DE69935377D1 - Infrarot/sichtbar multispektraler Strahlungsdetektor - Google Patents

Infrarot/sichtbar multispektraler Strahlungsdetektor

Info

Publication number
DE69935377D1
DE69935377D1 DE69935377T DE69935377T DE69935377D1 DE 69935377 D1 DE69935377 D1 DE 69935377D1 DE 69935377 T DE69935377 T DE 69935377T DE 69935377 T DE69935377 T DE 69935377T DE 69935377 D1 DE69935377 D1 DE 69935377D1
Authority
DE
Germany
Prior art keywords
infrared
radiation detector
multispectral radiation
visible
visible multispectral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69935377T
Other languages
English (en)
Other versions
DE69935377T2 (de
Inventor
Jean Louis Ouvrier-Buffet
Chantal Beccia
Michel Vilain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69935377D1 publication Critical patent/DE69935377D1/de
Publication of DE69935377T2 publication Critical patent/DE69935377T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14665—Imagers using a photoconductor layer
    • H01L27/14669—Infrared imagers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/10—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from different wavelengths
    • H04N23/11—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from different wavelengths for generating image signals from visible and infrared light wavelengths
DE69935377T 1998-07-28 1999-07-26 Infrarot/sichtbar multispektraler Strahlungsdetektor Expired - Lifetime DE69935377T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9809645A FR2781927B1 (fr) 1998-07-28 1998-07-28 Dispositif de detection de rayonnements multispectraux infrarouge/visible
FR9809645 1998-07-28

Publications (2)

Publication Number Publication Date
DE69935377D1 true DE69935377D1 (de) 2007-04-19
DE69935377T2 DE69935377T2 (de) 2007-11-15

Family

ID=9529111

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69935377T Expired - Lifetime DE69935377T2 (de) 1998-07-28 1999-07-26 Infrarot/sichtbar multispektraler Strahlungsdetektor

Country Status (4)

Country Link
US (1) US6320189B1 (de)
EP (1) EP0977275B1 (de)
DE (1) DE69935377T2 (de)
FR (1) FR2781927B1 (de)

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JP4225531B2 (ja) * 2001-02-07 2009-02-18 京セミ株式会社 放射線検出器および放射線検出素子
US6489616B2 (en) * 2001-03-19 2002-12-03 The Board Of Governors Of Southwest Missouri State University Doped, organic carbon-containing sensor for infrared detection and a process for the preparation thereof
US6777681B1 (en) 2001-04-25 2004-08-17 Raytheon Company Infrared detector with amorphous silicon detector elements, and a method of making it
US7075079B2 (en) * 2001-06-27 2006-07-11 Wood Roland A Sensor for dual wavelength bands
US6806454B1 (en) 2002-05-31 2004-10-19 Analog Devices, Inc. Image sensors with via-coupled photoconductive mediums
FR2844635B1 (fr) * 2002-09-16 2005-08-19 Commissariat Energie Atomique Dispositif detecteur de rayonnement electromagnetique avec boitier integre comportant deux detecteurs superposes
US7015479B2 (en) * 2003-07-31 2006-03-21 Eastman Kodak Company Digital film grain
FR2864065B1 (fr) * 2003-12-22 2006-02-24 Univ Toulouse Utilisation de ferrites spinelles comme materiau sensible pour dispositifs bolometriques de detection de l'infrarouge.
JP5201780B2 (ja) * 2004-06-14 2013-06-05 ルネサスエレクトロニクス株式会社 光検出器および光検出装置
FR2889589B1 (fr) * 2005-08-04 2008-09-26 Commissariat Energie Atomique Detecteur thermique de rayonnements electromagnetiques a elements d'isolation orientes et dispositif de detection mettant en oeuvre de tels detecteurs
CN100453986C (zh) * 2005-09-06 2009-01-21 中国科学技术大学 光学读出红外传感器
US7655909B2 (en) * 2006-01-26 2010-02-02 L-3 Communications Corporation Infrared detector elements and methods of forming same
US7459686B2 (en) * 2006-01-26 2008-12-02 L-3 Communications Corporation Systems and methods for integrating focal plane arrays
US7462831B2 (en) * 2006-01-26 2008-12-09 L-3 Communications Corporation Systems and methods for bonding
DE102006036049A1 (de) * 2006-08-02 2008-02-07 Adc Automotive Distance Control Systems Gmbh Elektronische Baugruppe, Verfahren zur Herstellung einer derartigen elektronischen Baugruppe, sowie Strahlungssensor-Baugruppe mit einer derartigen elektronischen Baugruppe
US7718965B1 (en) 2006-08-03 2010-05-18 L-3 Communications Corporation Microbolometer infrared detector elements and methods for forming same
US8153980B1 (en) * 2006-11-30 2012-04-10 L-3 Communications Corp. Color correction for radiation detectors
FR2919387B1 (fr) * 2007-07-26 2010-05-21 Commissariat Energie Atomique Dispositif de detection bispectrale et detecteur bispectral comportant un tel dispositif.
EP2104340A1 (de) * 2008-03-19 2009-09-23 Barco N.V. Kombinierte Wärme- und Sicht-Abbildung
US20090278929A1 (en) * 2008-05-06 2009-11-12 Flir Systems Inc Video camera with interchangable optical sensors
KR20100039171A (ko) * 2008-10-07 2010-04-15 삼성전자주식회사 가시광-적외선 복합 센서 및 그 제조 방법
FR2941329B1 (fr) * 2009-01-19 2011-03-04 Ulis Detecteur bispectral.
US7915585B2 (en) * 2009-03-31 2011-03-29 Bae Systems Information And Electronic Systems Integration Inc. Microbolometer pixel and fabrication method utilizing ion implantation
DE102009029343A1 (de) * 2009-09-10 2011-03-24 Robert Bosch Gmbh Sensor zur Detektion von thermischer Strahlung
FR2966976B1 (fr) * 2010-11-03 2016-07-29 Commissariat Energie Atomique Imageur monolithique multispectral visible et infrarouge
US8765514B1 (en) 2010-11-12 2014-07-01 L-3 Communications Corp. Transitioned film growth for conductive semiconductor materials
US8471204B2 (en) 2010-12-23 2013-06-25 Flir Systems, Inc. Monolithic electro-optical polymer infrared focal plane array
JP5988020B2 (ja) * 2012-03-26 2016-09-07 日本電気株式会社 固体撮像素子及びその製造方法
FR2999338B1 (fr) * 2012-12-10 2017-12-08 Soc Fr De Detecteurs Infrarouges - Sofradir Imageur monolithique multispectral visible et infrarouge
US10057509B2 (en) 2014-05-30 2018-08-21 Flir Systems, Inc. Multiple-sensor imaging system
FR3026877B1 (fr) 2014-10-03 2018-01-05 Commissariat A L'energie Atomique Et Aux Energies Alternatives Capteur d'empreintes digitales ou palmaires
WO2016112355A2 (en) * 2015-01-09 2016-07-14 Apple Inc. Polarization selective, frequency selective, and wide dynamic range detectors, imaging arrays, readout integrated circuits, and sensor systems
CN109132994A (zh) * 2018-07-11 2019-01-04 上海华虹宏力半导体制造有限公司 Mems电极微桥形成方法
CN112464799A (zh) * 2020-11-25 2021-03-09 京东方科技集团股份有限公司 指纹识别基板及其制备方法、识别方法和显示装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130274A (ja) * 1983-12-19 1985-07-11 Toshiba Corp 固体撮像装置
JPH0652802B2 (ja) * 1984-11-12 1994-07-06 株式会社東芝 受光装置
DE68923589T2 (de) * 1988-08-12 1996-01-18 Texas Instruments Inc Infrarot-Detektor.
US5286976A (en) * 1988-11-07 1994-02-15 Honeywell Inc. Microstructure design for high IR sensitivity
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
US5451786A (en) * 1994-04-19 1995-09-19 Santa Barbara Research Center Uncooled mis capacitor for infrared detection
US5811815A (en) * 1995-11-15 1998-09-22 Lockheed-Martin Ir Imaging Systems, Inc. Dual-band multi-level microbridge detector
US5818051A (en) * 1996-04-04 1998-10-06 Raytheon Ti Systems, Inc. Multiple color infrared detector
FR2752299B1 (fr) * 1996-08-08 1998-09-11 Commissariat Energie Atomique Detecteur infrarouge et procede de fabication de celui-ci
US6097031A (en) * 1997-07-25 2000-08-01 Honeywell Inc. Dual bandwith bolometer
FR2773215B1 (fr) 1997-12-31 2000-01-28 Commissariat Energie Atomique Detecteur thermique bolometrique

Also Published As

Publication number Publication date
FR2781927B1 (fr) 2001-10-05
US6320189B1 (en) 2001-11-20
DE69935377T2 (de) 2007-11-15
EP0977275B1 (de) 2007-03-07
EP0977275A1 (de) 2000-02-02
FR2781927A1 (fr) 2000-02-04

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