EP1588417A2 - Verfahren zum herstellen von bitleitungen für ucp-flash-speicher - Google Patents
Verfahren zum herstellen von bitleitungen für ucp-flash-speicherInfo
- Publication number
- EP1588417A2 EP1588417A2 EP04702285A EP04702285A EP1588417A2 EP 1588417 A2 EP1588417 A2 EP 1588417A2 EP 04702285 A EP04702285 A EP 04702285A EP 04702285 A EP04702285 A EP 04702285A EP 1588417 A2 EP1588417 A2 EP 1588417A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- floating gate
- trench
- insulation
- bit line
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
Definitions
- the invention relates to a method for producing bit lines for UCP flash memories with a floating gate arrangement arranged on a substrate and an insulation underneath the floating gate arrangement, the floating gate initially being etched over the entire surface after the previous photolithography by etching deposited poly-silicon layer is produced.
- the grid dimension is usually designed to be minimal, according to the state of the art.
- the current concepts for UCP memories therefore use particularly aggressive metal design rules in order to make cell sizes as small as possible.
- a substantial reduction in the cell size can only be achieved if one of the two bit lines can be buried, ie essentially underneath the substrate surface.
- Such a buried bit line must meet further requirements with regard to its resistive and capacitive coating and must not significantly increase the manufacturing costs.
- the conductive material used for the buried bit line must survive the temperature budget of the subsequent processes without damage.
- the invention is therefore based on the object of providing a method for producing bit lines for UCP flash memories, with which a reduction in cell size is achieved, the production costs are insignificantly influenced and the bit line survives the temperature budget of the subsequent processes without damage.
- bit line is arranged in a self-aligned manner as a buried bit line made of a temperature-resistant material in a silicon substrate or within the insulation of the active regions under the floating gate.
- a trench is etched into the insulation, which is then filled with a low-resistance material.
- the solution according to the invention has the advantage that no additional photolithographic steps have to be carried out, as a result of which the additional process costs for producing the buried bit line are minimized.
- the self-adjustment of the buried bit line to the floating gate means that No further tolerance buffers are necessary to ensure minimum distances and there are extremely stable conditions with regard to parasitic capacitive couplings, in particular to the floating gate and the control gate of the memory cell. These can also be largely adapted to the process and circuitry requirements by appropriate design of the lateral and upper termination of the buried bit line.
- a low-resistance material e.g. a high-melting metal, preferably tungsten, is used.
- the trench can easily be filled with tungsten, tungsten silicide or a highly doped polysilicon by CVD deposition.
- An embodiment of the invention is characterized in that the etching of the trench is stopped just above the bottom of the insulation, so that the buried bit line remains completely insulated within the insulation.
- the trench is etched through the insulation, as a result of which a well contact is formed outside the insulation by the buried bit line.
- one or more so-called insulating or conductive liners can be deposited in the trench before the bit line is deposited, as a lateral and / or lower termination of the buried bit line.
- the lateral and / or lower end of the buried bit line can be made of an insulating material, preferably silicon dioxide, silicon nitride, or titanium or titanium nitride. stand.
- the buried bit line is self-aligning with the floating gate in the cell arrangement, as a result of which an additional mask layer is not necessary for its formation.
- the starting point is in each case a floating gate arrangement 1 on a Si substrate 2 and an insulation 3 (shallow trench insulation) made of SiO 2 , in the Si substrate 2 under the float ting gate arrangement 1, wherein the floating gate 1 is first produced by etching into a poly-silicon layer 4 located on the silicon substrate after previous photolithography.
- the buried bit line 4 is located within the insulation 3, or in a second variant extends through the insulation 3 into the region of the trough below it (FIG. 1 c), so that an additional Trough contact can be realized in the P-substrate 2.
- the schematic sectional view according to FIG. 1 c shows a variant in which the buried bit line 5 is simultaneously used as a well contact.
- the etching trench 6 can extend into the insulation 3 or extend through it. In the latter case, a buried contact can additionally be implemented through the buried bit line 5.
- the buried bit line 5 is preferably above the normal level of insulation 3 (FIG. 1b).
- the second exemplary embodiment (FIGS. 2a-e) contains the following method steps:
- tungsten silicide can also be used to fill the trench 6.
- floating gate 1 is used as an etching mask.
- FIG. 4 prior art
- FIG. 5 shows the considerable area saving.
- the conventional UCP flash memory cell consists of a drain 10, a source region 11, a cell region 12, bit lines 13, 14.
- the contacting of different metallization levels is effected by vias 15.
- the significant area saving is achieved clearly visible.
Landscapes
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10303847 | 2003-01-30 | ||
DE10303847 | 2003-01-30 | ||
PCT/DE2004/000042 WO2004068578A2 (de) | 2003-01-30 | 2004-01-15 | Verfahren zum herstellen von bitleitungen für ucp-flash-speicher |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1588417A2 true EP1588417A2 (de) | 2005-10-26 |
Family
ID=32797297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04702285A Withdrawn EP1588417A2 (de) | 2003-01-30 | 2004-01-15 | Verfahren zum herstellen von bitleitungen für ucp-flash-speicher |
Country Status (4)
Country | Link |
---|---|
US (1) | US7485542B2 (de) |
EP (1) | EP1588417A2 (de) |
CN (1) | CN1745473B (de) |
WO (1) | WO2004068578A2 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160211250A1 (en) * | 2015-01-15 | 2016-07-21 | Infineon Technologies Ag | Semiconductor substrate arrangement, a semiconductor device, and a method for processing a semiconductor substrate |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4855800A (en) | 1986-03-27 | 1989-08-08 | Texas Instruments Incorporated | EPROM with increased floating gate/control gate coupling |
DE69228082T2 (de) * | 1991-03-12 | 1999-08-19 | Kuraray Co | Spiroorthocarbonat-Verbindung und daraus erhaltene Polymere |
US5278438A (en) | 1991-12-19 | 1994-01-11 | North American Philips Corporation | Electrically erasable and programmable read-only memory with source and drain regions along sidewalls of a trench structure |
FR2686837B1 (fr) | 1992-01-31 | 1995-05-24 | Valeo Thermique Habitacle | Dispositif de chauffage-ventilation de l'habitacle d'un vehicule automobile a moteur a faibles rejets thermiques. |
JP3065164B2 (ja) * | 1992-03-18 | 2000-07-12 | 富士通株式会社 | 半導体装置及びその製造方法 |
US20040111159A1 (en) * | 2000-01-30 | 2004-06-10 | Diamicron, Inc. | Modular bearing surfaces in prosthetic joints |
US5570314A (en) * | 1994-12-28 | 1996-10-29 | National Semiconductor Corporation | EEPROM devices with smaller cell size |
US6001687A (en) * | 1999-04-01 | 1999-12-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Process for forming self-aligned source in flash cell using SiN spacer as hard mask |
WO2001017022A1 (en) * | 1999-08-27 | 2001-03-08 | Infineon Technologies North America Corp. | Semiconductor device with buried bitlines |
US6214741B1 (en) * | 1999-11-05 | 2001-04-10 | United Silicon Incorporated | Method of fabricating a bit line of flash memory |
JP2001168306A (ja) * | 1999-12-09 | 2001-06-22 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
US20020045304A1 (en) * | 1999-12-30 | 2002-04-18 | Chien-Hsing Lee | Fabrication method and structure of flash memory device |
JP2001244349A (ja) * | 2000-02-29 | 2001-09-07 | Nec Corp | 半導体装置とその製造方法 |
US6355524B1 (en) * | 2000-08-15 | 2002-03-12 | Mosel Vitelic, Inc. | Nonvolatile memory structures and fabrication methods |
DE10122364B4 (de) * | 2001-05-09 | 2006-10-19 | Infineon Technologies Ag | Kompensationsbauelement, Schaltungsanordnung und Verfahren |
JP2003023113A (ja) | 2001-07-05 | 2003-01-24 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
-
2004
- 2004-01-15 WO PCT/DE2004/000042 patent/WO2004068578A2/de active Search and Examination
- 2004-01-15 EP EP04702285A patent/EP1588417A2/de not_active Withdrawn
- 2004-01-15 CN CN200480003230.8A patent/CN1745473B/zh not_active Expired - Fee Related
-
2005
- 2005-07-29 US US11/194,059 patent/US7485542B2/en active Active
Non-Patent Citations (7)
Title |
---|
"3.1.3 Glimmer", vol. 08/94, Retrieved from the Internet <URL:http://www.a-m.de/deutsch/literatur/gp0894.htm> [retrieved on 20060308] * |
"Lexikon", Retrieved from the Internet <URL:http://reuschling.de/html/lexikon.htm> [retrieved on 20041116] * |
"Wikipedia: Beschaltung der Signalleitungen", Retrieved from the Internet <URL:http://daswillichwissen.de/Open_circuit> [retrieved on 20041116] * |
"Wikipedia: Open circuit", Retrieved from the Internet <URL:http://www.daswillichwissen.de/Open_circuit> [retrieved on 20041116] * |
DEUTSCHE PHYSIKALISCHE GESELLSCHAFT E.V. (DPG): "E-Verhandlungen 2002 - Programm und Abstracts der Sitzung TT 15 - Metall-Isolatorübergänge, Phasenübergänge in Quantensystemen I", WWW-SERVER FÜR FRÜHJAHRSTAGUNGEN UND E-VERHANDLUNGEN, Retrieved from the Internet <URL:http://dpg.rz.uni-ulm.de/archive/2002/tt_15.html> [retrieved on 20041118] * |
DIALOGFORUM-CHEMIE.AT: "Dialogforum Chemie: Kautschukwaren", Retrieved from the Internet <URL:http://www.fcio.at/DFDetails.aspx?id=75> [retrieved on 20060309] * |
SCHARNAGL KLAUS: "Feldeffekttransistoren mit Luftspalt für den Nachweis von Wasserstoff", Retrieved from the Internet <URL:http://137.193.200.177/ediss/scharnagl-klaus/meta.html> [retrieved on 20041118] * |
Also Published As
Publication number | Publication date |
---|---|
CN1745473A (zh) | 2006-03-08 |
US7485542B2 (en) | 2009-02-03 |
US20060024889A1 (en) | 2006-02-02 |
WO2004068578A2 (de) | 2004-08-12 |
WO2004068578A3 (de) | 2004-10-28 |
CN1745473B (zh) | 2010-04-14 |
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Legal Events
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AX | Request for extension of the european patent |
Extension state: AL LT LV MK |
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DAX | Request for extension of the european patent (deleted) | ||
RBV | Designated contracting states (corrected) |
Designated state(s): DE FR GB |
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RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: INFINEON TECHNOLOGIES AG Owner name: GRATZ, ACHIM |
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RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 27/115 20060101AFI20160601BHEP |
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RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: INFINEON TECHNOLOGIES AG Owner name: ROEHRICH, MAYK |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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18D | Application deemed to be withdrawn |
Effective date: 20161119 |