DE69826373D1 - Signalverarbeitungssystem für einen Inertialsensor - Google Patents

Signalverarbeitungssystem für einen Inertialsensor

Info

Publication number
DE69826373D1
DE69826373D1 DE69826373T DE69826373T DE69826373D1 DE 69826373 D1 DE69826373 D1 DE 69826373D1 DE 69826373 T DE69826373 T DE 69826373T DE 69826373 T DE69826373 T DE 69826373T DE 69826373 D1 DE69826373 D1 DE 69826373D1
Authority
DE
Germany
Prior art keywords
signal processing
processing system
inertial sensor
inertial
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69826373T
Other languages
English (en)
Other versions
DE69826373T2 (de
Inventor
Stanley F Wyse
Daniel A Tazartes
Juergen K P Flamm
Charles A Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Guidance and Electronics Co Inc
Original Assignee
Litton Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litton Systems Inc filed Critical Litton Systems Inc
Publication of DE69826373D1 publication Critical patent/DE69826373D1/de
Application granted granted Critical
Publication of DE69826373T2 publication Critical patent/DE69826373T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/033—Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor
    • G06F3/0346—Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor with detection of the device orientation or free movement in a 3D space, e.g. 3D mice, 6-DOF [six degrees of freedom] pointers using gyroscopes, accelerometers or tilt-sensors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/10—Arrangements for controlling torque ripple, e.g. providing reduced torque ripple
DE69826373T 1997-07-14 1998-06-24 Signalverarbeitungssystem für einen Inertialsensor Expired - Lifetime DE69826373T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US892252 1997-07-14
US08/892,252 US5983718A (en) 1997-07-14 1997-07-14 Signal processing system for inertial sensor

Publications (2)

Publication Number Publication Date
DE69826373D1 true DE69826373D1 (de) 2004-10-28
DE69826373T2 DE69826373T2 (de) 2005-09-29

Family

ID=25399649

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69826373T Expired - Lifetime DE69826373T2 (de) 1997-07-14 1998-06-24 Signalverarbeitungssystem für einen Inertialsensor

Country Status (6)

Country Link
US (2) US5983718A (de)
EP (1) EP0892246B1 (de)
JP (1) JP3816674B2 (de)
KR (1) KR19990013847A (de)
CA (1) CA2241463C (de)
DE (1) DE69826373T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6253612B1 (en) * 1998-06-05 2001-07-03 Integrated Micro Instruments, Inc. Generation of mechanical oscillation applicable to vibratory rate gyroscopes
US6508122B1 (en) * 1999-09-16 2003-01-21 American Gnc Corporation Microelectromechanical system for measuring angular rate
US6360601B1 (en) * 2000-01-20 2002-03-26 Hughes Electronics Corp. Microgyroscope with closed loop output
US6246243B1 (en) * 2000-01-21 2001-06-12 Analog Devices, Inc. Semi-fusible link system
DE60112934T2 (de) * 2000-06-23 2006-06-14 Vibrotron As Vettre Mechano-elektrischer zweiwegwandler
US6553835B1 (en) * 2000-09-15 2003-04-29 Bei Technologies, Inc. Inertial rate sensor and method with improved clocking
US20030033850A1 (en) * 2001-08-09 2003-02-20 Challoner A. Dorian Cloverleaf microgyroscope with electrostatic alignment and tuning
DE10317159B4 (de) * 2003-04-14 2007-10-11 Litef Gmbh Verfahren zur Kompensation eines Nullpunktfehlers in einem Corioliskreisel
FR2858853B1 (fr) * 2003-08-13 2006-01-13 Sercel Rech Const Elect Accelerometre a vibrations parasites reduites par forme des electrodes amelioree
JP3964875B2 (ja) * 2004-02-16 2007-08-22 株式会社ジャイトロニクス 角速度センサ
DE102004061804B4 (de) * 2004-12-22 2015-05-21 Robert Bosch Gmbh Mikromechanischer Drehratensensor mit Fehlerunterdrückung
DE102005034703A1 (de) * 2005-07-26 2007-02-01 Robert Bosch Gmbh Verfahren und Schaltungsanordnung zum Antrieb und zur gleichzeitigen Auswertung eines Drehratensensors
FR2894412B1 (fr) * 2005-12-02 2008-02-29 Thales Sa Dispositif d'acquisition numerique d'un signal de modulation d'amplitude
US20080098814A1 (en) * 2006-10-31 2008-05-01 Honeywell International Inc. Dual mode mems sensor
FR2914126B1 (fr) * 2007-03-22 2009-05-22 Eddysense Sarl Procede de demodulation synchrone et support d'enregistrement pour ce procede, demodulateur synchrone et capteur incorporant ce demodulateur
US7630082B2 (en) * 2007-04-12 2009-12-08 Honeywell International Inc. Systems and methods for high precision feedback control in closed loop sensors
JP4794596B2 (ja) * 2008-04-04 2011-10-19 パナソニック株式会社 物理量検出回路、物理量センサ装置
DE102008044664B4 (de) * 2008-08-28 2023-12-21 Continental Automotive Technologies GmbH Verfahren zur Frequenzregelung einer Oszillatoranordnung
US8082789B2 (en) * 2008-10-02 2011-12-27 Freescale Semiconductor, Inc. Matched multiplier circuit having reduced phase shift for use in MEMS sensing applications
DE102009026508A1 (de) * 2009-05-27 2010-12-02 Robert Bosch Gmbh Sensor und Verfahren zum Betreiben eines Sensors
US9459274B2 (en) * 2013-03-13 2016-10-04 Invensense, Inc. Round-robin sensing device and method of use
GB201313389D0 (en) 2013-07-26 2013-09-11 Atlantic Inertial Systems Ltd Signal processing
US9885577B2 (en) * 2015-07-30 2018-02-06 Invensense, Inc. Reducing resonance peaks and drive tones from a micro-electro-mechanical system gyroscope response
JP6571064B2 (ja) * 2016-11-21 2019-09-04 株式会社東芝 検出装置およびセンサ装置
EP3786581B1 (de) * 2019-08-29 2023-06-07 Murata Manufacturing Co., Ltd. Versatzunterdrückendes kapazitives mems-gyroskop

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445376A (en) * 1982-03-12 1984-05-01 Technion Research And Development Foundation Ltd. Apparatus and method for measuring specific force and angular rate
US4510802A (en) * 1983-09-02 1985-04-16 Sundstrand Data Control, Inc. Angular rate sensor utilizing two vibrating accelerometers secured to a parallelogram linkage
US4522062A (en) * 1983-09-02 1985-06-11 Sundstrand Data Control, Inc. Digital processor for use with an accelerometer based angular rate sensor
US4590801A (en) * 1983-09-02 1986-05-27 Sundstrand Data Control, Inc. Apparatus for measuring inertial specific force and angular rate of a moving body
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
US4841773A (en) * 1987-05-01 1989-06-27 Litton Systems, Inc. Miniature inertial measurement unit
US4821572A (en) * 1987-11-25 1989-04-18 Sundstrand Data Control, Inc. Multi axis angular rate sensor having a single dither axis
US5007289A (en) * 1988-09-30 1991-04-16 Litton Systems, Inc. Three axis inertial measurement unit with counterbalanced, low inertia mechanical oscillator
US4996877A (en) * 1989-02-24 1991-03-05 Litton Systems, Inc. Three axis inertial measurement unit with counterbalanced mechanical oscillator
US5065627A (en) * 1990-03-20 1991-11-19 Litton Systems, Inc. Three axis inertial measurement unit with counterbalanced, low inertia mechanical oscillator
US5142921A (en) * 1990-10-29 1992-09-01 Litton Systems, Inc. Force balance instrument with electrostatic charge control
US5168756A (en) * 1991-02-08 1992-12-08 Sundstrand Corporation Dithering coriolis rate and acceleration sensor utilizing a permanent magnet
GB2266149B (en) * 1992-04-10 1995-08-16 British Aerospace Single axis rate sensor noise reduction
US5400269A (en) * 1993-09-20 1995-03-21 Rockwell International Corporation Closed-loop baseband controller for a rebalance loop of a quartz angular rate sensor
US5987986A (en) * 1994-07-29 1999-11-23 Litton Systems, Inc. Navigation grade micromachined rotation sensor system
US5616864A (en) * 1995-02-22 1997-04-01 Delco Electronics Corp. Method and apparatus for compensation of micromachined sensors

Also Published As

Publication number Publication date
EP0892246A2 (de) 1999-01-20
EP0892246B1 (de) 2004-09-22
EP0892246A3 (de) 2000-06-28
US6324909B1 (en) 2001-12-04
DE69826373T2 (de) 2005-09-29
JP3816674B2 (ja) 2006-08-30
US5983718A (en) 1999-11-16
CA2241463A1 (en) 1999-01-14
JPH11132771A (ja) 1999-05-21
KR19990013847A (ko) 1999-02-25
CA2241463C (en) 2001-10-02

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