DE69837718D1 - Integrierter pufferraum, abgabe- und lagersystem - Google Patents

Integrierter pufferraum, abgabe- und lagersystem

Info

Publication number
DE69837718D1
DE69837718D1 DE69837718T DE69837718T DE69837718D1 DE 69837718 D1 DE69837718 D1 DE 69837718D1 DE 69837718 T DE69837718 T DE 69837718T DE 69837718 T DE69837718 T DE 69837718T DE 69837718 D1 DE69837718 D1 DE 69837718D1
Authority
DE
Germany
Prior art keywords
tool
tools
bay
process tools
pod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69837718T
Other languages
English (en)
Other versions
DE69837718T2 (de
Inventor
William J Fosnight
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASYST TECHNOLOGIES
Asyst Technologies Inc
Original Assignee
ASYST TECHNOLOGIES
Asyst Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASYST TECHNOLOGIES, Asyst Technologies Inc filed Critical ASYST TECHNOLOGIES
Application granted granted Critical
Publication of DE69837718D1 publication Critical patent/DE69837718D1/de
Publication of DE69837718T2 publication Critical patent/DE69837718T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/14—Stack holders or separators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting
DE69837718T 1997-04-14 1998-03-26 Integrierter pufferraum, abgabe- und lagersystem Expired - Fee Related DE69837718T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US843245 1997-04-14
US08/843,245 US5980183A (en) 1997-04-14 1997-04-14 Integrated intrabay buffer, delivery, and stocker system
PCT/US1998/005961 WO1998046503A1 (en) 1997-04-14 1998-03-26 Integrated intrabay buffer, delivery, and stocker system

Publications (2)

Publication Number Publication Date
DE69837718D1 true DE69837718D1 (de) 2007-06-14
DE69837718T2 DE69837718T2 (de) 2007-09-06

Family

ID=25289443

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69837718T Expired - Fee Related DE69837718T2 (de) 1997-04-14 1998-03-26 Integrierter pufferraum, abgabe- und lagersystem

Country Status (7)

Country Link
US (1) US5980183A (de)
EP (1) EP1028905B1 (de)
JP (1) JP4068160B2 (de)
KR (1) KR100608391B1 (de)
AT (1) ATE361551T1 (de)
DE (1) DE69837718T2 (de)
WO (1) WO1998046503A1 (de)

Families Citing this family (139)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE275759T1 (de) 1995-03-28 2004-09-15 Brooks Automation Gmbh Be- und entladestation für halbleiterbearbeitungsanlagen
US6540466B2 (en) * 1996-12-11 2003-04-01 Applied Materials, Inc. Compact apparatus and method for storing and loading semiconductor wafer carriers
US6579052B1 (en) * 1997-07-11 2003-06-17 Asyst Technologies, Inc. SMIF pod storage, delivery and retrieval system
JPH1159829A (ja) * 1997-08-08 1999-03-02 Mitsubishi Electric Corp 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法
US6283692B1 (en) * 1998-12-01 2001-09-04 Applied Materials, Inc. Apparatus for storing and moving a cassette
US6435330B1 (en) * 1998-12-18 2002-08-20 Asyai Technologies, Inc. In/out load port transfer mechanism
IL128087A (en) * 1999-01-17 2002-04-21 Nova Measuring Instr Ltd Buffer station for a wafer handling system
WO2000051921A1 (en) * 1999-03-05 2000-09-08 Pri Automation, Inc. Material handling and transport system and process
EP1035563A1 (de) * 1999-03-09 2000-09-13 Motorola, Inc. Handhabungsvorrichtung und Verfahren zur Bewegung eines Behälters
US6304051B1 (en) * 1999-03-15 2001-10-16 Berkeley Process Control, Inc. Self teaching robotic carrier handling system
DE19913628A1 (de) * 1999-03-25 2000-10-05 Siemens Ag Anlage zur Fertigung von Halbleiterprodukten
DE19921246C2 (de) * 1999-05-07 2003-06-12 Infineon Technologies Ag Anlage zur Fertigung von Halbleiterprodukten
JP3730810B2 (ja) * 1999-07-09 2006-01-05 東京エレクトロン株式会社 容器の移動装置および方法
KR100321545B1 (ko) * 1999-07-15 2002-01-23 김광교 웨이퍼 카세트 이송장치
KR100322620B1 (ko) * 1999-08-16 2002-03-18 황인길 스탠더드 메커니컬 인터페이스 시스템의 카세트 캐리어 이송장치
DE60033056D1 (de) * 1999-12-02 2007-03-08 Asyst Technologies Wafer fördersystem
US6698991B1 (en) * 2000-03-02 2004-03-02 Applied Materials, Inc. Fabrication system with extensible equipment sets
JP3559213B2 (ja) 2000-03-03 2004-08-25 株式会社半導体先端テクノロジーズ ロードポート及びそれを用いた生産方式
US6506009B1 (en) * 2000-03-16 2003-01-14 Applied Materials, Inc. Apparatus for storing and moving a cassette
US6652212B2 (en) 2000-05-02 2003-11-25 Ckd Corporation Cylinder, load port using it, and production system
US6695120B1 (en) 2000-06-22 2004-02-24 Amkor Technology, Inc. Assembly for transporting material
US6889813B1 (en) 2000-06-22 2005-05-10 Amkor Technology, Inc. Material transport method
US6632068B2 (en) * 2000-09-27 2003-10-14 Asm International N.V. Wafer handling system
EP1202325A1 (de) * 2000-10-25 2002-05-02 Semiconductor300 GmbH & Co KG Vorrichtung zum Transport von einem Halbleiterwafer-Träger
US6887026B1 (en) 2000-12-22 2005-05-03 Infineon Technologie Sc300 Gmbh & Co. Kg Semiconductor product container and system for handling a semiconductor product container
EP1217646A1 (de) * 2000-12-22 2002-06-26 Semiconductor300 GmbH & Co KG Behälter für Halbleiterprodukte und Vorrichtung zur Behandlung eines solchen Behälter
US20020090282A1 (en) * 2001-01-05 2002-07-11 Applied Materials, Inc. Actuatable loadport system
US6516243B2 (en) 2001-01-16 2003-02-04 Taiwan Semiconductor Manufacturing Co., Ltd Stocker apparatus affording manual access
US6739820B2 (en) 2001-01-16 2004-05-25 Taiwan Semiconductor Manufacturing Co., Ltd Stocker apparatus with increased input/output capacity
US6677690B2 (en) * 2001-02-02 2004-01-13 Asyst Technologies, Inc. System for safeguarding integrated intrabay pod delivery and storage system
JP3829633B2 (ja) * 2001-02-22 2006-10-04 株式会社ダイフク 荷保管設備
US6629813B2 (en) 2001-04-18 2003-10-07 Taiwan Semiconductor Manufacturing Co., Ltd Microelectronic fabrication tool loading method providing enhanced microelectronic fabrication tool operating efficiency
US6879876B2 (en) 2001-06-13 2005-04-12 Advanced Technology Materials, Inc. Liquid handling system with electronic information storage
DE10157192A1 (de) * 2001-11-23 2003-06-12 Ortner C L S Gmbh Lagereinrichtung
US7134826B2 (en) * 2001-11-28 2006-11-14 Dainippon Screen Mfg. Co., Ltd. Substrate transfer apparatus, substrate processing apparatus and holding table
KR100577622B1 (ko) * 2001-12-04 2006-05-10 로제 가부시키가이샤 용기의 일시적 반입, 유치, 반출용 장치
AU2002359603A1 (en) * 2001-12-11 2003-06-23 Intrabay Automation, Inc. Monorail semiconductor wafer cassette transport system
US6726429B2 (en) 2002-02-19 2004-04-27 Vertical Solutions, Inc. Local store for a wafer processing station
JPWO2003105216A1 (ja) * 2002-06-07 2005-10-13 平田機工株式会社 容器搬送システム
TWI286989B (en) * 2002-06-19 2007-09-21 Brooks Automation Inc Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US7677859B2 (en) * 2002-07-22 2010-03-16 Brooks Automation, Inc. Substrate loading and uploading station with buffer
US6869263B2 (en) 2002-07-22 2005-03-22 Brooks Automation, Inc. Substrate loading and unloading station with buffer
DE10238165B3 (de) * 2002-08-15 2004-03-25 Hans-Heinz Helge Langgestrecktes Rolladenprofil aus Kunststoff oder Metall für Schwimmbadabdeckungen
US7506746B2 (en) 2002-08-31 2009-03-24 Applied Materials, Inc. System for transporting substrate carriers
US20040081546A1 (en) 2002-08-31 2004-04-29 Applied Materials, Inc. Method and apparatus for supplying substrates to a processing tool
US6955197B2 (en) * 2002-08-31 2005-10-18 Applied Materials, Inc. Substrate carrier having door latching and substrate clamping mechanisms
US7930061B2 (en) 2002-08-31 2011-04-19 Applied Materials, Inc. Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback
US7243003B2 (en) 2002-08-31 2007-07-10 Applied Materials, Inc. Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
US7684895B2 (en) 2002-08-31 2010-03-23 Applied Materials, Inc. Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
FR2844258B1 (fr) 2002-09-06 2005-06-03 Recif Sa Systeme de transport et stockage de conteneurs de plaques de semi-conducteur, et mecanisme de transfert
US7487099B2 (en) * 2002-09-10 2009-02-03 International Business Machines Corporation Method, system, and storage medium for resolving transport errors relating to automated material handling system transaction
EP2615625B2 (de) * 2002-10-11 2017-05-31 Murata Machinery, Ltd. Hängefahrzeug für ein automatisiertes Materialhandhabungssystem
US20070092359A1 (en) * 2002-10-11 2007-04-26 Brooks Automation, Inc. Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position
KR20040062137A (ko) * 2002-12-31 2004-07-07 엘지.필립스 엘시디 주식회사 기판 반송 시스템
US7221993B2 (en) 2003-01-27 2007-05-22 Applied Materials, Inc. Systems and methods for transferring small lot size substrate carriers between processing tools
US7611318B2 (en) 2003-01-27 2009-11-03 Applied Materials, Inc. Overhead transfer flange and support for suspending a substrate carrier
US7778721B2 (en) 2003-01-27 2010-08-17 Applied Materials, Inc. Small lot size lithography bays
US7077264B2 (en) * 2003-01-27 2006-07-18 Applied Material, Inc. Methods and apparatus for transporting substrate carriers
US7578647B2 (en) 2003-01-27 2009-08-25 Applied Materials, Inc. Load port configurations for small lot size substrate carriers
TWI246501B (en) * 2003-02-03 2006-01-01 Murata Machinery Ltd Overhead traveling carriage system
US6990721B2 (en) * 2003-03-21 2006-01-31 Brooks Automation, Inc. Growth model automated material handling system
US7168198B2 (en) * 2003-06-23 2007-01-30 Reginald Hill Newkirk Gun with user notification
US20050008467A1 (en) * 2003-07-11 2005-01-13 Rich Huang Load port transfer device
KR100999104B1 (ko) * 2003-10-01 2010-12-07 삼성전자주식회사 기판의 반송장치
US6931303B2 (en) * 2003-10-02 2005-08-16 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated transport system
JP3975360B2 (ja) * 2003-10-31 2007-09-12 セイコーエプソン株式会社 供給制御システムおよび方法、プログラム並びに情報記憶媒体
US7720557B2 (en) * 2003-11-06 2010-05-18 Applied Materials, Inc. Methods and apparatus for enhanced operation of substrate carrier handlers
US7218983B2 (en) * 2003-11-06 2007-05-15 Applied Materials, Inc. Method and apparatus for integrating large and small lot electronic device fabrication facilities
CN1640797A (zh) 2003-11-13 2005-07-20 应用材料有限公司 具有剪切构件的动态销和使用该动态销的衬底载体
TWI348450B (en) 2003-11-13 2011-09-11 Applied Materials Inc Break-away positioning conveyor mount for accommodating conveyor belt bends
US7230702B2 (en) * 2003-11-13 2007-06-12 Applied Materials, Inc. Monitoring of smart pin transition timing
CN1669892B (zh) * 2003-11-13 2011-11-16 应用材料股份有限公司 高速载入器相对于基片传送系统的校准
US6996448B2 (en) * 2003-12-02 2006-02-07 Taiwan Semiconductor Manufacturing Co., Ltd. Transport system with multiple-load-port stockers
US7101138B2 (en) * 2003-12-03 2006-09-05 Brooks Automation, Inc. Extractor/buffer
US7328836B2 (en) * 2004-02-03 2008-02-12 Taiwan Semiconductor Manufacturing Co., Ltd. Smart tag holder and cover housing
US7274971B2 (en) * 2004-02-28 2007-09-25 Applied Materials, Inc. Methods and apparatus for electronic device manufacturing system monitoring and control
TWI316044B (en) 2004-02-28 2009-10-21 Applied Materials Inc Methods and apparatus for material control system interface
US7413069B2 (en) * 2004-02-28 2008-08-19 Applied Materials, Inc. Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
US7611319B2 (en) * 2004-06-16 2009-11-03 Applied Materials, Inc. Methods and apparatus for identifying small lot size substrate carriers
US7409263B2 (en) * 2004-07-14 2008-08-05 Applied Materials, Inc. Methods and apparatus for repositioning support for a substrate carrier
JP2006051886A (ja) * 2004-08-12 2006-02-23 Murata Mach Ltd 天井走行車システム
JP4337683B2 (ja) * 2004-08-16 2009-09-30 村田機械株式会社 搬送システム
JP2008511178A (ja) * 2004-08-23 2008-04-10 ブルックス オートメーション インコーポレイテッド エレベータベースのツールローディング及びバッファリングシステム
JP2008510673A (ja) * 2004-08-24 2008-04-10 ブルックス オートメーション インコーポレイテッド 搬送システム
US7720558B2 (en) * 2004-09-04 2010-05-18 Applied Materials, Inc. Methods and apparatus for mapping carrier contents
JP4688533B2 (ja) * 2005-03-18 2011-05-25 大日本スクリーン製造株式会社 基板処理装置
CN100413047C (zh) * 2005-01-28 2008-08-20 大日本网目版制造株式会社 基板处理装置
JP2006237559A (ja) * 2005-01-28 2006-09-07 Dainippon Screen Mfg Co Ltd 基板処理装置
JP4695911B2 (ja) * 2005-03-31 2011-06-08 株式会社Ｓｅｎ 絶縁配管部材、ガス供給装置およびイオンビーム装置
JP4221603B2 (ja) * 2005-03-31 2009-02-12 村田機械株式会社 天井走行車システム
CN101223635B (zh) * 2005-05-16 2010-05-19 村田自动化机械有限公司 用于高物流量自动化物料搬运系统的模块终端
US7966089B1 (en) * 2005-07-05 2011-06-21 Advanced Micro Devices, Inc. Method and apparatus for automated fab control
WO2007008736A1 (en) * 2005-07-08 2007-01-18 Asyst Technologies, Inc. Stocker
DE102005039453B4 (de) * 2005-08-18 2007-06-28 Asys Automatic Systems Gmbh & Co. Kg Bearbeitungsanlage modularen Aufbaus für flächige Substrate
DE102005040741B4 (de) * 2005-08-26 2007-06-14 Asys Automatic Systems Gmbh & Co. Kg Bearbeitungsanlage modularen Aufbaus für flächige Substrate
US7771150B2 (en) * 2005-08-26 2010-08-10 Jusung Engineering Co., Ltd. Gate valve and substrate-treating apparatus including the same
US7577487B2 (en) * 2005-09-14 2009-08-18 Applied Materials, Inc. Methods and apparatus for a band to band transfer module
US7661919B2 (en) * 2005-09-28 2010-02-16 Muratec Automation Co., Ltd. Discontinuous conveyor system
JP2007096140A (ja) * 2005-09-30 2007-04-12 Asyst Shinko Inc 懸垂式昇降搬送台車における物品の授受方法並びに装置
WO2007051070A2 (en) * 2005-10-27 2007-05-03 Asyst Technologies, Inc. Horizontal array stocker
US20080107507A1 (en) * 2005-11-07 2008-05-08 Bufano Michael L Reduced capacity carrier, transport, load port, buffer system
US8267634B2 (en) * 2005-11-07 2012-09-18 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
WO2007056443A2 (en) * 2005-11-07 2007-05-18 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
US20070201967A1 (en) * 2005-11-07 2007-08-30 Bufano Michael L Reduced capacity carrier, transport, load port, buffer system
WO2007061604A2 (en) * 2005-11-21 2007-05-31 Applied Materials, Inc. Apparatus and methods for a substrate carrier having an inflatable seal
US20070141280A1 (en) * 2005-12-16 2007-06-21 Applied Materials, Inc. Substrate carrier having an interior lining
US20070140822A1 (en) * 2005-12-16 2007-06-21 Applied Materials, Inc. Methods and apparatus for opening and closing substrate carriers
US7536233B1 (en) * 2006-01-30 2009-05-19 Advanced Micro Devices, Inc. Method and apparatus for adjusting processing speeds based on work-in-process levels
WO2007133701A2 (en) * 2006-05-11 2007-11-22 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
KR101634914B1 (ko) * 2006-07-10 2016-07-08 엔테그리스, 아이엔씨. 정보 저장 엘리먼트를 갖는 물질 저장 용기를 관리하기 위한 시스템 및 방법
KR20140069354A (ko) 2006-08-18 2014-06-09 브룩스 오토메이션 인코퍼레이티드 용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템
US20080118334A1 (en) * 2006-11-22 2008-05-22 Bonora Anthony C Variable pitch storage shelves
US8160736B2 (en) * 2007-01-31 2012-04-17 Globalfoundries Singapore Pte. Ltd. Methods and apparatus for white space reduction in a production facility
US8337133B2 (en) * 2007-06-25 2012-12-25 International Business Machines Corporation Segregating wafer carrier types in semiconductor storage devices
JP5369419B2 (ja) * 2007-10-18 2013-12-18 村田機械株式会社 保管庫、保管庫セット及び保管庫付き搬送システム
WO2009055395A1 (en) 2007-10-22 2009-04-30 Applied Materials, Inc. Methods and apparatus for transporting substrate carriers
JP4992668B2 (ja) * 2007-10-31 2012-08-08 旭硝子株式会社 容器交換装置および容器交換方法
US8070410B2 (en) * 2008-02-05 2011-12-06 Lutz Rebstock Scalable stocker with automatic handling buffer
US9633881B2 (en) 2008-02-05 2017-04-25 Brooks Automation, Inc. Automatic handling buffer for bare stocker
US8356968B2 (en) * 2008-02-12 2013-01-22 Applied Materials, Inc. Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transfer
JP5256810B2 (ja) * 2008-03-24 2013-08-07 村田機械株式会社 保管庫装置及び保管庫付き搬送システム
EP2433299B1 (de) * 2009-05-18 2022-10-26 Brooks Automation US, LLC Substratbehälterlagerungssystem
US8882433B2 (en) * 2009-05-18 2014-11-11 Brooks Automation, Inc. Integrated systems for interfacing with substrate container storage systems
TWI496732B (zh) * 2009-07-31 2015-08-21 Murata Machinery Ltd 供工具利用之緩衝儲存和運輸裝置
US8275480B2 (en) * 2009-11-17 2012-09-25 Toyota Motor Engineering & Manufacturing North America, Inc. Methods and systems for transporting parts from a primary process to a secondary process in a first in, first out fashion
JP5633738B2 (ja) * 2010-09-27 2014-12-03 株式会社ダイフク 物品搬送設備
US8888434B2 (en) 2011-09-05 2014-11-18 Dynamic Micro System Container storage add-on for bare workpiece stocker
US9385019B2 (en) 2012-06-21 2016-07-05 Globalfoundries Inc. Overhead substrate handling and storage system
US9748088B2 (en) 2013-12-09 2017-08-29 Globalfoundries Inc. Method, storage medium and system for controlling the processing of lots of workpieces
JP6206747B2 (ja) * 2014-06-19 2017-10-04 村田機械株式会社 キャリアの一時保管装置と保管方法
US10520932B2 (en) 2014-07-03 2019-12-31 Taiwan Semiconductor Manufacturing Co., Ltd Transport system and method
US9632499B2 (en) 2014-11-03 2017-04-25 GlobalFoundries, Inc. Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits
US20160236865A1 (en) * 2015-02-16 2016-08-18 David Altemir Automated Warehouse Storage and Retrieval System
JP6531642B2 (ja) * 2015-12-24 2019-06-19 株式会社ダイフク 物品搬送設備
US10988359B2 (en) * 2016-10-18 2021-04-27 Murata Machinery, Ltd. Overhead transport vehicle and transport system
US10651066B2 (en) * 2017-11-24 2020-05-12 Taiwan Semiconductor Manufacturing Co., Ltd. Metrology method in wafer transportation
DE102018132814B3 (de) * 2018-12-19 2020-03-26 SSI Schäfer Automation GmbH (DE) Lager- und Kommissioniersystem und Verfahren zum Konfigurieren eines Fahrzeugs
US11658053B2 (en) 2019-10-21 2023-05-23 Globalfoundries U.S. Inc. Conversion plate for reticle pod storage and a reticle pod storage system
US11569108B2 (en) 2020-06-15 2023-01-31 Globalfoundries U.S. Inc. Reticle pod conversion plate for interfacing with a tool

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU685569A1 (ru) * 1974-03-06 1979-09-15 Ленинградский Государственный Проектный Институт Министерства Промышленнсти Средств Связи Устройство дл загрузки и разгрузки стеллажей склада штучными грузами
US4534389A (en) 1984-03-29 1985-08-13 Hewlett-Packard Company Interlocking door latch for dockable interface for integrated circuit processing
US4532970A (en) 1983-09-28 1985-08-06 Hewlett-Packard Company Particle-free dockable interface for integrated circuit processing
SE451831B (sv) * 1985-09-16 1987-11-02 Knight Konsult Ing Materialhanteringssystem
US4964776A (en) * 1987-12-01 1990-10-23 Tsubakimoto Chain Co. Article transfer and storage system
JPH0630371B2 (ja) * 1988-05-02 1994-04-20 日立機電工業株式会社 クリーンルーム内のウエハキャリアの搬送方法
IT1235835B (it) * 1989-08-08 1992-11-03 Sgs Thomson Microelectronics Movimentazione automatica di contenitori diversi con punti di prelievo e di codificazione standarizzati
JPH0439953A (ja) * 1990-06-05 1992-02-10 Seiko Epson Corp 半導体搬送システム
JPH04158508A (ja) * 1990-10-22 1992-06-01 Mitsubishi Electric Corp 半導体ウェハ搬送システム
US5387265A (en) * 1991-10-29 1995-02-07 Kokusai Electric Co., Ltd. Semiconductor wafer reaction furnace with wafer transfer means
EP0552756A1 (de) * 1992-01-21 1993-07-28 Shinko Electric Co. Ltd. Artikel-Lager in Reinraum
JP3082389B2 (ja) * 1992-01-27 2000-08-28 神鋼電機株式会社 クリーンルーム用保管庫
JPH05294410A (ja) * 1992-04-21 1993-11-09 Daifuku Co Ltd 荷保管設備
JPH05299489A (ja) * 1992-04-23 1993-11-12 Fuji Electric Co Ltd ウェーハ搬送用ロボット
JPH0616206A (ja) * 1992-07-03 1994-01-25 Shinko Electric Co Ltd クリーンルーム内搬送システム
EP0582017B1 (de) * 1992-08-04 1995-10-18 International Business Machines Corporation Verteilungseinrichtung mit Gaszufuhr-Abgabevorrichtung zum Handhaben und Speichern von abdichtbaren tragbaren unter Druck stehenden Behältern
JP3258748B2 (ja) * 1993-02-08 2002-02-18 東京エレクトロン株式会社 熱処理装置
US5527390A (en) * 1993-03-19 1996-06-18 Tokyo Electron Kabushiki Treatment system including a plurality of treatment apparatus
KR100221983B1 (ko) * 1993-04-13 1999-09-15 히가시 데쓰로 처리장치
JPH0722490A (ja) * 1993-06-30 1995-01-24 Mitsubishi Electric Corp ロット自動編成装置及び方法
US5570990A (en) * 1993-11-05 1996-11-05 Asyst Technologies, Inc. Human guided mobile loader stocker
JP3331746B2 (ja) * 1994-05-17 2002-10-07 神鋼電機株式会社 搬送システム
JP3202137B2 (ja) * 1994-10-24 2001-08-27 大日本スクリーン製造株式会社 基板処理装置のキャリア搬入・搬出装置
ATE275759T1 (de) * 1995-03-28 2004-09-15 Brooks Automation Gmbh Be- und entladestation für halbleiterbearbeitungsanlagen
JPH0936198A (ja) * 1995-07-19 1997-02-07 Hitachi Ltd 真空処理装置およびそれを用いた半導体製造ライン

Also Published As

Publication number Publication date
DE69837718T2 (de) 2007-09-06
ATE361551T1 (de) 2007-05-15
KR100608391B1 (ko) 2006-08-09
KR20010006331A (ko) 2001-01-26
WO1998046503A1 (en) 1998-10-22
EP1028905B1 (de) 2007-05-02
EP1028905A1 (de) 2000-08-23
US5980183A (en) 1999-11-09
EP1028905A4 (de) 2004-09-15
JP4068160B2 (ja) 2008-03-26
JP2001520803A (ja) 2001-10-30

Similar Documents

Publication Publication Date Title
DE69837718D1 (de) Integrierter pufferraum, abgabe- und lagersystem
EP0377464A3 (de) Plättchenbehandlungssystem
EP0960434B1 (de) Gerät für die verarbeitung von halbleiterscheiben
US6749070B2 (en) Modular stacking equipment rack
US6654241B2 (en) High availability small foot-print server
US5957648A (en) Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers
EP0603801A3 (de) Verallgemeinerter gemeinsamer Speicher in einer Verbandarchitektur eines Rechnersystems.
US5189668A (en) Atm switch and atm multiplexer
US20060221579A1 (en) Blade server system
SG54205A1 (en) Optical fibre management system
CA2384725A1 (en) Integrated circuit card programming modules, systems and methods
EP1573778A2 (de) Zugang zu einer oder mehreren ebenen von materiallagerregalen durch ein overhead-flaschenzugtransportfahrzeug voneiner einzigen spurposition aus
MY128036A (en) Optical fibre organizer
ATE182700T1 (de) Mehrfachport-verteilte speicherschnittstelle und zugehöriges verfahren
KR20080075490A (ko) 스톡커
US9198331B2 (en) Data center facility design configuration
EP0848413A3 (de) Kompakte Vorrichtung und Methode zum Aufbewahren und Laden von Halbleiterscheibeträgern
CN101109932A (zh) 工厂自动化系统及相关方法
US10869405B1 (en) Routing power and data cables to information handling system racks in a data center
EP0259050A3 (de) Vielfachkanal-Speicherzugriffsschaltung
FI852161L (fi) Laddningssystem foer ett multipelminne.
US20050191162A1 (en) Method for integrating interbay and intrabay material transportation systems within an integrated circuit factory
AU2231888A (en) Access priority control system for main storage for computer
JPS63174333A (ja) 半導体ウエハ収納用ストツカ
CA2115656A1 (en) Fault Tolerant Radio Communication System Controller

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee