 | 2003-12-08 | 株式会社ミツトヨ | 測定器 |
US6029363A (en) * | 1998-04-03 | 2000-02-29 | Mitutoyo Corporation | Self-calibrating position transducer system and method |
US6079254A (en) * | 1998-05-04 | 2000-06-27 | International Business Machines Corporation | Scanning force microscope with automatic surface engagement and improved amplitude demodulation |
JP4124867B2 (ja) * | 1998-07-14 | 2008-07-23 | 松下電器産業株式会社 | 変換装置 |
US7260051B1 (en) | 1998-12-18 | 2007-08-21 | Nanochip, Inc. | Molecular memory medium and molecular memory integrated circuit |
JP4014326B2 (ja) * | 1999-02-18 | 2007-11-28 | 本田技研工業株式会社 | 静電容量式傾斜センサ |
US6317011B1 (en) * | 2000-03-09 | 2001-11-13 | Avaya Technology Corp. | Resonant capacitive coupler |
JP2002031545A (ja) | 2000-07-13 | 2002-01-31 | Mitsutoyo Corp | 相対変位検出ユニット |
US20020138301A1 (en) * | 2001-03-22 | 2002-09-26 | Thanos Karras | Integration of a portal into an application service provider data archive and/or web based viewer |
US6487787B1 (en) | 2001-08-03 | 2002-12-03 | Mitutoyo Corporation | System and method for determination of error parameters for performing self-calibration and other functions without an external position reference in a transducer |
US7142500B2 (en) * | 2002-01-11 | 2006-11-28 | Hewlett-Packard Development Company, L.P. | Sensor with varying capacitance based on relative position between objects |
US7233517B2 (en) * | 2002-10-15 | 2007-06-19 | Nanochip, Inc. | Atomic probes and media for high density data storage |
US6776043B1 (en) * | 2003-02-07 | 2004-08-17 | The Boeing Company | Variable capacitance bridge accelerometer |
WO2004077677A1 (en) * | 2003-02-24 | 2004-09-10 | Analog Devices, Inc. | Signal-conditioning and analog-to-digital conversion circuit architecture |
US6922063B2 (en) * | 2003-07-11 | 2005-07-26 | Zircon Corporation | Apparatus and method for capacitive level sensor |
US7124634B2 (en) * | 2003-07-29 | 2006-10-24 | The Boeing Company | Single plate capacitive acceleration derivative detector |
US20050243660A1 (en) * | 2004-04-16 | 2005-11-03 | Rust Thomas F | Methods for erasing bit cells in a high density data storage device |
US20050243592A1 (en) * | 2004-04-16 | 2005-11-03 | Rust Thomas F | High density data storage device having eraseable bit cells |
US7489141B1 (en) | 2004-08-18 | 2009-02-10 | Environmental Metrology Corporation | Surface micro sensor and method |
US7310577B2 (en) * | 2004-09-29 | 2007-12-18 | The Boeing Company | Integrated capacitive bridge and integrated flexure functions inertial measurement unit |
AU2005299470A1 (en) * | 2004-10-22 | 2006-05-04 | Vikram A. Bose-Mullick | A signal-enhancement system for photodetector outputs |
US7317317B1 (en) * | 2004-11-02 | 2008-01-08 | Environmental Metrology Corporation | Shielded micro sensor and method for electrochemically monitoring residue in micro features |
US7360425B2 (en) * | 2004-11-22 | 2008-04-22 | The Boeing Company | Compensated composite structure |
US7228739B2 (en) | 2004-11-23 | 2007-06-12 | The Boeing Company | Precision flexure plate |
US7331229B2 (en) * | 2004-12-09 | 2008-02-19 | The Boeing Company | Magnetic null accelerometer |
US7137208B2 (en) * | 2004-12-14 | 2006-11-21 | The Boeing Company | Leveling device |
US8599174B2 (en) | 2005-03-18 | 2013-12-03 | The Invention Science Fund I, Llc | Verifying a written expression |
US7296470B2 (en) * | 2005-04-14 | 2007-11-20 | The Boeing Company | Extended accuracy flexured plate dual capacitance accelerometer |
US7463573B2 (en) * | 2005-06-24 | 2008-12-09 | Nanochip, Inc. | Patterned media for a high density data storage device |
US20070041237A1 (en) * | 2005-07-08 | 2007-02-22 | Nanochip, Inc. | Media for writing highly resolved domains |
US20070008867A1 (en) * | 2005-07-08 | 2007-01-11 | Nanochip, Inc. | High density data storage devices with a lubricant layer comprised of a field of polymer chains |
US20070008866A1 (en) * | 2005-07-08 | 2007-01-11 | Nanochip, Inc. | Methods for writing and reading in a polarity-dependent memory switch media |
US20070008865A1 (en) * | 2005-07-08 | 2007-01-11 | Nanochip, Inc. | High density data storage devices with polarity-dependent memory switching media |
