EP0498015A1 - Process for manufacturing ultrasonic transducers - Google Patents

Process for manufacturing ultrasonic transducers Download PDF

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Publication number
EP0498015A1
EP0498015A1 EP91101712A EP91101712A EP0498015A1 EP 0498015 A1 EP0498015 A1 EP 0498015A1 EP 91101712 A EP91101712 A EP 91101712A EP 91101712 A EP91101712 A EP 91101712A EP 0498015 A1 EP0498015 A1 EP 0498015A1
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EP
European Patent Office
Prior art keywords
transducer element
elastomer
transducer
matching layer
coupling layer
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP91101712A
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German (de)
French (fr)
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EP0498015B1 (en
Inventor
Hans-Joachim Dipl.-Ing. Burger
Rudolf Dipl.-Phys. Thurn
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Siemens AG
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Siemens AG
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Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE91101712T priority Critical patent/DE59100463D1/en
Priority to EP91101712A priority patent/EP0498015B1/en
Priority to JP4048058A priority patent/JPH04336799A/en
Publication of EP0498015A1 publication Critical patent/EP0498015A1/en
Priority to US08/090,562 priority patent/US5329682A/en
Application granted granted Critical
Publication of EP0498015B1 publication Critical patent/EP0498015B1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/067—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Definitions

  • the invention relates to a method for producing an ultrasonic transducer with a piezoelectric transducer element, which is connected to an acoustic matching layer, which is the only, uniform body made of vibrating elastomer.
  • the contact pressure is limited with a spring system belonging to the device, so that the transducer element designed as piezoceramic does not suffer from excessive pressure with regard to its properties, such as polarization and sensitivity.
  • the centering element used in the aforementioned method has openings or cavities into which lead wires contacted on the transducer element must be threaded prior to the application of the matching layer. It is not possible to check the quality of the matching layer itself, which can be restricted, for example, by undesirable air pockets.
  • the body is first made of elastomer as a molded part with centering contours and in a further process step the transducer element is inserted into the elastomer body with centering by the centering contours and is connected to its matching layer.
  • This enables the properties of the matching layer to be checked with regard to physically important parameters such as density, speed of sound, homogeneity, etc., so that only the molded part is eliminated in the event of a negative test result.
  • the quality of the matching layer itself can easily be checked with several measurements.
  • the ultrasound transducer is tested together with the transducer element in the prior art, which leads to higher rejects and unnecessary costs.
  • the transducer element is not exposed to any pressure when applying the matching layer and thus retains its sensitivity unchanged.
  • Another advantage of the manufacturing process is that only a few and simple tools and aids are required. In order to achieve good sound transmission from the transducer element to the matching layer, it proves to be advantageous that the transducer element is glued to the matching layer.
  • a simple embodiment of the invention exists when two of its surfaces are metallized for the electrical connection of the transducer element and when the first metallized surface is bonded to the matching layer, a first lead wire is interposed and contacted by the adhesive pressure with the metallized surface, and that a second lead wire is contacted by soldering on the other metallized surface. It is to be regarded as particularly favorable here that a cumbersome threading of the lead wires is avoided.
  • the molded part is designed such that after insertion of the transducer element it has a space that can be filled with a damping material, this results in the Advantage of a uniform transducer structure, consisting of the molded part which receives the transducer element and can also serve as a holder for the damping material if necessary.
  • a good effect of the adaptation layer is achieved if the elastomer from which the acoustic adaptation layer is made has a propagation speed for longitudinal waves between 800 and 1600 m / s, a density between 500 and 1500 kg / m3, a low modulus of elasticity and a low mechanical vibration damping .
  • the adaptation layer 3 is a component of the molded part 2 which is made from a single casting Transducer vibration in the matching layer 3 is. It is used to adjust the high acoustic wave resistance of the transducer element of approx. 2. 107 kg / m2s to the very low wave resistance of the air of 4. 102 kg / m2s.
  • the adaptation enables a high level of efficiency in sound radiation and reception.
  • the acoustic wave resistance is composed of the product of the speed of sound and density, so that low values of these two material constants are a prerequisite for a good adaptation to the medium air.
  • Elastomers with densities between 500 and 1500 kg / m3 and with propagation speeds for longitudinal waves between 800 and 1600 m / s result in a good one Adaptation to the ambient medium air.
  • the material of the matching layer should also have a low mechanical damping constant.
  • the transducer element 1 is glued to the matching layer 3 of the molded part 2, it being possible for the adhesive pressure to serve at the same time for contacting a first lead wire with a metallized surface 7 of the transducer element 1.
  • a second lead wire 10 is soldered directly to a second metallized surface 8 for connecting the transducer element.
  • the molded part 2 protrudes only partially on the sides of the disk-shaped transducer element 1.
  • FIG 2 shows an ultrasonic transducer with a molded part 2, which forms a space 5 after insertion of the transducer element 1, which, if necessary, can be filled with damping material 6.
  • the damping material 6 can be attached by means of adhesive or casting technology and serves to reduce the transducer quality, as is required for use in close-up measurements.
  • the described method is suitable for easily meeting different material combinations with regard to acoustic, physical or chemical requirements. It is irrelevant whether additional housing parts or shielding elements and the like are integrated at the same time.
  • the method according to the invention for producing transducers from prefabricated elements offers the advantage that the transducer components can be tested as individual parts during preliminary tests in their geometric dimensions or the acoustically important material parameters; Deviations in the characteristic data are not determined only after the complete converter has been completed.
  • the described method is not restricted to rotationally symmetrical constructions; rather, transducers with square, rectangular or elliptical geometry can also be constructed using the described elastic molded parts.

Abstract

The previously known process for manufacturing an ultrasonic transducer with a piezoelectric transducer element which is connected to an acoustic coupling layer which is composed, as a single uniform body, of oscillatory elastomer, has several disadvantages. Thus, for example the quality of the coupling layer itself cannot be tested but rather only the finished transducer so that if the coupling layer has inadequate properties in the case of a negative test result the entire transducer must be rejected. In addition, a complex device has hitherto been used for manufacture. The object of simplifying and improving the abovementioned process for manufacturing ultrasonic transducers whilst avoiding the stated disadvantages is achieved in that initially a preform made of elastomer (2) with centring contours (4) is produced and in a further process step the transducer element (1) is inserted into the elastomer body (2) accompanied by centring by means of the centring contours (4) and is connected to the coupling layer (3) of said body. <IMAGE>

Description

Die Erfindung betrifft ein Verfahren zur Herstellung eines Ultraschallwandlers mit einem piezoelektrischen Wandlerelement, das mit einer akustischen Anpaßschicht verbunden ist, die als einziger, einheitlicher Körper aus schwingungsfähigem Elastomer besteht.The invention relates to a method for producing an ultrasonic transducer with a piezoelectric transducer element, which is connected to an acoustic matching layer, which is the only, uniform body made of vibrating elastomer.

Verfahren zur Herstellung von Ultraschallwandlern der obengenannten Art sind bekannt (siehe US 4 128 370 ). Hierin ist ein Festkörper-Ultraschallwandler offenbart, bei dem zur Anpassung an das Umgebungsmedium Luft eine Anpaßschicht, bestehend aus einem Elastomer, verwendet wird. Bei der Applikation des Elastomers auf das Wandlerelement soll dieses gegenüber seiner Außenkontur oder einem Gehäuse möglichst genau in Position gehalten werden. Hierzu werden gemäß dem obengenannten US-Patent Zentrierteile verwendet, die das Wandlerelement sowohl zentrisch als auch in der Höhe und Planparallelität positionieren. Zur Applikation der Elastomer-Anpaßschicht auf das Wandlerelement wird eine aufwendige Vorrichtung eingesetzt, die erwärmtes Elastomer unter Druck in einen besonders gestalteten Hohlraum direkt auf das Wandlerelement aufpreßt. Mit einem zur Vorrichtung gehörigen Federsystem wird der Anpreßdruck begrenzt, damit das als Piezokeramik ausgebildete Wandlerelement nicht unter übermäßigem Druck hinsichtlich seiner Eigenschaften, wie z.B. Polarisation und Empfindlichkeit leidet. Das beim vorgenannten Verfahren benutzte Zentrierelement weist Öffnungen bzw. Hohlräume auf, in die am Wandlerelement kontaktierte Leitungsdrähte vor der Applikation der Anpaßschicht eingefädelt werden müssen. Eine Prüfung der Güte der Anpaßschicht selbst, die z.B. durch unerwünschte Lufteinschlüsse eingeschränkt sein kann, ist nicht möglich.Methods for producing ultrasonic transducers of the type mentioned above are known (see US 4 128 370). This discloses a solid-state ultrasound transducer in which an adaptation layer, consisting of an elastomer, is used to adapt to the ambient medium air. When the elastomer is applied to the transducer element, it should be held in position as precisely as possible with respect to its outer contour or a housing. According to the above-mentioned US patent, centering parts are used for this purpose, which position the transducer element both centrally and in terms of height and plane parallelism. A complex device is used to apply the elastomer matching layer to the transducer element, which presses heated elastomer under pressure directly onto the transducer element in a specially designed cavity. The contact pressure is limited with a spring system belonging to the device, so that the transducer element designed as piezoceramic does not suffer from excessive pressure with regard to its properties, such as polarization and sensitivity. The centering element used in the aforementioned method has openings or cavities into which lead wires contacted on the transducer element must be threaded prior to the application of the matching layer. It is not possible to check the quality of the matching layer itself, which can be restricted, for example, by undesirable air pockets.

Daher besteht die Aufgabe, obengenanntes Verfahren zur Herstellung von Ultraschallwandlern unter Vermeidung der erwähnten Nachteile zu vereinfachen und zu verbessern. Dies wird dadurch erreicht, daß zunächst der Körper aus Elastomer als Formteil mit Zentrierkonturen hergestellt wird und in einem weiteren Verfahrensschritt das Wandlerelement in den Elastomerkörper unter Zentrierung durch die Zentrierkonturen eingelegt und mit dessen Anpaßschicht verbunden wird. Hiermit wird die Prüfung der Eigenschaften der Anpaßschicht hinsichtlich physikalisch wichtiger Parameter wie Dichte, Schallgeschwindigkeit, Homogenität usw. ermöglicht, so daß bei negativem Prüfergebnis nur das Formteil ausgeschieden wird. Die Prüfung der Güte der Anpaßschicht für sich ist mit mehreren Messungen einfach durchzuführen. Im Gegensatz hierzu wird beim Stand der Technik der Ultraschallwandler mit dem Wandlerelement zusammen geprüft, was zu höheren Ausschüssen und unnötigen Kosten führt. Das Wandlerelement wird beim vorliegenden Herstellungsverfahren keinem Druck bei der Applikation der Anpaßschicht ausgesetzt und behält somit unverändert seine Empfindlichkeit bei. Ein weiterer Vorteil des Herstellungsverfahren besteht darin, daß nur wenige und einfache Werkzeuge und Hilfsmittel benötigt werden. Um eine gute Schallübertragung vom Wandlerelement zur Anpaßschicht zu erreichen, erweist es sich als vorteilhaft, daß das Wandlerelement mit der Anpaßschicht verklebt wird. Eine einfache Ausgestaltung der Erfindung liegt vor, wenn zum elektrischen Anschluß des Wandlerelements Zwei seiner Oberflächen metallisiert sind und bei der Verklebung der ersten metallisierten Oberfläche mit der Anpaßschicht ein erster Leitungsdraht zwischengeschoben und durch den Klebedruck mit der metallisierten Oberfläche kontaktiert wird, und daß ein zweiter Leitungsdraht durch Löten auf der anderen metallisierten Oberfläche kontaktiert wird. Als besonders günstig ist hierbei anzusehen, daß ein umständliches Einfädeln der Leitungsdrähte vermieden wird. Ist das Formteil derart ausgebildet, daß es nach Einfügen des Wandlerelementes einen Raum aufweist, der mit einem Dämpfungsmaterial ausfüllbar ist, so ergibt sich hiermit der Vorteil eines einheitlichen Wandlergebildes, bestehend aus dem Formteil, welches das Wandlerelement aufnimmt und zugleich im Bedarfsfall als Halterung für das Dämpfungsmaterial dienen kann. Eine gute Wirkung der Anpaßschicht wird erzielt, wenn das Elastomer, aus dem die akustische Anpaßschicht besteht, eine Ausbreitungsgeschwindigkeit für Longitudinalwellen zwichen 800 und 1600 m/s, eine Dichte zwischen 500 und 1500 kg/m³, einen niedrigen Elastizitätsmodul und eine niedrige mechanische Schwingdämpfung hat.Therefore, there is the task of simplifying and improving the above-mentioned method for producing ultrasonic transducers while avoiding the disadvantages mentioned. This is achieved in that the body is first made of elastomer as a molded part with centering contours and in a further process step the transducer element is inserted into the elastomer body with centering by the centering contours and is connected to its matching layer. This enables the properties of the matching layer to be checked with regard to physically important parameters such as density, speed of sound, homogeneity, etc., so that only the molded part is eliminated in the event of a negative test result. The quality of the matching layer itself can easily be checked with several measurements. In contrast to this, the ultrasound transducer is tested together with the transducer element in the prior art, which leads to higher rejects and unnecessary costs. In the present production process, the transducer element is not exposed to any pressure when applying the matching layer and thus retains its sensitivity unchanged. Another advantage of the manufacturing process is that only a few and simple tools and aids are required. In order to achieve good sound transmission from the transducer element to the matching layer, it proves to be advantageous that the transducer element is glued to the matching layer. A simple embodiment of the invention exists when two of its surfaces are metallized for the electrical connection of the transducer element and when the first metallized surface is bonded to the matching layer, a first lead wire is interposed and contacted by the adhesive pressure with the metallized surface, and that a second lead wire is contacted by soldering on the other metallized surface. It is to be regarded as particularly favorable here that a cumbersome threading of the lead wires is avoided. If the molded part is designed such that after insertion of the transducer element it has a space that can be filled with a damping material, this results in the Advantage of a uniform transducer structure, consisting of the molded part which receives the transducer element and can also serve as a holder for the damping material if necessary. A good effect of the adaptation layer is achieved if the elastomer from which the acoustic adaptation layer is made has a propagation speed for longitudinal waves between 800 and 1600 m / s, a density between 500 and 1500 kg / m³, a low modulus of elasticity and a low mechanical vibration damping .

Ausführungsformen der Erfindung werden im folgenden anhand einer Zeichnung näher erläutert.Embodiments of the invention are explained in more detail below with reference to a drawing.

Es zeigen:

FIG 1
einen Ultraschallwandler ohne Dämpfungsmaterial,
FIG 2
einen Ultraschallwandler mit Dämpfungsmaterial.
Show it:
FIG. 1
an ultrasonic transducer without damping material,
FIG 2
an ultrasonic transducer with damping material.

In FIG 1 ist ein Ultraschallwandler abgebildet, der ein als akustische Anpaßschicht 3 ausgebildetes Formteil 2 und ein darin positioniertes Wandlerelement 1 aufweist. Die Positionierung des Wandlerelements 1 erfolgt über Zentrierkonturen 4 in dem Formteil 2. Die Anpaßschicht 3 ist Bestandteil des aus einem Guß gefertigten Formteils 2. Sie bildet das schallabstrahlende und empfangende Element des Ultraschallwandlers und hat eine Dicke von λ/4, wobei λ die Wellenlänge der Wandlerschwingung in der Anpaßschicht 3 ist. Sie dient zur Anpassung des hohen akustischen Wellenwiderstands des Wandlerelements von ca. 2 . 10⁷ kg/m²s an den sehr niedrigen Wellenwiderstand der Luft von 4 . 10² kg/m²s. Die Anpassung ermöglicht einen hohen Wirkungsgrad bei Schallabstrahlung und -empfang. Der akustische Wellenwiderstand setzt sich zusammen aus dem Produkt von Schallgeschwindigkeit und Dichte, so daß niedrige Werte dieser beiden Materialkonstanten eine Voraussetzung für eine gute Anpassung an das Medium Luft darstellen. Elastomere mit Dichten zwischen 500 und 1500 kg/m³ sowie mit Ausbreitungsgeschwindigkeiten für Longitudinalwellen zwischen 800 und 1600 m/s ergeben eine gute Anpassung an das Umgebungsmedium Luft. Zur Erzielung großer Reichweiten sollte der Werkstoff der Anpaßschicht außerdem eine niedrige mechanische Dämpfungskonstante aufweisen.1 shows an ultrasound transducer which has a molded part 2 designed as an acoustic adaptation layer 3 and a transducer element 1 positioned therein. The positioning of the transducer element 1 takes place via centering contours 4 in the molded part 2. The adaptation layer 3 is a component of the molded part 2 which is made from a single casting Transducer vibration in the matching layer 3 is. It is used to adjust the high acoustic wave resistance of the transducer element of approx. 2. 10⁷ kg / m²s to the very low wave resistance of the air of 4. 10² kg / m²s. The adaptation enables a high level of efficiency in sound radiation and reception. The acoustic wave resistance is composed of the product of the speed of sound and density, so that low values of these two material constants are a prerequisite for a good adaptation to the medium air. Elastomers with densities between 500 and 1500 kg / m³ and with propagation speeds for longitudinal waves between 800 and 1600 m / s result in a good one Adaptation to the ambient medium air. In order to achieve long ranges, the material of the matching layer should also have a low mechanical damping constant.

Das Wandlerelement 1 wird mit der Anpaßschicht 3 des Formteils 2 verklebt, wobei zugleich der Klebedruck zur Kontaktierung eines ersten Leitungsdrahtes mit einer metallisierten Oberfläche 7 des Wandlerelementes 1 dienen kann. An eine zweite metallisierte Oberfläche 8 wird direkt ein zweiter Leitungsdraht 10 zum Anschluß des Wandlerelementes gelötet. Bei dieser Ausführungsform steht das Formteil 2 nur teilweise an den Seiten des hier scheibenförmigen Wandlerelementes 1 über. Demgegenüber zeigt FIG 2 einen Ultraschallwandler mit einem Formteil 2, das nach Einlegen des Wandlerelements 1 einen Raum 5 bildet, der mit Dämpfungsmaterial 6, soweit erforderlich, ausgefüllt werden kann. Das Dämpfungsmaterial 6 läßt sich hierbei mittels Klebe- oder Gießtechnik anbringen und dient zur Reduzierung der Wandlergüte, wie sie für den Einsatz zu Messungen im Nahbereich erforderlich ist.The transducer element 1 is glued to the matching layer 3 of the molded part 2, it being possible for the adhesive pressure to serve at the same time for contacting a first lead wire with a metallized surface 7 of the transducer element 1. A second lead wire 10 is soldered directly to a second metallized surface 8 for connecting the transducer element. In this embodiment, the molded part 2 protrudes only partially on the sides of the disk-shaped transducer element 1. In contrast, FIG 2 shows an ultrasonic transducer with a molded part 2, which forms a space 5 after insertion of the transducer element 1, which, if necessary, can be filled with damping material 6. The damping material 6 can be attached by means of adhesive or casting technology and serves to reduce the transducer quality, as is required for use in close-up measurements.

Das beschriebene Verfahren ist geeignet, unterschiedliche Werkstoffkombinationen hinsichtlich akustischer, physikalischer oder chemischer Anforderungen einfach zu erfüllen. Dabei ist es unerheblich, ob gleichzeitig weitere Gehäuseteile oder Abschirmelemente und ähnliches integriert werden. Das erfindungsgemäße Verfahren der Wandlerherstellung aus vorgefertigten Elementen bietet den Vorteil, daß die Wandlerkomponenten bereits bei Vorprüfungen in ihren geometrischen Abmessungen oder den akustisch wichtigen Materialparametern als Einzelteile geprüft werden können; Abweichungen in den Kenndaten werden nicht erst nach der Fertigstellung des kompletten Wandlers festgestellt. Das beschriebene Verfahren ist nicht auf rotationssymmetrische Konstruktionen beschränkt; vielmehr können auch Wandler mit quadratischer, rechteckiger oder elliptischer Geometrie mittels beschriebener elastischer Formteile aufgebaut werden.The described method is suitable for easily meeting different material combinations with regard to acoustic, physical or chemical requirements. It is irrelevant whether additional housing parts or shielding elements and the like are integrated at the same time. The method according to the invention for producing transducers from prefabricated elements offers the advantage that the transducer components can be tested as individual parts during preliminary tests in their geometric dimensions or the acoustically important material parameters; Deviations in the characteristic data are not determined only after the complete converter has been completed. The described method is not restricted to rotationally symmetrical constructions; rather, transducers with square, rectangular or elliptical geometry can also be constructed using the described elastic molded parts.

Claims (5)

Verfahren zur Herstellung eines Ultraschallwandlers mit einem piezoelektrischen Wandlerelement (1), das mit einer akustischen Anpaßschicht (3) verbunden ist, die als einziger, einheitlicher Körper (2) aus schwingungsfähigem Elastomer besteht, dadurch gekennzeichnet, daß zunächst der Körper aus Elastomer als Formteil (2) mit Zentrierkonturen (4) hergestellt wird und in einem weiteren Verfahrensschritt das Wandlerelement (1) in den Elastomerkörper (2) unter Zentrierung durch die Zentrierkonturen (4) eingelegt und mit dessen Anpaßschicht (3) verbunden wird.Method for producing an ultrasonic transducer with a piezoelectric transducer element (1) which is connected to an acoustic matching layer (3) which, as the only, unitary body (2), is made of an elastomer that can vibrate, characterized in that first the body made of elastomer as a molded part ( 2) is produced with centering contours (4) and, in a further process step, the transducer element (1) is inserted into the elastomer body (2) with centering through the centering contours (4) and connected to its matching layer (3). Verfahren nach Anspruch 1, dadurch gekennzeichnet, , daß das Wandlerelement (1) mit der Anpaßschicht (3) verklebt wird.Method according to Claim 1, characterized in that the transducer element (1) is glued to the matching layer (3). Verfahren nach Anspruch 2, dadurch gekennzeichnet, daß zum elektrischen Anschluß des Wandlerelements (1) zwei seiner Oberflächen (7, 8) metallisiert sind, daß bei der Verklebung der ersten metallisierten Oberfläche (7) mit der Anpaßschicht (3) ein erster Leitungsdraht (9) zwischengeschoben und durch den Klebedruck mit der metallisierten Oberfläche kontaktiert wird, und daß ein zweiter Leitungsdraht (10) durch Löten auf der anderen metallisierten Oberfläche (8) kontaktiert wird.Method according to Claim 2, characterized in that two of its surfaces (7, 8) are metallized for the electrical connection of the transducer element (1), that when the first metallized surface (7) is bonded to the matching layer (3) a first lead wire (9 ) is inserted and contacted by the adhesive pressure with the metallized surface, and that a second lead wire (10) is contacted by soldering on the other metallized surface (8). Verfahren nach Anspruch 1, 2 oder 3, dadurch gekennzeichnet, daß das Formteil (2) derart ausgebildet ist, daß es nach Einfügen des Wandlerelementes (1) einen Raum (5) aufweist, der mit dem Dämpfungsmaterial (6) ausfüllbar ist.Method according to Claim 1, 2 or 3 , characterized in that the molded part (2) is designed such that after insertion of the transducer element (1) it has a space (5) which can be filled with the damping material (6). Verfahren nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß das Elastomer, aus dem die akustische Anpaßschicht (3) besteht, eine Ausbreitungsgeschwindigkeit für Longitudinalwellen zwichen 800 und 1600 m/s und eine Dichte zwischen 500 und 1500 kg/m³ hat.Method according to one of the preceding claims, characterized in that the elastomer from which the acoustic matching layer (3) is made has a propagation speed for longitudinal waves between 800 and 1600 m / s and a density between 500 and 1500 kg / m³.
EP91101712A 1991-02-07 1991-02-07 Process for manufacturing ultrasonic transducers Expired - Lifetime EP0498015B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE91101712T DE59100463D1 (en) 1991-02-07 1991-02-07 Method of manufacturing ultrasonic transducers.
EP91101712A EP0498015B1 (en) 1991-02-07 1991-02-07 Process for manufacturing ultrasonic transducers
JP4048058A JPH04336799A (en) 1991-02-07 1992-02-03 Manufacture of ultrasonic converter
US08/090,562 US5329682A (en) 1991-02-07 1993-07-12 Method for the production of ultrasound transformers

Applications Claiming Priority (1)

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EP91101712A EP0498015B1 (en) 1991-02-07 1991-02-07 Process for manufacturing ultrasonic transducers

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EP0498015A1 true EP0498015A1 (en) 1992-08-12
EP0498015B1 EP0498015B1 (en) 1993-10-06

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EP (1) EP0498015B1 (en)
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DE (1) DE59100463D1 (en)

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EP0766071A1 (en) * 1995-09-28 1997-04-02 Endress + Hauser Gmbh + Co. Ultrasonic transducer
WO2004008432A1 (en) * 2002-07-11 2004-01-22 Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. Method for the acoustic adaptation of an active element of an electroacoustic transducer for emitting and receiving ultrasound waves, and device for emitting and receiving ultrasound waves
DE102006026674A1 (en) * 2006-06-02 2007-12-06 Valeo Schalter Und Sensoren Gmbh Ultrasound sensor, particularly motor vehicle ultrasound sensor, has diaphragm with base movable in swinging by piezo ceramics, and piezo ceramic has metallic surface, which has element or connection

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US5541468A (en) * 1994-11-21 1996-07-30 General Electric Company Monolithic transducer array case and method for its manufacture
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US5329682A (en) 1994-07-19
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EP0498015B1 (en) 1993-10-06

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