DE69816726D1 - Verfahren und Vorrichtung zur in-situ Endpunktbestimmung und zur Optimierung eines chemisch-mechanischen Polierverfahrens mit Linear Poliergerät - Google Patents

Verfahren und Vorrichtung zur in-situ Endpunktbestimmung und zur Optimierung eines chemisch-mechanischen Polierverfahrens mit Linear Poliergerät

Info

Publication number
DE69816726D1
DE69816726D1 DE69816726T DE69816726T DE69816726D1 DE 69816726 D1 DE69816726 D1 DE 69816726D1 DE 69816726 T DE69816726 T DE 69816726T DE 69816726 T DE69816726 T DE 69816726T DE 69816726 D1 DE69816726 D1 DE 69816726D1
Authority
DE
Germany
Prior art keywords
belt
removal rate
chemical
end point
optimizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69816726T
Other languages
English (en)
Other versions
DE69816726T2 (de
Inventor
Rahal Jairath
Jiri Pecen
Saket Chadda
Wilbur C Krussel
Jerauld J Cutini
Erik H Engdahl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of DE69816726D1 publication Critical patent/DE69816726D1/de
Application granted granted Critical
Publication of DE69816726T2 publication Critical patent/DE69816726T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/12—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with apertures for inspecting the surface to be abraded
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
DE69816726T 1997-05-28 1998-05-28 Verfahren und Vorrichtung zur in-situ Endpunktbestimmung und zur Optimierung eines chemisch-mechanischen Polierverfahrens mit Linear Poliergerät Expired - Fee Related DE69816726T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US869655 1997-05-28
US08/869,655 US6146248A (en) 1997-05-28 1997-05-28 Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher

Publications (2)

Publication Number Publication Date
DE69816726D1 true DE69816726D1 (de) 2003-09-04
DE69816726T2 DE69816726T2 (de) 2004-08-05

Family

ID=25354009

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69816726T Expired - Fee Related DE69816726T2 (de) 1997-05-28 1998-05-28 Verfahren und Vorrichtung zur in-situ Endpunktbestimmung und zur Optimierung eines chemisch-mechanischen Polierverfahrens mit Linear Poliergerät

Country Status (7)

Country Link
US (2) US6146248A (de)
EP (1) EP0893203B1 (de)
JP (1) JPH1177524A (de)
KR (1) KR19980087549A (de)
AT (1) ATE246071T1 (de)
DE (1) DE69816726T2 (de)
TW (1) TW440888B (de)

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US6261155B1 (en) 2001-07-17
US6146248A (en) 2000-11-14
EP0893203B1 (de) 2003-07-30
TW440888B (en) 2001-06-16
DE69816726T2 (de) 2004-08-05
EP0893203A2 (de) 1999-01-27
EP0893203A3 (de) 2000-01-12
KR19980087549A (ko) 1998-12-05
ATE246071T1 (de) 2003-08-15
JPH1177524A (ja) 1999-03-23

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