EP1255150A4 - Actuator - Google Patents

Actuator

Info

Publication number: EP1255150A4
Authority: EP; European Patent Office
Prior art keywords: actuator
Prior art date: 2000-10-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP01978919A

Other languages

German (de)

French (fr)

Other versions

EP1255150B1 (en

EP1255150A1 (en

Inventor

Kiyotaka Mutoh

Yuzuru Ueda

Norihiro Asada

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nippon Signal Co Ltd

Original Assignee

Nippon Signal Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-10-25

Filing date

2001-10-25

Publication date

2006-04-12

2001-10-25 Application filed by Nippon Signal Co Ltd filed Critical Nippon Signal Co Ltd

2002-11-06 Publication of EP1255150A1 publication Critical patent/EP1255150A1/en

2006-04-12 Publication of EP1255150A4 publication Critical patent/EP1255150A4/en

2011-08-10 Application granted granted Critical

2011-08-10 Publication of EP1255150B1 publication Critical patent/EP1255150B1/en

2021-10-25 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/058—Rotation out of a plane parallel to the substrate

EP01978919A 2000-10-25 2001-10-25 Actuator equipped with a mirror for optical scanning Expired - Lifetime EP1255150B1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2000325611		2000-10-25
JP2000325611A JP3926552B2 (en)	2000-10-25	2000-10-25	Actuator
PCT/JP2001/009404 WO2002035275A1 (en)	2000-10-25	2001-10-25	Actuator

Publications (3)

Publication Number	Publication Date
EP1255150A1 EP1255150A1 (en)	2002-11-06
EP1255150A4 true EP1255150A4 (en)	2006-04-12
EP1255150B1 EP1255150B1 (en)	2011-08-10

Family

ID=18802952

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP01978919A Expired - Lifetime EP1255150B1 (en)	2000-10-25	2001-10-25	Actuator equipped with a mirror for optical scanning

Country Status (6)

Country	Link
US (1)	US6774445B2 (en)
EP (1)	EP1255150B1 (en)
JP (1)	JP3926552B2 (en)
KR (1)	KR100845398B1 (en)
TW (1)	TW552186B (en)
WO (1)	WO2002035275A1 (en)

Families Citing this family (40)

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ATE355530T1 (en) *	2001-07-26	2006-03-15	Fraunhofer Ges Forschung	MICROMECHANICAL COMPONENT
JP3919616B2 (en) *	2002-07-05	2007-05-30	キヤノン株式会社	Micro structure and manufacturing method thereof
JP3905539B2 (en)	2002-08-14	2007-04-18	富士通株式会社	Micro oscillating device with torsion bar
JP3715611B2 (en)	2002-10-11	2005-11-09	エヌティティエレクトロニクス株式会社	Microactuator device and optical switch system using the same
JP2004325578A (en) *	2003-04-22	2004-11-18	Fujitsu Ltd	Deflecting mirror
EP1746452A1 (en) *	2004-05-11	2007-01-24	Sumitomo Precision Products Company Limited	Electrostatic drive type mems mirror scanner
TWI235735B (en) *	2004-06-18	2005-07-11	Walsin Lihwa Corp	Two-axis element and manufacturing method thereof
CN100409064C (en) *	2004-07-16	2008-08-06	华新丽华股份有限公司	Resonance assembly, double-shaft assembly and method for manufacturing double-shaft assembly and micro-system assembly
JP2006337929A (en) *	2005-06-06	2006-12-14	Anritsu Corp	Optical scanner
JP4610447B2 (en) *	2005-08-31	2011-01-12	Ｏｋｉセミコンダクタ株式会社	Semiconductor device and its manufacturing method and inspection method
KR100682961B1 (en) *	2006-01-20	2007-02-15	삼성전자주식회사	Rotational micro mirror
KR100837399B1 (en)	2006-06-22	2008-06-12	삼성전자주식회사	MEMS device for two-axial drive
KR100829563B1 (en)	2006-09-01	2008-05-14	삼성전자주식회사	Electromagnetic type micro actuator and Method for manufacturing the same
KR100908120B1 (en) *	2006-11-01	2009-07-16	삼성전기주식회사	Electromagnetic micro actuator
JP4285568B2 (en) *	2007-01-10	2009-06-24	セイコーエプソン株式会社	Actuator, optical scanner and image forming apparatus
US8390912B2 (en)	2007-01-10	2013-03-05	Seiko Epson Corporation	Actuator, optical scanner and image forming device
KR100911144B1 (en) *	2007-03-27	2009-08-06	삼성전자주식회사	2-axis driving electromagnetic actuator
KR101345288B1 (en) *	2007-09-21	2013-12-27	삼성전자주식회사	2-axis driving electromagnetic scanner
JP2009294458A (en) *	2008-06-05	2009-12-17	Brother Ind Ltd	Optical scanner
KR100973979B1 (en) *	2008-08-22	2010-08-05	한국과학기술원	Electromagnetic Multi-axis Actuator
US20100057337A1 (en) *	2008-09-02	2010-03-04	Tele Atlas North America, Inc.	System and method for providing digital map, routing, or navigation information with need-based routing
JP5506485B2 (en) *	2010-03-24	2014-05-28	スタンレー電気株式会社	2D optical scanner
CN103827725B (en) *	2011-09-30	2016-03-23	松下知识产权经营株式会社	Optical reflection element
JP5857602B2 (en) *	2011-10-03	2016-02-10	ミツミ電機株式会社	Optical scanning device
JP6044943B2 (en)	2011-10-25	2016-12-14	インテル・コーポレーション	Actuator
JP2013258519A (en) *	2012-06-12	2013-12-26	Nippon Dempa Kogyo Co Ltd	Piezoelectric vibration piece and piezoelectric device
JP2014123020A (en) *	2012-12-21	2014-07-03	Seiko Epson Corp	Actuator, optical scanner, image display apparatus and head-mounted display
CN105934698B (en) *	2013-01-11	2019-04-16	英特尔公司	Mirror drive
JP6177636B2 (en) *	2013-09-19	2017-08-09	日本信号株式会社	Planar actuator
JP6550207B2 (en) *	2013-10-29	2019-07-24	セイコーエプソン株式会社	Optical scanner, image display device, head mounted display and head up display
JP2015087443A (en) *	2013-10-29	2015-05-07	セイコーエプソン株式会社	Optical scanner, image display device, head-mounted display, and head-up display
JP2015087444A (en) *	2013-10-29	2015-05-07	セイコーエプソン株式会社	Optical scanner, image display device, head-mounted display, and head-up display
JP6023687B2 (en) *	2013-10-30	2016-11-09	京セラドキュメントソリューションズ株式会社	Optical scanning apparatus, image forming apparatus including the optical scanning apparatus, and method for adjusting resonance frequency of vibration mirror unit in optical scanning apparatus
US9670056B2 (en) *	2014-01-31	2017-06-06	Stmicroelectronics S.R.L.	Electrostatically driven MEMS device
JPWO2015146144A1 (en) *	2014-03-28	2017-04-13	住友精密工業株式会社	Drive device
US9617142B1 (en) *	2015-09-30	2017-04-11	Mems Drive, Inc.	MEMS grid for manipulating structural parameters of MEMS devices
JP6233396B2 (en) *	2015-12-09	2017-11-22	ミツミ電機株式会社	Optical scanning device
JP7035305B2 (en) *	2016-09-28	2022-03-15	セイコーエプソン株式会社	Optical scanners, image display devices, head-mounted displays and head-up displays
CN108152801B (en) *	2017-11-10	2022-01-11	无锡英菲感知技术有限公司	Dynamic deformation controllable micromirror
CN108226936B (en) *	2017-11-10	2022-02-11	无锡英菲感知技术有限公司	Time division sharing window laser radar system based on micro-mirror

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5912608A (en) *	1995-05-26	1999-06-15	The Nippon Signal Co., Ltd.	Planar type electromagnetic actuator

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US4524624A (en)	1982-10-25	1985-06-25	Peerless Nuclear Corporation	Pressure and differential pressure detectors and transmitter for use in hostile environment
JPS5979824U (en) *	1982-11-17	1984-05-30	横河電機株式会社	light deflection element
US4823506A (en)	1987-07-02	1989-04-25	S.C. Johnson & Son, Inc.	Insect bait device
JPH0518730Y2 (en) *	1987-08-18	1993-05-18
JPH038313A (en)	1989-06-06	1991-01-16	Marcon Electron Co Ltd	Manufacture of solid electrolytic capacitor
JPH038313U (en) *	1989-06-12	1991-01-25
JPH0369112A (en)	1989-08-08	1991-03-25	Fujitsu Ltd	Hot plate oven
JP2519184Y2 (en) *	1989-11-10	1996-12-04	オリンパス光学工業株式会社	Mounting device for thin plate optical member
US5208880A (en) *	1992-04-30	1993-05-04	General Electric Company	Microdynamical fiber-optic switch and method of switching using same
JP2722314B2 (en)	1993-12-20	1998-03-04	日本信号株式会社	Planar type galvanometer mirror and method of manufacturing the same
JP2657769B2 (en)	1994-01-31	1997-09-24	正喜江刺	Planar type galvanometer mirror having displacement detection function and method of manufacturing the same
JPH08160281A (en) *	1994-12-01	1996-06-21	Ricoh Co Ltd	Reflector member and reflection surface device
JP3425814B2 (en) *	1994-12-28	2003-07-14	日本信号株式会社	Electromagnetic actuator and method of manufacturing the same
US6232861B1 (en) *	1995-06-05	2001-05-15	Nihon Shingo Kabushiki Kaisha	Electromagnetic actuator
JP4414498B2 (en) *	1997-12-09	2010-02-10	オリンパス株式会社	Optical deflector
JP2000187140A (en) *	1998-12-24	2000-07-04	Toshiba Corp	Optical device for image forming apparatus
JP2000235152A (en) *	1999-02-12	2000-08-29	Victor Co Of Japan Ltd	Light deflector

2000
- 2000-10-25 JP JP2000325611A patent/JP3926552B2/en not_active Expired - Lifetime
2001
- 2001-10-25 WO PCT/JP2001/009404 patent/WO2002035275A1/en active Application Filing
- 2001-10-25 EP EP01978919A patent/EP1255150B1/en not_active Expired - Lifetime
- 2001-10-25 TW TW090126337A patent/TW552186B/en not_active IP Right Cessation
- 2001-10-25 KR KR1020027008197A patent/KR100845398B1/en active IP Right Grant
2002
- 2002-05-30 US US10/159,753 patent/US6774445B2/en not_active Expired - Fee Related

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5912608A (en) *	1995-05-26	1999-06-15	The Nippon Signal Co., Ltd.	Planar type electromagnetic actuator

Also Published As

Publication number	Publication date
JP3926552B2 (en)	2007-06-06
KR100845398B1 (en)	2008-07-10
KR20020070466A (en)	2002-09-09
JP2002131685A (en)	2002-05-09
US6774445B2 (en)	2004-08-10
WO2002035275A1 (en)	2002-05-02
US20020149072A1 (en)	2002-10-17
EP1255150B1 (en)	2011-08-10
TW552186B (en)	2003-09-11
EP1255150A1 (en)	2002-11-06

Legal Events

Date	Code	Title	Description
2002-09-21	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2002-11-06	17P	Request for examination filed	Effective date: 20020523
2002-11-06	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
2004-05-19	RBV	Designated contracting states (corrected)	Designated state(s): DE FR GB
2006-04-12	A4	Supplementary search report drawn up and despatched	Effective date: 20060224
2006-04-12	RIC1	Information provided on ipc code assigned before grant	Ipc: G02B 26/10 20060101AFI20020507BHEP Ipc: G02B 26/08 20060101ALI20060220BHEP
2007-06-06	17Q	First examination report despatched	Effective date: 20060517
2010-12-17	GRAP	Despatch of communication of intention to grant a patent	Free format text: ORIGINAL CODE: EPIDOSNIGR1
2010-12-22	RTI1	Title (correction)	Free format text: ACTUATOR EQUIPPED WITH A MIRROR FOR OPTICAL SCANNING
2011-04-12	GRAS	Grant fee paid	Free format text: ORIGINAL CODE: EPIDOSNIGR3
2011-07-08	GRAA	(expected) grant	Free format text: ORIGINAL CODE: 0009210
2011-08-10	AK	Designated contracting states	Kind code of ref document: B1 Designated state(s): DE FR GB
2011-08-10	REG	Reference to a national code	Ref country code: GB Ref legal event code: FG4D
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2012-06-15	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT
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