DE69736818D1 - Verfahren und System zur Aufnahme eines Objekts oder Musters - Google Patents

Verfahren und System zur Aufnahme eines Objekts oder Musters

Info

Publication number
DE69736818D1
DE69736818D1 DE69736818T DE69736818T DE69736818D1 DE 69736818 D1 DE69736818 D1 DE 69736818D1 DE 69736818 T DE69736818 T DE 69736818T DE 69736818 T DE69736818 T DE 69736818T DE 69736818 D1 DE69736818 D1 DE 69736818D1
Authority
DE
Germany
Prior art keywords
images
subpictures
image
simultaneously obtained
recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69736818T
Other languages
English (en)
Inventor
Howard Stern
Fereydoun Maali
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Energy and Automation Inc
Original Assignee
Siemens Energy and Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Energy and Automation Inc filed Critical Siemens Energy and Automation Inc
Application granted granted Critical
Publication of DE69736818D1 publication Critical patent/DE69736818D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/50—Image enhancement or restoration by the use of more than one image, e.g. averaging, subtraction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G06T1/0007—Image acquisition
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G01N2021/8825—Separate detection of dark field and bright field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G01N2021/95646—Soldering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2200/00—Indexing scheme for image data processing or generation, in general
    • G06T2200/32—Indexing scheme for image data processing or generation, in general involving image mosaicing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30152—Solder
DE69736818T 1996-11-12 1997-11-07 Verfahren und System zur Aufnahme eines Objekts oder Musters Expired - Fee Related DE69736818D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/748,040 US6075883A (en) 1996-11-12 1996-11-12 Method and system for imaging an object or pattern

Publications (1)

Publication Number Publication Date
DE69736818D1 true DE69736818D1 (de) 2006-11-23

Family

ID=25007738

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69725021T Expired - Fee Related DE69725021T2 (de) 1996-11-12 1997-11-07 Verfahren und system zum darstellen eines objektes oder musters
DE69736818T Expired - Fee Related DE69736818D1 (de) 1996-11-12 1997-11-07 Verfahren und System zur Aufnahme eines Objekts oder Musters

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69725021T Expired - Fee Related DE69725021T2 (de) 1996-11-12 1997-11-07 Verfahren und system zum darstellen eines objektes oder musters

Country Status (10)

Country Link
US (3) US6075883A (de)
EP (2) EP1016028B1 (de)
AT (2) ATE250249T1 (de)
AU (1) AU5174798A (de)
CA (1) CA2271492C (de)
DE (2) DE69725021T2 (de)
DK (1) DK1016028T3 (de)
ES (1) ES2207754T3 (de)
PT (1) PT1016028E (de)
WO (1) WO1998021687A1 (de)

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ATE342549T1 (de) 2006-11-15
EP1016028A1 (de) 2000-07-05
ATE250249T1 (de) 2003-10-15
DE69725021D1 (de) 2003-10-23
US20030215127A1 (en) 2003-11-20
PT1016028E (pt) 2004-02-27
DK1016028T3 (da) 2004-01-26
EP1359534A1 (de) 2003-11-05
EP1016028A4 (de) 2001-11-21
EP1016028B1 (de) 2003-09-17
US6603874B1 (en) 2003-08-05
US6075883A (en) 2000-06-13
CA2271492A1 (en) 1998-05-22
CA2271492C (en) 2007-05-29
WO1998021687A1 (en) 1998-05-22
EP1359534B1 (de) 2006-10-11
AU5174798A (en) 1998-06-03
ES2207754T3 (es) 2004-06-01
DE69725021T2 (de) 2004-04-22

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