DE69905994D1 - Positiv arbeitende Photoresist-Zusammensetzung mit chemischem Verstärkungseffekt - Google Patents

Positiv arbeitende Photoresist-Zusammensetzung mit chemischem Verstärkungseffekt

Info

Publication number
DE69905994D1
DE69905994D1 DE69905994T DE69905994T DE69905994D1 DE 69905994 D1 DE69905994 D1 DE 69905994D1 DE 69905994 T DE69905994 T DE 69905994T DE 69905994 T DE69905994 T DE 69905994T DE 69905994 D1 DE69905994 D1 DE 69905994D1
Authority
DE
Germany
Prior art keywords
photoresist composition
chemical amplification
amplification effect
positive working
working photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69905994T
Other languages
English (en)
Other versions
DE69905994T2 (de
Inventor
Hiroto Yukuwa
Katsumi Oomori
Ryusuke Uchida
Yukihiko Sawayanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of DE69905994D1 publication Critical patent/DE69905994D1/de
Application granted granted Critical
Publication of DE69905994T2 publication Critical patent/DE69905994T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/111—Polymer of unsaturated acid or ester
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/115—Cationic or anionic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/122—Sulfur compound containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/126—Halogen compound containing
DE69905994T 1998-08-21 1999-08-11 Positiv arbeitende Photoresist-Zusammensetzung mit chemischem Verstärkungseffekt Expired - Lifetime DE69905994T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23545398A JP3638086B2 (ja) 1998-08-21 1998-08-21 ポジ型レジスト組成物及びそれを用いたレジストパターン形成方法

Publications (2)

Publication Number Publication Date
DE69905994D1 true DE69905994D1 (de) 2003-04-24
DE69905994T2 DE69905994T2 (de) 2003-12-04

Family

ID=16986337

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69905994T Expired - Lifetime DE69905994T2 (de) 1998-08-21 1999-08-11 Positiv arbeitende Photoresist-Zusammensetzung mit chemischem Verstärkungseffekt

Country Status (4)

Country Link
US (3) US20020119393A1 (de)
EP (1) EP0985975B1 (de)
JP (1) JP3638086B2 (de)
DE (1) DE69905994T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4694686B2 (ja) * 2000-08-31 2011-06-08 東京応化工業株式会社 半導体素子製造方法
DE10058951A1 (de) * 2000-11-28 2002-06-20 Infineon Technologies Ag Verfahren zur Herstellung einer Lithographiemaske für eine integrierte Schaltung
US7312014B2 (en) 2001-06-22 2007-12-25 Wako Pure Chemical Industries Ltd. Resist compositions
KR100944227B1 (ko) * 2007-12-17 2010-02-24 제일모직주식회사 방향족 산 분해성 기를 갖는 (메타)아크릴레이트 화합물 및감광성 고분자 및 레지스트 조성물
US8039194B2 (en) * 2008-01-08 2011-10-18 Internatinal Business Machines Corporation Photoacid generators for extreme ultraviolet lithography
JP5416955B2 (ja) * 2008-12-05 2014-02-12 富士フイルム株式会社 化学増幅型ポジ型レジスト組成物及びパターン形成方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1447956A1 (de) * 1965-01-02 1968-11-21 Kalle Ag Verfahren zur Herstellung einer mit einem Diazoniumsalz vorsensibilisierten Druckform
JPS50120825A (de) * 1974-03-08 1975-09-22
US5393624A (en) * 1988-07-29 1995-02-28 Tokyo Electron Limited Method and apparatus for manufacturing a semiconductor device
JP2930369B2 (ja) * 1990-05-21 1999-08-03 富士写真フイルム 株式会社 感光性組成物
JPH05181281A (ja) * 1991-11-01 1993-07-23 Fuji Photo Film Co Ltd フオトレジスト組成物及びエツチング方法
CA2092774A1 (en) * 1992-04-10 1993-10-11 Yuji Ueda Positive photoresist composition
US5550004A (en) * 1992-05-06 1996-08-27 Ocg Microelectronic Materials, Inc. Chemically amplified radiation-sensitive composition
KR100233367B1 (ko) * 1993-04-15 1999-12-01 카나가와 치히로 레지스트 재료
US5744281A (en) * 1993-09-14 1998-04-28 Kabushiki Kaisha Toshiba Resist composition for forming a pattern and method of forming a pattern wherein the composition 4-phenylpyridine as an additive
EP0653681B1 (de) * 1993-11-17 2000-09-13 AT&T Corp. Verfahren zur Herstellung einer Vorrichtung unter Benutzung einer lichtempfindlichen Zusammensetzung
EP0701173B1 (de) * 1994-09-08 1997-11-12 Agfa-Gevaert N.V. Verfahren zur Herstellung lithographischer Druckplatten mittels Bildelementen, einen lichtempfindlichen Säurespender enthaltend
JPH0915852A (ja) * 1995-07-03 1997-01-17 Fuji Hanto Electron Technol Kk ポジ型レジスト組成物とそれを用いた微細パターン形成方法
US5861231A (en) * 1996-06-11 1999-01-19 Shipley Company, L.L.C. Copolymers and photoresist compositions comprising copolymer resin binder component
JP3808140B2 (ja) * 1996-09-10 2006-08-09 Ａｚエレクトロニックマテリアルズ株式会社 新規酸感応性基で保護されたヒドロキシスチレン重合体およびこれらを含む放射線感応性材料
US6187504B1 (en) * 1996-12-19 2001-02-13 Jsr Corporation Radiation sensitive resin composition
KR100551653B1 (ko) * 1997-08-18 2006-05-25 제이에스알 가부시끼가이샤 감방사선성수지조성물
JP3711198B2 (ja) * 1998-04-23 2005-10-26 東京応化工業株式会社 レジストパターンの形成方法
US6815144B2 (en) * 1998-04-23 2004-11-09 Tokyo Ohka Kogyo Co., Ltd. Positive-working chemical-amplification photoresist composition
JP3761322B2 (ja) * 1998-04-23 2006-03-29 東京応化工業株式会社 化学増幅型ポジ型ホトレジスト
JP3662774B2 (ja) * 1999-06-02 2005-06-22 東京応化工業株式会社 ポジ型レジスト組成物

Also Published As

Publication number Publication date
EP0985975A1 (de) 2000-03-15
JP3638086B2 (ja) 2005-04-13
US7147984B2 (en) 2006-12-12
US20040191677A1 (en) 2004-09-30
JP2000066401A (ja) 2000-03-03
DE69905994T2 (de) 2003-12-04
US20020119393A1 (en) 2002-08-29
EP0985975B1 (de) 2003-03-19
US20040023163A1 (en) 2004-02-05

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