EP0069327A2 - Method of laser annealing a subsurface region in a semiconductor - Google Patents

Method of laser annealing a subsurface region in a semiconductor Download PDF

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Publication number
EP0069327A2
EP0069327A2 EP82105775A EP82105775A EP0069327A2 EP 0069327 A2 EP0069327 A2 EP 0069327A2 EP 82105775 A EP82105775 A EP 82105775A EP 82105775 A EP82105775 A EP 82105775A EP 0069327 A2 EP0069327 A2 EP 0069327A2
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EP
European Patent Office
Prior art keywords
region
annealing
ions
laser
implanted
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EP82105775A
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German (de)
French (fr)
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EP0069327B1 (en
EP0069327A3 (en
Inventor
Howard Helge Hansen
Jerome Brett Lasky
Ronald R. Silverman
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International Business Machines Corp
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International Business Machines Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/092—Laser beam processing-diodes or transistor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/093—Laser beam treatment in general

Definitions

  • the present invention relates to a method of annealing ion implanted regions buried in a semiconductor body by a radiation of the implanted region with a continuous wave laser having an emission frequency which the ion implanted regions will absorb strongly.
  • the present invention may be particularly and advantageously used in the formation of vertical bipolar integrated circuits.
  • junctions lying less than 0.35 pm from the surface of the body can be annealed with a laser beam without substantial thermal diffusion of the implanted ions.
  • precisely controlled junctions could be realized.
  • U.S. Patent 4 151 008 is representative of a substantial amount of literature which teaches that a laser beam having a pulse duration on the order of one millisecond can be used for purposes of annealing surface areas of semiconductor devices.
  • the present invention intends to provide a method of annealing buried ion implanted regions in a semiconductor body without the undesirable effects of thermal diffusion of the implanted species.
  • the method of the present invention includes irradiation of the implanted region by a continuous laser having an emission frequency at which ion implanted regions absorb strongly and at which the unimplanted regions are substantially unabsorbing.
  • This annealing can be done by using continuous lasers whose emission wavelength is passed through the unimplanted portion of the body without any substantial absorption but is substantially absorbed in the buried implanted regions of the body.
  • the absorption of the laser emission wavelength causes solid state regrowth and electrical activation of the implanted species in the implanted region without substantial thermal diffusion of the implanted species.
  • the present invention further intends to provide a laser annealing method melting or deleteriously altering the structure of the surface layers of the semiconductor body being annealed.
  • This is achieved by a method of forming and annealing deep buried ion implanted regions in a semiconductor body comprising ion implanting impurity ions into a crystalline semiconductor body to provide a buried region having a high concentration of the impurity ions at a predetermined depth below the surface of the body, and annealing the buried region by exposure to the light emitted by a continuous laser having an emission frequency to which the unimplanted body is substantially transparent but which is substantially absorbed by the buried region.
  • the method of the present invention may be advantageously employed in the production of vertical bipolar integrated circuits.
  • Selected oxide isolation regions 11 are formed in a silicon body 10 comprised of p-type material and having a resistivity in the order of 10 Q cm.
  • the oxide region 11 preferably extends into the body up to 5 pm.
  • the formation of such isolation regions 11 is well known to the semiconductor art and basically employs etching and thermal oxidation techniques.
  • an oxide layer 12 may be formed on the entire surface 13 of the body .10 . Again such oxidation techniques are well known in the semiconductor industry.
  • the body 1 0 is subjected to a blanket ion implantation of phosphorous ions at an energy level of, for example, 400 keV and a 15 2 dosage of 1 to 5 x 10 15 ions per cm 2 .
  • This ion implantation step is carried out using standard ion implantation techniques well known to the art.
  • This ion implantation step creates an n-type surface region 14 in the body having an impurity distribution of the implanted ion as indicated by the curve 18.
  • the distribution of the implanted ions in the region .14 basically comprises a Gaussian curve having an extended tail reaching toward the surface 13 .
  • the region 14 may be roughly characterized into three regions 15 , 16 and 17 .
  • the most highly doped region 16 is usually located from 0.5 to 5 ⁇ m below the surface 13 and contains the peak concentration of ions which is approximately 1 0 20 atoms per cm 3 . However, the peak concentration could range from 1 0 15 to 3 10 21 atoms per cm 3 .
  • Such ion implantation causes damage in the semiconductor lattice. This damage must be annealed out of the semiconductor lattice and the implanted ions themselves moved into substitutional positions in the lattice where they are electrically active. To achieve this desired result / the following method is employed.
  • the body 10 is heated to about 300°C. After the body reaches this temperature, the body is exposed to the emission spectra of a laser having an emission wavelength larger than 600 nm.
  • a continuous neodynimum: y_ttrium aluminum garnet (Nd:YAG) laser operating at a wavelength of 1.06 pm, meets this requirement and was used in the actual experiments.
  • the oxide layer 12 which is transparent to the light emitted by this laser.
  • the laser beam penetrates the underlying region 14 it becomes absorbed by the damaged sites within semiconductor lattice. This absorption of the light heats the region, anneals the damage and causes the implanted dopant ions in the vicinity to become electrically active by causing the ions to move into electrically active substitutional positions in the lattice. This occurs without causing melting of the lattice.
  • the distribution of damage in the implanted region can, for all practical purposes, be considered to have the same distribution as the implanted regions.
  • the energy of the laser beam will be most strongly absorbed in the heavily implanted region 16, and less strongly absorbed in the more lightly implanted regions 15 and 17.
  • heating of the semiconductor wafer to about 300 0 C eliminates the effect damage to the wafer such as slip dislocation.
  • This heating results in this improvement because it reduces the effect of two deleterious mechanisms which are present in all continuous wave neodymium-YAG annealing, that is, the decreasing thermal conductivity of the silicon as the substrate temperature increases and the increasing absorption coefficient of the silicon with increasing temperature.
  • any of the laser emission spectra unabsorbed by the implanted region passes through to the substrate 10 and is only weakly absorbed causing little effect.
  • base and emitter base regions 20 and 21 using additional ion implantation techniques. Specifically arsenic ions can be implanted.at 25 keV to a level of 8 x 10 15 ions per cm 2 to create an emitter, following which boron ions also at an energy level of 25 keV and a density of 4 x 10 13 ions per cm 2 can be deposited to create the base region.
  • the implantation and activation of the implanted ions in the emitter and base region results in the formation of a bipolar integrated circuit as taught in U.S. Patent 4111720.

Abstract

A method for annealing an ion implanted region (14) buried in a semiconductor substrate (10) without the undesirable effects of thermal diffusion, which includes the radiation of the substrate by a continuous laser having an emission wavelength longer than 600 nm which the buried ion implanted region will absorb strongly but which will be substantially unabsorbed by the unimplanted regions.Results can be improved when the substrate is heated to approximately 300°C during this laser annealing.

Description

  • The present invention relates to a method of annealing ion implanted regions buried in a semiconductor body by a radiation of the implanted region with a continuous wave laser having an emission frequency which the ion implanted regions will absorb strongly. The present invention may be particularly and advantageously used in the formation of vertical bipolar integrated circuits.
  • Improved very high speed, high performance, integrated circuits, with low resistance collectors are now required by the electronic industry. To meet this need, it has been necessary for the integrated circuit industry to utilize very precise ion implanted regions in non-epitaxial semiconductor bodies.
  • Typical high speed, high performance devices are taught in U.S. Patent 4 111 720 to A. E. Michel et al. This patent describes the formation of non-epitaxial vertical bipolar integrated circuits involving ion implantation. In the formation of such circuits, thermal annealing has been found to be undesirable for it causes substantial diffusion of the implanted ions which prevents the fabrication of sub-micron, bipolar devices with very precisely controlled sub-micron junctions. If precisely controlled junctions are not obtained, the significant advantages which should be realizable from such non-epitaxial vertical bipolar integrated circuits cannot be achieved.
  • With the development of laser annealing it was found that junctions lying less than 0.35 pm from the surface of the body can be annealed with a laser beam without substantial thermal diffusion of the implanted ions. Thus, precisely controlled junctions could be realized.
  • In the Applied Physics Letter, February 1, 1978, pgs. 142-144, Gat and Gibbons teach that ion implantation annealing with substantially no thermal diffusion can be obtained for arsenic implanted regions at the surface of a semiconductor body by use of a continuous argon laser. In the Applied Physics Letter, March 1, 1978, pgs. 276-278, the same authors taught that the method of the above described reference provides 100% electrical activation of the implanted ions. Again, the same authors in the Applied Physics Letter of September 1, 1978, pgs. 389-391, taught that continuous wave lasers, i. e. krypton, provide better control of diffusion profiles since no melting of the body occurs as previously found in pulsed systems.
  • However, in the Solid-State Technology Journal, dated November 1979, on pgs. 59-68, the author Gat, in conjunction with several others, discussed the entire problem of continuous wave annealing and clearly taught on page 66, that deeply implanted ions, lying more than 0.35 pm from the surface of the device, cannot be annealed by laser techniques.
  • Other prior art which may be of interest can be found in the Applied Physics Letter, September 15, 1978, pgs. 542-544, where Williams et al teach that continuous wave laser annealing is probably due to solid state epitaxial regrowth of damaged silicon and that dwell times of continuous wave argon lasers on the order of milliseconds provide adequate time and temperature to allow regrowth without melting and associated thermal diffusion of the circuit.
  • Also Gatet al, in the Journal of Applied Physics, April 1979, pgs. 2926-2929, taught that heated semiconductor bodies could be utilized during continuous wave, argon annealing and apparently relates the laser energy to that required to raise the anneal portion from its bulk temperature to that required for solid state epitaxial regrowth.
  • IBM Technical Disclosure Bulletin, Vol. 21, # 10, March 1979, pg. 4040, also disclosed the use of the heated substrate during neodymimum laser annealing in order to provide more uniform absorption characteristics by the silicon substrate.
  • U.S. Patent 4 151 008 is representative of a substantial amount of literature which teaches that a laser beam having a pulse duration on the order of one millisecond can be used for purposes of annealing surface areas of semiconductor devices.
  • However, although the prior art described the solution of a number of problems associated with laser annealing of semiconductor bodies, none of them achieved the annealing, by laser technique, of implanted regions located more than 0.35 µm from the surface of the semiconductor body without altering the ion implantation curve.
  • Accordingly, the present invention intends to provide a method of annealing buried ion implanted regions in a semiconductor body without the undesirable effects of thermal diffusion of the implanted species. The method of the present invention includes irradiation of the implanted region by a continuous laser having an emission frequency at which ion implanted regions absorb strongly and at which the unimplanted regions are substantially unabsorbing.
  • It is another object of the present invention to provide an ion implantation method of forming and annealing ion implanted regions more than 0.35 um from the surface of the semiconductor body. This annealing can be done by using continuous lasers whose emission wavelength is passed through the unimplanted portion of the body without any substantial absorption but is substantially absorbed in the buried implanted regions of the body. The absorption of the laser emission wavelength causes solid state regrowth and electrical activation of the implanted species in the implanted region without substantial thermal diffusion of the implanted species.
  • The present invention further intends to provide a laser annealing method melting or deleteriously altering the structure of the surface layers of the semiconductor body being annealed.
  • This is achieved by a method of forming and annealing deep buried ion implanted regions in a semiconductor body comprising ion implanting impurity ions into a crystalline semiconductor body to provide a buried region having a high concentration of the impurity ions at a predetermined depth below the surface of the body, and annealing the buried region by exposure to the light emitted by a continuous laser having an emission frequency to which the unimplanted body is substantially transparent but which is substantially absorbed by the buried region. The method of the present invention may be advantageously employed in the production of vertical bipolar integrated circuits.
  • The foregoing and other objects features advantages of the invention will be apparent from the following more particular description of the preferred embodiment of the invention as illustrated in the accompanying drawing, which shows a large cross-sectional partial view of an ion implanted region in a semiconductor body that can be treated by the present invention together with a curve showing the distribution, that is the concentration variational depth, of the impurities forming the implanted region.
  • Selected oxide isolation regions 11 , of which only one is shown, are formed in a silicon body 10 comprised of p-type material and having a resistivity in the order of 10 Q cm. The oxide region 11 preferably extends into the body up to 5 pm. The formation of such isolation regions 11 is well known to the semiconductor art and basically employs etching and thermal oxidation techniques.
  • Simultaneously, an oxide layer 12 may be formed on the entire surface 13 of the body .10 . Again such oxidation techniques are well known in the semiconductor industry.
  • Following formation of the layer 12, the body 10 is subjected to a blanket ion implantation of phosphorous ions at an energy level of, for example, 400 keV and a 15 2 dosage of 1 to 5 x 1015 ions per cm2. This ion implantation step is carried out using standard ion implantation techniques well known to the art. This ion implantation step creates an n-type surface region 14 in the body having an impurity distribution of the implanted ion as indicated by the curve 18. The distribution of the implanted ions in the region .14 basically comprises a Gaussian curve having an extended tail reaching toward the surface 13 . The region 14 may be roughly characterized into three regions 15 , 16 and 17 . The most highly doped region 16 is usually located from 0.5 to 5 µm below the surface 13 and contains the peak concentration of ions which is approximately 10 20 atoms per cm3. However, the peak concentration could range from 10 15 to 3 1021 atoms per cm3. The regions 15 and 17, bounding region 16, both contain a lesser concentration of ions than does region 16 . Region 15 is terminated by the surface 13 and region 17 is terminated by the p-n junction 19 .
  • As is well known, such ion implantation causes damage in the semiconductor lattice. This damage must be annealed out of the semiconductor lattice and the implanted ions themselves moved into substitutional positions in the lattice where they are electrically active. To achieve this desired result/the following method is employed. The body 10 is heated to about 300°C. After the body reaches this temperature, the body is exposed to the emission spectra of a laser having an emission wavelength larger than 600 nm. Specifically, a continuous neodynimum: y_ttrium aluminum garnet (Nd:YAG) laser, operating at a wavelength of 1.06 pm, meets this requirement and was used in the actual experiments. The laser beam impinging on the body shown in Fig. 1 passes without effect through the oxide layer 12 which is transparent to the light emitted by this laser. As the laser beam penetrates the underlying region 14 it becomes absorbed by the damaged sites within semiconductor lattice. This absorption of the light heats the region, anneals the damage and causes the implanted dopant ions in the vicinity to become electrically active by causing the ions to move into electrically active substitutional positions in the lattice. This occurs without causing melting of the lattice.
  • The distribution of damage in the implanted region can, for all practical purposes, be considered to have the same distribution as the implanted regions. Thus, the energy of the laser beam will be most strongly absorbed in the heavily implanted region 16, and less strongly absorbed in the more lightly implanted regions 15 and 17.
  • It has been found that heating of the semiconductor wafer to about 3000C eliminates the effect damage to the wafer such as slip dislocation. This heating results in this improvement because it reduces the effect of two deleterious mechanisms which are present in all continuous wave neodymium-YAG annealing, that is, the decreasing thermal conductivity of the silicon as the substrate temperature increases and the increasing absorption coefficient of the silicon with increasing temperature.
  • Initial analysis of devices treated in accordance with the above described invention shows that there are no structural defects within the first quarter of a um of the region 14 in which the impurity concentration is 3 less than 2 x 10 ions per cm3. Continuing research indicates that the defect free region extends considerably deeper. This indicates that the laser treatment in accordance with the invention does not cause melting or the other adverse effects associated with the laser annealing treatments disclosed by the prior.art discussed above.
  • Any of the laser emission spectra unabsorbed by the implanted region passes through to the substrate 10 and is only weakly absorbed causing little effect.
  • Following this laser annealing step, base and emitter base regions 20 and 21 using additional ion implantation techniques. Specifically arsenic ions can be implanted.at 25 keV to a level of 8 x 1015 ions per cm 2 to create an emitter, following which boron ions also at an energy level of 25 keV and a density of 4 x 1013 ions per cm2 can be deposited to create the base region. The implantation and activation of the implanted ions in the emitter and base region results in the formation of a bipolar integrated circuit as taught in U.S. Patent 4111720.
  • While the specific example has been described with respect to a npn transistor, it will be obvious that pnp transistors and complementary transistors can also be formed.

Claims (8)

1. A method of annealing a buried ion implanted region (14) in a semiconductor body (10) said buried region being formed by ion implanting impurity ions into said body to provide a high concentration of said impurity ions at a predetermined depth below the surface (13) of said body, characterized by annealing said buried region by exposing said body to the emission of a continuous laser having an emission frequency which is substantially absorbed by said buried region and to which the remainder of said body is substantially transparent.
2. A method of annealing a semiconductor body (10) comprising a deeply buried ion implanted region (14) formed by ion implanting impurity ions into said body to provide said buried region having its highest concentration of impurity ions at a predetermined depth of at least 0.35 pm below the surface (13) of said body, characterized by annealing said buried region by exposure of said body to the light emitted by a continuous laser having an emission wavelength greater than 600 nm, to which the unimplanted body is substantially transparent but which is strongly absorbed by said buried region.
3. The method of claim 1 or 2, wherein said body (10) is heated during exposure to said laser.
4. The method of claim 1 or 2, wherein said body (10) comprises silicon and said implanted ions are phosphorous ions implanted at an energy level of 400 keV with a dosage of 1 to 5 x 1015 ions per cm 2 .
5. The method of claim 1, wherein said emission wavelength of said laser is larger than 600 nm.
6. The method of claim 2 or 5, wherein said laser is a y ttrium aluminum garnet laser operating at a wavelength of about 1060 nm.
7. The method of claim 1 or 2, wherein said buried region (14) lies between 0.5 and 5.0 µm below said surface (13) of said body (10) and the peak concentration of implanted ions ranges from 10 15 to 10 20 ions per cm .
8. The method of claim 1 or 2, wherein after said annealing step a base region (20) and an emitter region (21) are ion implanted in said buried region (14).
EP82105775A 1981-07-08 1982-06-29 Method of laser annealing a subsurface region in a semiconductor Expired EP0069327B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/281,267 US4379727A (en) 1981-07-08 1981-07-08 Method of laser annealing of subsurface ion implanted regions
US281267 1981-07-08

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EP0069327A2 true EP0069327A2 (en) 1983-01-12
EP0069327A3 EP0069327A3 (en) 1984-09-12
EP0069327B1 EP0069327B1 (en) 1987-09-09

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JPS5810822A (en) 1983-01-21
US4379727A (en) 1983-04-12
CA1189768A (en) 1985-07-02
DE3277264D1 (en) 1987-10-15
EP0069327B1 (en) 1987-09-09
EP0069327A3 (en) 1984-09-12
JPS6244849B2 (en) 1987-09-22

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