DE69835020D1 - Plasmabrenner und verwendungsverfahren dieses plasmabrenners - Google Patents

Plasmabrenner und verwendungsverfahren dieses plasmabrenners

Info

Publication number
DE69835020D1
DE69835020D1 DE69835020T DE69835020T DE69835020D1 DE 69835020 D1 DE69835020 D1 DE 69835020D1 DE 69835020 T DE69835020 T DE 69835020T DE 69835020 T DE69835020 T DE 69835020T DE 69835020 D1 DE69835020 D1 DE 69835020D1
Authority
DE
Germany
Prior art keywords
plasmabenger
plasmabrenner
use method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69835020T
Other languages
English (en)
Other versions
DE69835020T2 (de
Inventor
L Birx
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Science Research Laboratory Inc
Original Assignee
Science Research Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Science Research Laboratory Inc filed Critical Science Research Laboratory Inc
Application granted granted Critical
Publication of DE69835020D1 publication Critical patent/DE69835020D1/de
Publication of DE69835020T2 publication Critical patent/DE69835020T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H—PRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H1/00—Using plasma to produce a reactive propulsive thrust
    • F03H1/0087—Electro-dynamic thrusters, e.g. pulsed plasma thrusters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/54—Plasma accelerators
DE69835020T 1997-04-28 1998-04-28 Plasmabrenner und verwendungsverfahren dieses plasmabrenners Expired - Lifetime DE69835020T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US847434 1986-04-02
US08/847,434 US5866871A (en) 1997-04-28 1997-04-28 Plasma gun and methods for the use thereof
PCT/US1998/008507 WO1998048973A1 (en) 1997-04-28 1998-04-28 Plasma gun and methods for the use thereof

Publications (2)

Publication Number Publication Date
DE69835020D1 true DE69835020D1 (de) 2006-08-03
DE69835020T2 DE69835020T2 (de) 2007-01-18

Family

ID=25300621

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69835020T Expired - Lifetime DE69835020T2 (de) 1997-04-28 1998-04-28 Plasmabrenner und verwendungsverfahren dieses plasmabrenners

Country Status (4)

Country Link
US (2) US5866871A (de)
EP (1) EP1015161B1 (de)
DE (1) DE69835020T2 (de)
WO (1) WO1998048973A1 (de)

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US6300720B1 (en) * 1997-04-28 2001-10-09 Daniel Birx Plasma gun and methods for the use thereof
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US7402825B2 (en) * 2005-06-28 2008-07-22 Cymer, Inc. LPP EUV drive laser input system
US7394083B2 (en) 2005-07-08 2008-07-01 Cymer, Inc. Systems and methods for EUV light source metrology
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US9269544B2 (en) 2013-02-11 2016-02-23 Colorado State University Research Foundation System and method for treatment of biofilms
US9532826B2 (en) 2013-03-06 2017-01-03 Covidien Lp System and method for sinus surgery
US9555145B2 (en) 2013-03-13 2017-01-31 Covidien Lp System and method for biofilm remediation
US10237962B2 (en) 2014-02-26 2019-03-19 Covidien Lp Variable frequency excitation plasma device for thermal and non-thermal tissue effects
RU2568854C1 (ru) * 2014-09-15 2015-11-20 Виктор Георгиевич Карелин Способ формирования тяги двигателя с центральным телом и двигатель для его реализации
US10121655B2 (en) * 2015-11-20 2018-11-06 Applied Materials, Inc. Lateral plasma/radical source
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US10195683B2 (en) * 2016-11-14 2019-02-05 Matthew Fagan Metal analyzing plasma CNC cutting machine and associated methods
US10300551B2 (en) 2016-11-14 2019-05-28 Matthew Fagan Metal analyzing plasma CNC cutting machine and associated methods
TWI733021B (zh) * 2017-05-15 2021-07-11 美商應用材料股份有限公司 電漿源組件、處理腔室與處理基板的方法
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Also Published As

Publication number Publication date
DE69835020T2 (de) 2007-01-18
EP1015161A1 (de) 2000-07-05
US5866871A (en) 1999-02-02
EP1015161A4 (de) 2003-07-16
WO1998048973A1 (en) 1998-11-05
US6084198A (en) 2000-07-04
EP1015161B1 (de) 2006-06-21

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