DE69904168D1 - Magnetfeldfühler - Google Patents

Magnetfeldfühler

Info

Publication number
DE69904168D1
DE69904168D1 DE69904168T DE69904168T DE69904168D1 DE 69904168 D1 DE69904168 D1 DE 69904168D1 DE 69904168 T DE69904168 T DE 69904168T DE 69904168 T DE69904168 T DE 69904168T DE 69904168 D1 DE69904168 D1 DE 69904168D1
Authority
DE
Germany
Prior art keywords
magnetic sensor
magnetic
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69904168T
Other languages
English (en)
Other versions
DE69904168T2 (de
Inventor
J Bohlinger
Hong Wan
Tamara Bratland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE69904168D1 publication Critical patent/DE69904168D1/de
Application granted granted Critical
Publication of DE69904168T2 publication Critical patent/DE69904168T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
DE69904168T 1998-05-27 1999-05-26 Magnetfeldfühler Expired - Lifetime DE69904168T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/085,858 US6529114B1 (en) 1998-05-27 1998-05-27 Magnetic field sensing device
PCT/US1999/011587 WO1999061931A1 (en) 1998-05-27 1999-05-26 Magnetic field sensing device

Publications (2)

Publication Number Publication Date
DE69904168D1 true DE69904168D1 (de) 2003-01-09
DE69904168T2 DE69904168T2 (de) 2003-07-17

Family

ID=22194441

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69904168T Expired - Lifetime DE69904168T2 (de) 1998-05-27 1999-05-26 Magnetfeldfühler

Country Status (5)

Country Link
US (3) US6529114B1 (de)
EP (1) EP1082619B1 (de)
JP (1) JP3510592B2 (de)
DE (1) DE69904168T2 (de)
WO (1) WO1999061931A1 (de)

