EP1620880A1 - Semiconductor substrate and manufacturing method therefor - Google Patents
Semiconductor substrate and manufacturing method thereforInfo
- Publication number
- EP1620880A1 EP1620880A1 EP04730068A EP04730068A EP1620880A1 EP 1620880 A1 EP1620880 A1 EP 1620880A1 EP 04730068 A EP04730068 A EP 04730068A EP 04730068 A EP04730068 A EP 04730068A EP 1620880 A1 EP1620880 A1 EP 1620880A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- substrate
- manufacturing
- layer
- ion
- gallium arsenide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76259—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along a porous layer
Definitions
- the present invention relates to a semiconductor substrate and a manufacturing method therefor and, more particularly, to a semiconductor substrate which has a gallium arsenide layer and a manufacturing method therefor.
- a device on a compound semiconductor substrate made of gallium arsenide and other materials has for example high performance, high speed and good light-emitting properties.
- the compound semiconductor substrate is expensive and has low mechanical strength, and is difficult to manufacture a large-area substrate. Under these circumstances, attempts have been made to heteroepitaxially grow a compound semiconductor on a silicon substrate which is inexpensive, has a high mechanical strength, and can form a large-area substrate.
- 3,257,624 discloses a method of obtaining a large-area semiconductor substrate by heteroepitaxially growing a compound semiconductor layer on a silicon substrate, implanting ions in the silicon substrate, bonding the silicon substrate to another substrate, heating the ion-implanted layer and causing it to collapse, and dividing the bonded substrate stack.
- Such a method needs to relax mismatch between the lattice constant of silicon and that of the compound semiconductor to obtain good crystallinity, depending on the specifications of a required compound semiconductor substrate.
- 2,877,800 discloses a method of obtaining a compound semiconductor substrate by growing a compound semiconductor layer on a porous silicon layer formed on a silicon substrate, bonding the silicon substrate to another substrate, cutting the porous silicon layer with a jet of a fluid, and dividing the bonded substrate stack.
- the porous silicon layer between the silicon and the compound semiconductor relaxes mismatch between the lattice constant of silicon and that of the compound semiconductor to some degree to form a heteroepitaxial layer. It is difficult to eliminate the mismatch between the lattice constant of the porous silicon and that of the compound semiconductor, and thus the resultant compound semiconductor may have poor crystallinity.
- the specifications of some required compound semiconductor devices may limit the range of applications of a compound semiconductor substrate formed by such a manu acturing method, and the compound semiconductor devices may not sufficiently exhibit their superiority.
- the present invention has been made on the basis of the above-mentioned consideration, and has as its object to provide a method of manufacturing a semiconductor substrate which sufficiently exhibits its superiority as a compound semiconductor device and can ensure good economy.
- a semiconductor substrate manufacturing method characterized by comprising a first step of implanting ions in a first substrate which has a gallium arsenide layer on a germanium member and forming an ion-implanted layer in the first substrate, a second step of bonding the first substrate to a second substrate to form a bonded substrate stack, and a third step of dividing the bonded substrate stack at the io -implanted layer.
- the gallium arsenide layer is preferably formed by epitaxial growth.
- the first step may comprise a step of forming a compound semiconductor layer on the gallium arsenide layer.
- the ions preferably include one of hydrogen ions and ions of a rare gas.
- the third step preferably comprises a step of dividing the bonded substrate stack at the ion-implanted layer by annealing the bonded substrate stack.
- the third step preferably comprises a step of dividing the bonded substrate stack at the ion-implanted layer by a jet of a fluid or a static pressure.
- the third step preferably comprises a step of dividing the bonded substrate stack at the ion-implanted layer by inserting a member in the ion-implanted layer.
- the manufacturing method preferably further comprises a step of removing a part of the ion-implanted layer left on a part of the gallium arsenide layer, which has been transferred to the second substrate after the third step.
- the manufacturing method preferably further comprises a step of planarizing a surface of the germanium member obtained by division in the division step and reusing the germanium member in the first step.
- Fig. 1 is a view for explaining a semiconductor substrate manufacturing method according to a preferred embodiment of the present invention
- Fig. 2 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention.
- Fig. 3 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention
- Fig. 4 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention
- Fig. 5 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention
- Fig. 6 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention.
- Fig. 7 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention.
- Figs. 1 to 7 are views for explaining a substrate manufacturing method according to the preferred embodiment of the present invention.
- a germanium member 11 is prepared.
- a gallium arsenide layer 12 is formed on the surface of the germanium member 11 by epitaxial growth. Since mismatch between the lattice constant of germanium and that of gallium arsenide is small, a gallium arsenide layer with good crystallinity can be formed on the germanium member 11. Epitaxial growth allows the gallium arsenide layer to have a uniform thickness.
- hydrogen ions are implanted in the surface of the gallium arsenide layer 12 shown in Fig. 2.
- An ion-implanted layer 13 is formed in the gallium arsenide layer 12, thereby forming a first substrate 10.
- ions of a rare gas such as helium, neon, argon, krypton, xenon, or the like may be used alone or in combination in the implantation.
- an insulating layer is formed on the surface of the gallium arsenide layer 12, prior to the ion implantation.
- the ion-implanted layer 13 can be formed in at least one of the germanium member 11 and the gallium arsenide layer 12.
- a second substrate 20 is bonded to the surface of the first substrate 10 to form a bonded substrate stack 30.
- a silicon substrate or a substrate obtained by forming an insulating layer such as an Si0 2 layer on its surface can be adopted as the second substrate 20.
- any other substrate such as an insulating substrate (e.g., a glass substrate) may be used as the second substrate 20.
- the bonded substrate stack 30 is divided at the ion-implanted layer 13 into two substrates.
- the ion-implanted layer 13 has highly concentrated microcavities , microbubbles , distortions, or defects, and is more fragile than the remaining portion of the bonded substrate stack 30.
- This division can be performed by, for example, annealing the bonded substrate stack 30.
- the division can be performed by, for example, a method of using a fluid.
- a method of forming a jet of a fluid (liquid or gas) and injecting the jet to the separation layer 12, a method which utilizes the static pressure of a fluid, or the like may preferably be used.
- a method using water as the fluid is called a water jet method.
- the division can be performed by inserting a solid member such as a wedge into the separation layer 12.
- an ion-implanted layer 13b left on a gallium arsenide layer 12b of the second substrate 20 is removed using an etchant or the like.
- the gallium arsenide layer 12b is preferably be used as an etching stopper layer.
- a hydrogen annealing step, polishing step, or the like may be performed as needed to planarize the second substrate.
- a semiconductor substrate 40 shown in Fig. 7 is obtained.
- the semiconductor substrate 40 shown in Fig. 7 has the thin gallium arsenide layer 12b on its surface.
- the expression "thin gallium arsenide layer” is intended to mean a layer thinner than a general semiconductor substrate.
- the thickness of the gallium arsenide layer 12b preferably falls within a range of 5 nm to 5 Aim.
- Another compound semiconductor layer of AlGaAs, GaP, InP, InAs , or the like can be formed on the gallium arsenide layer 12b, depending on the specifications of the semiconductor device.
- an ion-implanted layer 13a or the like left on the germanium member 11 is removed using an etchant or the like. Then, the hydrogen annealing step, polishing step, or the like may be performed to planarize the surface of the germanium member.
- the planarized substrate can be reused as the germanium member 11 to be used in the step shown in Fig. 1. Repeated reuse of the germanium member 11 can greatly reduce the manufacturing cost of a semiconductor substrate.
- the manufacturing method according to the present invention makes it possible to obtain a semiconductor substrate which has a gallium arsenide layer with a uniform thickness and good crystallinity. Also, the manufacturing method according to the present invention can greatly reduce the manufacturing cost of a semiconductor substrate with a gallium arsenide layer. Therefore, according to the present invention, there can be provided a method of manufacturing a semiconductor substrate which sufficiently exhibits its superiority as a compound semiconductor device and can ensure good economy.
Abstract
The first step of implanting ions in the first substrate which has a gallium arsenide layer on a germanium member and forming an ion-implanted layer in the first substrate, the second step of bonding the first substrate to the second substrate to form a bonded substrate stack, and the third step of dividing the bonded substrate stack at the ion-implanted layer are performed, thereby manufacturing a semiconductor substrate.
Description
DESCRIPTION SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD
THEREFOR
TECHNICAL FIELD
The present invention relates to a semiconductor substrate and a manufacturing method therefor and, more particularly, to a semiconductor substrate which has a gallium arsenide layer and a manufacturing method therefor.
BACKGROUND ART
A device on a compound semiconductor substrate made of gallium arsenide and other materials has for example high performance, high speed and good light-emitting properties. The compound semiconductor substrate, however, is expensive and has low mechanical strength, and is difficult to manufacture a large-area substrate. Under these circumstances, attempts have been made to heteroepitaxially grow a compound semiconductor on a silicon substrate which is inexpensive, has a high mechanical strength, and can form a large-area substrate. For example, Japanese Patent No. 3,257,624 discloses a method of obtaining a large-area semiconductor substrate by heteroepitaxially growing a compound semiconductor layer on a silicon substrate,
implanting ions in the silicon substrate, bonding the silicon substrate to another substrate, heating the ion-implanted layer and causing it to collapse, and dividing the bonded substrate stack. Such a method needs to relax mismatch between the lattice constant of silicon and that of the compound semiconductor to obtain good crystallinity, depending on the specifications of a required compound semiconductor substrate. Japanese Patent No. 2,877,800 discloses a method of obtaining a compound semiconductor substrate by growing a compound semiconductor layer on a porous silicon layer formed on a silicon substrate, bonding the silicon substrate to another substrate, cutting the porous silicon layer with a jet of a fluid, and dividing the bonded substrate stack.
In the manufacturing method disclosed in Japanese Patent No. 2,877,800, the porous silicon layer between the silicon and the compound semiconductor relaxes mismatch between the lattice constant of silicon and that of the compound semiconductor to some degree to form a heteroepitaxial layer. It is difficult to eliminate the mismatch between the lattice constant of the porous silicon and that of the compound semiconductor, and thus the resultant compound semiconductor may have poor crystallinity. The specifications of some required compound semiconductor
devices may limit the range of applications of a compound semiconductor substrate formed by such a manu acturing method, and the compound semiconductor devices may not sufficiently exhibit their superiority.
DISCLOSURE OF INVENTION The present invention has been made on the basis of the above-mentioned consideration, and has as its object to provide a method of manufacturing a semiconductor substrate which sufficiently exhibits its superiority as a compound semiconductor device and can ensure good economy.
According to the present invention, there is provided a semiconductor substrate manufacturing method, characterized by comprising a first step of implanting ions in a first substrate which has a gallium arsenide layer on a germanium member and forming an ion-implanted layer in the first substrate, a second step of bonding the first substrate to a second substrate to form a bonded substrate stack, and a third step of dividing the bonded substrate stack at the io -implanted layer.
According to a preferred embodiment of the present invention, the gallium arsenide layer is preferably formed by epitaxial growth. Also, the first step may comprise a step of forming a compound semiconductor layer on the gallium arsenide layer.
According to a preferred embodiment of the present invention, the ions preferably include one of hydrogen ions and ions of a rare gas.
According to a preferred embodiment of the present invention, the third step preferably comprises a step of dividing the bonded substrate stack at the ion-implanted layer by annealing the bonded substrate stack.
According to a preferred embodiment of the present invention, the third step preferably comprises a step of dividing the bonded substrate stack at the ion-implanted layer by a jet of a fluid or a static pressure.
According to a preferred embodiment of the present invention, the third step preferably comprises a step of dividing the bonded substrate stack at the ion-implanted layer by inserting a member in the ion-implanted layer.
According to a preferred embodiment of the present invention, the manufacturing method preferably further comprises a step of removing a part of the ion-implanted layer left on a part of the gallium arsenide layer, which has been transferred to the second substrate after the third step. According to a preferred embodiment of the present invention, the manufacturing method preferably further comprises a step of planarizing a surface of
the germanium member obtained by division in the division step and reusing the germanium member in the first step.
Other features and advantages of the present invention will be apparent from the following description taken in conjunction with the accompanying drawings , in which like reference characters designate the same or similar parts throughout the figures thereof . BRIEF DESCRIPTION OF DRAWINGS
The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
Fig. 1 is a view for explaining a semiconductor substrate manufacturing method according to a preferred embodiment of the present invention;
Fig. 2 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention;
Fig. 3 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention; Fig. 4 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention;
Fig. 5 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention;
Fig. 6 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention; and
Fig. 7 is a view for explaining the semiconductor substrate manufacturing method according to the preferred embodiment of the present invention;
BEST MODE FOR CARRYING OUT THE INVENTION A preferred embodiment of the present invention will be described with reference to the accompanying drawings . Figs. 1 to 7 are views for explaining a substrate manufacturing method according to the preferred embodiment of the present invention. In the step shown in Fig. 1, a germanium member 11 is prepared. Then, in the step shown in Fig. 2, a gallium arsenide layer 12 is formed on the surface of the germanium member 11 by epitaxial growth. Since mismatch between the lattice constant of germanium and that of gallium arsenide is small, a gallium arsenide layer with good crystallinity can be formed on the germanium member 11. Epitaxial growth allows the gallium arsenide layer to have a uniform thickness.
In the step shown in Fig. 3, hydrogen ions are
implanted in the surface of the gallium arsenide layer 12 shown in Fig. 2. An ion-implanted layer 13 is formed in the gallium arsenide layer 12, thereby forming a first substrate 10. In addition to hydrogen ions, ions of a rare gas such as helium, neon, argon, krypton, xenon, or the like may be used alone or in combination in the implantation. Though not shown, an insulating layer is formed on the surface of the gallium arsenide layer 12, prior to the ion implantation. The ion-implanted layer 13 can be formed in at least one of the germanium member 11 and the gallium arsenide layer 12.
In the step shown in Fig. 4, a second substrate 20 is bonded to the surface of the first substrate 10 to form a bonded substrate stack 30. Typically, a silicon substrate or a substrate obtained by forming an insulating layer such as an Si02 layer on its surface can be adopted as the second substrate 20. Also any other substrate such as an insulating substrate (e.g., a glass substrate) may be used as the second substrate 20.
In the step shown in Fig. 5, the bonded substrate stack 30 is divided at the ion-implanted layer 13 into two substrates. The ion-implanted layer 13 has highly concentrated microcavities , microbubbles , distortions, or defects, and is more fragile than the remaining portion of the bonded substrate stack 30. This
division can be performed by, for example, annealing the bonded substrate stack 30. Alternatively, the division can be performed by, for example, a method of using a fluid. As the method, a method of forming a jet of a fluid (liquid or gas) and injecting the jet to the separation layer 12, a method which utilizes the static pressure of a fluid, or the like may preferably be used. Out of jet injection methods, a method using water as the fluid is called a water jet method. Alternatively, the division can be performed by inserting a solid member such as a wedge into the separation layer 12.
In the step shown in Fig. 6, an ion-implanted layer 13b left on a gallium arsenide layer 12b of the second substrate 20 is removed using an etchant or the like. At this time, the gallium arsenide layer 12b is preferably be used as an etching stopper layer. Then, a hydrogen annealing step, polishing step, or the like may be performed as needed to planarize the second substrate.
With the above-mentioned operation, a semiconductor substrate 40 shown in Fig. 7 is obtained. The semiconductor substrate 40 shown in Fig. 7 has the thin gallium arsenide layer 12b on its surface. The expression "thin gallium arsenide layer" is intended to mean a layer thinner than a general semiconductor substrate. To exhibit the superiority as a
semiconductor device, the thickness of the gallium arsenide layer 12b preferably falls within a range of 5 nm to 5 Aim. Another compound semiconductor layer of AlGaAs, GaP, InP, InAs , or the like can be formed on the gallium arsenide layer 12b, depending on the specifications of the semiconductor device.
After the division in the step shown in Fig. 5, an ion-implanted layer 13a or the like left on the germanium member 11 is removed using an etchant or the like. Then, the hydrogen annealing step, polishing step, or the like may be performed to planarize the surface of the germanium member. The planarized substrate can be reused as the germanium member 11 to be used in the step shown in Fig. 1. Repeated reuse of the germanium member 11 can greatly reduce the manufacturing cost of a semiconductor substrate.
As has been described above, the manufacturing method according to the present invention makes it possible to obtain a semiconductor substrate which has a gallium arsenide layer with a uniform thickness and good crystallinity. Also, the manufacturing method according to the present invention can greatly reduce the manufacturing cost of a semiconductor substrate with a gallium arsenide layer. Therefore, according to the present invention, there can be provided a method of manufacturing a semiconductor substrate which sufficiently exhibits its
superiority as a compound semiconductor device and can ensure good economy.
As many apparently widely different embodiments of the present invention can be made without departing from the spirit and scope thereof, it is to be understood that the invention is not limited to the specific embodiments thereof except as defined in the claims .
Claims
1. A semiconductor substrate manufacturing method, comprising: a first step of implanting ions in a first substrate which has a gallium arsenide layer on a germanium member and forming an ion-implanted layer in the first substrate; a second step of bonding the first substrate to a second substrate to form a bonded substrate stack; and a third step of dividing the bonded substrate stack at the ion-implanted layer.
2. The manufacturing method according to claim 1 , wherein the gallium arsenide layer is formed by epitaxial growth.
3. The manufacturing method according to claim
1, wherein the first step comprises a step of forming a compound semiconductor layer on the gallium arsenide layer.
4. The manufacturing method according to claim 1, wherein the ions include one of hydrogen ions and ions of a rare gas .
5. The manufacturing method according to claim 1, wherein the third step comprises a step of dividing the bonded substrate stack at the ion-implanted layer by annealing the bonded substrate stack.
6. The manufacturing method according to claim 1, wherein the third step comprises a step of dividing the bonded substrate stack at the ion-implanted layer by a jet of a fluid or a static pressure.
7. The manufacturing method according to claim 1, wherein the third step comprises a step of dividing the bonded substrate stack at the ion-implanted layer by inserting a member in the ion-implanted layer.
8. The manufacturing method according to claim 1, further comprising a step of removing a part of the ion-implanted layer left on a part of the gallium arsenide layer, which has been transferred to the second substrate after the third step.
9. The manufacturing method according to claim 1, further comprising a step of planarizing a surface of the germanium member obtained by division in the division step and reusing the germanium member in the first step.
10. A semiconductor substrate which is manufactured by a manufacturing method as defined in claim 1.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003128917A JP4532846B2 (en) | 2003-05-07 | 2003-05-07 | Manufacturing method of semiconductor substrate |
PCT/JP2004/006178 WO2004100233A1 (en) | 2003-05-07 | 2004-04-28 | Semiconductor substrate and manufacturing method therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1620880A1 true EP1620880A1 (en) | 2006-02-01 |
EP1620880A4 EP1620880A4 (en) | 2008-08-06 |
Family
ID=33432059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04730068A Withdrawn EP1620880A4 (en) | 2003-05-07 | 2004-04-28 | Semiconductor substrate and manufacturing method therefor |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1620880A4 (en) |
JP (1) | JP4532846B2 (en) |
KR (1) | KR100725141B1 (en) |
CN (2) | CN101145509A (en) |
TW (1) | TWI259514B (en) |
WO (1) | WO2004100233A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5128781B2 (en) * | 2006-03-13 | 2013-01-23 | 信越化学工業株式会社 | Manufacturing method of substrate for photoelectric conversion element |
CN108231695A (en) * | 2016-12-15 | 2018-06-29 | 上海新微技术研发中心有限公司 | Composite substrate and method for manufacturing the same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0961312A2 (en) * | 1998-05-15 | 1999-12-01 | Canon Kabushiki Kaisha | SOI Substrate formed by bonding |
EP0994503A1 (en) * | 1998-10-16 | 2000-04-19 | Commissariat A L'energie Atomique | Structure comprising a thin layer composed of material containing conductive and isolation regions and method for manufacturing the structure |
US20020072130A1 (en) * | 2000-08-16 | 2002-06-13 | Zhi-Yuan Cheng | Process for producing semiconductor article using graded expital growth |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0794409A (en) * | 1993-09-20 | 1995-04-07 | Fujitsu Ltd | Formation of iii-v compound semiconductor thin film |
JP3879173B2 (en) * | 1996-03-25 | 2007-02-07 | 住友電気工業株式会社 | Compound semiconductor vapor deposition method |
-
2003
- 2003-05-07 JP JP2003128917A patent/JP4532846B2/en not_active Expired - Fee Related
-
2004
- 2004-04-27 TW TW093111750A patent/TWI259514B/en not_active IP Right Cessation
- 2004-04-28 WO PCT/JP2004/006178 patent/WO2004100233A1/en active Application Filing
- 2004-04-28 EP EP04730068A patent/EP1620880A4/en not_active Withdrawn
- 2004-04-28 KR KR1020057020457A patent/KR100725141B1/en not_active IP Right Cessation
- 2004-04-28 CN CNA2007101812355A patent/CN101145509A/en active Pending
- 2004-04-28 CN CNB2004800006869A patent/CN100358104C/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0961312A2 (en) * | 1998-05-15 | 1999-12-01 | Canon Kabushiki Kaisha | SOI Substrate formed by bonding |
EP0994503A1 (en) * | 1998-10-16 | 2000-04-19 | Commissariat A L'energie Atomique | Structure comprising a thin layer composed of material containing conductive and isolation regions and method for manufacturing the structure |
US20020072130A1 (en) * | 2000-08-16 | 2002-06-13 | Zhi-Yuan Cheng | Process for producing semiconductor article using graded expital growth |
Non-Patent Citations (2)
Title |
---|
See also references of WO2004100233A1 * |
VENKATASUBRAMANIAN R: "HIGH-QUALITY EUTECTIC-METAL-BONDED ALGAAS-GAAS THIN FILMS ON SI SUBSTRATES" APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, vol. 60, no. 7, 17 February 1992 (1992-02-17), pages 886-888, XP000290448 ISSN: 0003-6951 * |
Also Published As
Publication number | Publication date |
---|---|
JP2004335693A (en) | 2004-11-25 |
KR20060005406A (en) | 2006-01-17 |
WO2004100233A1 (en) | 2004-11-18 |
CN100358104C (en) | 2007-12-26 |
CN1698180A (en) | 2005-11-16 |
JP4532846B2 (en) | 2010-08-25 |
TW200425261A (en) | 2004-11-16 |
CN101145509A (en) | 2008-03-19 |
TWI259514B (en) | 2006-08-01 |
KR100725141B1 (en) | 2007-06-07 |
EP1620880A4 (en) | 2008-08-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2198552C (en) | Fabrication process of semiconductor substrate | |
JP4173884B2 (en) | Method for manufacturing germanium-on-insulator (GeOI) type wafer | |
US6429095B1 (en) | Semiconductor article and method of manufacturing the same | |
US7256075B2 (en) | Recycling of a wafer comprising a multi-layer structure after taking-off a thin layer | |
US7018909B2 (en) | Forming structures that include a relaxed or pseudo-relaxed layer on a substrate | |
US7018910B2 (en) | Transfer of a thin layer from a wafer comprising a buffer layer | |
US20210050248A1 (en) | Pseudo-substrate with improved efficiency of usage of single crystal material | |
EP0843345A2 (en) | Method of manufacturing a semiconductor article | |
KR100746179B1 (en) | A method of preparation of an epitaxial substrate | |
CA2220600C (en) | Method of manufacturing semiconductor article | |
KR100327840B1 (en) | Process of reclamation of soi substrate and reproduced substrate | |
KR20080107256A (en) | Process for fabricating a structure for epitaxy without an exclusion zone | |
US20050124137A1 (en) | Semiconductor substrate and manufacturing method therefor | |
US20100012947A1 (en) | PROCESS FOR MAKING A GaN SUBSTRATE | |
EP1437764A1 (en) | A compliant substrate for a heteroepitaxy, a heteroepitaxial structure and a method for fabricating a compliant substrate | |
EP1620880A1 (en) | Semiconductor substrate and manufacturing method therefor | |
WO2004077552A1 (en) | Relaxation of a thin layer after its transfer | |
US20100167500A1 (en) | Method of recycling an epitaxied donor wafer | |
JP2007019323A (en) | Method for regenerating bond wafer and bond wafer, and method for manufacturing ssoi wafer | |
JP5032743B2 (en) | Formation of relaxed useful layers from wafers without a buffer layer | |
JP2004343046A (en) | Compliant substrate for heteroepitaxy, heteroepitaxial structure, and compliant-substrate fabricating method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20050119 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): BE DE FR GB IT NL |
|
DAX | Request for extension of the european patent (deleted) | ||
RBV | Designated contracting states (corrected) |
Designated state(s): BE DE FR GB IT NL |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20080703 |
|
17Q | First examination report despatched |
Effective date: 20091218 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Effective date: 20100413 |