DE69819929D1 - Verbessertes prüfsystem für proben - Google Patents

Verbessertes prüfsystem für proben

Info

Publication number
DE69819929D1
DE69819929D1 DE69819929T DE69819929T DE69819929D1 DE 69819929 D1 DE69819929 D1 DE 69819929D1 DE 69819929 T DE69819929 T DE 69819929T DE 69819929 T DE69819929 T DE 69819929T DE 69819929 D1 DE69819929 D1 DE 69819929D1
Authority
DE
Germany
Prior art keywords
samples
testing system
improved testing
improved
testing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69819929T
Other languages
English (en)
Other versions
DE69819929T2 (de
Inventor
Mehdi Vaez-Iravani
Stanley Stokowski
Guoheng Zhao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Publication of DE69819929D1 publication Critical patent/DE69819929D1/de
Application granted granted Critical
Publication of DE69819929T2 publication Critical patent/DE69819929T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/44Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/4738Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474Details of optical heads therefor, e.g. using optical fibres
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/94Investigating contamination, e.g. dust
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501Semiconductor wafers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0216Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using light concentrators or collectors or condensers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8822Dark field detection
    • G01N2021/8825Separate detection of dark field and bright field
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8845Multiple wavelengths of illumination or detection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8848Polarisation of light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/065Integrating spheres
DE69819929T 1997-09-19 1998-09-18 Verbessertes prüfsystem für proben Expired - Lifetime DE69819929T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US933771 1997-09-19
US08/933,771 US6201601B1 (en) 1997-09-19 1997-09-19 Sample inspection system
PCT/US1998/019564 WO1999014575A1 (en) 1997-09-19 1998-09-18 Improved sample inspection system

Publications (2)

Publication Number Publication Date
DE69819929D1 true DE69819929D1 (de) 2003-12-24
DE69819929T2 DE69819929T2 (de) 2004-11-11

Family

ID=25464477

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69828827T Expired - Lifetime DE69828827T2 (de) 1997-09-19 1998-09-18 Verbessertes Prüfsystem für Proben
DE69819929T Expired - Lifetime DE69819929T2 (de) 1997-09-19 1998-09-18 Verbessertes prüfsystem für proben
DE69840532T Expired - Lifetime DE69840532D1 (de) 1997-09-19 1998-09-18 Verbessertes Prüfsystem für Proben

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69828827T Expired - Lifetime DE69828827T2 (de) 1997-09-19 1998-09-18 Verbessertes Prüfsystem für Proben

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69840532T Expired - Lifetime DE69840532D1 (de) 1997-09-19 1998-09-18 Verbessertes Prüfsystem für Proben

Country Status (6)

Country Link
US (9) US6201601B1 (de)
EP (3) EP1023582B1 (de)
JP (1) JP4499279B2 (de)
AU (1) AU9400098A (de)
DE (3) DE69828827T2 (de)
WO (1) WO1999014575A1 (de)

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US20050206886A1 (en) 2005-09-22
US20050174568A1 (en) 2005-08-11
US6891611B1 (en) 2005-05-10
WO1999014575B1 (en) 1999-06-03
WO1999014575A1 (en) 1999-03-25
EP1265063A1 (de) 2002-12-11
US7064821B2 (en) 2006-06-20
JP2001516874A (ja) 2001-10-02
EP1265063B1 (de) 2005-01-26
US20010002149A1 (en) 2001-05-31
DE69819929T2 (de) 2004-11-11
US20010000977A1 (en) 2001-05-10
AU9400098A (en) 1999-04-05
US6384910B2 (en) 2002-05-07
DE69840532D1 (de) 2009-03-19
EP1508799A2 (de) 2005-02-23
EP1508799B1 (de) 2009-02-04
DE69828827D1 (de) 2005-03-03
DE69828827T2 (de) 2006-01-05
EP1508799A3 (de) 2005-05-18
JP4499279B2 (ja) 2010-07-07
EP1023582A4 (de) 2000-11-29
US20010000679A1 (en) 2001-05-03
US20030206295A1 (en) 2003-11-06
EP1023582A1 (de) 2000-08-02
US6201601B1 (en) 2001-03-13
US6639662B2 (en) 2003-10-28
US6657715B2 (en) 2003-12-02
EP1023582B1 (de) 2003-11-19
US7079238B2 (en) 2006-07-18
US20020080346A1 (en) 2002-06-27
US6618134B2 (en) 2003-09-09

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