EP0714123A3 - A semiconductor device, a semiconductor device-mounted apparatus, and a method for replacing the semiconductor device - Google Patents
A semiconductor device, a semiconductor device-mounted apparatus, and a method for replacing the semiconductor device Download PDFInfo
- Publication number
- EP0714123A3 EP0714123A3 EP95303846A EP95303846A EP0714123A3 EP 0714123 A3 EP0714123 A3 EP 0714123A3 EP 95303846 A EP95303846 A EP 95303846A EP 95303846 A EP95303846 A EP 95303846A EP 0714123 A3 EP0714123 A3 EP 0714123A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- semiconductor device
- solder
- connection electrode
- drawing layer
- replacing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/03—Manufacturing methods
- H01L2224/036—Manufacturing methods by patterning a pre-deposited material
- H01L2224/0361—Physical or chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/03—Manufacturing methods
- H01L2224/039—Methods of manufacturing bonding areas involving a specific sequence of method steps
- H01L2224/03912—Methods of manufacturing bonding areas involving a specific sequence of method steps the bump being used as a mask for patterning the bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/1012—Auxiliary members for bump connectors, e.g. spacers
- H01L2224/10122—Auxiliary members for bump connectors, e.g. spacers being formed on the semiconductor or solid-state body to be connected
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/1012—Auxiliary members for bump connectors, e.g. spacers
- H01L2224/10122—Auxiliary members for bump connectors, e.g. spacers being formed on the semiconductor or solid-state body to be connected
- H01L2224/10145—Flow barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/13111—Tin [Sn] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
- H01L2224/75302—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00013—Fully indexed content
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01022—Titanium [Ti]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01024—Chromium [Cr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01046—Palladium [Pd]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01075—Rhenium [Re]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/1026—Compound semiconductors
- H01L2924/1032—III-V
- H01L2924/10329—Gallium arsenide [GaAs]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
Abstract
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28813394 | 1994-11-22 | ||
JP288133/94 | 1994-11-22 | ||
JP06288133A JP3138159B2 (en) | 1994-11-22 | 1994-11-22 | Semiconductor device, semiconductor device package, and semiconductor device replacement method |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0714123A2 EP0714123A2 (en) | 1996-05-29 |
EP0714123A3 true EP0714123A3 (en) | 1998-06-10 |
EP0714123B1 EP0714123B1 (en) | 2005-10-26 |
Family
ID=17726244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP95303846A Expired - Lifetime EP0714123B1 (en) | 1994-11-22 | 1995-06-06 | A semiconductor device, a semiconductor device-mounted apparatus, and a method for replacing the semiconductor device |
Country Status (4)
Country | Link |
---|---|
US (1) | US5726501A (en) |
EP (1) | EP0714123B1 (en) |
JP (1) | JP3138159B2 (en) |
DE (1) | DE69534543T2 (en) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5956605A (en) * | 1996-09-20 | 1999-09-21 | Micron Technology, Inc. | Use of nitrides for flip-chip encapsulation |
US5877560A (en) * | 1997-02-21 | 1999-03-02 | Raytheon Company | Flip chip microwave module and fabrication method |
US5942448A (en) * | 1997-02-24 | 1999-08-24 | Sarnoff Corporation | Method of making contacts on an integrated circuit |
US5929521A (en) * | 1997-03-26 | 1999-07-27 | Micron Technology, Inc. | Projected contact structure for bumped semiconductor device and resulting articles and assemblies |
KR100219806B1 (en) * | 1997-05-27 | 1999-09-01 | 윤종용 | Method for manufacturing flip chip mount type of semiconductor, and manufacture solder bump |
US6407461B1 (en) * | 1997-06-27 | 2002-06-18 | International Business Machines Corporation | Injection molded integrated circuit chip assembly |
FR2765399B1 (en) * | 1997-06-27 | 2001-12-07 | Sgs Thomson Microelectronics | SEMICONDUCTOR DEVICE WITH REMOTE EXCHANGES |
US6118180A (en) * | 1997-11-03 | 2000-09-12 | Lsi Logic Corporation | Semiconductor die metal layout for flip chip packaging |
DE19750073A1 (en) * | 1997-11-12 | 1999-05-20 | Bosch Gmbh Robert | Circuit board |
JPH11297889A (en) * | 1998-04-16 | 1999-10-29 | Sony Corp | Semiconductor package, mounting board and mounting method by use of them |
US6423623B1 (en) | 1998-06-09 | 2002-07-23 | Fairchild Semiconductor Corporation | Low Resistance package for semiconductor devices |
US6133634A (en) | 1998-08-05 | 2000-10-17 | Fairchild Semiconductor Corporation | High performance flip chip package |
JP2000150560A (en) * | 1998-11-13 | 2000-05-30 | Seiko Epson Corp | Bump forming method, bump forming bonding tool, semiconductor wafer, semiconductor chip, semiconductor device, manufacture thereof, circuit substrate and electronic machine |
JP2000260792A (en) * | 1999-03-10 | 2000-09-22 | Toshiba Corp | Semiconductor device |
US6130479A (en) * | 1999-08-02 | 2000-10-10 | International Business Machines Corporation | Nickel alloy films for reduced intermetallic formation in solder |
JP2001068836A (en) * | 1999-08-27 | 2001-03-16 | Mitsubishi Electric Corp | Printed wiring board and semicondcutor module, and manufacture thereof |
JP2001077518A (en) * | 1999-09-01 | 2001-03-23 | Fujitsu Ltd | Electronic component mounting printed board and electrtonic component dismounting method |
US6624522B2 (en) | 2000-04-04 | 2003-09-23 | International Rectifier Corporation | Chip scale surface mounted device and process of manufacture |
US6320137B1 (en) * | 2000-04-11 | 2001-11-20 | 3M Innovative Properties Company | Flexible circuit with coverplate layer and overlapping protective layer |
US6876052B1 (en) | 2000-05-12 | 2005-04-05 | National Semiconductor Corporation | Package-ready light-sensitive integrated circuit and method for its preparation |
US6930397B2 (en) | 2001-03-28 | 2005-08-16 | International Rectifier Corporation | Surface mounted package with die bottom spaced from support board |
US7119447B2 (en) * | 2001-03-28 | 2006-10-10 | International Rectifier Corporation | Direct fet device for high frequency application |
US7476964B2 (en) * | 2001-06-18 | 2009-01-13 | International Rectifier Corporation | High voltage semiconductor device housing with increased clearance between housing can and die for improved flux flushing |
US6582990B2 (en) | 2001-08-24 | 2003-06-24 | International Rectifier Corporation | Wafer level underfill and interconnect process |
US6784540B2 (en) | 2001-10-10 | 2004-08-31 | International Rectifier Corp. | Semiconductor device package with improved cooling |
US6951125B2 (en) * | 2002-01-31 | 2005-10-04 | Stmicroelectronics, Inc. | System and method for aligning an integrated circuit die on an integrated circuit substrate |
US7323361B2 (en) * | 2002-03-29 | 2008-01-29 | Fairchild Semiconductor Corporation | Packaging system for semiconductor devices |
US7547623B2 (en) * | 2002-06-25 | 2009-06-16 | Unitive International Limited | Methods of forming lead free solder bumps |
US7397137B2 (en) * | 2002-07-15 | 2008-07-08 | International Rectifier Corporation | Direct FET device for high frequency application |
US7579697B2 (en) * | 2002-07-15 | 2009-08-25 | International Rectifier Corporation | Arrangement for high frequency application |
US7265045B2 (en) * | 2002-10-24 | 2007-09-04 | Megica Corporation | Method for fabricating thermal compliant semiconductor chip wiring structure for chip scale packaging |
US6841865B2 (en) | 2002-11-22 | 2005-01-11 | International Rectifier Corporation | Semiconductor device having clips for connecting to external elements |
US20040124546A1 (en) * | 2002-12-29 | 2004-07-01 | Mukul Saran | Reliable integrated circuit and package |
US7253510B2 (en) | 2003-01-16 | 2007-08-07 | International Business Machines Corporation | Ball grid array package construction with raised solder ball pads |
TWI222192B (en) * | 2003-09-04 | 2004-10-11 | Advanced Semiconductor Eng | Substrate with net structure |
US7098540B1 (en) * | 2003-12-04 | 2006-08-29 | National Semiconductor Corporation | Electrical interconnect with minimal parasitic capacitance |
JP2005175128A (en) * | 2003-12-10 | 2005-06-30 | Fujitsu Ltd | Semiconductor device and manufacturing method thereof |
US20050269677A1 (en) * | 2004-05-28 | 2005-12-08 | Martin Standing | Preparation of front contact for surface mounting |
JP4817418B2 (en) * | 2005-01-31 | 2011-11-16 | オンセミコンダクター・トレーディング・リミテッド | Circuit device manufacturing method |
US7524701B2 (en) * | 2005-04-20 | 2009-04-28 | International Rectifier Corporation | Chip-scale package |
US7230333B2 (en) * | 2005-04-21 | 2007-06-12 | International Rectifier Corporation | Semiconductor package |
TWI365516B (en) * | 2005-04-22 | 2012-06-01 | Int Rectifier Corp | Chip-scale package |
TW200742515A (en) * | 2006-01-27 | 2007-11-01 | Ibiden Co Ltd | Printed-circuit board, and method for manufacturing the same |
JP4221012B2 (en) * | 2006-06-12 | 2009-02-12 | トヨタ自動車株式会社 | Semiconductor device and manufacturing method thereof |
JP4795883B2 (en) * | 2006-07-21 | 2011-10-19 | 株式会社日立ハイテクノロジーズ | Pattern inspection / measurement equipment |
KR100771467B1 (en) * | 2006-10-30 | 2007-10-30 | 삼성전기주식회사 | Circuit board and method for manufacturing there of |
JP5073351B2 (en) * | 2007-04-12 | 2012-11-14 | 日本電波工業株式会社 | Electronic devices for surface mounting |
US8669658B2 (en) * | 2007-07-24 | 2014-03-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Crosstalk-free WLCSP structure for high frequency application |
KR20090046627A (en) * | 2007-11-06 | 2009-05-11 | 주식회사 동부하이텍 | Semiconductor device and method for fabricating the same |
JP5649788B2 (en) * | 2009-01-21 | 2015-01-07 | 富士通株式会社 | Printed circuit board, printed circuit board mounting structure, and printed circuit board mounting method |
JPWO2010109572A1 (en) | 2009-03-23 | 2012-09-20 | トヨタ自動車株式会社 | Semiconductor device |
JP5290215B2 (en) * | 2010-02-15 | 2013-09-18 | ルネサスエレクトロニクス株式会社 | Semiconductor device, semiconductor package, interposer, and manufacturing method of interposer |
US8360303B2 (en) * | 2010-07-22 | 2013-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Forming low stress joints using thermal compress bonding |
US8647974B2 (en) * | 2011-03-25 | 2014-02-11 | Ati Technologies Ulc | Method of fabricating a semiconductor chip with supportive terminal pad |
US9368461B2 (en) * | 2014-05-16 | 2016-06-14 | Intel Corporation | Contact pads for integrated circuit packages |
US9362243B2 (en) * | 2014-05-21 | 2016-06-07 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor package device and forming the same |
US11626336B2 (en) * | 2019-10-01 | 2023-04-11 | Qualcomm Incorporated | Package comprising a solder resist layer configured as a seating plane for a device |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4274576A (en) * | 1979-11-13 | 1981-06-23 | International Business Machines Corporation | Cryogenic chip removal technique |
US5011066A (en) * | 1990-07-27 | 1991-04-30 | Motorola, Inc. | Enhanced collapse solder interconnection |
US5046161A (en) * | 1988-02-23 | 1991-09-03 | Nec Corporation | Flip chip type semiconductor device |
US5075965A (en) * | 1990-11-05 | 1991-12-31 | International Business Machines | Low temperature controlled collapse chip attach process |
EP0476912A2 (en) * | 1990-09-19 | 1992-03-25 | AT&T Corp. | Electronic device manipulating apparatus and method |
US5237269A (en) * | 1991-03-27 | 1993-08-17 | International Business Machines Corporation | Connections between circuit chips and a temporary carrier for use in burn-in tests |
US5311404A (en) * | 1992-06-30 | 1994-05-10 | Hughes Aircraft Company | Electrical interconnection substrate with both wire bond and solder contacts |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3697828A (en) * | 1970-12-03 | 1972-10-10 | Gen Motors Corp | Geometry for a pnp silicon transistor with overlay contacts |
CA1226966A (en) * | 1985-09-10 | 1987-09-15 | Gabriel Marcantonio | Integrated circuit chip package |
JPH01209736A (en) * | 1988-02-17 | 1989-08-23 | Nec Corp | Method of replacing semiconductor element |
JPH05121488A (en) * | 1991-10-25 | 1993-05-18 | Matsushita Electric Ind Co Ltd | Bare chip mounting board |
-
1994
- 1994-11-22 JP JP06288133A patent/JP3138159B2/en not_active Expired - Fee Related
-
1995
- 1995-06-05 US US08/464,077 patent/US5726501A/en not_active Expired - Lifetime
- 1995-06-06 DE DE69534543T patent/DE69534543T2/en not_active Expired - Lifetime
- 1995-06-06 EP EP95303846A patent/EP0714123B1/en not_active Expired - Lifetime
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4274576A (en) * | 1979-11-13 | 1981-06-23 | International Business Machines Corporation | Cryogenic chip removal technique |
US5046161A (en) * | 1988-02-23 | 1991-09-03 | Nec Corporation | Flip chip type semiconductor device |
US5011066A (en) * | 1990-07-27 | 1991-04-30 | Motorola, Inc. | Enhanced collapse solder interconnection |
EP0476912A2 (en) * | 1990-09-19 | 1992-03-25 | AT&T Corp. | Electronic device manipulating apparatus and method |
US5075965A (en) * | 1990-11-05 | 1991-12-31 | International Business Machines | Low temperature controlled collapse chip attach process |
US5237269A (en) * | 1991-03-27 | 1993-08-17 | International Business Machines Corporation | Connections between circuit chips and a temporary carrier for use in burn-in tests |
US5311404A (en) * | 1992-06-30 | 1994-05-10 | Hughes Aircraft Company | Electrical interconnection substrate with both wire bond and solder contacts |
Non-Patent Citations (1)
Title |
---|
"CHIP REMOVAL METHOD", IBM TECHNICAL DISCLOSURE BULLETIN, vol. 31, no. 11, April 1989 (1989-04-01), pages 212/213, XP000027183 * |
Also Published As
Publication number | Publication date |
---|---|
JPH08148522A (en) | 1996-06-07 |
US5726501A (en) | 1998-03-10 |
EP0714123B1 (en) | 2005-10-26 |
JP3138159B2 (en) | 2001-02-26 |
DE69534543T2 (en) | 2006-07-13 |
EP0714123A2 (en) | 1996-05-29 |
DE69534543D1 (en) | 2005-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0714123A3 (en) | A semiconductor device, a semiconductor device-mounted apparatus, and a method for replacing the semiconductor device | |
EP0964608A3 (en) | Method for laser soldering | |
EP0810649A3 (en) | Method for coupling substrates and structure | |
EP1321982A3 (en) | Waferlevel method for direct bumping on copper pads in integrated circuits | |
EP0889512A3 (en) | Method for controlling solder bump shape and stand-off height | |
EP1134805A3 (en) | Solder bump fabrication methods and structure including a titanium barrier layer | |
EP0794572A3 (en) | Electronic component, method for making the same, and lead frame and mold assembly for use therein | |
CA2116766A1 (en) | Solder Bump Fabrication Method and Solder Bumps Formed Thereby | |
EP0732736A3 (en) | Semiconductor package for flip-chip mounting process | |
EP1450415A3 (en) | Gallium nitride-based III-V group compound semiconductor device | |
EP1202348A3 (en) | Semiconductor device and method of manufacturing same | |
EP1892754A3 (en) | Method of electroplating solder bumps of uniform height on integrated circuit substrates | |
EP1335422A3 (en) | Chip sized semiconductor device and a process for making it | |
MY105130A (en) | Self-centering electrode for power devices. | |
EP0753988A3 (en) | Method for forming bumps on a substrate | |
SG69995A1 (en) | Semiconductor body with solder material layer | |
EP0083488A3 (en) | Method of producing printed circuits | |
EP0806793A3 (en) | Insulated wafer spacing mask for a substrate support chuck and method of fabricating same | |
US8046911B2 (en) | Method for mounting electronic component on substrate and method for forming solder surface | |
US6085968A (en) | Solder retention ring for improved solder bump formation | |
EP0818823A3 (en) | Radio frequency module and method for fabricating the radio frequency module | |
EP0854520A3 (en) | Method for mounting optical semiconductor device on supporting substrate | |
EP1191578A3 (en) | Semiconductor apparatus and method for producing the same | |
EP0926734A3 (en) | Method and apparatus for delivering electrical power to a semiconducteur die | |
EP1049253A3 (en) | Surface acoustic wave device having bump electrodes and method for producing the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): DE FR GB |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): DE FR GB |
|
17P | Request for examination filed |
Effective date: 19981203 |
|
17Q | First examination report despatched |
Effective date: 20001006 |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): DE FR GB |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D |
|
REF | Corresponds to: |
Ref document number: 69534543 Country of ref document: DE Date of ref document: 20051201 Kind code of ref document: P |
|
ET | Fr: translation filed | ||
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20060606 |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed |
Effective date: 20060727 |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20060606 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20100709 Year of fee payment: 16 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20100602 Year of fee payment: 16 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20120229 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 69534543 Country of ref document: DE Effective date: 20120103 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20120103 Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110630 |