DE69826406D1 - Rastersondenmikroskop mit Feinstellungsvorrichtung - Google Patents

Rastersondenmikroskop mit Feinstellungsvorrichtung

Info

Publication number
DE69826406D1
DE69826406D1 DE69826406T DE69826406T DE69826406D1 DE 69826406 D1 DE69826406 D1 DE 69826406D1 DE 69826406 T DE69826406 T DE 69826406T DE 69826406 T DE69826406 T DE 69826406T DE 69826406 D1 DE69826406 D1 DE 69826406D1
Authority
DE
Germany
Prior art keywords
adjustment device
fine adjustment
scanning probe
probe microscope
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69826406T
Other languages
English (en)
Other versions
DE69826406T2 (de
Inventor
Takashi Shirai
Ken Murayama
Takafumi Morimoto
Hiroshi Kuroda
Harumasa Onozato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Application granted granted Critical
Publication of DE69826406D1 publication Critical patent/DE69826406D1/de
Publication of DE69826406T2 publication Critical patent/DE69826406T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/87—Optical lever arm for reflecting light
DE69826406T 1997-10-31 1998-10-30 Rastersondenmikroskop mit Feinstellungsvorrichtung Expired - Fee Related DE69826406T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP31603597A JP3563247B2 (ja) 1997-10-31 1997-10-31 走査型プローブ顕微鏡
JP31603597 1997-10-31

Publications (2)

Publication Number Publication Date
DE69826406D1 true DE69826406D1 (de) 2004-10-28
DE69826406T2 DE69826406T2 (de) 2005-09-29

Family

ID=18072542

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69826406T Expired - Fee Related DE69826406T2 (de) 1997-10-31 1998-10-30 Rastersondenmikroskop mit Feinstellungsvorrichtung

Country Status (4)

Country Link
US (1) US6229607B1 (de)
EP (1) EP0913665B1 (de)
JP (1) JP3563247B2 (de)
DE (1) DE69826406T2 (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5631734A (en) 1994-02-10 1997-05-20 Affymetrix, Inc. Method and apparatus for detection of fluorescently labeled materials
US5751683A (en) * 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US6339217B1 (en) * 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
US6337479B1 (en) 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
US6802646B1 (en) * 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
US6923044B1 (en) * 2001-03-08 2005-08-02 General Nanotechnology Llc Active cantilever for nanomachining and metrology
EP1196939A4 (de) * 1999-07-01 2002-09-18 Gen Nanotechnology Llc Vorrichtung und verfahren zur untersuchung und/oder veränderungsobjekt
US7062092B2 (en) 2000-08-22 2006-06-13 Affymetrix, Inc. System, method, and computer software product for gain adjustment in biological microarray scanner
US6650411B2 (en) 2001-04-26 2003-11-18 Affymetrix, Inc. System, method, and product for pixel clocking in scanning of biological materials
US6643015B2 (en) 2001-04-26 2003-11-04 Affymetrix, Inc. System, method, and product for symmetrical filtering in scanning of biological materials
US6490533B2 (en) 2001-04-26 2002-12-03 Affymetrix, Inc. System, method, and product for dynamic noise reduction in scanning of biological materials
US7053369B1 (en) * 2001-10-19 2006-05-30 Rave Llc Scan data collection for better overall data accuracy
US6718821B1 (en) 2001-11-07 2004-04-13 Sandia Corporation Laser interferometry force-feedback sensor for an interfacial force microscope
US6813937B2 (en) * 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
KR100441894B1 (ko) * 2002-01-26 2004-07-27 한국전자통신연구원 마이크로 집적형 근접장 광기록 헤드 및 이를 이용한광기록 장치
US6998689B2 (en) * 2002-09-09 2006-02-14 General Nanotechnology Llc Fluid delivery for scanning probe microscopy
CA2422224A1 (en) 2002-03-15 2003-09-15 Affymetrix, Inc. System, method, and product for scanning of biological materials
US7687767B2 (en) * 2002-12-20 2010-03-30 Agilent Technologies, Inc. Fast scanning stage for a scanning probe microscope
KR100497729B1 (ko) * 2003-02-21 2005-06-28 한국과학기술원 유연기구 메커니즘을 이용한 3축 직선운동 스테이지
US7317415B2 (en) 2003-08-08 2008-01-08 Affymetrix, Inc. System, method, and product for scanning of biological materials employing dual analog integrators
US7176450B2 (en) * 2004-01-02 2007-02-13 Itn Energy Systems, Inc. Long travel near-field scanning optical microscope
US7180662B2 (en) * 2004-04-12 2007-02-20 Applied Scientific Instrumentation Inc. Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage
JP2006118867A (ja) * 2004-10-19 2006-05-11 Hitachi Kenki Fine Tech Co Ltd 走査型プローブ顕微鏡及びそれを用いた計測方法
KR100687717B1 (ko) * 2004-12-16 2007-02-27 한국전자통신연구원 압전소자를 채용한 마이크로 스테이지
DE112006000419T5 (de) * 2005-02-24 2008-01-17 Sii Nano Technology Inc. Abtastsondenmikroskop-Versatzerfassungsmechanismus und Abtastsondenmikroskop, welches dergleichen verwendet
WO2006090594A1 (ja) * 2005-02-24 2006-08-31 Sii Nanotechnology Inc. 走査型プローブ顕微鏡用微動機構およびこれを用いた走査型プローブ顕微鏡
US7333724B2 (en) * 2005-08-18 2008-02-19 Jack Chen Camera and piezo ceramic motor therefor
JP4448099B2 (ja) * 2006-02-01 2010-04-07 キヤノン株式会社 走査型プローブ装置
US8009889B2 (en) 2006-06-27 2011-08-30 Affymetrix, Inc. Feature intensity reconstruction of biological probe array
US8001831B2 (en) * 2007-05-31 2011-08-23 Sii Nano Technology Inc. Positioning apparatus and scanning probe microscope employing the same
US7397754B1 (en) * 2008-01-22 2008-07-08 International Business Machines Corporation Micro-electromechanical system based data storage system
US9767342B2 (en) 2009-05-22 2017-09-19 Affymetrix, Inc. Methods and devices for reading microarrays
JP2016017862A (ja) * 2014-07-09 2016-02-01 株式会社日立ハイテクサイエンス ３次元微動装置
WO2017079374A1 (en) * 2015-11-03 2017-05-11 Board Of Regents, The University Of Texas System Metrology devices for rapid specimen setup
CN109900192A (zh) * 2019-03-13 2019-06-18 昆山市建设工程质量检测中心 一种装配式混凝土预制构件结合面粗糙度检测装置和方法
CN112611453B (zh) * 2020-12-23 2022-03-29 吉林大学 复眼原位监测单元、微观调节单元及其多光谱成像系统
CN113400094B (zh) * 2021-06-07 2022-08-26 乔锋智能装备股份有限公司 一种用cnc加工中心机床加工件的综合检测件

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4520570A (en) 1983-12-30 1985-06-04 International Business Machines Corporation Piezoelectric x-y-positioner
US4667415A (en) 1985-11-29 1987-05-26 Gca Corporation Microlithographic reticle positioning system
JP2577423B2 (ja) 1988-02-29 1997-01-29 工業技術院長 大ストローク走査型トンネル顕微鏡
US5245863A (en) 1990-07-11 1993-09-21 Olympus Optical Co., Ltd. Atomic probe microscope
CA2060674C (en) 1991-02-08 1996-10-01 Masahiro Tagawa Driving apparatus and a recording and/or reproducing apparatus using the same
US5408094A (en) 1992-05-07 1995-04-18 Olympus Optical Co., Ltd. Atomic force microscope with light beam emission at predetermined angle
JP3000500B2 (ja) 1992-09-02 2000-01-17 セイコーインスツルメンツ株式会社 原子間力顕微鏡
US5360974A (en) 1992-10-20 1994-11-01 International Business Machines Corp. Dual quad flexure scanner
US5679952A (en) * 1994-05-23 1997-10-21 Hitachi, Ltd. Scanning probe microscope
JPH08278317A (ja) 1995-04-10 1996-10-22 Nikon Corp 原子間力顕微鏡
US5656769A (en) * 1994-08-11 1997-08-12 Nikon Corporation Scanning probe microscope

Also Published As

Publication number Publication date
DE69826406T2 (de) 2005-09-29
JPH11133040A (ja) 1999-05-21
EP0913665B1 (de) 2004-09-22
EP0913665A1 (de) 1999-05-06
JP3563247B2 (ja) 2004-09-08
US6229607B1 (en) 2001-05-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee