DE69841842D1 - Verfahren und vorrichtung zur reduzierung der ablagerung von material in der abluftröhre eines reaktionsofens - Google Patents

Verfahren und vorrichtung zur reduzierung der ablagerung von material in der abluftröhre eines reaktionsofens

Info

Publication number
DE69841842D1
DE69841842D1 DE69841842T DE69841842T DE69841842D1 DE 69841842 D1 DE69841842 D1 DE 69841842D1 DE 69841842 T DE69841842 T DE 69841842T DE 69841842 T DE69841842 T DE 69841842T DE 69841842 D1 DE69841842 D1 DE 69841842D1
Authority
DE
Germany
Prior art keywords
annular nozzle
nozzle assembly
pipes
inner surfaces
molecules
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69841842T
Other languages
English (en)
Inventor
Youfan Gu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Application granted granted Critical
Publication of DE69841842D1 publication Critical patent/DE69841842D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
DE69841842T 1997-01-13 1998-01-08 Verfahren und vorrichtung zur reduzierung der ablagerung von material in der abluftröhre eines reaktionsofens Expired - Lifetime DE69841842D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/782,785 US5827370A (en) 1997-01-13 1997-01-13 Method and apparatus for reducing build-up of material on inner surface of tube downstream from a reaction furnace
PCT/US1998/000162 WO1998030731A1 (en) 1997-01-13 1998-01-08 Method and apparatus for reducing deposition of material in the exhaust pipe of a reaction furnace

Publications (1)

Publication Number Publication Date
DE69841842D1 true DE69841842D1 (de) 2010-09-30

Family

ID=25127174

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69841842T Expired - Lifetime DE69841842D1 (de) 1997-01-13 1998-01-08 Verfahren und vorrichtung zur reduzierung der ablagerung von material in der abluftröhre eines reaktionsofens

Country Status (8)

Country Link
US (1) US5827370A (de)
EP (1) EP0954621B1 (de)
JP (1) JP3472582B2 (de)
KR (1) KR20000070123A (de)
AT (1) ATE478168T1 (de)
DE (1) DE69841842D1 (de)
TW (1) TW357256B (de)
WO (1) WO1998030731A1 (de)

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Also Published As

Publication number Publication date
KR20000070123A (ko) 2000-11-25
WO1998030731A1 (en) 1998-07-16
TW357256B (en) 1999-05-01
US5827370A (en) 1998-10-27
JP2002501671A (ja) 2002-01-15
EP0954621A1 (de) 1999-11-10
JP3472582B2 (ja) 2003-12-02
EP0954621A4 (de) 2004-05-06
ATE478168T1 (de) 2010-09-15
EP0954621B1 (de) 2010-08-18

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