DE69930700D1 - Halbleitersubstrat und Verfahren zu seiner Herstellung - Google Patents
Halbleitersubstrat und Verfahren zu seiner HerstellungInfo
- Publication number
- DE69930700D1 DE69930700D1 DE69930700T DE69930700T DE69930700D1 DE 69930700 D1 DE69930700 D1 DE 69930700D1 DE 69930700 T DE69930700 T DE 69930700T DE 69930700 T DE69930700 T DE 69930700T DE 69930700 D1 DE69930700 D1 DE 69930700D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- semiconductor substrate
- semiconductor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02658—Pretreatments
- H01L21/02661—In-situ cleaning
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25127198 | 1998-09-04 | ||
JP25127198 | 1998-09-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69930700D1 true DE69930700D1 (de) | 2006-05-18 |
DE69930700T2 DE69930700T2 (de) | 2006-11-09 |
Family
ID=17220319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69930700T Expired - Lifetime DE69930700T2 (de) | 1998-09-04 | 1999-09-03 | Halbleitersubstrat und Verfahren zu seiner Herstellung |
Country Status (6)
Country | Link |
---|---|
US (1) | US6335269B1 (de) |
EP (1) | EP0984483B1 (de) |
KR (1) | KR100376658B1 (de) |
CN (1) | CN1127120C (de) |
DE (1) | DE69930700T2 (de) |
TW (1) | TW459390B (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6162705A (en) * | 1997-05-12 | 2000-12-19 | Silicon Genesis Corporation | Controlled cleavage process and resulting device using beta annealing |
US20070122997A1 (en) * | 1998-02-19 | 2007-05-31 | Silicon Genesis Corporation | Controlled process and resulting device |
US6287941B1 (en) * | 1999-04-21 | 2001-09-11 | Silicon Genesis Corporation | Surface finishing of SOI substrates using an EPI process |
US6660606B2 (en) * | 2000-09-29 | 2003-12-09 | Canon Kabushiki Kaisha | Semiconductor-on-insulator annealing method |
US7101772B2 (en) * | 2000-12-30 | 2006-09-05 | Texas Instruments Incorporated | Means for forming SOI |
US6524170B2 (en) * | 2001-03-19 | 2003-02-25 | Brookhaven Science Associates, Llc | Method of surface preparation of niobium |
JP2002305293A (ja) * | 2001-04-06 | 2002-10-18 | Canon Inc | 半導体部材の製造方法及び半導体装置の製造方法 |
US6743722B2 (en) | 2002-01-29 | 2004-06-01 | Strasbaugh | Method of spin etching wafers with an alkali solution |
JP4464033B2 (ja) * | 2002-06-13 | 2010-05-19 | 信越半導体株式会社 | 半導体ウエーハの形状評価方法及び形状評価装置 |
US7332417B2 (en) * | 2003-01-27 | 2008-02-19 | Amberwave Systems Corporation | Semiconductor structures with structural homogeneity |
TWI242232B (en) * | 2003-06-09 | 2005-10-21 | Canon Kk | Semiconductor substrate, semiconductor device, and method of manufacturing the same |
JP2005136383A (ja) * | 2003-10-09 | 2005-05-26 | Canon Inc | 有機半導体素子、その製造方法および有機半導体装置 |
US7542197B2 (en) * | 2003-11-01 | 2009-06-02 | Silicon Quest Kabushiki-Kaisha | Spatial light modulator featured with an anti-reflective structure |
US7354815B2 (en) * | 2003-11-18 | 2008-04-08 | Silicon Genesis Corporation | Method for fabricating semiconductor devices using strained silicon bearing material |
KR100993979B1 (ko) * | 2003-12-02 | 2010-11-11 | 주식회사 실트론 | 반도체 웨이퍼의 제조방법 |
US8993410B2 (en) | 2006-09-08 | 2015-03-31 | Silicon Genesis Corporation | Substrate cleaving under controlled stress conditions |
US9362439B2 (en) | 2008-05-07 | 2016-06-07 | Silicon Genesis Corporation | Layer transfer of films utilizing controlled shear region |
US8293619B2 (en) | 2008-08-28 | 2012-10-23 | Silicon Genesis Corporation | Layer transfer of films utilizing controlled propagation |
US7811900B2 (en) * | 2006-09-08 | 2010-10-12 | Silicon Genesis Corporation | Method and structure for fabricating solar cells using a thick layer transfer process |
TW200818327A (en) * | 2006-09-29 | 2008-04-16 | Sumco Techxiv Corp | Silicon wafer heat treatment method |
US8124916B2 (en) * | 2007-04-16 | 2012-02-28 | Maxim Integrated Products, Inc. | Thermal processing of silicon wafers |
DE102008030679B4 (de) * | 2008-04-17 | 2016-01-28 | Von Ardenne Gmbh | Vorrichtung zur Diffusionsbehandlung von Werkstücken |
US8330126B2 (en) * | 2008-08-25 | 2012-12-11 | Silicon Genesis Corporation | Race track configuration and method for wafering silicon solar substrates |
US8329557B2 (en) * | 2009-05-13 | 2012-12-11 | Silicon Genesis Corporation | Techniques for forming thin films by implantation with reduced channeling |
WO2012102755A1 (en) * | 2011-01-28 | 2012-08-02 | Applied Materials, Inc. | Carbon addition for low resistivity in situ doped silicon epitaxy |
JP6299668B2 (ja) * | 2015-05-13 | 2018-03-28 | 信越半導体株式会社 | ヘイズの評価方法 |
US20180068886A1 (en) * | 2016-09-02 | 2018-03-08 | Qualcomm Incorporated | Porous semiconductor layer transfer for an integrated circuit structure |
JP6834932B2 (ja) * | 2017-12-19 | 2021-02-24 | 株式会社Sumco | 貼り合わせウェーハ用の支持基板の製造方法および貼り合わせウェーハの製造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2608351B2 (ja) | 1990-08-03 | 1997-05-07 | キヤノン株式会社 | 半導体部材及び半導体部材の製造方法 |
DE69133359T2 (de) | 1990-08-03 | 2004-12-16 | Canon K.K. | Verfahren zur Herstellung eines SOI-Substrats |
US5750000A (en) | 1990-08-03 | 1998-05-12 | Canon Kabushiki Kaisha | Semiconductor member, and process for preparing same and semiconductor device formed by use of same |
EP1251556B1 (de) | 1992-01-30 | 2010-03-24 | Canon Kabushiki Kaisha | Herstellungsverfahren für Halbleitersubstrat |
JP3214631B2 (ja) | 1992-01-31 | 2001-10-02 | キヤノン株式会社 | 半導体基体及びその作製方法 |
JPH06295945A (ja) | 1993-04-08 | 1994-10-21 | Shin Etsu Handotai Co Ltd | 半導体製造プロセスの評価方法および装置 |
JP3260516B2 (ja) * | 1993-09-09 | 2002-02-25 | コマツ電子金属株式会社 | 貼合せsoiとその製造方法 |
JP3257580B2 (ja) | 1994-03-10 | 2002-02-18 | キヤノン株式会社 | 半導体基板の作製方法 |
DE69628505T2 (de) | 1995-07-21 | 2004-05-06 | Canon K.K. | Halbleitendes Substrat und dessen Herstellungsverfahren |
JP3216078B2 (ja) | 1995-07-21 | 2001-10-09 | キヤノン株式会社 | 半導体基材及び半導体基材の製造方法 |
JPH1032234A (ja) * | 1996-07-17 | 1998-02-03 | Toshiba Corp | Soi基板の評価方法 |
EP0996145A3 (de) | 1998-09-04 | 2000-11-08 | Canon Kabushiki Kaisha | Verfahren zur Herstellung von Halbleitersubstraten |
-
1999
- 1999-09-03 US US09/390,296 patent/US6335269B1/en not_active Expired - Lifetime
- 1999-09-03 EP EP99307024A patent/EP0984483B1/de not_active Expired - Lifetime
- 1999-09-03 DE DE69930700T patent/DE69930700T2/de not_active Expired - Lifetime
- 1999-09-03 TW TW088115250A patent/TW459390B/zh not_active IP Right Cessation
- 1999-09-03 KR KR10-1999-0038228A patent/KR100376658B1/ko not_active IP Right Cessation
- 1999-09-03 CN CN99122409A patent/CN1127120C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR100376658B1 (ko) | 2003-03-19 |
US6335269B1 (en) | 2002-01-01 |
EP0984483A3 (de) | 2000-11-15 |
CN1250944A (zh) | 2000-04-19 |
DE69930700T2 (de) | 2006-11-09 |
EP0984483B1 (de) | 2006-04-05 |
CN1127120C (zh) | 2003-11-05 |
KR20000022995A (ko) | 2000-04-25 |
TW459390B (en) | 2001-10-11 |
EP0984483A2 (de) | 2000-03-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |