DE69928474D1 - Optiche sonde für nahfeld-messungen - Google Patents
Optiche sonde für nahfeld-messungenInfo
- Publication number
- DE69928474D1 DE69928474D1 DE69928474T DE69928474T DE69928474D1 DE 69928474 D1 DE69928474 D1 DE 69928474D1 DE 69928474 T DE69928474 T DE 69928474T DE 69928474 T DE69928474 T DE 69928474T DE 69928474 D1 DE69928474 D1 DE 69928474D1
- Authority
- DE
- Germany
- Prior art keywords
- nahfeld
- measurements
- optical probe
- probe
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/06—Probe tip arrays
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/125—Optical beam sources therefor, e.g. laser control circuitry specially adapted for optical storage devices; Modulators, e.g. means for controlling the size or intensity of optical spots or optical traces
- G11B7/128—Modulators
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1353—Diffractive elements, e.g. holograms or gratings
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1362—Mirrors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B7/1374—Objective lenses
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B2007/13727—Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/22—Apparatus or processes for the manufacture of optical heads, e.g. assembly
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/862—Near-field probe
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2480198 | 1998-02-05 | ||
JP02480198A JP3862845B2 (ja) | 1998-02-05 | 1998-02-05 | 近接場用光プローブ |
PCT/JP1999/000514 WO1999040445A1 (en) | 1998-02-05 | 1999-02-05 | Optical probe for proximity field |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69928474D1 true DE69928474D1 (de) | 2005-12-29 |
DE69928474T2 DE69928474T2 (de) | 2006-07-20 |
Family
ID=12148310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69928474T Expired - Lifetime DE69928474T2 (de) | 1998-02-05 | 1999-02-05 | Optiche sonde für nahfeld-messungen |
Country Status (5)
Country | Link |
---|---|
US (3) | US6528780B1 (de) |
EP (1) | EP0981051B1 (de) |
JP (1) | JP3862845B2 (de) |
DE (1) | DE69928474T2 (de) |
WO (1) | WO1999040445A1 (de) |
Families Citing this family (65)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5345170A (en) * | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
US6232789B1 (en) * | 1997-05-28 | 2001-05-15 | Cascade Microtech, Inc. | Probe holder for low current measurements |
US5729150A (en) * | 1995-12-01 | 1998-03-17 | Cascade Microtech, Inc. | Low-current probe card with reduced triboelectric current generating cables |
US5914613A (en) * | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
US6002263A (en) * | 1997-06-06 | 1999-12-14 | Cascade Microtech, Inc. | Probe station having inner and outer shielding |
US6034533A (en) * | 1997-06-10 | 2000-03-07 | Tervo; Paul A. | Low-current pogo probe card |
JP3862845B2 (ja) * | 1998-02-05 | 2006-12-27 | セイコーインスツル株式会社 | 近接場用光プローブ |
US6256882B1 (en) * | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
DE69940577D1 (de) * | 1998-11-09 | 2009-04-23 | Seiko Instr Inc | Nahfeld Abtastkopf und Herstellungsverfahren dafür |
JP2000329677A (ja) * | 1999-03-17 | 2000-11-30 | Seiko Instruments Inc | 光マイクロカンチレバーとその製造方法および光マイクロカンチレバーホルダ |
US6578264B1 (en) * | 1999-06-04 | 2003-06-17 | Cascade Microtech, Inc. | Method for constructing a membrane probe using a depression |
JP4020233B2 (ja) * | 1999-08-25 | 2007-12-12 | セイコーインスツル株式会社 | 近視野光ヘッドとその製造方法 |
US6835963B2 (en) * | 1999-12-22 | 2004-12-28 | Kabushiki Kaisha Toshiba | Light-emitting element and method of fabrication thereof |
US6838890B2 (en) * | 2000-02-25 | 2005-01-04 | Cascade Microtech, Inc. | Membrane probing system |
JP4648512B2 (ja) * | 2000-03-07 | 2011-03-09 | セイコーインスツル株式会社 | 近視野光発生素子の製造方法 |
JP3882456B2 (ja) | 2000-03-13 | 2007-02-14 | 株式会社日立製作所 | 近接場光プローブおよびそれを用いた近接場光学顕微鏡および光記録/再生装置 |
US6917726B2 (en) * | 2001-09-27 | 2005-07-12 | Cornell Research Foundation, Inc. | Zero-mode clad waveguides for performing spectroscopy with confined effective observation volumes |
JP2002005810A (ja) * | 2000-06-16 | 2002-01-09 | Canon Inc | プローブ及びその製造方法、表面観察装置、露光装置、情報処理装置 |
JP2004505256A (ja) * | 2000-07-27 | 2004-02-19 | ゼテティック・インスティチュート | 共振器により強化された光透過機能を有する多重光源アレイ |
US6707026B2 (en) * | 2000-08-04 | 2004-03-16 | Minolta Co., Ltd. | Solid immersion mirror and reproducing apparatus |
US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
DE20114544U1 (de) | 2000-12-04 | 2002-02-21 | Cascade Microtech Inc | Wafersonde |
KR100672833B1 (ko) * | 2001-08-09 | 2007-01-22 | 재단법인서울대학교산학협력재단 | 근접장 홀로그래픽 메모리 시스템 및 그 방법 |
US7355420B2 (en) | 2001-08-21 | 2008-04-08 | Cascade Microtech, Inc. | Membrane probing system |
US6951846B2 (en) * | 2002-03-07 | 2005-10-04 | The United States Of America As Represented By The Secretary Of The Army | Artemisinins with improved stability and bioavailability for therapeutic drug development and application |
JP2003294857A (ja) * | 2002-03-29 | 2003-10-15 | Mitsubishi Electric Corp | 乗員検出装置 |
US6724205B1 (en) * | 2002-11-13 | 2004-04-20 | Cascade Microtech, Inc. | Probe for combined signals |
US6861856B2 (en) * | 2002-12-13 | 2005-03-01 | Cascade Microtech, Inc. | Guarded tub enclosure |
US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7250626B2 (en) | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
JP2005144561A (ja) * | 2003-11-11 | 2005-06-09 | Seiko Epson Corp | 近接場光プローブ、近接場光の取出し方法並びに近接場光を用いた加工方法 |
WO2005065258A2 (en) | 2003-12-24 | 2005-07-21 | Cascade Microtech, Inc. | Active wafer probe |
US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
JP3765314B2 (ja) * | 2004-03-31 | 2006-04-12 | セイコーエプソン株式会社 | マスク、マスクの製造方法、電気光学装置の製造方法および電子機器 |
JP2008512680A (ja) | 2004-09-13 | 2008-04-24 | カスケード マイクロテック インコーポレイテッド | 両面プロービング構造体 |
GB2423819B (en) * | 2004-09-17 | 2008-02-06 | Pacific Biosciences California | Apparatus and method for analysis of molecules |
US7170050B2 (en) | 2004-09-17 | 2007-01-30 | Pacific Biosciences Of California, Inc. | Apparatus and methods for optical analysis of molecules |
JP2006107584A (ja) * | 2004-10-01 | 2006-04-20 | Konica Minolta Opto Inc | 光学素子及び光スポット位置調整方法 |
US7616987B2 (en) * | 2004-10-05 | 2009-11-10 | Agency For Science, Technology And Research | Microprobe for 3D bio-imaging, method for fabricating the same and use thereof |
US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
JP5172331B2 (ja) * | 2005-03-31 | 2013-03-27 | 独立行政法人科学技術振興機構 | 走査型プローブ顕微鏡用カンチレバー及びそれを具備する走査型プローブ顕微鏡 |
US20070294047A1 (en) * | 2005-06-11 | 2007-12-20 | Leonard Hayden | Calibration system |
US8039814B2 (en) | 2005-12-22 | 2011-10-18 | Koninklijke Philips Electronics N.V. | Luminescence sensor operating in reflection mode |
DE102006002461B8 (de) * | 2006-01-18 | 2008-07-24 | Max Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Spiegeloptik für nahfeldoptische Messungen |
US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
US8609366B2 (en) * | 2006-07-28 | 2013-12-17 | Legacy Emanuel Hospital & Health Center | Method and systems for tissue culture |
EP1936340A1 (de) * | 2006-12-21 | 2008-06-25 | Koninklijke Philips Electronics N.V. | Subwellenlängen-Apertur |
EP2171517A4 (de) | 2007-07-31 | 2012-02-29 | Battelle Energy Alliance Llc | Sichtoptik und verfahren zum sichten |
US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
BRPI0909212A2 (pt) | 2008-03-28 | 2015-08-18 | Pacific Biosciences California | Composições e método para sequeciamento de ácido nucléico |
US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
WO2010059247A2 (en) | 2008-11-21 | 2010-05-27 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
US8675293B2 (en) * | 2010-01-25 | 2014-03-18 | Axsun Technologies, Inc. | SOI lens structure for medical probe |
WO2011091408A2 (en) * | 2010-01-25 | 2011-07-28 | Axsun Technologies, Inc. | Silicon optical bench oct probe for medical imaging |
DE202010013458U1 (de) | 2010-09-23 | 2010-12-30 | Eberhard-Karls-Universität Tübingen | Sonde für aperturlose Nahfeldmikroskopie und/oder für Ramanspektroskopie |
TWI427250B (zh) | 2011-07-12 | 2014-02-21 | Univ Nat Pingtung Sci & Tech | 浮力式太陽集熱動力裝置 |
JP6341634B2 (ja) * | 2013-05-28 | 2018-06-13 | 新光電気工業株式会社 | プローブガイド板及びその製造方法、半導体検査装置 |
US9696498B2 (en) * | 2015-05-04 | 2017-07-04 | Huawei Technologies Co., Ltd. | Three-dimensional (3D) photonic chip-to-fiber interposer |
JP6706076B2 (ja) * | 2016-01-14 | 2020-06-03 | 新光電気工業株式会社 | プローブガイド板及びその製造方法とプローブ装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0534129A (ja) * | 1991-07-31 | 1993-02-09 | Satoshi Kawada | 光学プローブ |
JP3268797B2 (ja) * | 1991-10-09 | 2002-03-25 | オリンパス光学工業株式会社 | 光導入装置 |
JP3213436B2 (ja) * | 1993-05-24 | 2001-10-02 | シャープ株式会社 | 光プローブ素子、光プローブ素子を用いた記録再生装置、および光プローブ素子の製造方法 |
US5354985A (en) | 1993-06-03 | 1994-10-11 | Stanford University | Near field scanning optical and force microscope including cantilever and optical waveguide |
JPH10506457A (ja) | 1994-07-28 | 1998-06-23 | ジェネラル ナノテクノロジー エルエルシー | 走査型プローブ顕微鏡装置 |
JPH0954101A (ja) * | 1995-08-14 | 1997-02-25 | Nikon Corp | 走査型近接場光学顕微鏡 |
JP3618896B2 (ja) * | 1996-03-29 | 2005-02-09 | キヤノン株式会社 | 微小開口を有するプローブの作製法とそれによるプローブ、並びに該プローブを用いた走査型近接場光顕微鏡と走査型トンネル顕微鏡との複合装置、および該プローブを用いた記録再生装置 |
JP3327112B2 (ja) * | 1996-04-19 | 2002-09-24 | 松下電器産業株式会社 | 異方性黒鉛薄膜基板及びそれを利用した応用装置 |
JPH1186364A (ja) * | 1997-09-11 | 1999-03-30 | Canon Inc | 微小開口の形成方法、微小開口を含んでなるメンブレンと該メンブレンによるプローブ、及び該プローブによる表面観察装置、露光装置、情報処理装置 |
JPH11166935A (ja) * | 1997-09-25 | 1999-06-22 | Canon Inc | 光検出または照射用の光プローブと該プローブを備えた近視野光学顕微鏡、及該光プローブの製造方法とその製造に用いる基板 |
JP3862845B2 (ja) * | 1998-02-05 | 2006-12-27 | セイコーインスツル株式会社 | 近接場用光プローブ |
-
1998
- 1998-02-05 JP JP02480198A patent/JP3862845B2/ja not_active Expired - Fee Related
-
1999
- 1999-02-05 US US09/402,382 patent/US6528780B1/en not_active Expired - Lifetime
- 1999-02-05 EP EP99902848A patent/EP0981051B1/de not_active Expired - Lifetime
- 1999-02-05 DE DE69928474T patent/DE69928474T2/de not_active Expired - Lifetime
- 1999-02-05 WO PCT/JP1999/000514 patent/WO1999040445A1/ja active IP Right Grant
-
2003
- 2003-01-09 US US10/339,074 patent/US6881947B2/en not_active Expired - Fee Related
-
2005
- 2005-03-30 US US11/093,618 patent/US7015455B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69928474T2 (de) | 2006-07-20 |
JP3862845B2 (ja) | 2006-12-27 |
US6528780B1 (en) | 2003-03-04 |
US20030141444A1 (en) | 2003-07-31 |
EP0981051A4 (de) | 2001-05-02 |
US7015455B2 (en) | 2006-03-21 |
JPH11223638A (ja) | 1999-08-17 |
WO1999040445A1 (en) | 1999-08-12 |
US20050167576A1 (en) | 2005-08-04 |
US6881947B2 (en) | 2005-04-19 |
EP0981051B1 (de) | 2005-11-23 |
EP0981051A1 (de) | 2000-02-23 |
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