EP0602021A3 - - Google Patents

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Publication number
EP0602021A3
EP0602021A3 EP19940200483 EP94200483A EP0602021A3 EP 0602021 A3 EP0602021 A3 EP 0602021A3 EP 19940200483 EP19940200483 EP 19940200483 EP 94200483 A EP94200483 A EP 94200483A EP 0602021 A3 EP0602021 A3 EP 0602021A3
Authority
EP
European Patent Office
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19940200483
Other versions
EP0602021A2 (en
Inventor
Takashi Watanabe
Kazuaki Masuda
Akira Goto
Hiroshi Kono
Takashi Kanzaki
Toshio Kashino
Akio Saito
Koyo Midorikawa
Toru Okumura
Masami Ikeda
Nobuyuki Kuwabara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63275800A external-priority patent/JP2771557B2/en
Priority claimed from JP27579488A external-priority patent/JPH02121843A/en
Priority claimed from JP27579788A external-priority patent/JPH02121842A/en
Priority claimed from JP740989A external-priority patent/JPH02187345A/en
Priority claimed from JP1007470A external-priority patent/JP2831368B2/en
Priority claimed from JP1007403A external-priority patent/JP2763563B2/en
Priority claimed from JP741089A external-priority patent/JP2633943B2/en
Priority claimed from JP918489A external-priority patent/JPH02188257A/en
Priority claimed from JP918189A external-priority patent/JPH02188255A/en
Priority claimed from JP1018079A external-priority patent/JP2764418B2/en
Priority to EP99200740A priority Critical patent/EP0937579B1/en
Priority to ES99200740T priority patent/ES2207908T3/en
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP0602021A2 publication Critical patent/EP0602021A2/en
Publication of EP0602021A3 publication Critical patent/EP0602021A3/xx
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/162Manufacturing of the nozzle plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14024Assembling head parts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/1433Structure of nozzle plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1604Production of bubble jet print heads of the edge shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1606Coating the nozzle area or the ink chamber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • B41J2/1634Manufacturing processes machining laser machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14379Edge shooter
EP94200483A 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head Withdrawn EP0602021A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ES99200740T ES2207908T3 (en) 1988-10-31 1989-10-30 HEAD FOR INK JETS AND METHOD FOR THE MANUFACTURING OF THE SAME, PLATE WITH DOWNLOAD OVERS FOR THE HEAD AND ITS METHOD OF MANUFACTURING AND APPARATUS FOR INK JETS WITH HEAD FOR INK JETS.
EP99200740A EP0937579B1 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head

Applications Claiming Priority (21)

Application Number Priority Date Filing Date Title
JP27579488A JPH02121843A (en) 1988-10-31 1988-10-31 Liquid injection recording head and manufacture thereof
JP275800/88 1988-10-31
JP27579788A JPH02121842A (en) 1988-10-31 1988-10-31 Ink jet recording head and manufacture thereof
JP275794/88 1988-10-31
JP275797/88 1988-10-31
JP63275800A JP2771557B2 (en) 1988-10-31 1988-10-31 Method of manufacturing ink jet recording head
JP741089A JP2633943B2 (en) 1989-01-13 1989-01-13 Ink jet recording head and method of manufacturing the head
JP7409/89 1989-01-13
JP7403/89 1989-01-13
JP7470/89 1989-01-13
JP7410/89 1989-01-13
JP1007403A JP2763563B2 (en) 1989-01-13 1989-01-13 Method of manufacturing ink jet recording head
JP1007470A JP2831368B2 (en) 1989-01-13 1989-01-13 Method of manufacturing ejection port forming member for ink jet recording head
JP740989A JPH02187345A (en) 1989-01-13 1989-01-13 Ink jet recording head and its manufacture
JP9181/89 1989-01-18
JP9184/89 1989-01-18
JP918489A JPH02188257A (en) 1989-01-18 1989-01-18 Production of ink jet head
JP918189A JPH02188255A (en) 1989-01-18 1989-01-18 Production of discharge port plate
JP1018079A JP2764418B2 (en) 1989-01-28 1989-01-28 Method of manufacturing ink jet recording head and ink jet recording head manufactured by the method
JP18079/89 1989-01-28
EP19890311199 EP0367541B1 (en) 1988-10-31 1989-10-30 Method of manufacturing an ink jet head

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP89311199.7 Division 1989-10-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP99200740A Division EP0937579B1 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head

Publications (2)

Publication Number Publication Date
EP0602021A2 EP0602021A2 (en) 1994-06-15
EP0602021A3 true EP0602021A3 (en) 1994-08-31

Family

ID=27579561

Family Applications (3)

Application Number Title Priority Date Filing Date
EP94200483A Withdrawn EP0602021A2 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head
EP19890311199 Expired - Lifetime EP0367541B1 (en) 1988-10-31 1989-10-30 Method of manufacturing an ink jet head
EP99200740A Expired - Lifetime EP0937579B1 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head

Family Applications After (2)

Application Number Title Priority Date Filing Date
EP19890311199 Expired - Lifetime EP0367541B1 (en) 1988-10-31 1989-10-30 Method of manufacturing an ink jet head
EP99200740A Expired - Lifetime EP0937579B1 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head

Country Status (3)

Country Link
EP (3) EP0602021A2 (en)
DE (2) DE68918663T2 (en)
ES (2) ES2207908T3 (en)

Families Citing this family (45)

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JP3032021B2 (en) * 1990-02-02 2000-04-10 キヤノン株式会社 Ink jet recording device
GB9010289D0 (en) * 1990-05-08 1990-06-27 Xaar Ltd Drop-on-demand printing apparatus and method of manufacture
CN1067632C (en) * 1990-07-20 2001-06-27 佳能株式会社 Recording apparatus with ink jet recording head
ES2120954T3 (en) * 1990-07-21 1998-11-16 Canon Kk METHOD FOR THE MANUFACTURE OF A PRINT HEAD FOR INK JETS AND HEAD FOR PRINTING BY INKS.
US5442384A (en) * 1990-08-16 1995-08-15 Hewlett-Packard Company Integrated nozzle member and tab circuit for inkjet printhead
US5291226A (en) * 1990-08-16 1994-03-01 Hewlett-Packard Company Nozzle member including ink flow channels
US5469199A (en) * 1990-08-16 1995-11-21 Hewlett-Packard Company Wide inkjet printhead
US5305015A (en) * 1990-08-16 1994-04-19 Hewlett-Packard Company Laser ablated nozzle member for inkjet printhead
DE69111936T2 (en) * 1990-08-16 1996-04-11 Hewlett Packard Co Photo-ablated components for inkjet printheads.
ES2100278T3 (en) * 1991-01-18 1997-06-16 Canon Kk LIQUID JET UNIT WITH HOLES AND PRINTING DEVICE USING THE SAME.
JPH0577425A (en) * 1991-02-21 1993-03-30 Hewlett Packard Co <Hp> Nozzle plate and its preparation
JP3278186B2 (en) * 1991-03-08 2002-04-30 キヤノン株式会社 Inkjet recording head
JP3179834B2 (en) * 1991-07-19 2001-06-25 株式会社リコー Liquid flight recorder
EP0786348B1 (en) * 1991-10-22 2002-07-03 Canon Kabushiki Kaisha Process for producing an ink jet recording head
GB9202434D0 (en) * 1992-02-05 1992-03-18 Xaar Ltd Method of and apparatus for forming nozzles
US5420627A (en) * 1992-04-02 1995-05-30 Hewlett-Packard Company Inkjet printhead
US5450113A (en) * 1992-04-02 1995-09-12 Hewlett-Packard Company Inkjet printhead with improved seal arrangement
US5278584A (en) * 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
US5297331A (en) * 1992-04-03 1994-03-29 Hewlett-Packard Company Method for aligning a substrate with respect to orifices in an inkjet printhead
US5300959A (en) * 1992-04-02 1994-04-05 Hewlett-Packard Company Efficient conductor routing for inkjet printhead
US5703631A (en) * 1992-05-05 1997-12-30 Compaq Computer Corporation Method of forming an orifice array for a high density ink jet printhead
US5378137A (en) * 1993-05-10 1995-01-03 Hewlett-Packard Company Mask design for forming tapered inkjet nozzles
US5350616A (en) * 1993-06-16 1994-09-27 Hewlett-Packard Company Composite orifice plate for ink jet printer and method for the manufacture thereof
GB9418412D0 (en) * 1994-09-13 1994-11-02 Xaar Ltd Removal of material from inkjet printheads
SG85076A1 (en) * 1994-09-13 2001-12-19 Xaar Ltd Removal of material from inkjet printheads
US5736998A (en) * 1995-03-06 1998-04-07 Hewlett-Packard Company Inkjet cartridge design for facilitating the adhesive sealing of a printhead to an ink reservoir
US5852460A (en) * 1995-03-06 1998-12-22 Hewlett-Packard Company Inkjet print cartridge design to decrease deformation of the printhead when adhesively sealing the printhead to the print cartridge
JPH0952365A (en) * 1995-06-08 1997-02-25 Canon Inc Ink jet recording head and manufacture thereof, and ink jet recording apparatus
US6561623B1 (en) * 1995-08-31 2003-05-13 Canon Kabushiki Kaisha Method for producing ink jet recording head and ink jet recording head produced by same
AU2476197A (en) * 1996-06-07 1997-12-11 Canon Kabushiki Kaisha Liquid ejection head and apparatus, and manufacturing method for liquid ejection head
JP3461249B2 (en) * 1996-08-30 2003-10-27 キヤノン株式会社 Inkjet recording head
US6193347B1 (en) 1997-02-06 2001-02-27 Hewlett-Packard Company Hybrid multi-drop/multi-pass printing system
US6259463B1 (en) 1997-10-30 2001-07-10 Hewlett-Packard Company Multi-drop merge on media printing system
US6193345B1 (en) 1997-10-30 2001-02-27 Hewlett-Packard Company Apparatus for generating high frequency ink ejection and ink chamber refill
US6234613B1 (en) * 1997-10-30 2001-05-22 Hewlett-Packard Company Apparatus for generating small volume, high velocity ink droplets in an inkjet printer
US6361145B1 (en) * 1998-01-27 2002-03-26 Canon Kabushiki Kaisha Ink jet recording head, method of producing same, and ink jet recording apparatus
US6416155B1 (en) 1998-10-27 2002-07-09 Canon Kabushiki Kaisha Ink jet recording head, ink jet recording cartridge, and recording apparatus
US6261742B1 (en) 1999-02-01 2001-07-17 Hewlett-Packard Company Method for manufacturing a printhead with re-entrant nozzles
EP1065058A3 (en) * 1999-06-30 2003-04-09 Canon Kabushiki Kaisha Method for manufacturing ink jet recording head, ink jet recording head manufactured by such method, and laser working method
US6747244B1 (en) 1999-11-30 2004-06-08 Canon Kabushiki Kaisha Laser working apparatus, laser working method, method for producing ink jet recording head utilizing such laser working apparatus or method, and ink jet recording head formed by such producing method
SE0003293D0 (en) * 2000-09-15 2000-09-15 Aamic Ab Dispensing nozzle
US7311386B2 (en) 2004-06-30 2007-12-25 Lexmark Interntional, Inc. Die attach methods and apparatus for micro-fluid ejection device
US7043838B2 (en) 2004-06-30 2006-05-16 Lexmark International, Inc. Process for manufacturing a micro-fluid ejection device
KR100580654B1 (en) 2004-10-29 2006-05-16 삼성전자주식회사 Nozzle plate, inkjet printhead having the same and manufacturing method of nozzle plate
JP5404331B2 (en) 2008-12-17 2014-01-29 キヤノン株式会社 Ink jet recording head, recording element substrate, method for manufacturing ink jet recording head, and method for manufacturing recording element substrate

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US4374707A (en) * 1981-03-19 1983-02-22 Xerox Corporation Orifice plate for ink jet printing machines
JPS6132761A (en) * 1984-07-25 1986-02-15 Nec Corp Jet head
EP0309146A2 (en) * 1987-09-19 1989-03-29 Xaar Limited Manufacture of nozzles for ink jet printers
EP0367438A1 (en) * 1988-10-19 1990-05-09 Xaar Limited Method of forming adherent fluorosilane layer on a substrate and ink jet recording head containing such a layer

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US4374707A (en) * 1981-03-19 1983-02-22 Xerox Corporation Orifice plate for ink jet printing machines
JPS6132761A (en) * 1984-07-25 1986-02-15 Nec Corp Jet head
EP0309146A2 (en) * 1987-09-19 1989-03-29 Xaar Limited Manufacture of nozzles for ink jet printers
EP0367438A1 (en) * 1988-10-19 1990-05-09 Xaar Limited Method of forming adherent fluorosilane layer on a substrate and ink jet recording head containing such a layer

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Also Published As

Publication number Publication date
EP0937579A3 (en) 1999-11-03
EP0367541B1 (en) 1994-10-05
DE68918663D1 (en) 1994-11-10
DE68918663T2 (en) 1995-03-16
DE68929489T2 (en) 2004-08-19
ES2207908T3 (en) 2004-06-01
EP0937579A2 (en) 1999-08-25
EP0602021A2 (en) 1994-06-15
EP0367541A2 (en) 1990-05-09
EP0937579B1 (en) 2003-10-08
DE68929489D1 (en) 2003-11-13
EP0367541A3 (en) 1990-11-14
ES2060789T3 (en) 1994-12-01

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