DE69734675T2 - Verfahren zur determinierung von laser-induzierter kompaktierung in geschmolzenem quarz - Google Patents

Verfahren zur determinierung von laser-induzierter kompaktierung in geschmolzenem quarz Download PDF

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Publication number
DE69734675T2
DE69734675T2 DE69734675T DE69734675T DE69734675T2 DE 69734675 T2 DE69734675 T2 DE 69734675T2 DE 69734675 T DE69734675 T DE 69734675T DE 69734675 T DE69734675 T DE 69734675T DE 69734675 T2 DE69734675 T2 DE 69734675T2
Authority
DE
Germany
Prior art keywords
compacting
induced
determining laser
melted quartz
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69734675T
Other languages
English (en)
Other versions
DE69734675D1 (de
Inventor
C Allan
R Powell
Nicholas Francis Borrelli
Thomas Philip Seward
Charlene Marie Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=21823466&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69734675(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Corning Inc filed Critical Corning Inc
Publication of DE69734675D1 publication Critical patent/DE69734675D1/de
Application granted granted Critical
Publication of DE69734675T2 publication Critical patent/DE69734675T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C03B19/066—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction for the production of quartz or fused silica articles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/10—Forming beads
    • C03B19/1005—Forming solid beads
    • C03B19/106—Forming solid beads by chemical vapour deposition; by liquid phase reaction
    • C03B19/1065—Forming solid beads by chemical vapour deposition; by liquid phase reaction by liquid phase reactions, e.g. by means of a gel phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C03C1/006—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/50—After-treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/13—Computer control
DE69734675T 1996-08-29 1997-08-27 Verfahren zur determinierung von laser-induzierter kompaktierung in geschmolzenem quarz Expired - Lifetime DE69734675T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US2499596P 1996-08-29 1996-08-29
PCT/US1997/015234 WO1998008776A1 (en) 1996-08-29 1997-08-27 Method for determining laser-induced compaction in fused silica

Publications (2)

Publication Number Publication Date
DE69734675D1 DE69734675D1 (de) 2005-12-22
DE69734675T2 true DE69734675T2 (de) 2006-06-14

Family

ID=21823466

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69736563T Revoked DE69736563T2 (de) 1996-08-29 1997-08-27 Quartz mit niedriger kompaktierung unter hochenergiebestrahlung
DE69734675T Expired - Lifetime DE69734675T2 (de) 1996-08-29 1997-08-27 Verfahren zur determinierung von laser-induzierter kompaktierung in geschmolzenem quarz

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69736563T Revoked DE69736563T2 (de) 1996-08-29 1997-08-27 Quartz mit niedriger kompaktierung unter hochenergiebestrahlung

Country Status (7)

Country Link
US (2) US6295841B1 (de)
EP (2) EP0960074B1 (de)
JP (2) JP2001500631A (de)
KR (2) KR20000035913A (de)
DE (2) DE69736563T2 (de)
RU (1) RU2175647C2 (de)
WO (2) WO1998008776A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0960074B1 (de) 1996-08-29 2005-11-16 Corning Incorporated Verfahren zur determinierung von laser-induzierter kompaktierung in geschmolzenem quarz
DE19840525A1 (de) * 1998-09-06 2000-03-09 Inst Neue Mat Gemein Gmbh Verfahren zur Herstellung optischer Schichten von gleichmäßiger Schichtdicke
KR100824985B1 (ko) * 2001-09-11 2008-04-28 재단법인 포항산업과학연구원 투명 실리카 글래스 제조용 조성물 및 이를 이용한 실리카글래스의 제조 방법
EP1552281B8 (de) * 2002-09-16 2016-10-19 Hellma Materials GmbH Bestimmung der eignung eines optischen materials zur herstellung von optischen elementen, eine vorrichtung hierzu und die verwendung des materials
JP4370581B2 (ja) 2003-02-17 2009-11-25 株式会社ニコン 露光装置及び露光装置用光学部材
DE10308466A1 (de) * 2003-02-21 2004-09-02 Carl Zeiss Smt Ag Verfahren zur Herstellung von strahlungsresistentem Quarzglasmaterial und Quarzglasmaterial
US6992753B2 (en) * 2003-12-24 2006-01-31 Carl Zeiss Smt Ag Projection optical system
JP2013075827A (ja) * 2005-11-07 2013-04-25 Corning Inc デューテロキシルドープ石英ガラス、このガラスを有する光学部材及びリソグラフィシステム並びにこのガラスの作成方法
US7934390B2 (en) * 2006-05-17 2011-05-03 Carl Zeiss Smt Gmbh Method for manufacturing a lens of synthetic quartz glass with increased H2 content
JP5432378B2 (ja) * 2009-08-18 2014-03-05 カール・ツァイス・エスエムティー・ゲーエムベーハー Ｅｕｖマイクロリソグラフィー用基板及びミラーとその製造方法
DE102010052685A1 (de) 2010-11-26 2012-05-31 J-Fiber Gmbh Verfahren zur Herstellung von strahlungsresistentem Quarzglasmaterial und danach hergestellte Quarzglaskörper
RU2731764C1 (ru) * 2019-12-30 2020-09-08 Акционерное общество "Научно-производственное предприятие "Медикон" (АО "НПП "Медикон") Способ выплавки кварцевого стекла

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3933454A (en) * 1974-04-22 1976-01-20 Corning Glass Works Method of making optical waveguides
NL8403380A (nl) 1984-11-07 1986-06-02 Philips Nv Werkwijze en inrichting voor het verdichten van een voorgevormd poreus lichaam uit materiaal, waarvan het hoofdbestanddeel uit sio2 bestaat.
US4961767A (en) 1987-05-20 1990-10-09 Corning Incorporated Method for producing ultra-high purity, optical quality, glass articles
US4789389A (en) * 1987-05-20 1988-12-06 Corning Glass Works Method for producing ultra-high purity, optical quality, glass articles
US5161059A (en) * 1987-09-21 1992-11-03 Massachusetts Institute Of Technology High-efficiency, multilevel, diffractive optical elements
US4895790A (en) * 1987-09-21 1990-01-23 Massachusetts Institute Of Technology High-efficiency, multilevel, diffractive optical elements
US5325230A (en) * 1989-06-09 1994-06-28 Shin-Etsu Quartz Products Co., Ltd. Optical members and blanks of synthetic silica glass and method for their production
EP0401845B2 (de) * 1989-06-09 2001-04-11 Heraeus Quarzglas GmbH & Co. KG Optische Teile und Rohlinge aus synthetischem Siliziumdioxidglas und Verfahren zu ihrer Herstellung
US5043002A (en) * 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
US5410428A (en) 1990-10-30 1995-04-25 Shin-Etsu Quartz Products Co. Ltd. Optical member made of high-purity and transparent synthetic silica glass and method for production thereof or blank thereof
EP0546196B1 (de) * 1991-06-29 1997-05-02 Shin-Etsu Quartz Products Co., Ltd. Synthetisches optisches element aus quarzglas für excimer-laser und seine herstellung
JP2588447B2 (ja) * 1991-06-29 1997-03-05 信越石英株式会社 エキシマレーザー用石英ガラス部材の製造方法
JP2859095B2 (ja) * 1993-07-30 1999-02-17 信越化学工業株式会社 エキシマレーザリソグラフィー用合成石英マスク基板
US5547482A (en) * 1994-07-05 1996-08-20 Chalk; Julie B. Method of making fused silica articles
JP3283383B2 (ja) * 1994-07-06 2002-05-20 松下電器産業株式会社 設計検証装置
US5594651A (en) * 1995-02-14 1997-01-14 St. Ville; James A. Method and apparatus for manufacturing objects having optimized response characteristics
US5616159A (en) * 1995-04-14 1997-04-01 Corning Incorporated Method of forming high purity fused silica having high resistance to optical damage
EP0747327B2 (de) * 1995-06-07 2003-08-27 Corning Incorporated Verfahren zur thermischen Behandlung und zum Konsolidieren von Vorformen aus Siliciumdioxid zur Verminderung von durch Laser hervorgerufenen optischen Defekten
EP0914301A4 (de) * 1996-07-26 2000-03-22 Corning Inc Geschmolzenes quartzglas mit hohem widerstand gegen optische bschädigung
EP0960074B1 (de) * 1996-08-29 2005-11-16 Corning Incorporated Verfahren zur determinierung von laser-induzierter kompaktierung in geschmolzenem quarz

Also Published As

Publication number Publication date
EP0960074A1 (de) 1999-12-01
JP2001500631A (ja) 2001-01-16
EP0958255A4 (de) 2004-03-31
DE69734675D1 (de) 2005-12-22
US6295841B1 (en) 2001-10-02
DE69736563D1 (de) 2006-10-05
RU2175647C2 (ru) 2001-11-10
EP0958255A1 (de) 1999-11-24
US6543254B2 (en) 2003-04-08
US20020036188A1 (en) 2002-03-28
JP2000517284A (ja) 2000-12-26
EP0960074A4 (de) 2002-09-04
EP0958255B1 (de) 2006-08-23
WO1998008776A1 (en) 1998-03-05
WO1998008775A1 (en) 1998-03-05
KR20000035913A (ko) 2000-06-26
KR20000035883A (ko) 2000-06-26
EP0960074B1 (de) 2005-11-16
DE69736563T2 (de) 2008-01-03

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