EP0823585A2 - Supply plant in particular for toxic and combustible gases - Google Patents
Supply plant in particular for toxic and combustible gases Download PDFInfo
- Publication number
- EP0823585A2 EP0823585A2 EP97112685A EP97112685A EP0823585A2 EP 0823585 A2 EP0823585 A2 EP 0823585A2 EP 97112685 A EP97112685 A EP 97112685A EP 97112685 A EP97112685 A EP 97112685A EP 0823585 A2 EP0823585 A2 EP 0823585A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- absorber
- pressure
- line
- gas
- toxic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/01—Mounting arrangements
- F17C2205/0103—Exterior arrangements
- F17C2205/0111—Boxes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/01—Mounting arrangements
- F17C2205/0123—Mounting arrangements characterised by number of vessels
- F17C2205/013—Two or more vessels
- F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
- F17C2205/0142—Two or more vessels characterised by the presence of fluid connection between vessels bundled in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0323—Valves
Definitions
- the invention relates to a supply system, in particular for toxic and combustible Gases, with at least one storage container which contains the gas and with a sampling line and an absorber is connected.
- Bottle bundles which consist of individual by means of a brazed, high pressure tested Bottles connected to the collecting line are made with an extraction line connected, which directs the fluorine to the places where it is needed.
- extraction line connected to the places where it is needed.
- Several bundles of bottles are regularly used to ensure gas supply connected to the sampling line via a switchover device. When the gas pressure of a bottle bundle comes to an end, the bottle bundle becomes switched off from the sampling line via the switchover device and a full one Bottle bundle switched on to the sampling line.
- a Absorber provided, which is connected to the connecting lines of the bottle bundle is and thus that in the connecting lines or the bottle bundle residual gas can take up.
- the absorber can only neutralize a certain amount of gas per unit of time, may the pressure of the in the connecting lines or if necessary residual gas in the bottle bundle when the absorber is switched on the connecting lines must not be too large, otherwise the ones supplied to the absorber The amount of gas would be too large, with the result that part of the gas would not would be neutralized and enter the environment as a toxic or flammable substance would.
- a pressure reducer is arranged between the storage containers and the absorber.
- the pressure reducer advantageously ensures that only a certain amount of gas is passed to the absorber.
- the amount of gas can be determined by setting the back pressure, i.e. the pressure on the side of the absorber. With a larger line leading to the absorber, a lower back pressure must be set than with smaller connecting lines. For example, if the line diameter of the pipeline leading to the absorber is 12 mm with a wall thickness of 1 mm, the back pressure for an absorber with an F 2 absorption capacity of 3 g F 2 / sec. Air should be set to 3 bar, because then only 2.5 g F 2 / sec.
- the gas pressure reducer is set to a back pressure of less than 3 bar in a supply system according to the invention, the F 2 absorber can absorb any residual gas amount from each bundle if the bundle valve is leaking.
- the pressure reducer is therefore advantageously designed for a pre-pressure of 200 bar and an adjustable back pressure of 0 to 10 bar.
- a vacuum pump is provided, which is located in the absorber line and the connecting lines Gas sucks through the absorber. It is particularly advantageous if the Pressure reducer can be sucked through from the vacuum side. This can ensure be that after the bundle changeover the residual gas from the line between the absorber and the switching station and between the storage container and the switching station or from the reservoir itself is sucked. This means that after loosening the reservoir from the Connection lines no residual gas flows out of the line. This is particularly so In the case of supply systems for fluorine, this is a great advantage, since fluorine no longer comes from the Lines escapes and poisoned people through the formation of hydrogen fluoride or Bottle bundles corrode from the inside due to leaky bottle valves be destroyed.
- FIG. A supply system according to the invention It shows the only FIG. A supply system according to the invention.
- a supply system there are two bundles of bottles 1 and 2 connected to a removal line 3 via a switching device 10.
- the bundles of bottles 1, 2 are each via a flexible line 1a, 2a with permanently installed Connection lines 1b, 2b connected.
- connection lines 1b, 2b are to the extraction line 3 towards the first pressure reducer 8, 9.
- the pressure reducer 8, 9 the gas pressure prevailing in the cylinder bundles 1, 2 is reduced to the operating pressure.
- the connecting lines 1b, 2b there are between bottle bundles 1, 2 and pressure reducer 8, 9 pressure switch 13, 14, which in the connecting lines 1b, 2b monitor the prevailing gas pressure.
- the connecting lines 1b, 2b are further connected to absorber lines 4, 5, which each have an absorber, not shown, with the connecting lines 1b, 2b and thus connect to the bundles of bottles 1, 2 via the first lines 1a, 2a.
- Second pressure reducers 6, 7 are connected in the absorber lines 4, 5.
- the second pressure reducers 6, 7 are for a pre-pressure of 200 bar and an adjustable Back pressure designed from 0 to 10 bar.
- solenoid valves 11, 12, which close normally before the absorber, are switched, which the absorbers from the absorber lines 4, 5 and thus from the Can cut lines 1a, 2a, 1b, 2b.
- the pressure switch 13 shown on the left reports that the Pressure of the bottle bundle is 5 bar, it sends a signal to the switching station 10, which then separates the supply line 1b from the extraction line 3 and the supply line 2b connects to the extraction line 3.
- the supply line 1b is closed in a pressure-tight manner after the changeover in the changeover station 10.
- the state is shown in which the right bottle bundle 2 with the extraction line 3 connected and the supply line 1b in the switching station 10 is closed pressure-tight.
- the pressure in the supply line is 1b in the selected one Example 5 bar.
- the solenoid valve 11 is opened. That is in the connecting line 1b and the supply line 1a residual gas is via the absorber line 4th fed to the absorber.
- the second pressure reducer 6 the pressure at one Line diameter of the absorber line 4 of 12 mm with a wall thickness reduced from 1 mm to, for example, 3 bar in the absorber line 4. It is therefore ensures that only as much residual gas is supplied to the absorber per unit of time, how he can neutralize.
- a vacuum pump not shown, which is located in the pipe network residual gas sucks through the absorber.
- the second pressure reducer is for this purpose 6, 7 designed so that they can be sucked through from the back pressure side. That means, that even if there is no more pressure on the pre-pressure side, gas can flow through the pressure reducer if the pressure on the back pressure side is less than on the pre-printed page.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
Description
Die Erfindung betrifft eine Versorgungsanlage, insbesondere für toxische und brennbare Gase, mit wenigstens einem Vorratsbehälter, welcher das Gas enthält und mit einer Entnahmeleitung sowie einem Absorber verbunden ist.The invention relates to a supply system, in particular for toxic and combustible Gases, with at least one storage container which contains the gas and with a sampling line and an absorber is connected.
Derartige Versorgungsanlagen sind beispielsweise zur Bereitstellung von Fluor bekannt. Bei einer solchen bekannten Anlage sind beispielsweise zwei sogenannte Flaschenbündel, welche aus einzelnen mittels einer hartverlöteten, hochdruckgeprüften Sammelleitung verbundenen Flaschen bestehen, mit einer Entnahmeleitung verbunden, welche das Fluor an die Stellen leitet, wo es benötigt wird. Um eine unterbrechungsfreie Gasversorgung zu gewährleisten, sind regelmäßig mehrere Flaschenbündel über eine Umschalteinrichtung mit der Entnahmeleitung verbunden. Neigt sich der Gasdruck eines Flaschenbündels zu Ende, wird das Flaschenbündel über die Umschalteinrichtung von der Entnahmeleitung abgeschaltet und ein volles Flaschenbündel an die Entnahmeleitung angeschaltet.Supply systems of this type are known, for example, for the provision of fluorine. In such a known system there are, for example, two so-called Bottle bundles, which consist of individual by means of a brazed, high pressure tested Bottles connected to the collecting line are made with an extraction line connected, which directs the fluorine to the places where it is needed. To be uninterrupted Several bundles of bottles are regularly used to ensure gas supply connected to the sampling line via a switchover device. When the gas pressure of a bottle bundle comes to an end, the bottle bundle becomes switched off from the sampling line via the switchover device and a full one Bottle bundle switched on to the sampling line.
Zur Entsorgung des sich in den Leitungen des abgeschalteten Flaschenbündels und gegebenenfalls im abgeschalteten Flaschenbündel befindlichen Restgases ist ein Absorber vorgesehen, welcher mit den Anschlußleitungen des Flaschenbündels ververbunden ist und somit das sich in den Anschlußleitungen oder dem Flaschenbündel befindliche Restgas aufnehmen kann.To dispose of the in the lines of the switched off bottle bundle and any residual gas in the switched-off bottle bundle is a Absorber provided, which is connected to the connecting lines of the bottle bundle is and thus that in the connecting lines or the bottle bundle residual gas can take up.
Da der Absorber nur eine bestimmte Menge Gas pro Zeiteinheit neutralisieren kann, darf der Druck des sich in den Anschlußleitungen beziehungsweise gegebenenfalls im Flaschenbündel befindlichen Restgases bei der Anschaltung des Absorbers an die Anschlußleitungen nicht zu groß sein, da ansonsten die dem Absorber zugeführte Gasmenge zu groß wäre, was zur Folge hätte, daß ein Teil des Gases nicht neutralisiert würde und als giftige oder brennbare Substanz in die Umwelt gelangen würde.Since the absorber can only neutralize a certain amount of gas per unit of time, may the pressure of the in the connecting lines or if necessary residual gas in the bottle bundle when the absorber is switched on the connecting lines must not be too large, otherwise the ones supplied to the absorber The amount of gas would be too large, with the result that part of the gas would not would be neutralized and enter the environment as a toxic or flammable substance would.
Derselbe nachteilige Effekt würde auch bei einer Störung auftreten, bei der der Absorber während des Betriebs an die Anschlußleitung geschaltet würde.The same adverse effect would also occur in the event of a fault in which the absorber would be connected to the connecting line during operation.
Es ist Aufgabe der Erfindung, eine eingangs genannte Versorgungsanlage so auszubilden, daß die Gefahr, daß nicht neutralisiertes Gas in die Umwelt gelangt, verringert ist.It is an object of the invention to design a supply system mentioned at the outset so that the risk of non-neutralized gas getting into the environment is reduced is.
Die Lösung dieser Aufgabe ergibt sich aus den Merkmalen des kennzeichnenden Teils des Anspruchs 1. Vorteilhafte Weiterbildungen der Erfindung ergeben sich aus den Unteransprüchen.The solution to this problem results from the characteristics of the characteristic Part of claim 1. Advantageous further developments of the invention result from the subclaims.
Gemäß der Erfindung ist zwischen den Vorratsbehältern und dem Absorber ein Druckminderer angeordnet. Durch den Druckminderer wird in vorteilhafter Weise erreicht, daß nur eine bestimmte Menge Gas an den Absorber geleitet wird. Die Gasmenge kann durch die Einstellung des Hinterdrucks, das heißt den Druck auf der Seite des Absorbers bestimmt werden. Bei einer größeren zum Absorber führenden Leitung muß ein geringerer Hinterdruck eingestellt werden als bei kleineren Anschlußleitungen. Wenn zum Beispiel der Leitungsdurchmesser der zum Absorber führenden Rohrleitung 12 mm bei einer Wandstärke von 1 mm beträgt, kann der Hinterdruck für einen Absorber mit einer F2-Ab-sorptionsleistung von 3 g F2 /Sek. Luft auf 3 bar eingestellt sein, da dann etwa nur 2,5 g F2/Sek. durch den Absorber strömen, wenn die F2-Belastung des abgesaugten F2/N2 Mischgases 314 g F2/m3 beträgt. Das heißt, wird bei einer erfindungsgemäßen Versorgungsanlage der Gasdruckminderer auf einen Hinterdruck von kleiner 3 bar eingestellt, kann der F2-Absorber jede Restgasmenge aus jedem Bündel bei eventuell lecken Bündelventil aufnehmen. In vorteilhafter Weise ist daher der Druckminderer für einen Vordruck von 200 bar und einen einstellbaren Hinterdruck von 0 bis 10 bar ausgelegt.According to the invention, a pressure reducer is arranged between the storage containers and the absorber. The pressure reducer advantageously ensures that only a certain amount of gas is passed to the absorber. The amount of gas can be determined by setting the back pressure, i.e. the pressure on the side of the absorber. With a larger line leading to the absorber, a lower back pressure must be set than with smaller connecting lines. For example, if the line diameter of the pipeline leading to the absorber is 12 mm with a wall thickness of 1 mm, the back pressure for an absorber with an F 2 absorption capacity of 3 g F 2 / sec. Air should be set to 3 bar, because then only 2.5 g F 2 / sec. flow through the absorber when the F2 load of the extracted F2 / N 2 mixed gas is 314 g F 2 / m 3 . That is, if the gas pressure reducer is set to a back pressure of less than 3 bar in a supply system according to the invention, the F 2 absorber can absorb any residual gas amount from each bundle if the bundle valve is leaking. The pressure reducer is therefore advantageously designed for a pre-pressure of 200 bar and an adjustable back pressure of 0 to 10 bar.
Bei einer besonderen Ausführungsform der Erfindung ist eine Vakuumpumpe vorgesehen, welche das sich in der Absorberleitung sowie den Anschlußleitungen befindliche Gas durch den Absorber saugt. Hierbei ist es besonders vorteilhaft, wenn der Druckminderer von der Unterdruckseite her durchsaugbar ist. Hierdurch kann gewährleistet werden, daß nach der Bündelumschaltung das Restgas aus der Leitung zwischen dem Absorber und der Umschaltstation sowie zwischen dem Vorratsbehälter und der Umschaltstation beziehungsweise aus dem Vorratsbehälter selbst gesaugt wird. Dies bedeutet, daß nach dem Lösen des Vorratsbehälters von den Anschlußleitungen kein Restgas aus der Leitung ausströmt. Dies ist insbesondere bei Versorgungsanlagen für Fluor von großem Vorteil, da kein Fluor mehr aus den Leitungen austritt und durch Bildung von Fluorwasserstoff Menschen vergiftet oder Flaschenbündel durch undichte Flaschenventile von innen her stark korrodieren beziehungsweise zerstört werden.In a special embodiment of the invention, a vacuum pump is provided, which is located in the absorber line and the connecting lines Gas sucks through the absorber. It is particularly advantageous if the Pressure reducer can be sucked through from the vacuum side. This can ensure be that after the bundle changeover the residual gas from the line between the absorber and the switching station and between the storage container and the switching station or from the reservoir itself is sucked. This means that after loosening the reservoir from the Connection lines no residual gas flows out of the line. This is particularly so In the case of supply systems for fluorine, this is a great advantage, since fluorine no longer comes from the Lines escapes and poisoned people through the formation of hydrogen fluoride or Bottle bundles corrode from the inside due to leaky bottle valves be destroyed.
Weitere Einzelheiten, Merkmale und Vorteile der vorliegenden Erfindung ergeben sich aus der nachfolgenden Beschreibung eines besonderen Ausführungsbeispiels unter Bezugnahme auf die Zeichnung.Further details, features and advantages of the present invention will become apparent from the following description of a particular embodiment with reference to the drawing.
Es zeigt die einzige Fig. Eine erfindungsgemäße Versorgungsanlage.It shows the only FIG. A supply system according to the invention.
Bei einer erfindungsgemäßen Versorgungsanlage sind zwei Flaschenbündel 1 und 2
über eine Umschalteinrichtung 10 mit einer Entnahmeleitung 3 verbunden. Die Flaschenbündel
1, 2 sind jeweils über eine flexible Leitung 1a, 2a mit fest installierten
Anschlußleitungen 1b, 2b verbunden. In den Anschlußleitungen 1b, 2b befinden sich
zur Entnahmeleitung 3 hin erste Druckminderer 8, 9. Durch die Druckminderer 8, 9
wird der in den Flaschenbündeln 1, 2 herrschende Gasdruck auf Betriebsdruck reduziert.
In den Anschlußleitungen 1b, 2b befinden sich zwischen Flaschenbündel 1,
2 und Druckminderer 8, 9 Druckwächter 13, 14, welche den in den Anschlußleitungen
1b, 2b herrschenden Gasdruck überwachen.In a supply system according to the invention there are two bundles of bottles 1 and 2
connected to a
Die Anschlußleitungen 1b, 2b sind des weiteren mit Absorberleitungen 4, 5 verbunden,
welche jeweils einen nicht gezeigten Absorber mit den Anschlußleitungen 1b,
2b und damit über die ersten Leitungen 1a, 2a mit den Flaschenbündeln 1, 2 verbinden.
In den Absorberleitungen 4, 5 sind zweite Druckminderer 6, 7 geschaltet. Die
zweiten Druckminderer 6, 7 sind für einen Vordruck von 200 bar und einen einstellbaren
Hinterdruck von 0 bis 10 bar ausgelegt. In den Absorberleitungen 4, 5 sind
des weiteren vor dem Absorber stromlos schließende Magnetventile 11, 12 geschaltet,
welche die Absorber von den Absorberleitungen 4, 5 und somit von den
Leitungen 1a, 2a, 1b, 2b abtrennen können.The connecting
Meldet beispielsweise der in der Fig. Links dargestellte Druckwächter 13, daß der
Druck des Flaschenbündels 5 bar beträgt, gibt er ein Signal an die Umschaltstation
10, welche dann die Verorgungsleitung 1b von der Entnahmeleitung 3 abtrennt und
die Versorgungsleitung 2b an die Entnahmeleitung 3 anschließt. Die Versorgungsleitung
1b ist nach dem Umschalten in der Umschaltstation 10 druckdicht verschlossen.
In der Fig. Ist der Zustand dargestellt, bei dem das rechte Flaschenbündel 2 mit
der Entnahmeleitung 3 verbunden und die Versorgungsleitung 1b in der Umschaltstation
10 druckdicht verschlossen ist.For example, the
Nach dem Umschalten beträgt der Druck in der Versorgungsleitung 1b im gewählten
Beispiel 5 bar. Nachdem das am Flaschenbündel 1 angeordnete Zentralventil verschlossen
wurde, wird das Magnetventil 11 geöffnet. Das sich in der Anschlußleitung
1b und der Zuführleitung 1a befindliche Restgas wird über die Absorberleitung 4
dem Absorber zugeführt. Durch den zweiten Druckminderer 6 wird der Druck bei einem
Leitungsdurchmesser der Absorberleitung 4 von 12 mm bei einer Wandstärke
von 1 mm auf beispielsweise 3 bar in der Absorberleitung 4 reduziert. Es ist daher
gewährleistet, daß dem Absorber nur so viel Restgas pro Zeiteinheit zugeführt wird,
wie er neutralisieren kann. After switching, the pressure in the supply line is 1b in the selected one
Example 5 bar. After the central valve arranged on the bottle bundle 1 is closed
the
Um sicherzustellen, daß aus dem Leitungsnetz sämtliches Restgas entfernt wird, ist
eine nicht gezeigte Vakuumpumpe vorgesehen, welche das sich im Leitungsnetz
befindliche Restgas durch den Absorber saugt. Hierzu sind die zweiten Druckminderer
6, 7 so ausgelegt, daß sie von der Hinterdruckseite durchsaugbar sind. Das bedeutet,
daß selbst wenn auf der Vordruckseite kein Druck mehr vorhanden ist, Gas
durch den Druckminderer strömen kann, wenn der Druck auf der Hinterdruckseite
geringer ist als auf der Vordruckseite.To ensure that all residual gas is removed from the pipeline network
a vacuum pump, not shown, is provided, which is located in the pipe network
residual gas sucks through the absorber. The second pressure reducer is for this
Claims (4)
dadurch gekennzeichnet,
daß zwischen dem Vorratsbehälter (1, 2) und dem Absorber ein Druckminderer (6, 7) angeordnet ist.Supply system, in particular for toxic and combustible gases, with at least one storage container (1, 2), which contains the gas and is connected to an extraction line (3) and an absorber,
characterized,
that a pressure reducer (6, 7) is arranged between the storage container (1, 2) and the absorber.
dadurch gekennzeichnet,
daß der Druckminderer (6, 7) für einen Vordruck von 200 bar und einen einstellbaren Hinterdruck von 0 bis 10 bar ausgelegt ist. Supply system according to claim 1,
characterized,
that the pressure reducer (6, 7) is designed for a pre-pressure of 200 bar and an adjustable back pressure of 0 to 10 bar.
dadurch gekennzeichnet,
daß der Absorber über eine Absorberleitung (4, 5) mit dem Vorratsbehälter (1, 2) verbunden ist und eine Vakuumpumpe vorgesehen ist, welche das sich in der Absorberleitung befindliche Gas durch den Absorber saugt.Supply system according to claim 1 or 2,
characterized,
that the absorber is connected via an absorber line (4, 5) to the reservoir (1, 2) and a vacuum pump is provided which sucks the gas in the absorber line through the absorber.
dadurch gekennzeichnet,
daß der Druckminderer (6, 7) von der Hinterdruckseite her durchsaugbar ist.Supply system according to one of claims 1 to 3,
characterized,
that the pressure reducer (6, 7) can be sucked through from the back pressure side.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19632015A DE19632015C1 (en) | 1996-08-08 | 1996-08-08 | Supply system, especially for toxic and flammable gases |
| DE19632015 | 1996-08-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0823585A2 true EP0823585A2 (en) | 1998-02-11 |
| EP0823585A3 EP0823585A3 (en) | 1998-12-09 |
Family
ID=7802125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP97112685A Withdrawn EP0823585A3 (en) | 1996-08-08 | 1997-07-24 | Supply plant in particular for toxic and combustible gases |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0823585A3 (en) |
| DE (1) | DE19632015C1 (en) |
| ZA (1) | ZA971454B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0255003A2 (en) * | 1986-07-18 | 1988-02-03 | Fujitsu Limited | Automatic gas distributing device, for supplying a pipe with gas from an alternative gas source, controlled by the direct application of high gas pressure of the source |
| US5137047A (en) * | 1990-08-24 | 1992-08-11 | Mark George | Delivery of reactive gas from gas pad to process tool |
| US5151395A (en) * | 1987-03-24 | 1992-09-29 | Novapure Corporation | Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor |
| DE9217477U1 (en) * | 1992-12-15 | 1993-04-15 | Pneumatik Berlin Gmbh, O-1120 Berlin, De | |
| US5250323A (en) * | 1989-10-30 | 1993-10-05 | Kabushiki Kaisha Toshiba | Chemical vapor growth apparatus having an exhaust device including trap |
-
1996
- 1996-08-08 DE DE19632015A patent/DE19632015C1/en not_active Expired - Fee Related
-
1997
- 1997-02-20 ZA ZA9701454A patent/ZA971454B/en unknown
- 1997-07-24 EP EP97112685A patent/EP0823585A3/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0255003A2 (en) * | 1986-07-18 | 1988-02-03 | Fujitsu Limited | Automatic gas distributing device, for supplying a pipe with gas from an alternative gas source, controlled by the direct application of high gas pressure of the source |
| US5151395A (en) * | 1987-03-24 | 1992-09-29 | Novapure Corporation | Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor |
| US5250323A (en) * | 1989-10-30 | 1993-10-05 | Kabushiki Kaisha Toshiba | Chemical vapor growth apparatus having an exhaust device including trap |
| US5137047A (en) * | 1990-08-24 | 1992-08-11 | Mark George | Delivery of reactive gas from gas pad to process tool |
| DE9217477U1 (en) * | 1992-12-15 | 1993-04-15 | Pneumatik Berlin Gmbh, O-1120 Berlin, De |
Also Published As
| Publication number | Publication date |
|---|---|
| ZA971454B (en) | 1997-08-27 |
| DE19632015C1 (en) | 1998-01-15 |
| EP0823585A3 (en) | 1998-12-09 |
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