EP0401996A2 - Process for the manufacture of thermal ink jet printing heads and heads obtained in this way - Google Patents
Process for the manufacture of thermal ink jet printing heads and heads obtained in this way Download PDFInfo
- Publication number
- EP0401996A2 EP0401996A2 EP90305432A EP90305432A EP0401996A2 EP 0401996 A2 EP0401996 A2 EP 0401996A2 EP 90305432 A EP90305432 A EP 90305432A EP 90305432 A EP90305432 A EP 90305432A EP 0401996 A2 EP0401996 A2 EP 0401996A2
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- European Patent Office
- Prior art keywords
- chamber
- layer
- parallel
- support element
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 title claims abstract description 38
- 230000008569 process Effects 0.000 title claims abstract description 36
- 238000007641 inkjet printing Methods 0.000 title claims abstract description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 238000005530 etching Methods 0.000 claims abstract description 19
- 238000010438 heat treatment Methods 0.000 claims abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 7
- 238000005488 sandblasting Methods 0.000 claims abstract description 6
- 239000011810 insulating material Substances 0.000 claims abstract description 3
- 239000010410 layer Substances 0.000 claims description 51
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 8
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 7
- 239000008367 deionised water Substances 0.000 claims description 7
- 229910021641 deionized water Inorganic materials 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 6
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 claims description 6
- 239000011241 protective layer Substances 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 4
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 claims description 3
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 3
- 238000011282 treatment Methods 0.000 claims description 3
- 239000004925 Acrylic resin Substances 0.000 claims description 2
- 229920000178 Acrylic resin Polymers 0.000 claims description 2
- 239000003822 epoxy resin Substances 0.000 claims description 2
- 229920000647 polyepoxide Polymers 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 7
- 239000013043 chemical agent Substances 0.000 claims 2
- 229920002994 synthetic fiber Polymers 0.000 claims 2
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 150000002739 metals Chemical class 0.000 abstract description 2
- 239000011347 resin Substances 0.000 abstract 2
- 229920005989 resin Polymers 0.000 abstract 2
- 238000005520 cutting process Methods 0.000 description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 239000004576 sand Substances 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000002679 ablation Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 229960002050 hydrofluoric acid Drugs 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- RVSGESPTHDDNTH-UHFFFAOYSA-N alumane;tantalum Chemical compound [AlH3].[Ta] RVSGESPTHDDNTH-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
Definitions
- the present invention relates to a process for the manufacture of a thermal ink jet printing head and more particularly to the production of a duct for the ink for a thermal ink jet printing head of the type in which the nozzles, the ink expulsion chambers and the heating elements with the corresponding electric conductors are contained in a multi-layer plate formed by superposed layers of metals and insulating materials fixed on a silicon support.
- thermal ink jet printing heads in which the ink feed duct is obtained by cutting a slit extending through the multi-layer plate for its entire thickness by means of a jet of sand formed by particles of very hard materials, for example alumina, with sizes of the order of 10-25 ⁇ m.
- the sand jet Since such a process is necessarily applied to the complete multi-layer plate, the sand jet must cut into a relatively considerable thickness of the order of 0.5-0.7 mm. In such case, the terminal opening of the slit turns out of very inaccurate geometrical shape, causing a large number of rejects, which make the process more costly.
- the present invention aims to provide a process for cutting the ink duct in a multi-layer plate for a thermal ink jet printing head which is free from the above-mentioned drawbacks.
- Another aim of the invention is to produce cuts for the ink duct of geometrical form in multi-layer plates for thermal ink jet printing heads, which are very accurate, and have clean edges, over a greatly reduced production time.
- the invention provides a process, which is characterised in the manner defined in the main claim.
- a multi-layer plate 1 comprisee a plurality of metal layers and electrically insulating in which each layer is constructed by processes of vacuum deposition and electroforming which are known in the art.
- the ink is contained in chambers 4 produced in one of the layers of the plate 1 and is expelled through nozzles 5 and 5′ disposed in two parallel rows by the effect of the expansion of a vapour bubble generated by the rapid heating of heating elements 8 and 8′ contained in the chambers 4.
- the plate 1 is used on a thermal ink jet dot printing head mounted immovably directly on a main ink reservoir not shown in the drawings.
- Each row of nozzles may contain a variable number of nozzles which is determined on the basis of the printing requirements, such as, for example, the level of definition of the characters.
- the main reservoir communicates with the chambers 4 through a common duct 14 (Fig. 1) produced in the thickness of the plate 1 and through a plurality of feed passages 16 connecting each chamber 4 with the common duct 14.
- the process for cutting the common duct 14 through the thickness of the silicon support 20 is as
- a silicon support plate 20 of a thickness in the range between 400 ⁇ m and 700 ⁇ m is passivated on both faces with a layer 22 and 24, respectively, of silicon dioxide with a thickness, for example, of 1.5 ⁇ m, these layers performing the function of thermal and electrical insulation.
- the layers 22 and 24 are covered with two protective layers 26 and 28 of a photosensitive substance.
- photosensitive substances are normally epoxy and/or acrylic resins polymerizable by the effect of light radiation.
- the protective layer 28 is removed by the known photolithographic technique to form an aperture 30 (Fig. 2) of rectangular form extending lengthwise in the direction parallel to the crystallographic orientation ⁇ 110> of the silicon support 20. Consequently, the rows of heating elements 8 and 8′ will be aligned parallel to this direction.
- the aperture 30 leaves free a zone 32 (Fig.2) of the layer 24 of silicon dioxide.
- the zone 32 is thereafter removed chemically with a selective, hydrofluoric acid (HF) based solution to uncover a portion 34 of the support 20 (Fig. 3).
- HF hydrofluoric acid
- the support 20 is constituted by crystalline silicon having a standard crystallographic orientation of ⁇ 100> , the etching action of the anisotropic attack solution develops predominantly in accordance with the orientation of ⁇ 100> and much less in accordance with the associated orientation of ⁇ 111>.
- the orientation ⁇ 100> corresponds to a direction X (Fig. 2) perpendicular to the outer faces of the support 20
- the orientation ⁇ 100> represents a direction Y perpendicular to X
- the orientation ⁇ 111> represents a direction Z perpendicular to Y and forming with the direction X a characteristic angle ⁇ dependent on the form of the crystal lattice of the material of the support 20. Therefore, the groove 35 (Fig. 2)
- a truncated pyramid (Fig. 4) which is obtained after the etching process has in cross-section the form of a truncated pyramid (Fig. 4) having as its greater base the surface 34 (Fig. 3) parallel to the outer faces of the support 20 and as its smaller or truncation base a surface 36 (Fig. 4) parallel to the surface 34, the width L of which depends on the depth H1 reached by the etching and on the width L1 of the zone 34.
- the length of the groove 35 in the direction perpendicular to the drawing depends on the number of nozzles 5 employed in each row.
- the lateral surfaces 38 and 40 have a characteristic inclination ⁇ with respect to the greater base 34 of about 54 o , corresponding to the angle between the crystallographic orientations ⁇ 100> and ⁇ 111> of the silicon support 20.
- etching of the groove 35 (Fig.4) is continued for an attack time T depending on the attack gradient G100 and until the end surface 36 reaches a depth H1 comprised between 60% and 90% of the thickness H of the support 20.
- the depth H1 of the groove 35 to be etched is about 400 ⁇ m.
- the attack time T lasts 8 hours and 55 minutes.
- metal layers are successively deposited under vacuum on the layer 22 of silicon dioxide by known deposition techniques to form the heating elements 8, 8′ and the corresponding electric conductors, for example as described in Italian Patent Application No. 67044 A/89, dated 26.1.89, in the name of the Applicant.
- the silicon dioxide layer 22 is covered with a layer 44 (Fig. 5) between 500 and 2000 A thick of an electrically resistive metal, for example a 50/50 tantalum-aluminium alloy.
