DE69935575D1 - Mikrogefertigte kammer gefült mit gas und deren mikroherstellungsverfahren - Google Patents

Mikrogefertigte kammer gefült mit gas und deren mikroherstellungsverfahren

Info

Publication number
DE69935575D1
DE69935575D1 DE69935575T DE69935575T DE69935575D1 DE 69935575 D1 DE69935575 D1 DE 69935575D1 DE 69935575 T DE69935575 T DE 69935575T DE 69935575 T DE69935575 T DE 69935575T DE 69935575 D1 DE69935575 D1 DE 69935575D1
Authority
DE
Germany
Prior art keywords
micro
manufacturing
gas
chamber filled
made chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69935575T
Other languages
English (en)
Other versions
DE69935575T2 (de
Inventor
Goeran Stemme
Edvard Kaelvesten
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Instrumentarium Oyj
Original Assignee
Instrumentarium Oyj
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Instrumentarium Oyj filed Critical Instrumentarium Oyj
Publication of DE69935575D1 publication Critical patent/DE69935575D1/de
Application granted granted Critical
Publication of DE69935575T2 publication Critical patent/DE69935575T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/202—Filters comprising a gas or vapour
DE69935575T 1998-01-23 1999-01-23 Mikrogefertigte Kammer gefüllt mit Gas und deren Mikroherstellungsverfahren Expired - Lifetime DE69935575T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12660 1998-01-23
US09/012,660 US6124145A (en) 1998-01-23 1998-01-23 Micromachined gas-filled chambers and method of microfabrication
PCT/IB1999/000129 WO1999037995A1 (en) 1998-01-23 1999-01-23 Micromachined gas-filled chambers and method of microfabrication

Publications (2)

Publication Number Publication Date
DE69935575D1 true DE69935575D1 (de) 2007-05-03
DE69935575T2 DE69935575T2 (de) 2007-11-29

Family

ID=21756069

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69935575T Expired - Lifetime DE69935575T2 (de) 1998-01-23 1999-01-23 Mikrogefertigte Kammer gefüllt mit Gas und deren Mikroherstellungsverfahren

Country Status (4)

Country Link
US (2) US6124145A (de)
EP (1) EP1049921B1 (de)
DE (1) DE69935575T2 (de)
WO (1) WO1999037995A1 (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0951068A1 (de) * 1998-04-17 1999-10-20 Interuniversitair Micro-Elektronica Centrum Vzw Herstellungsverfahren für eine Mikrostruktur mit Innenraum
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
US20070181781A1 (en) * 2001-03-06 2007-08-09 Digital Optics Corporation Integrated optical transceiver
US6951797B1 (en) * 1999-10-19 2005-10-04 Imego Ab Method relating to anodic bonding
AU2001287139A1 (en) * 2000-10-10 2002-04-22 Lightcross, Inc Waveguide having a light drain
WO2002084754A2 (en) * 2000-10-25 2002-10-24 Washington State University Research Foundation Piezoelectric micro-transducers, methods of use and manufacturing methods for same
US6387723B1 (en) * 2001-01-19 2002-05-14 Silicon Light Machines Reduced surface charging in silicon-based devices
US6792180B1 (en) 2001-03-20 2004-09-14 Kotura, Inc. Optical component having flat top output
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
DE10149139A1 (de) * 2001-10-05 2003-04-24 Bosch Gmbh Robert Verfahren zum Erzeugen von Hohlräumen mit einer optisch transparenten Wandung
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
DE10214769A1 (de) * 2002-04-03 2003-10-16 Bosch Gmbh Robert Vorrichtung und Sensor zur Aufnahme von Lichtsignalen sowie Herstellungsverfahren
US6871942B2 (en) * 2002-04-15 2005-03-29 Timothy R. Emery Bonding structure and method of making
JP2005524112A (ja) * 2002-04-29 2005-08-11 フラウンホーファー−ゲゼルシャフト・ツール・フェルデルング・デル・アンゲヴァンテン・フォルシュング・アインゲトラーゲネル・フェライン チップの保護装置およびチップの作動方法
US6759309B2 (en) * 2002-05-28 2004-07-06 Applied Materials, Inc. Micromachined structures including glass vias with internal conductive layers anodically bonded to silicon-containing substrates
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
US20050007118A1 (en) * 2003-04-09 2005-01-13 John Kitching Micromachined alkali-atom vapor cells and method of fabrication
US20050161381A1 (en) * 2004-01-27 2005-07-28 Norman Wesley M. Tortuous path in diffusion bonded plates for fluid handling
US7691723B2 (en) * 2005-01-07 2010-04-06 Honeywell International Inc. Bonding system having stress control
KR20070071965A (ko) * 2005-12-30 2007-07-04 삼성전자주식회사 실리콘 직접 접합 방법
DE102006032047A1 (de) * 2006-07-10 2008-01-24 Schott Ag Verfahren zur Herstellung optoelektronischer Bauelemente und damit hergestellte Erzeugnisse
JP5139766B2 (ja) * 2007-10-15 2013-02-06 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法
US8552829B2 (en) 2010-11-19 2013-10-08 Infineon Technologies Austria Ag Transformer device and method for manufacturing a transformer device
CN111213050A (zh) 2017-10-12 2020-05-29 新加坡科技研究局 化学品传感器及其形成方法
DE102018120061A1 (de) * 2018-08-17 2020-02-20 Infineon Technologies Ag Ein Detektormodul für einen photoakustischen Gassensor
GB2585647A (en) * 2019-07-08 2021-01-20 Univ Strathclyde Vapour cell
CN117083514A (zh) 2021-03-04 2023-11-17 哈恩-席卡德应用研究学会 用于对mems单元中的参考气体进行封闭的方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3745349A (en) * 1971-11-18 1973-07-10 M Liston Single path,dual source radiant energy analyzer
US4084096A (en) * 1977-02-14 1978-04-11 Edwards Miles L Electrically activated infrared source
DE3466127D1 (en) * 1983-05-09 1987-10-15 Shaye Communications Ltd Element
US4668374A (en) * 1986-07-07 1987-05-26 General Motors Corporation Gas sensor and method of fabricating same
US4943032A (en) * 1986-09-24 1990-07-24 Stanford University Integrated, microminiature electric to fluidic valve and pressure/flow regulator
US4914720A (en) * 1986-12-04 1990-04-03 Cascadia Technology Corporation Gas analyzers
US5343064A (en) * 1988-03-18 1994-08-30 Spangler Leland J Fully integrated single-crystal silicon-on-insulator process, sensors and circuits
US4922116A (en) * 1988-08-04 1990-05-01 Hughes Aircraft Company Flicker free infrared simulator with resistor bridges
FI85426C (fi) * 1990-08-03 1992-04-10 Vaisala Oy Anordning och foerfarande foer maetning av halten av en gas.
US5285131A (en) * 1990-12-03 1994-02-08 University Of California - Berkeley Vacuum-sealed silicon incandescent light
EP0581376A1 (de) * 1992-07-28 1994-02-02 Koninklijke Philips Electronics N.V. Gastentladungslampe und Verfahren zur Herstellung derselben mittels Mikro-Bearbeitungstechnologie
FI101911B1 (fi) * 1993-04-07 1998-09-15 Valtion Teknillinen Sähköisesti moduloitava terminen säteilylähde ja menetelmä sen valmistamiseksi
FI110727B (fi) * 1994-06-23 2003-03-14 Vaisala Oyj Sähköisesti moduloitava terminen säteilylähde
US6127629A (en) * 1994-10-03 2000-10-03 Ford Global Technologies, Inc. Hermetically sealed microelectronic device and method of forming same
FI102696B1 (fi) * 1995-02-22 1999-01-29 Instrumentarium Oy Kaksoissäteilylähdekokoonpano ja mittausanturi
JPH0989773A (ja) * 1995-09-20 1997-04-04 Horiba Ltd 赤外線ガス分析計
US5768083A (en) * 1996-10-30 1998-06-16 Tekna Seal, Inc. Method of suppressing electrostatic energy in glass-to-metal hermetic seal devices
US5892140A (en) * 1997-04-30 1999-04-06 Honeywell Inc. Micromachined inferential opto-thermal gas sensor
US6074891A (en) * 1998-06-16 2000-06-13 Delphi Technologies, Inc. Process for verifying a hermetic seal and semiconductor device therefor

Also Published As

Publication number Publication date
US6548322B1 (en) 2003-04-15
US6124145A (en) 2000-09-26
EP1049921B1 (de) 2007-03-21
EP1049921A1 (de) 2000-11-08
DE69935575T2 (de) 2007-11-29
WO1999037995A1 (en) 1999-07-29

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