US7932726B1 (en) | 2005-08-16 | 2011-04-26 | Environmental Metrology Corporation | Method of design optimization and monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS) |
US20080001075A1 (en) * | 2006-06-15 | 2008-01-03 | Nanochip, Inc. | Memory stage for a probe storage device |
US20080175033A1 (en) * | 2007-01-19 | 2008-07-24 | Nanochip, Inc. | Method and system for improving domain stability in a ferroelectric media |
US20080174918A1 (en) * | 2007-01-19 | 2008-07-24 | Nanochip, Inc. | Method and system for writing and reading a charge-trap media with a probe tip |
US20080233672A1 (en) * | 2007-03-20 | 2008-09-25 | Nanochip, Inc. | Method of integrating mems structures and cmos structures using oxide fusion bonding |
JP5044348B2 (ja) * | 2007-09-26 | 2012-10-10 | 株式会社東芝 | センサ装置、及びこれを用いたセンサシステムと電子機器 |
US20090129246A1 (en) * | 2007-11-21 | 2009-05-21 | Nanochip, Inc. | Environmental management of a probe storage device |
US20090294028A1 (en) * | 2008-06-03 | 2009-12-03 | Nanochip, Inc. | Process for fabricating high density storage device with high-temperature media |
US20100039729A1 (en) * | 2008-08-14 | 2010-02-18 | Nanochip, Inc. | Package with integrated magnets for electromagnetically-actuated probe-storage device |
US20100039919A1 (en) * | 2008-08-15 | 2010-02-18 | Nanochip, Inc. | Cantilever Structure for Use in Seek-and-Scan Probe Storage |
US8081005B2 (en) * | 2009-03-17 | 2011-12-20 | The Corporation Of Mercer University | Capacitive sensors for nano-positioning and methods of using the same |
DE102011079704A1 (de) * | 2011-07-25 | 2013-01-31 | Robert Bosch Gmbh | Suchgerät |
CN105185283B (zh) | 2015-10-23 | 2017-12-08 | 京东方科技集团股份有限公司 | 检测装置、基板架、检测基板架上基板位置的方法 |
US9933867B2 (en) * | 2015-12-30 | 2018-04-03 | Synaptics Incorporated | Active pen capacitive displacement gauge |
US10254134B2 (en) * | 2016-08-04 | 2019-04-09 | Apple Inc. | Interference-insensitive capacitive displacement sensing |
DE102018128023A1 (de) * | 2018-11-09 | 2020-05-14 | Schaeffler Technologies AG & Co. KG | Linearführung |
CN112067899B (zh) * | 2020-08-31 | 2023-04-07 | 湖北长江新型显示产业创新中心有限公司 | 面板结构、显示装置及面板结构的对位检测方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3312892A (en) * | 1964-05-04 | 1967-04-04 | Technology Instr Corp Of Calif | Contactless electrical transducer having moving parts |
DE2311015A1 (de) * | 1973-03-06 | 1974-09-12 | Gaby Weiss | Kondensatorkarte zur ermittlung von flaechengroessen |
DE2518745C3 (de) * | 1975-04-26 | 1979-06-21 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Fehlerkompensation in Positioniersystemen |
NL7905562A (nl) * | 1979-07-17 | 1981-01-20 | Heerens Willem Christiaan | Capacitieve meter. |
US4814845A (en) * | 1986-11-03 | 1989-03-21 | Kulite Semiconductor Products, Inc. | Capacitive transducers employing high conductivity diffused regions |
US4893071A (en) * | 1988-05-24 | 1990-01-09 | American Telephone And Telegraph Company, At&T Bell Laboratories | Capacitive incremental position measurement and motion control |
JP3043477B2 (ja) * | 1991-07-17 | 2000-05-22 | 和廣 岡田 | 静電容量の変化を利用したセンサ |
US5461319A (en) * | 1992-12-28 | 1995-10-24 | Peters; Randall D. | Symmetric differential capacitance transducer employing cross coupled conductive plates to form equipotential pairs |
JPH07192346A (ja) * | 1993-12-24 | 1995-07-28 | Victor Co Of Japan Ltd | 静電容量値の変化の検出による記録跡の位置情報の検出装置 |
JP3686109B2 (ja) * | 1994-10-07 | 2005-08-24 | ヒューレット・パッカード・カンパニー | メモリ装置 |
-
1996
- 1996-07-22 JP JP19168796A patent/JPH1038508A/ja active Pending
-
1997
- 1997-07-15 US US08/892,733 patent/US5861754A/en not_active Expired - Fee Related
- 1997-07-21 EP EP97305425A patent/EP0821216B1/de not_active Expired - Lifetime
- 1997-07-21 DE DE69725071T patent/DE69725071T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0821216A2 (de) | 1998-01-28 |
JPH1038508A (ja) | 1998-02-13 |
US5861754A (en) | 1999-01-19 |
DE69725071T2 (de) | 2004-07-22 |
EP0821216A3 (de) | 1999-06-16 |
EP0821216B1 (de) | 2003-09-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE |
|
8339 | Ceased/non-payment of the annual fee |