DE69827767D1 - Gewichtssensor und verfahren zur bestimmung der masse - Google Patents
Gewichtssensor und verfahren zur bestimmung der masseInfo
- Publication number
- DE69827767D1 DE69827767D1 DE69827767T DE69827767T DE69827767D1 DE 69827767 D1 DE69827767 D1 DE 69827767D1 DE 69827767 T DE69827767 T DE 69827767T DE 69827767 T DE69827767 T DE 69827767T DE 69827767 D1 DE69827767 D1 DE 69827767D1
- Authority
- DE
- Germany
- Prior art keywords
- mass
- determining
- weight sensor
- sensor
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0648—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of rectangular shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
- B06B1/0692—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF with a continuous electrode on one side and a plurality of electrodes on the other side
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N2035/00178—Special arrangements of analysers
- G01N2035/00207—Handling bulk quantities of analyte
- G01N2035/00217—Handling bulk quantities of analyte involving measurement of weight
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N2035/00178—Special arrangements of analysers
- G01N2035/00237—Handling microquantities of analyte, e.g. microvalves, capillary networks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02827—Elastic parameters, strength or force
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24307397 | 1997-09-08 | ||
JP24307397 | 1997-09-08 | ||
JP36136897 | 1997-12-26 | ||
JP36136897 | 1997-12-26 | ||
PCT/JP1998/003969 WO1999013300A1 (en) | 1997-09-08 | 1998-09-04 | Mass sensor and mass detection method |
PCT/JP1998/003971 WO1999013518A1 (en) | 1997-09-08 | 1998-09-04 | Piezoelectric/electrostriction device |
US09/242,642 US6239534B1 (en) | 1997-09-08 | 1998-12-28 | Piezoelectric/electrostrictive device |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69827767D1 true DE69827767D1 (de) | 2004-12-30 |
DE69827767T2 DE69827767T2 (de) | 2006-03-02 |
Family
ID=85685825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69827767T Expired - Fee Related DE69827767T2 (de) | 1997-09-08 | 1998-09-04 | Gewichtssensor und verfahren zur bestimmung der masse |
Country Status (6)
Country | Link |
---|---|
US (8) | US6386053B1 (de) |
EP (3) | EP0938143A4 (de) |
JP (4) | JP3844784B2 (de) |
CN (2) | CN1119628C (de) |
DE (1) | DE69827767T2 (de) |
WO (2) | WO1999013518A1 (de) |
Families Citing this family (97)
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KR20030016244A (ko) * | 2000-04-05 | 2003-02-26 | 더 차레스 스타크 드레이퍼 래보레이토리, 인코포레이티드 | 물질의 질량을 측정하는 방법 및 장치 |
US6760195B2 (en) * | 2000-04-17 | 2004-07-06 | Seagate Technology Llc | Intrinsically excitable actuator assembly |
JP4868270B2 (ja) * | 2000-05-26 | 2012-02-01 | 日立金属株式会社 | 圧電アクチュエータ素子 |
US6787975B2 (en) * | 2000-05-31 | 2004-09-07 | Denso Corporation | Piezoelectric device for injector |
DE10029444B4 (de) * | 2000-06-21 | 2004-07-22 | Leica Microsystems Heidelberg Gmbh | Optische Anordnung |
US6851120B2 (en) * | 2000-07-13 | 2005-02-01 | Seagate Technology Llc | Micro-actuator structure for improved stability |
WO2002010217A2 (en) * | 2000-08-02 | 2002-02-07 | The Johns Hopkins University | Endothelial cell expression patterns |
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1998
- 1998-09-04 EP EP98941716A patent/EP0938143A4/de not_active Withdrawn
- 1998-09-04 CN CN98801739.3A patent/CN1119628C/zh not_active Expired - Fee Related
- 1998-09-04 JP JP51533499A patent/JP3844784B2/ja not_active Expired - Fee Related
- 1998-09-04 US US09/297,655 patent/US6386053B1/en not_active Expired - Fee Related
- 1998-09-04 WO PCT/JP1998/003971 patent/WO1999013518A1/ja not_active Application Discontinuation
- 1998-09-04 DE DE69827767T patent/DE69827767T2/de not_active Expired - Fee Related
- 1998-09-04 CN CN98801731.8A patent/CN1243604A/zh active Pending
- 1998-09-04 JP JP51533399A patent/JP3298897B2/ja not_active Expired - Fee Related
- 1998-09-04 US US09/214,110 patent/US6465934B1/en not_active Expired - Fee Related
- 1998-09-04 EP EP98941714A patent/EP0943903B1/de not_active Expired - Lifetime
- 1998-09-04 WO PCT/JP1998/003969 patent/WO1999013300A1/ja active IP Right Grant
- 1998-12-28 US US09/242,642 patent/US6239534B1/en not_active Expired - Fee Related
-
1999
- 1999-03-05 JP JP11059501A patent/JP2000162518A/ja active Pending
- 1999-08-31 JP JP24557199A patent/JP3778736B2/ja not_active Expired - Fee Related
- 1999-09-03 EP EP99307027A patent/EP0996175A3/de not_active Withdrawn
-
2002
- 2002-02-08 US US10/071,019 patent/US6612190B2/en not_active Expired - Fee Related
- 2002-08-30 US US10/231,737 patent/US6724127B2/en not_active Expired - Fee Related
-
2003
- 2003-06-19 US US10/465,470 patent/US6840123B2/en not_active Expired - Fee Related
-
2004
- 2004-08-25 US US10/925,514 patent/US6895829B2/en not_active Expired - Fee Related
-
2005
- 2005-02-18 US US11/060,988 patent/US7089813B2/en not_active Expired - Fee Related
Also Published As
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WO1999013518A1 (en) | 1999-03-18 |
EP0943903B1 (de) | 2004-11-24 |
US6840123B2 (en) | 2005-01-11 |
US6239534B1 (en) | 2001-05-29 |
CN1243604A (zh) | 2000-02-02 |
JP3844784B2 (ja) | 2006-11-15 |
WO1999013300A1 (en) | 1999-03-18 |
US20020088284A1 (en) | 2002-07-11 |
US6895829B2 (en) | 2005-05-24 |
JP2000102268A (ja) | 2000-04-07 |
JP2000162518A (ja) | 2000-06-16 |
US20030209094A1 (en) | 2003-11-13 |
EP0943903A1 (de) | 1999-09-22 |
US20030011283A1 (en) | 2003-01-16 |
US7089813B2 (en) | 2006-08-15 |
CN1243573A (zh) | 2000-02-02 |
US6612190B2 (en) | 2003-09-02 |
CN1119628C (zh) | 2003-08-27 |
EP0938143A1 (de) | 1999-08-25 |
EP0938143A4 (de) | 2000-03-15 |
EP0996175A3 (de) | 2002-09-25 |
US20050016277A1 (en) | 2005-01-27 |
EP0996175A2 (de) | 2000-04-26 |
US6465934B1 (en) | 2002-10-15 |
US6386053B1 (en) | 2002-05-14 |
JP3778736B2 (ja) | 2006-05-24 |
US20050145032A1 (en) | 2005-07-07 |
JP3298897B2 (ja) | 2002-07-08 |
DE69827767T2 (de) | 2006-03-02 |
US6724127B2 (en) | 2004-04-20 |
EP0943903A4 (de) | 2000-03-15 |
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