- the layer 44 is then etched by a known process of dry etching under vacuum to form two pluralities of independent resistive elements 8 and 8′ for heating the ink.
- the Ta-Al elements 8, 8′ are covered with a layer 46 of aluminium with a thickness comprised between 2000 and 10,000 A.
- the layer 46 is then etched by a process similar to the foregoing to obtain electric conductors 47 for supplying the heating elements 8 and 8′.
- On the aluminium layer 46 there are then deposited two layers 50 and 52 of electrically insulating, but thermally conductive, materials.
- the layer 50 in contact with the aluminium conductors 47 is constituted by silicon nitride, while the overlying layer 52 is constituted by silicon carbide. In total, the two layers 50 and 52 have a thickness compsised between 2000 and 20,000 A.
- a layer 56 of tantalum of a thickness between 1000 A and 10,000 A is thereafter deposited by known techniques on the layer 52.
- the layer 56 is then etched under vacuum to obtain separate and parallel strips superposed on the conductors 47.
- the layer 56 has a dual function of protection of the ink of the subjacent resistive and insulating layers and of electrical connection between the conductors 47 and connecting terminals (not shown) towards the outside.
- the layers 44, 46, 50, 52 and 56 are interrupted in an intermediate zone 60 (Fig. 5) between the two rows of the heating elements 8 and 8′, leaving free a part 62 of the layer 22. More particularly, the tantalum layer 56 also covers the edges 58 of the subjacent layers to protect them from possible infiltrations of acids employed in the etching treatments and from the ink during the operation of the head.
- a jet of sand formed predominantly of alumina particles of an average size of about 20 ⁇ m is directed against the end surface 36 in a direction perpendicular to the surface itself.
- the sandblasting operation is interrupted when an opening 63 (Fig. 6) defined by two plane and parallel walls 64 and 66 has been obtained in the surface 62.
- the walls 64 and 66 are connected at one end to the lateral surfaces 38 and 40, respectively, of the groove 35 and intersect at the other end (at the top in Fig.6) the surface 62.
- the walls 64 and 66 and the surface 62 therefore define a parallelepipedal chamber 69 having the truncation base 36 in common with the pyramidal chamber.
- a layer 74 of photosensitive material for example Vacrel (Registered Trade Mark), in which the chambers 4 and the feed passages 16 are obtained by a photolithographic process.
- a sheet 76 of gold-plated nickel bearing the nozzles 5 and 5′ is hot-soldered to the layer 74.
- thermal ink jet head may undergo variations of modifications and that the thermal head so constructed may be modified in form and dimensions without, however, departing from the scope of the invention.
- the sandblasting process previously described may be substituted alternatively by a process of cutting by means of a laser beam of the "excimer” (excited dimer) type.
- This type of laser is particularly suitable for machining solid materials, such as, for example, silicon and silicon dioxide, inasmuch as the excimer laser operates in a cold state without overheating the parts machined and without leaving traces of melting on the surfaces struck by the laser beam.
- the excimer laser beam generates a very small portion of heat, inasmuch as the energy of the laser beam acts on the molecular bonds of the struck material, overcoming the forces of cohesion.
- the removal of material therefore takes place by ablation of particles, rather than through thermal phenomena such as melting, vaporization or sublimation.
- This mechanism of ablation of particles confers on the machined parts a degree of precision much higher than that obtainable with other conventional types of laser beams, such as a CO2 or YAG laser beam.
- a disc 80 (Fig.7) of silicon of circular form with a diameter of about 100 mm and about 0.5 mm thick is normally used as the supporting base 20.
- a cutaway portion 81 at the edge of the disc 80 commonly indicates the crystallographic orientation ⁇ 100> of the disc 80.
- numerous identical configurations 82 of plates which, when construction has taken place, are separated by means of crossed cuts in the support disc along intermediate lines 83.
- Fig. 8 shows on an enlarged scale a part 84 of the disc 80 comprising a slot 63 seen from the direction of the surface 62 of Fig. 6.
- a panel 85 in chain-dotted lines represents the area occupied on the surface of the disc 80 by the layers 50, 52, 56 (Fig. 5) of each individual plate.
- the process hereinbefore described for etching slots for feeding the ink in each individual plate finds valid application, enabling a plurality of slots of the type of the groove 35 (Fig. 4) to be obtained simultaneously with a single etching operation, with a considerable reduction in the working times and costs.
Abstract
Description
- The present invention relates to a process for the manufacture of a thermal ink jet printing head and more particularly to the production of a duct for the ink for a thermal ink jet printing head of the type in which the nozzles, the ink expulsion chambers and the heating elements with the corresponding electric conductors are contained in a multi-layer plate formed by superposed layers of metals and insulating materials fixed on a silicon support.
- There are known in the art thermal ink jet printing heads in which the ink feed duct is obtained by cutting a slit extending through the multi-layer plate for its entire thickness by means of a jet of sand formed by particles of very hard materials, for example alumina, with sizes of the order of 10-25 µm.
- Since such a process is necessarily applied to the complete multi-layer plate, the sand jet must cut into a relatively considerable thickness of the order of 0.5-0.7 mm. In such case, the terminal opening of the slit turns out of very inaccurate geometrical shape, causing a large number of rejects, which make the process more costly.
- Also known is the cutting of the common duct for the ink in a multi-layer plate for an ink jet head by means of a laser beam of conventional type, for example YAG,CO₂. Since the conventional types of laser beams operate by thermal effect, they cause the melting of a surface layer of the sides of the cut.
- When this molten layer solidifies, it becomes very fragile and, by reason of the thermal stresses due to its cooling, is subject to extensive cracking. In consequence, infiltration of ink will occur through these cracks during the working of the head, with a consequent reduction in the life of the head.
- Therefore, the present invention aims to provide a process for cutting the ink duct in a multi-layer plate for a thermal ink jet printing head which is free from the above-mentioned drawbacks.
- Another aim of the invention is to produce cuts for the ink duct of geometrical form in multi-layer plates for thermal ink jet printing heads, which are very accurate, and have clean edges, over a greatly reduced production time.
- Accordingly, the invention provides a process, which is characterised in the manner defined in the main claim.
- An embodiment of the invention will now be described by way of example only, and, with reference to the accompanying drawings in which:
- Fig. 1 represents diagrammatically a cross section of a multi-layer plate obtained according to the invention;
- Figs. 2 - 8 represent successive stages of working of the plate of Fig. 1.
- Referring to Fig. 1, a multi-layer plate 1 comprisee a plurality of metal layers and electrically insulating in which each layer is constructed by processes of vacuum deposition and electroforming which are known in the art.
- The ink is contained in chambers 4 produced in one of the layers of the plate 1 and is expelled through
nozzles - The plate 1 is used on a thermal ink jet dot printing head mounted immovably directly on a main ink reservoir not shown in the drawings.
- Each row of nozzles may contain a variable number of nozzles which is determined on the basis of the printing requirements, such as, for example, the level of definition of the characters.
- The main reservoir communicates with the chambers 4 through a common duct 14 (Fig. 1) produced in the thickness of the plate 1 and through a plurality of
feed passages 16 connecting each chamber 4 with thecommon duct 14. - The process for cutting the
common duct 14 through the thickness of thesilicon support 20 is as - A
silicon support plate 20 of a thickness in the range between 400 µm and 700 µm is passivated on both faces with alayer layers protective layers protective layer 28 is removed by the known photolithographic technique to form an aperture 30 (Fig. 2) of rectangular form extending lengthwise in the direction parallel to the crystallographic orientation <110> of thesilicon support 20. Consequently, the rows of heating elements 8 and 8′ will be aligned parallel to this direction. Theaperture 30 leaves free a zone 32 (Fig.2) of thelayer 24 of silicon dioxide. Thezone 32 is thereafter removed chemically with a selective, hydrofluoric acid (HF) based solution to uncover aportion 34 of the support 20 (Fig. 3). After removing theprotective layers support 20 is immersed in an attack bath for etching thesurface 34. - Since the
support 20 is constituted by crystalline silicon having a standard crystallographic orientation of < 100> , the etching action of the anisotropic attack solution develops predominantly in accordance with the orientation of <100> and much less in accordance with the associated orientation of <111>. With respect to thesilicon support 20, the orientation <100> corresponds to a direction X (Fig. 2) perpendicular to the outer faces of thesupport 20, the orientation <100> represents a direction Y perpendicular to X and the orientation <111> represents a direction Z perpendicular to Y and forming with the direction X a characteristic angle α dependent on the form of the crystal lattice of the material of thesupport 20. Therefore, the groove 35 (Fig. 4) which is obtained after the etching process has in cross-section the form of a truncated pyramid (Fig. 4) having as its greater base the surface 34 (Fig. 3) parallel to the outer faces of thesupport 20 and as its smaller or truncation base a surface 36 (Fig. 4) parallel to thesurface 34, the width L of which depends on the depth H₁ reached by the etching and on the width L₁ of thezone 34. The length of thegroove 35 in the direction perpendicular to the drawing depends on the number ofnozzles 5 employed in each row. Thelateral surfaces greater base 34 of about 54o, corresponding to the angle between the crystallographic orientations <100> and <111> of thesilicon support 20. The widths L, L₁ are linked to the depth H₁ of thegroove 35 and to the inclination α by the equation:
L₁ = L-2H₁ cotgα 1) - The solutions most usual for anisotropic etching of silicon are the following:
A. Ethylenediamine : 750 ml
Pyrocatechol : 120 gr
Deionized water : 100 ml. - This solution, operating at a temperature of 115oC, develops an attach gradient in accordance with the orientation <100> : G₁₀₀ = 0.75 µm/min and a ratio
B. Ethylenediamine : 750 ml
Pyrocatechol : 120 gr
Deionized water : 240 ml -
-
- This solution, operating at a temperature of 100oC, gives G₁₀₀ = 1.8 µm/min.
- The operation of etching of the groove 35 (Fig.4) is continued for an attack time T depending on the attack gradient G₁₀₀ and until the
end surface 36 reaches a depth H₁ comprised between 60% and 90% of the thickness H of thesupport 20. - By way of example, with a
support 20 of a thickness H = 600 µm, the depth H₁ of thegroove 35 to be etched is about 400 µm. Having fixed a width L of thesurface 36 of about 350 µm, there is obtained from the equation 1) the width L₁ of the zone 34 (Fig. 3) from which the operation of etching begins, that is L₁= 926 µm. - Using, for example, the solution A, the attack time T lasts 8 hours and 55 minutes. After etching the
groove 35 for a depth H₁, metal layers are successively deposited under vacuum on thelayer 22 of silicon dioxide by known deposition techniques to form the heating elements 8, 8′ and the corresponding electric conductors, for example as described in Italian Patent Application No. 67044 A/89, dated 26.1.89, in the name of the Applicant. - More particularly, the
silicon dioxide layer 22 is covered with a layer 44 (Fig. 5) between 500 and 2000 A thick of an electrically resistive metal, for example a 50/50 tantalum-aluminium alloy. Thelayer 44 is then etched by a known process of dry etching under vacuum to form two pluralities of independent resistive elements 8 and 8′ for heating the ink. - The Ta-Al elements 8, 8′ are covered with a
layer 46 of aluminium with a thickness comprised between 2000 and 10,000 A. thelayer 46 is then etched by a process similar to the foregoing to obtainelectric conductors 47 for supplying the heating elements 8 and 8′. On thealuminium layer 46 there are then deposited twolayers layer 50 in contact with thealuminium conductors 47 is constituted by silicon nitride, while theoverlying layer 52 is constituted by silicon carbide. In total, the twolayers - A
layer 56 of tantalum of a thickness between 1000 A and 10,000 A is thereafter deposited by known techniques on thelayer 52. Thelayer 56 is then etched under vacuum to obtain separate and parallel strips superposed on theconductors 47. - The
layer 56 has a dual function of protection of the ink of the subjacent resistive and insulating layers and of electrical connection between theconductors 47 and connecting terminals (not shown) towards the outside. - The
layers part 62 of thelayer 22. More particularly, thetantalum layer 56 also covers theedges 58 of the subjacent layers to protect them from possible infiltrations of acids employed in the etching treatments and from the ink during the operation of the head. - The breaking through of the
residual wall 36′, which has a thickness of H₂=H-H₁, is thereafter carried out by a sandblasting operation. - To this end, a jet of sand formed predominantly of alumina particles of an average size of about 20 µm is directed against the
end surface 36 in a direction perpendicular to the surface itself. - The sandblasting operation is interrupted when an opening 63 (Fig. 6) defined by two plane and
parallel walls surface 62. Thewalls groove 35 and intersect at the other end (at the top in Fig.6) thesurface 62. Thewalls surface 62 therefore define aparallelepipedal chamber 69 having thetruncation base 36 in common with the pyramidal chamber. After completing the cutting of the common duct 14 (Fig. 1), there is deposited on thetantalum layer 56, as described in the above-mentioned Patent Application, alayer 74 of photosensitive material, for example Vacrel (Registered Trade Mark), in which the chambers 4 and thefeed passages 16 are obtained by a photolithographic process. Finally, asheet 76 of gold-plated nickel bearing thenozzles layer 74. - It remains understood that the process of construction of the thermal ink jet head may undergo variations of modifications and that the thermal head so constructed may be modified in form and dimensions without, however, departing from the scope of the invention.
- For example, the sandblasting process previously described may be substituted alternatively by a process of cutting by means of a laser beam of the "excimer" (excited dimer) type.
- This type of laser is particularly suitable for machining solid materials, such as, for example, silicon and silicon dioxide, inasmuch as the excimer laser operates in a cold state without overheating the parts machined and without leaving traces of melting on the surfaces struck by the laser beam.
- The excimer laser beam generates a very small portion of heat, inasmuch as the energy of the laser beam acts on the molecular bonds of the struck material, overcoming the forces of cohesion. The removal of material therefore takes place by ablation of particles, rather than through thermal phenomena such as melting, vaporization or sublimation.
- This mechanism of ablation of particles confers on the machined parts a degree of precision much higher than that obtainable with other conventional types of laser beams, such as a CO₂ or YAG laser beam.
- In order to construct plates for thermal ink jet heads industrially in large numbers by the process described hereinbefore, a disc 80 (Fig.7) of silicon of circular form with a diameter of about 100 mm and about 0.5 mm thick is normally used as the supporting
base 20. Acutaway portion 81 at the edge of thedisc 80 commonly indicates the crystallographic orientation <100> of thedisc 80. On this disc there are produced at the same time numerousidentical configurations 82 of plates which, when construction has taken place, are separated by means of crossed cuts in the support disc alongintermediate lines 83. Fig. 8 shows on an enlarged scale apart 84 of thedisc 80 comprising aslot 63 seen from the direction of thesurface 62 of Fig. 6. Apanel 85 in chain-dotted lines represents the area occupied on the surface of thedisc 80 by thelayers
Claims (21)
elements are produced in a plurality of superposed layers fixed on a support element (20) defined by two opposed and parallel plane surfaces, the duct (14) being in communication with the chambers and being formed through the thickness of the support element, the process comprising the steps of:
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8967458A IT1234800B (en) | 1989-06-08 | 1989-06-08 | MANUFACTURING PROCEDURE OF INK-JET THERMAL HEADS AND HEADS SO OBTAINED |
IT6745889 | 1989-06-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0401996A2 true EP0401996A2 (en) | 1990-12-12 |
EP0401996A3 EP0401996A3 (en) | 1991-12-04 |
Family
ID=11302549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19900305432 Withdrawn EP0401996A3 (en) | 1989-06-08 | 1990-05-18 | Process for the manufacture of thermal ink jet printing heads and heads obtained in this way |
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EP (1) | EP0401996A3 (en) |
IT (1) | IT1234800B (en) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0609011A2 (en) * | 1993-01-25 | 1994-08-03 | Hewlett-Packard Company | Method for manufacturing a thermal ink-jet print head |
EP0609012A3 (en) * | 1993-01-25 | 1994-09-14 | Hewlett-Packard Company | Method for manufacturing a thermal ink-jet print head |
EP0764533A2 (en) * | 1995-09-22 | 1997-03-26 | Lexmark International, Inc. | Fabrication of ink feed slots in a silicon substrate of a thermal ink jet printer |
EP0955166A1 (en) * | 1998-04-29 | 1999-11-10 | Hewlett-Packard Company | Thin film ink jet printhead |
WO2000000354A1 (en) * | 1998-06-29 | 2000-01-06 | Olivetti Lexikon S.P.A. | Ink jet printhead |
WO2001054863A2 (en) * | 2000-01-26 | 2001-08-02 | Hewlett-Packard Co. | Ink feed slot formation in ink-jet printheads |
EP1213147A1 (en) * | 2000-12-05 | 2002-06-12 | Hewlett-Packard Company | Slotted substrates and techniques for forming same |
EP1226947A1 (en) * | 2001-01-30 | 2002-07-31 | Hewlett-Packard Company | Thin film coating of a slotted substrate and techniques for forming slotted substrates |
WO2002085630A1 (en) * | 2001-04-20 | 2002-10-31 | Hewlett-Packard Company | Thermal ink jet defect tolerant resistor design |
EP1338420A1 (en) * | 2002-02-20 | 2003-08-27 | Brother Kogyo Kabushiki Kaisha | Ink-jet head and ink-jet printer |
US7267431B2 (en) | 2004-06-30 | 2007-09-11 | Lexmark International, Inc. | Multi-fluid ejection device |
DE19917595B4 (en) * | 1998-05-29 | 2008-08-07 | Industrial Technology Research Institute, Chutung | A method of manufacturing an ink jet head chip and its ink passageway structure |
US7429335B2 (en) | 2004-04-29 | 2008-09-30 | Shen Buswell | Substrate passage formation |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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ITTO20020876A1 (en) | 2002-10-10 | 2004-04-11 | Olivetti I Jet Spa | PARALLEL INK JET PRINTING DEVICE |
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EP0197723A2 (en) * | 1985-04-03 | 1986-10-15 | Xerox Corporation | Thermal ink jet printhead and process therefor |
EP0224937A2 (en) * | 1985-12-06 | 1987-06-10 | Hewlett-Packard Company | Thermal ink jet print head assembly |
US4789425A (en) * | 1987-08-06 | 1988-12-06 | Xerox Corporation | Thermal ink jet printhead fabricating process |
US4835553A (en) * | 1988-08-25 | 1989-05-30 | Xerox Corporation | Thermal ink jet printhead with increased drop generation rate |
-
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EP0197723A2 (en) * | 1985-04-03 | 1986-10-15 | Xerox Corporation | Thermal ink jet printhead and process therefor |
EP0224937A2 (en) * | 1985-12-06 | 1987-06-10 | Hewlett-Packard Company | Thermal ink jet print head assembly |
US4789425A (en) * | 1987-08-06 | 1988-12-06 | Xerox Corporation | Thermal ink jet printhead fabricating process |
US4835553A (en) * | 1988-08-25 | 1989-05-30 | Xerox Corporation | Thermal ink jet printhead with increased drop generation rate |
Cited By (26)
Publication number | Priority date | Publication date | Assignee | Title |
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EP0609011A2 (en) * | 1993-01-25 | 1994-08-03 | Hewlett-Packard Company | Method for manufacturing a thermal ink-jet print head |
EP0609011A3 (en) * | 1993-01-25 | 1994-09-14 | Hewlett-Packard Company | Method for manufacturing a thermal ink-jet print head |
EP0609012A3 (en) * | 1993-01-25 | 1994-09-14 | Hewlett-Packard Company | Method for manufacturing a thermal ink-jet print head |
US5441593A (en) * | 1993-01-25 | 1995-08-15 | Hewlett-Packard Corporation | Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining |
US5608436A (en) * | 1993-01-25 | 1997-03-04 | Hewlett-Packard Company | Inkjet printer printhead having equalized shelf length |
EP0764533A3 (en) * | 1995-09-22 | 1997-08-13 | Lexmark Int Inc | Fabrication of ink feed slots in a silicon substrate of a thermal ink jet printer |
EP0764533A2 (en) * | 1995-09-22 | 1997-03-26 | Lexmark International, Inc. | Fabrication of ink feed slots in a silicon substrate of a thermal ink jet printer |
EP0955166A1 (en) * | 1998-04-29 | 1999-11-10 | Hewlett-Packard Company | Thin film ink jet printhead |
US6126277A (en) * | 1998-04-29 | 2000-10-03 | Hewlett-Packard Company | Non-kogating, low turn on energy thin film structure for very low drop volume thermal ink jet pens |
DE19917595B4 (en) * | 1998-05-29 | 2008-08-07 | Industrial Technology Research Institute, Chutung | A method of manufacturing an ink jet head chip and its ink passageway structure |
WO2000000354A1 (en) * | 1998-06-29 | 2000-01-06 | Olivetti Lexikon S.P.A. | Ink jet printhead |
US6412921B1 (en) | 1998-06-29 | 2002-07-02 | Olivetti Tecnost S.P.A. | Ink jet printhead |
WO2001054863A2 (en) * | 2000-01-26 | 2001-08-02 | Hewlett-Packard Co. | Ink feed slot formation in ink-jet printheads |
WO2001054863A3 (en) * | 2000-01-26 | 2002-04-04 | Hewlett Packard Co | Ink feed slot formation in ink-jet printheads |
EP1213147A1 (en) * | 2000-12-05 | 2002-06-12 | Hewlett-Packard Company | Slotted substrates and techniques for forming same |
US6675476B2 (en) | 2000-12-05 | 2004-01-13 | Hewlett-Packard Development Company, L.P. | Slotted substrates and techniques for forming same |
SG115428A1 (en) * | 2000-12-05 | 2005-10-28 | Hewlett Packard Co | Slotted substrates and techniques for forming same |
US6968617B2 (en) | 2000-12-05 | 2005-11-29 | Hewlett-Packard Development Company, L.P. | Methods of fabricating fluid ejection devices |
EP1226947A1 (en) * | 2001-01-30 | 2002-07-31 | Hewlett-Packard Company | Thin film coating of a slotted substrate and techniques for forming slotted substrates |
WO2002085630A1 (en) * | 2001-04-20 | 2002-10-31 | Hewlett-Packard Company | Thermal ink jet defect tolerant resistor design |
US6527378B2 (en) | 2001-04-20 | 2003-03-04 | Hewlett-Packard Company | Thermal ink jet defect tolerant resistor design |
US6832434B2 (en) | 2001-04-20 | 2004-12-21 | Hewlett-Packard Development Company, L.P. | Methods of forming thermal ink jet resistor structures for use in nucleating ink |
EP1338420A1 (en) * | 2002-02-20 | 2003-08-27 | Brother Kogyo Kabushiki Kaisha | Ink-jet head and ink-jet printer |
US6979077B2 (en) | 2002-02-20 | 2005-12-27 | Brother Kogyo Kabushiki Kaisha | Ink-jet head and ink-jet printer having ink-jet head |
US7429335B2 (en) | 2004-04-29 | 2008-09-30 | Shen Buswell | Substrate passage formation |
US7267431B2 (en) | 2004-06-30 | 2007-09-11 | Lexmark International, Inc. | Multi-fluid ejection device |
Also Published As
Publication number | Publication date |
---|---|
IT1234800B (en) | 1992-05-27 |
IT8967458A0 (en) | 1989-06-08 |
EP0401996A3 (en) | 1991-12-04 |
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