DE9102748U1 - - Google Patents

Info

Publication number
DE9102748U1
DE9102748U1 DE9102748U DE9102748U DE9102748U1 DE 9102748 U1 DE9102748 U1 DE 9102748U1 DE 9102748 U DE9102748 U DE 9102748U DE 9102748 U DE9102748 U DE 9102748U DE 9102748 U1 DE9102748 U1 DE 9102748U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9102748U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE9102748U priority Critical patent/DE9102748U1/de
Publication of DE9102748U1 publication Critical patent/DE9102748U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
DE9102748U 1991-01-14 1991-03-07 Expired - Lifetime DE9102748U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9102748U DE9102748U1 (en) 1991-01-14 1991-03-07

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE9100388 1991-01-14
DE9102748U DE9102748U1 (en) 1991-01-14 1991-03-07

Publications (1)

Publication Number Publication Date
DE9102748U1 true DE9102748U1 (en) 1991-07-04

Family

ID=25957769

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9102748U Expired - Lifetime DE9102748U1 (en) 1991-01-14 1991-03-07

Country Status (1)

Country Link
DE (1) DE9102748U1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0569899A1 (en) * 1992-05-12 1993-11-18 The Foxboro Company An overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
FR2700003A1 (en) * 1992-12-28 1994-07-01 Commissariat Energie Atomique Method for manufacturing a pressure sensor using silicon on insulator technology and sensor obtained.
EP0610806A1 (en) * 1993-02-12 1994-08-17 CSEM, Centre Suisse d'Electronique et de Microtechnique S.A. Capacitive absolute pressure sensor and procedure for fabrication of a plurality of such sensors
WO1996013705A1 (en) * 1994-10-29 1996-05-09 Joshua Lanter Process for producing lead-throughs for electric lines through gastight connections between glass and silicon or the like and gastight lead-throughs in such connections and pressure sensors comprising such lead-throughs
WO2000002028A1 (en) * 1998-07-07 2000-01-13 The Goodyear Tire & Rubber Company Method of fabricating silicon capacitive sensor
EP1016135A1 (en) * 1997-07-18 2000-07-05 Kavlico Corporation Fusion-bond electrical feed-through
DE102004006199B4 (en) * 2004-02-09 2015-09-03 Robert Bosch Gmbh Micromechanical pressure sensor for high pressures

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5344523A (en) * 1992-05-12 1994-09-06 The Foxboro Comany Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
US5323656A (en) * 1992-05-12 1994-06-28 The Foxboro Company Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
EP0569899A1 (en) * 1992-05-12 1993-11-18 The Foxboro Company An overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
FR2700003A1 (en) * 1992-12-28 1994-07-01 Commissariat Energie Atomique Method for manufacturing a pressure sensor using silicon on insulator technology and sensor obtained.
US5510276A (en) * 1992-12-28 1996-04-23 Commissariat A L'energie Atomique Process for producing a pressure transducer using silicon-on-insulator technology
US5488869A (en) * 1993-02-12 1996-02-06 Csem Centre Suisse D'electronique Et De Microtechnique Sa Capacitive absolute pressure measurement sensor and method of manufacturing a plurality of such sensors
FR2701564A1 (en) * 1993-02-12 1994-08-19 Suisse Electronique Microtech Capacitive-type absolute pressure sensor and method of manufacturing a plurality of such sensors.
EP0610806A1 (en) * 1993-02-12 1994-08-17 CSEM, Centre Suisse d'Electronique et de Microtechnique S.A. Capacitive absolute pressure sensor and procedure for fabrication of a plurality of such sensors
WO1996013705A1 (en) * 1994-10-29 1996-05-09 Joshua Lanter Process for producing lead-throughs for electric lines through gastight connections between glass and silicon or the like and gastight lead-throughs in such connections and pressure sensors comprising such lead-throughs
EP1016135A1 (en) * 1997-07-18 2000-07-05 Kavlico Corporation Fusion-bond electrical feed-through
EP1016135A4 (en) * 1997-07-18 2006-06-21 Kavlico Corp Fusion-bond electrical feed-through
WO2000002028A1 (en) * 1998-07-07 2000-01-13 The Goodyear Tire & Rubber Company Method of fabricating silicon capacitive sensor
US6452427B1 (en) 1998-07-07 2002-09-17 Wen H. Ko Dual output capacitance interface circuit
DE102004006199B4 (en) * 2004-02-09 2015-09-03 Robert Bosch Gmbh Micromechanical pressure sensor for high pressures

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