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US6529114B1 (en) * 1998-05-27 2003-03-04 Honeywell International Inc. Magnetic field sensing device
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US7005958B2 (en) * 2002-06-14 2006-02-28 Honeywell International Inc. Dual axis magnetic sensor
JP4016857B2 (ja) * 2002-10-18 2007-12-05 ヤマハ株式会社 磁気センサ及びその製造方法
US7050917B2 (en) * 2003-03-24 2006-05-23 Delphi Technologies, Inc. Method for selectively reconfiguring a sensor according to applicable sensing requirements and reconfigurable sensor
DE10314838A1 (de) * 2003-04-01 2004-10-28 Robert Seuffer Gmbh & Co. Kg Verfahren und Vorrichtung zur Messung der Position, welche ein Magnet und ein Messort zueinander haben
ATE448487T1 (de) * 2003-12-04 2009-11-15 Nxp Bv Magnetfeldempfindliche sensoranordnung
US7196875B2 (en) * 2004-03-24 2007-03-27 Honeywell International Inc. Permalloy sensor having individual permalloy resist pattern runners with lengths perpendicular to a wafer level anisotropy
US7126330B2 (en) * 2004-06-03 2006-10-24 Honeywell International, Inc. Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
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US7394248B1 (en) 2007-08-02 2008-07-01 Magic Technologies, Inc. Method and structure to reset multi-element MTJ
JP4458149B2 (ja) * 2007-10-31 2010-04-28 Ｔｄｋ株式会社 磁気カプラ
US20090152356A1 (en) * 2007-12-14 2009-06-18 Honeywell International Inc. Non-contact magnetic pattern recognition sensor
US8242776B2 (en) * 2008-03-26 2012-08-14 Everspin Technologies, Inc. Magnetic sensor design for suppression of barkhausen noise
US20090315554A1 (en) * 2008-06-20 2009-12-24 Honeywell International Inc. Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
FR2955942B1 (fr) * 2010-01-29 2013-01-04 Centre Nat Rech Scient Magnetometre integre et son procede de fabrication
US8525514B2 (en) * 2010-03-19 2013-09-03 Memsic, Inc. Magnetometer
JP5411818B2 (ja) * 2010-08-26 2014-02-12 セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー 半導体装置
CN102297652B (zh) * 2011-03-03 2012-12-05 江苏多维科技有限公司 一种独立封装的磁电阻角度传感器
CN102298125B (zh) * 2011-03-03 2013-01-23 江苏多维科技有限公司 推挽桥式磁电阻传感器
US8947082B2 (en) 2011-10-21 2015-02-03 University College Cork, National University Of Ireland Dual-axis anisotropic magnetoresistive sensors
TWI452319B (zh) * 2012-01-09 2014-09-11 Voltafield Technology Corp 磁阻感測元件
US9116198B2 (en) * 2012-02-10 2015-08-25 Memsic, Inc. Planar three-axis magnetometer
US9372242B2 (en) * 2012-05-11 2016-06-21 Memsic, Inc. Magnetometer with angled set/reset coil
ITTO20120614A1 (it) 2012-07-11 2014-01-12 St Microelectronics Srl Sensore magnetoresistivo integrato multistrato e relativo metodo di fabbricazione
JP6089572B2 (ja) * 2012-10-18 2017-03-08 ヤマハ株式会社 磁気抵抗効果素子のリセット回路
US9244134B2 (en) * 2013-01-15 2016-01-26 Infineon Technologies Ag XMR-sensor and method for manufacturing the XMR-sensor
US8786397B1 (en) * 2013-02-07 2014-07-22 Excelliance Mos Corporation Electric field resistor
EP2778704B1 (de) * 2013-03-11 2015-09-16 Ams Ag Magnetfeldsensorsystem
US9134385B2 (en) 2013-05-09 2015-09-15 Honeywell International Inc. Magnetic-field sensing device
ITTO20130436A1 (it) * 2013-05-29 2014-11-30 St Microelectronics Srl Magnetoresistore integrato di tipo amr a basso consumo
TWI493209B (zh) * 2013-07-05 2015-07-21 Voltafield Technology Corp 一種單晶片三軸磁阻感測裝置
CN104698409B (zh) * 2015-02-04 2017-11-10 江苏多维科技有限公司 一种单芯片具有校准线圈/重置线圈的高强度磁场x轴线性磁电阻传感器
CN105182258A (zh) * 2015-10-21 2015-12-23 美新半导体（无锡）有限公司 能够实现重置和自检的磁场传感器
CN205581283U (zh) * 2016-04-11 2016-09-14 江苏多维科技有限公司 一种具有初始化线圈封装的磁电阻传感器
JP2019087688A (ja) * 2017-11-09 2019-06-06 Tdk株式会社 磁気センサ

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US5260652A (en) * 1992-03-25 1993-11-09 Seagate Technology, Inc. Magnetoresistive sensor with electrical contacts having variable resistive regions for enhanced sensor sensitivity
JP3089828B2 (ja) * 1992-05-27 2000-09-18 株式会社村田製作所 強磁性磁気抵抗素子
JP2551321B2 (ja) * 1993-04-21 1996-11-06 日本電気株式会社 集積化磁気抵抗効果センサ
DE4317512C2 (de) 1993-05-26 1995-03-30 Univ Schiller Jena Vorrichtung zur berührungslosen Nullpunkt-, Positions- und Drehwinkelmessung
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FR2752302B1 (fr) * 1996-08-08 1998-09-11 Commissariat Energie Atomique Capteur de champ magnetique a pont de magnetoresistances
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Also Published As

Publication number Publication date
US20030141957A1 (en) 2003-07-31
US7202771B2 (en) 2007-04-10
US20060152332A1 (en) 2006-07-13
US7034651B2 (en) 2006-04-25
US6529114B1 (en) 2003-03-04
DE69904168T2 (de) 2003-07-17
EP1082619B1 (de) 2002-11-27
JP2002516999A (ja) 2002-06-11
JP3510592B2 (ja) 2004-03-29
EP1082619A1 (de) 2001-03-14
WO1999061931A1 (en) 1999-12-02

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Legal Events

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