DE69808192D1 - Intern optisch gepumpter, feldmodulierter, oberflächenemittierender Laser mit vertikalem Resonator - Google Patents

Intern optisch gepumpter, feldmodulierter, oberflächenemittierender Laser mit vertikalem Resonator

Info

Publication number
DE69808192D1
DE69808192D1 DE69808192T DE69808192T DE69808192D1 DE 69808192 D1 DE69808192 D1 DE 69808192D1 DE 69808192 T DE69808192 T DE 69808192T DE 69808192 T DE69808192 T DE 69808192T DE 69808192 D1 DE69808192 D1 DE 69808192D1
Authority
DE
Germany
Prior art keywords
modulated
field
emitting laser
optically pumped
vertical resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69808192T
Other languages
English (en)
Other versions
DE69808192T2 (de
Inventor
Anna Kullander-Sjoberg
Michael Widman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microsemi Semiconductor AB
Original Assignee
Mitel Semiconductor AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9714820.9A external-priority patent/GB9714820D0/en
Priority claimed from GBGB9718082.2A external-priority patent/GB9718082D0/en
Application filed by Mitel Semiconductor AB filed Critical Mitel Semiconductor AB
Publication of DE69808192D1 publication Critical patent/DE69808192D1/de
Application granted granted Critical
Publication of DE69808192T2 publication Critical patent/DE69808192T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/42Arrays of surface emitting lasers
    • H01S5/423Arrays of surface emitting lasers having a vertical cavity
    • H01S5/426Vertically stacked cavities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/04Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/041Optical pumping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2302/00Amplification / lasing wavelength
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/026Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/06Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/0607Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature
    • H01S5/0614Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature controlled by electric field, i.e. whereby an additional electric field is used to tune the bandgap, e.g. using the Stark-effect
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/341Structures having reduced dimensionality, e.g. quantum wires
    • H01S5/3412Structures having reduced dimensionality, e.g. quantum wires quantum box or quantum dash
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34306Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000nm, e.g. InP based 1300 and 1500nm lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34313Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer having only As as V-compound, e.g. AlGaAs, InGaAs
DE69808192T 1997-07-14 1998-07-13 Intern optisch gepumpter, feldmodulierter, oberflächenemittierender Laser mit vertikalem Resonator Expired - Fee Related DE69808192T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9714820.9A GB9714820D0 (en) 1997-07-14 1997-07-14 Field modulated vertical cavity surface-emitting laser with internal optical pumping
GBGB9718082.2A GB9718082D0 (en) 1997-08-27 1997-08-27 Field modulated vertical cavity surface-emitting laser with internal optical pumping

Publications (2)

Publication Number Publication Date
DE69808192D1 true DE69808192D1 (de) 2002-10-31
DE69808192T2 DE69808192T2 (de) 2003-04-30

Family

ID=26311881

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69808192T Expired - Fee Related DE69808192T2 (de) 1997-07-14 1998-07-13 Intern optisch gepumpter, feldmodulierter, oberflächenemittierender Laser mit vertikalem Resonator

Country Status (4)

Country Link
US (1) US6285704B1 (de)
EP (1) EP0892474B1 (de)
CA (1) CA2242670A1 (de)
DE (1) DE69808192T2 (de)

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US6849862B2 (en) * 1997-11-18 2005-02-01 Technologies And Devices International, Inc. III-V compound semiconductor device with an AlxByInzGa1-x-y-zN1-a-bPaAsb non-continuous quantum dot layer
US6483859B1 (en) 1999-06-24 2002-11-19 Lockheed Martin Corporation System and method for high-speed laser detection of ultrasound
US7286241B2 (en) * 1999-06-24 2007-10-23 Lockheed Martin Corporation System and method for high-speed laser detection of ultrasound
US6795477B1 (en) * 1999-08-12 2004-09-21 Cortek Inc. Method for modulating an optically pumped, tunable vertical cavity surface emitting laser (VCSEL)
US6424669B1 (en) * 1999-10-29 2002-07-23 E20 Communications, Inc. Integrated optically pumped vertical cavity surface emitting laser
WO2001031756A1 (en) * 1999-10-29 2001-05-03 E20 Communications, Inc. Modulated integrated optically pumped vertical cavity surface emitting lasers
JP2001223429A (ja) * 2000-02-09 2001-08-17 Fuji Photo Film Co Ltd 半導体レーザ装置
DE10108079A1 (de) * 2000-05-30 2002-09-12 Osram Opto Semiconductors Gmbh Optisch gepumpte oberflächenemittierende Halbleiterlaservorrichtung und Verfahren zu deren Herstellung
US6816525B2 (en) 2000-09-22 2004-11-09 Andreas Stintz Quantum dot lasers
US6600169B2 (en) * 2000-09-22 2003-07-29 Andreas Stintz Quantum dash device
US6553051B1 (en) * 2000-10-31 2003-04-22 Agilent Technologies, Inc. System for optically pumping a long wavelength laser using a short wavelength laser
WO2002071562A2 (en) * 2001-03-02 2002-09-12 Science & Technology Corporation @ Unm Quantum dot vertical cavity surface emitting laser
US6556610B1 (en) 2001-04-12 2003-04-29 E20 Communications, Inc. Semiconductor lasers
US6567454B1 (en) * 2001-05-01 2003-05-20 Sandia Corporation Coupled-resonator vertical-cavity lasers with two active gain regions
EP1399994B1 (de) * 2001-06-20 2005-07-27 Infineon Technologies AG Photonen-emitter und datenübertragungsvorrichtung
US6717964B2 (en) 2001-07-02 2004-04-06 E20 Communications, Inc. Method and apparatus for wavelength tuning of optically pumped vertical cavity surface emitting lasers
US6714307B2 (en) 2001-10-16 2004-03-30 Zygo Corporation Measurement of complex surface shapes using a spherical wavefront
FR2833758B1 (fr) * 2001-12-13 2004-12-10 Commissariat Energie Atomique Dispositif d'emission de lumiere a micro-cavite et procede de fabrication de ce dispositif
DE10214120B4 (de) * 2002-03-28 2007-06-06 Osram Opto Semiconductors Gmbh Optisch pumpbare oberflächenemittierende Halbleiterlaservorrichtung
US6865208B1 (en) 2002-06-10 2005-03-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ultrafast laser beam switching and pulse train generation by using coupled vertical-cavity, surface-emitting lasers (VCSELS)
US7209506B2 (en) * 2003-07-31 2007-04-24 Osram Opto Semiconductors Gmbh Optically pumped semiconductor device and method for producing it
DE10341085A1 (de) * 2003-07-31 2005-03-03 Osram Opto Semiconductors Gmbh Optisch gepumpte Halbleitervorrichtung und Verfahren zu deren Herstellung
US7282732B2 (en) * 2003-10-24 2007-10-16 Stc. Unm Quantum dot structures
TW200524236A (en) * 2003-12-01 2005-07-16 Nl Nanosemiconductor Gmbh Optoelectronic device incorporating an interference filter
WO2005122349A1 (en) * 2004-06-07 2005-12-22 Nl Nanosemiconductor Gmbh Electrooptically wavelength-tunable resonant cavity optoelectronic device for high-speed data transfer
US7593436B2 (en) * 2006-06-16 2009-09-22 Vi Systems Gmbh Electrooptically Bragg-reflector stopband-tunable optoelectronic device for high-speed data transfer
US7772615B2 (en) * 2007-08-10 2010-08-10 Connector Optics Anti stark electrooptic medium and electrooptically modulated optoelectronic device based thereupon
US7580595B1 (en) 2008-05-09 2009-08-25 Technische Universitaet Berlin Data transmission optoelectric device
GB2526140B (en) 2014-05-15 2019-03-13 Toshiba Res Europe Limited Photon Source comprising a Control Signal and a Quantum Structure
CN115079617B (zh) * 2022-07-22 2022-11-22 中国科学院精密测量科学与技术创新研究院 一种微型Mz光泵原子传感器的伺服环路锁定装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2927908B2 (ja) * 1990-08-14 1999-07-28 キヤノン株式会社 発光素子
DE9012119U1 (de) 1990-08-23 1991-12-19 Muenz, Werner, 8056 Neufahrn, De
EP0549853B1 (de) * 1991-12-16 1997-02-05 International Business Machines Corporation Abstimmbarer Laser mit gekoppelter Quantumwell-Struktur
US5513204A (en) 1995-04-12 1996-04-30 Optical Concepts, Inc. Long wavelength, vertical cavity surface emitting laser with vertically integrated optical pump
US5914976A (en) 1997-01-08 1999-06-22 W. L. Gore & Associates, Inc. VCSEL-based multi-wavelength transmitter and receiver modules for serial and parallel optical links

Also Published As

Publication number Publication date
EP0892474B1 (de) 2002-09-25
EP0892474A1 (de) 1999-01-20
CA2242670A1 (en) 1999-01-14
US6285704B1 (en) 2001-09-04
DE69808192T2 (de) 2003-04-30

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: ZARLINK SEMICONDUCTOR AB, JARFALLA, SE

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee