DE69941866D1 - Schutz gegen elektrostatische Entladung für integrierte Sensorschaltungen mit Passivierung - Google Patents

Schutz gegen elektrostatische Entladung für integrierte Sensorschaltungen mit Passivierung

Info

Publication number
DE69941866D1
DE69941866D1 DE69941866T DE69941866T DE69941866D1 DE 69941866 D1 DE69941866 D1 DE 69941866D1 DE 69941866 T DE69941866 T DE 69941866T DE 69941866 T DE69941866 T DE 69941866T DE 69941866 D1 DE69941866 D1 DE 69941866D1
Authority
DE
Germany
Prior art keywords
passivation
electrostatic discharge
discharge protection
integrated sensor
sensor circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69941866T
Other languages
English (en)
Inventor
Danielle A Thomas
Frank Randolph Bryant
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics lnc USA
Original Assignee
STMicroelectronics lnc USA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics lnc USA filed Critical STMicroelectronics lnc USA
Application granted granted Critical
Publication of DE69941866D1 publication Critical patent/DE69941866D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1329—Protecting the fingerprint sensor against damage caused by the finger
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/931—Silicon carbide semiconductor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/953—Making radiation resistant device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/958—Passivation layer
DE69941866T 1998-02-17 1999-02-17 Schutz gegen elektrostatische Entladung für integrierte Sensorschaltungen mit Passivierung Expired - Fee Related DE69941866D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/024,094 US6091082A (en) 1998-02-17 1998-02-17 Electrostatic discharge protection for integrated circuit sensor passivation

Publications (1)

Publication Number Publication Date
DE69941866D1 true DE69941866D1 (de) 2010-02-11

Family

ID=21818842

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69941866T Expired - Fee Related DE69941866D1 (de) 1998-02-17 1999-02-17 Schutz gegen elektrostatische Entladung für integrierte Sensorschaltungen mit Passivierung

Country Status (3)

Country Link
US (4) US6091082A (de)
EP (1) EP0938131B1 (de)
DE (1) DE69941866D1 (de)

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Also Published As

Publication number Publication date
EP0938131A3 (de) 2000-12-06
US6610555B1 (en) 2003-08-26
US6472246B1 (en) 2002-10-29
EP0938131A2 (de) 1999-08-25
US6180989B1 (en) 2001-01-30
US6091082A (en) 2000-07-18
EP0938131B1 (de) 2009-12-30

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