DE69932995D1 - Lichtempfindliche Harzzusammensetzung - Google Patents
Lichtempfindliche HarzzusammensetzungInfo
- Publication number
- DE69932995D1 DE69932995D1 DE69932995T DE69932995T DE69932995D1 DE 69932995 D1 DE69932995 D1 DE 69932995D1 DE 69932995 T DE69932995 T DE 69932995T DE 69932995 T DE69932995 T DE 69932995T DE 69932995 D1 DE69932995 D1 DE 69932995D1
- Authority
- DE
- Germany
- Prior art keywords
- resin composition
- photosensitive resin
- photosensitive
- composition
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
- Y10S430/115—Cationic or anionic
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31855998 | 1998-11-10 | ||
JP31855998A JP3941268B2 (ja) | 1998-11-10 | 1998-11-10 | 感放射線性樹脂組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69932995D1 true DE69932995D1 (de) | 2006-10-12 |
DE69932995T2 DE69932995T2 (de) | 2007-03-15 |
Family
ID=18100492
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69932995T Expired - Lifetime DE69932995T2 (de) | 1998-11-10 | 1999-11-09 | Lichtempfindliche Harzzusammensetzung |
Country Status (4)
Country | Link |
---|---|
US (1) | US6337171B1 (de) |
EP (1) | EP1011029B1 (de) |
JP (1) | JP3941268B2 (de) |
DE (1) | DE69932995T2 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4838437B2 (ja) * | 2000-06-16 | 2011-12-14 | Jsr株式会社 | 感放射線性樹脂組成物 |
US6630282B2 (en) | 2000-08-21 | 2003-10-07 | Tokyo Ohka Kogyo Co., Ltd. | Crosslinked positive-working photoresist composition |
JP4694686B2 (ja) * | 2000-08-31 | 2011-06-08 | 東京応化工業株式会社 | 半導体素子製造方法 |
KR100760146B1 (ko) * | 2000-09-18 | 2007-09-18 | 제이에스알 가부시끼가이샤 | 감방사선성 수지 조성물 |
JP4438218B2 (ja) * | 2000-11-16 | 2010-03-24 | Jsr株式会社 | 感放射線性樹脂組成物 |
US6838225B2 (en) | 2001-01-18 | 2005-01-04 | Jsr Corporation | Radiation-sensitive resin composition |
US7531286B2 (en) * | 2002-03-15 | 2009-05-12 | Jsr Corporation | Radiation-sensitive resin composition |
JP4048824B2 (ja) * | 2002-05-09 | 2008-02-20 | Jsr株式会社 | 感放射線性樹脂組成物 |
JP4168095B2 (ja) * | 2002-05-24 | 2008-10-22 | サンノプコ株式会社 | 感光性樹脂組成物 |
TWI314943B (en) * | 2002-08-29 | 2009-09-21 | Radiation-sensitive resin composition | |
JP3937996B2 (ja) * | 2002-10-08 | 2007-06-27 | Jsr株式会社 | 感放射性樹脂組成物 |
JP4140506B2 (ja) * | 2003-10-28 | 2008-08-27 | Jsr株式会社 | 感放射線性樹脂組成物 |
US20080213699A1 (en) * | 2004-12-17 | 2008-09-04 | Samsung Electronics Co., Ltd. | Photoresist composition and method of forming a photoresist pattern using the photoresist composition |
KR20060068798A (ko) * | 2004-12-17 | 2006-06-21 | 삼성전자주식회사 | 감광성 폴리머, 이를 포함하는 포토레지스트 조성물 및이를 이용한 포토레지스트 패턴 형성 방법 |
JP2007092018A (ja) * | 2005-02-21 | 2007-04-12 | Jsr Corp | フェノール性水酸基を有する共重合体および感放射線性樹脂組成物 |
US20060188812A1 (en) * | 2005-02-21 | 2006-08-24 | Tomoki Nagai | Phenolic hydroxyl group-containing copolymer and radiation-sensitive resin composition |
JP4536546B2 (ja) * | 2005-02-21 | 2010-09-01 | 東京応化工業株式会社 | ポジ型レジスト組成物及びそれを用いたレジストパターン形成方法 |
JP4715671B2 (ja) * | 2005-08-03 | 2011-07-06 | Jsr株式会社 | メッキ造形物製造用ポジ型感放射線性樹脂組成物、転写フィルムおよびメッキ造形物の製造方法 |
US20070031758A1 (en) | 2005-08-03 | 2007-02-08 | Jsr Corporation | Positive-type radiation-sensitive resin composition for producing a metal-plating formed material, transcription film and production method of a metal-plating formed material |
JP5062996B2 (ja) * | 2005-09-20 | 2012-10-31 | 富士フイルム株式会社 | ジアリールヨードニウム塩の製造方法及びジアリールヨードニウム塩 |
WO2018168258A1 (ja) | 2017-03-17 | 2018-09-20 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、及び電子デバイスの製造方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06123970A (ja) | 1992-10-12 | 1994-05-06 | Shin Etsu Chem Co Ltd | ポジ型レジスト材料 |
US5374500A (en) | 1993-04-02 | 1994-12-20 | International Business Machines Corporation | Positive photoresist composition containing photoacid generator and use thereof |
JP2936956B2 (ja) | 1993-04-15 | 1999-08-23 | 信越化学工業株式会社 | レジスト材料 |
KR100233367B1 (ko) * | 1993-04-15 | 1999-12-01 | 카나가와 치히로 | 레지스트 재료 |
WO1995016671A1 (en) | 1993-12-16 | 1995-06-22 | The Children's Medical Center Corporation | Triflate-mediated preparation and use of iodonium compounds |
DE69508812T2 (de) * | 1994-01-28 | 1999-11-04 | Shinetsu Chemical Co | Sulfoniumsalz und chemisch verstärkte Positivresistzusammensetzungen |
JP3271728B2 (ja) | 1994-02-14 | 2002-04-08 | 日本電信電話株式会社 | ポジ型レジスト組成物 |
EP0675410B1 (de) * | 1994-03-28 | 1999-08-04 | Wako Pure Chemical Industries Ltd | Resistzusammensetzung für tiefe Ultraviolettbelichtung |
JP3591549B2 (ja) | 1995-11-02 | 2004-11-24 | 信越化学工業株式会社 | 新規ヨ−ドニウム塩及び化学増幅ポジ型レジスト材料 |
TW436663B (en) * | 1995-11-02 | 2001-05-28 | Shinetsu Chemical Co | Sulfonium salts and chemically amplified positive resist compositions |
US5585220A (en) | 1995-12-01 | 1996-12-17 | International Business Machines Corporation | Resist composition with radiation sensitive acid generator |
KR0185318B1 (ko) * | 1996-12-28 | 1999-04-01 | 김흥기 | 양성 포토레지스트 제조용 공중합체 및 이를 함유하는 화학증폭형 양성 포토레지스트 조성물 |
US6066433A (en) * | 1997-03-10 | 2000-05-23 | Shin-Etsu Chemical Co., Ltd. | High molecular weight silicone compounds, chemically amplified positive resist compositions, and patterning method |
TWI250379B (en) | 1998-08-07 | 2006-03-01 | Az Electronic Materials Japan | Chemical amplified radiation-sensitive composition which contains onium salt and generator |
-
1998
- 1998-11-10 JP JP31855998A patent/JP3941268B2/ja not_active Expired - Lifetime
-
1999
- 1999-11-08 US US09/435,922 patent/US6337171B1/en not_active Expired - Lifetime
- 1999-11-09 EP EP99122344A patent/EP1011029B1/de not_active Expired - Lifetime
- 1999-11-09 DE DE69932995T patent/DE69932995T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1011029B1 (de) | 2006-08-30 |
JP2000147772A (ja) | 2000-05-26 |
DE69932995T2 (de) | 2007-03-15 |
JP3941268B2 (ja) | 2007-07-04 |
US6337171B1 (en) | 2002-01-08 |
EP1011029A3 (de) | 2001-01-17 |
EP1011029A2 (de) | 2000-06-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |