DE69739863D1 - 5- oder 6-achsiges lasermesssystem - Google Patents
5- oder 6-achsiges lasermesssystemInfo
- Publication number
- DE69739863D1 DE69739863D1 DE69739863T DE69739863T DE69739863D1 DE 69739863 D1 DE69739863 D1 DE 69739863D1 DE 69739863 T DE69739863 T DE 69739863T DE 69739863 T DE69739863 T DE 69739863T DE 69739863 D1 DE69739863 D1 DE 69739863D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring system
- laser measuring
- axis laser
- axis
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/344—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US2408296P | 1996-08-16 | 1996-08-16 | |
PCT/US1997/014339 WO1998007012A1 (en) | 1996-08-16 | 1997-08-15 | Five-axis/six-axis laser measuring system |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69739863D1 true DE69739863D1 (de) | 2010-06-10 |
Family
ID=21818781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69739863T Expired - Lifetime DE69739863D1 (de) | 1996-08-16 | 1997-08-15 | 5- oder 6-achsiges lasermesssystem |
Country Status (6)
Country | Link |
---|---|
US (1) | US6049377A (de) |
EP (1) | EP0866954B1 (de) |
JP (1) | JP2001503133A (de) |
CN (1) | CN1105297C (de) |
DE (1) | DE69739863D1 (de) |
WO (1) | WO1998007012A1 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3413122B2 (ja) * | 1998-05-21 | 2003-06-03 | キヤノン株式会社 | 位置決め装置及びこれを用いた露光装置並びにデバイス製造方法 |
US7800758B1 (en) | 1999-07-23 | 2010-09-21 | Faro Laser Trackers, Llc | Laser-based coordinate measuring device and laser-based method for measuring coordinates |
JP2001356011A (ja) * | 2000-06-13 | 2001-12-26 | National Institute Of Advanced Industrial & Technology | 直動体の真直度計測装置 |
US6801722B1 (en) * | 2001-05-01 | 2004-10-05 | Terabeam Corporation | Optical tracking system with reflective fiber |
EP1421409A1 (de) * | 2001-08-22 | 2004-05-26 | Automated Precision, Inc. | Sechs-dimensionales laser-trackingsystem und methode |
GB0212659D0 (en) * | 2002-05-31 | 2002-07-10 | Bae Systems Plc | Tool movement and positioning system |
US7230689B2 (en) * | 2002-08-26 | 2007-06-12 | Lau Kam C | Multi-dimensional measuring system |
US7130047B2 (en) * | 2004-04-30 | 2006-10-31 | Optimum Technologies, Inc. | Method of producing polarizers for polarized optical probes |
CN100380099C (zh) * | 2004-09-09 | 2008-04-09 | 武汉光迅科技股份有限公司 | 光纤传感器 |
US7400416B2 (en) * | 2005-01-07 | 2008-07-15 | Automated Precision, Inc. | Accurate target orientation measuring system |
EP1703300A1 (de) * | 2005-03-17 | 2006-09-20 | Leica Geosystems AG | Verfahren und System zur Bestimmung von Position und Orientierung eines Objekts |
TWI318151B (en) * | 2007-02-09 | 2009-12-11 | Ind Tech Res Inst | Apparatus for detecting manufacturing parameters of a machine tool |
GB0706821D0 (en) * | 2007-04-10 | 2007-05-16 | Renishaw Plc | Rotation detection kit |
US7555404B2 (en) * | 2007-08-09 | 2009-06-30 | The Boeing Company | Methods and systems for automated ply boundary and orientation inspection |
CN101738161B (zh) * | 2008-11-14 | 2012-11-07 | 中国科学院沈阳自动化研究所 | 一种测量运动物体六维位姿的设备和方法 |
US7841094B2 (en) * | 2009-01-27 | 2010-11-30 | Trimble Kaiserslautern Gmbh | Optical instrument with angle indicator and method for operating the same |
CN102422165B (zh) | 2009-04-29 | 2013-05-29 | 皇家飞利浦电子股份有限公司 | 表征车辆动态的基于激光二极管的多光束激光点成像系统 |
TWI414747B (zh) * | 2011-05-10 | 2013-11-11 | Univ Nat Formosa | A five - degree - of - freedom optical system |
EP2522960B1 (de) * | 2011-05-13 | 2014-03-26 | SICK STEGMANN GmbH | Vorrichtung und Verfahren zur Messung des Drehwinkels zweier relativ zueinander rotierender Objekte |
WO2012173964A1 (en) * | 2011-06-14 | 2012-12-20 | Faro Technologies, Inc. | Automated and accelerated warm-up and stability check for laser trackers |
US20130141736A1 (en) * | 2011-12-01 | 2013-06-06 | Mingwu Bai | Control method and apparatus for positioning a moving object |
US20150276391A1 (en) * | 2012-10-15 | 2015-10-01 | Fujitsu Limited | Direction discrimination device, direction discrimination method, and recording medium storing direction discrimination control program |
ITRM20130318A1 (it) * | 2013-06-03 | 2014-12-04 | Icfo Inst De Ciencies Fotoniques | Tiltmetro fotonico ultra-sensibile utilizzante il momento angolare orbitale della luce, e relative metodo di misura angolare. |
JP6130242B2 (ja) * | 2013-06-26 | 2017-05-17 | Dmg森精機株式会社 | 測定装置を備えた工作機械 |
GB201313751D0 (en) * | 2013-08-01 | 2013-09-18 | Renishaw Plc | Rotation Detection Apparatus |
US9857160B1 (en) | 2013-09-24 | 2018-01-02 | TVS Holdings, LLC | Multi-mode frequency sweeping interferometer and method of using same |
US9631954B2 (en) * | 2014-02-04 | 2017-04-25 | Teledyne Scientific & Imaging, Llc | Moving platform roll sensor system |
CN106461372B (zh) * | 2014-09-03 | 2019-08-09 | 北京交通大学 | 单根光纤耦合双频激光六自由度误差同时测量系统 |
US9976947B1 (en) | 2014-11-24 | 2018-05-22 | TVS Holdings, LLC | Position measurement device |
CN105492860B (zh) * | 2015-01-22 | 2018-03-09 | 北京交通大学 | 一种可检测21项几何误差的激光测量系统与方法 |
BR112019000722B1 (pt) | 2016-07-15 | 2023-03-28 | Fastbrick Ip Pty Ltd | Lança extensível telescópica para transportar item e lança dobrável |
BR112019000728B1 (pt) | 2016-07-15 | 2023-03-28 | Fastbrick Ip Pty Ltd | Veículo que incorpora máquina de assentamento de tijolos |
CN111095355B (zh) | 2017-07-05 | 2023-10-20 | 快砖知识产权私人有限公司 | 实时定位和定向跟踪器 |
AU2018317937B2 (en) | 2017-08-17 | 2023-11-23 | Fastbrick Ip Pty Ltd | Communication system for an interaction system |
CN111226090B (zh) | 2017-08-17 | 2023-05-23 | 快砖知识产权私人有限公司 | 具有改进的横滚角测量的激光跟踪器 |
EP3694793B1 (de) | 2017-10-11 | 2023-11-08 | Fastbrick IP Pty Ltd | Maschine zum fördern von gegenständen |
CN110081823B (zh) * | 2019-06-06 | 2024-01-26 | 合肥工业大学 | 一种机床五自由度几何运动误差测量系统 |
US11307367B2 (en) * | 2020-08-17 | 2022-04-19 | X Development Llc | Method of precision beam collimation using fiber-optic circulator and wavelength tunable source |
CN112525863A (zh) * | 2020-10-13 | 2021-03-19 | 温州市质量技术检测科学研究院 | 一种塑料激光透射率检测装备 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3790284A (en) * | 1972-05-08 | 1974-02-05 | Hewlett Packard Co | Interferometer system for measuring straightness and roll |
GB1428372A (en) * | 1972-06-09 | 1976-03-17 | Soctt R N | Optical apparatus for determining deviations from a predeter mined form of a surface |
US3915572A (en) * | 1974-02-27 | 1975-10-28 | Nasa | Combined dual scatter, local oscillator laser doppler velocimeter |
US4560272A (en) * | 1980-12-10 | 1985-12-24 | The Perkin-Elmer Corporation | Three-axis angle sensor |
GB8420096D0 (en) * | 1984-08-07 | 1984-09-12 | Putra Siregar N I | Measurement of errors |
US4714339B2 (en) * | 1986-02-28 | 2000-05-23 | Us Commerce | Three and five axis laser tracking systems |
JPH0619845B2 (ja) * | 1986-09-26 | 1994-03-16 | ティアツク株式会社 | デイスク変動状態検出装置 |
US4792228A (en) * | 1987-08-20 | 1988-12-20 | Cincinnati Milacron Inc. | Position error sensing and feedback apparatus and method |
US4804270A (en) * | 1987-09-23 | 1989-02-14 | Grumman Aerospace Corporation | Multi-axis alignment apparatus |
GB8730169D0 (en) * | 1987-12-24 | 1988-02-03 | Renishaw Plc | Optical apparatus for use with interferometric measuring devices |
US4874245A (en) * | 1988-02-26 | 1989-10-17 | Simmonds Precision Products, Inc. | Optical shaft angular and torsional displacement and speed sensing system |
US5064289A (en) * | 1989-02-23 | 1991-11-12 | Hewlett-Packard Company | Linear-and-angular measuring plane mirror interferometer |
US5073025A (en) * | 1989-11-08 | 1991-12-17 | Rockwell International Corporation | Independent polarization state measurements sensor |
US5102222A (en) * | 1990-02-08 | 1992-04-07 | Harmonic Lightwaves, Inc. | Light wave polarization determination using a hybrid system |
JP2669732B2 (ja) * | 1990-07-27 | 1997-10-29 | 昭和電工株式会社 | 旋光度検出方法、その検出装置および旋光度検出用セル |
US5363196A (en) * | 1992-01-10 | 1994-11-08 | Ultratech Stepper, Inc. | Apparatus for measuring a departure from flatness or straightness of a nominally-plane mirror for a precision X-Y movable-stage |
US5418611A (en) * | 1992-03-25 | 1995-05-23 | Huang; Peisen | Multi-degree-of-freedom geometric error measurement system |
JP3185831B2 (ja) * | 1993-07-30 | 2001-07-11 | 富士写真フイルム株式会社 | 偏光コヒーレント合波レーザ |
-
1997
- 1997-08-15 DE DE69739863T patent/DE69739863D1/de not_active Expired - Lifetime
- 1997-08-15 US US08/911,915 patent/US6049377A/en not_active Expired - Lifetime
- 1997-08-15 CN CN97191384.6A patent/CN1105297C/zh not_active Expired - Lifetime
- 1997-08-15 WO PCT/US1997/014339 patent/WO1998007012A1/en active Application Filing
- 1997-08-15 EP EP97937261A patent/EP0866954B1/de not_active Expired - Lifetime
- 1997-08-15 JP JP10510042A patent/JP2001503133A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CN1105297C (zh) | 2003-04-09 |
US6049377A (en) | 2000-04-11 |
JP2001503133A (ja) | 2001-03-06 |
EP0866954B1 (de) | 2010-04-28 |
EP0866954A1 (de) | 1998-09-30 |
WO1998007012A1 (en) | 1998-02-19 |
CN1205077A (zh) | 1999-01-13 |
EP0866954A4 (de) | 2007-07-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |