EP1636628A4 - High fill ratio reflective spatial light modulator with hidden hinge - Google Patents

High fill ratio reflective spatial light modulator with hidden hinge

Info

Publication number
EP1636628A4
EP1636628A4 EP04710674A EP04710674A EP1636628A4 EP 1636628 A4 EP1636628 A4 EP 1636628A4 EP 04710674 A EP04710674 A EP 04710674A EP 04710674 A EP04710674 A EP 04710674A EP 1636628 A4 EP1636628 A4 EP 1636628A4
Authority
EP
European Patent Office
Prior art keywords
light modulator
spatial light
reflective spatial
high fill
fill ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04710674A
Other languages
German (de)
French (fr)
Other versions
EP1636628A1 (en
Inventor
Shaoher X Pan
Xiao Yang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miradia Inc
Original Assignee
Miradia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miradia Inc filed Critical Miradia Inc
Publication of EP1636628A1 publication Critical patent/EP1636628A1/en
Publication of EP1636628A4 publication Critical patent/EP1636628A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
EP04710674A 2003-06-02 2004-02-12 High fill ratio reflective spatial light modulator with hidden hinge Withdrawn EP1636628A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US47540403P 2003-06-02 2003-06-02
US61112103A 2003-06-30 2003-06-30
PCT/US2004/004279 WO2004109363A1 (en) 2003-06-02 2004-02-12 High fill ratio reflective spatial light modulator with hidden hinge

Publications (2)

Publication Number Publication Date
EP1636628A1 EP1636628A1 (en) 2006-03-22
EP1636628A4 true EP1636628A4 (en) 2009-04-15

Family

ID=33514052

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04710674A Withdrawn EP1636628A4 (en) 2003-06-02 2004-02-12 High fill ratio reflective spatial light modulator with hidden hinge

Country Status (5)

Country Link
EP (1) EP1636628A4 (en)
JP (1) JP2006526805A (en)
KR (1) KR20060014434A (en)
TW (2) TWI363882B (en)
WO (1) WO2004109363A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7483198B2 (en) 2003-02-12 2009-01-27 Texas Instruments Incorporated Micromirror device and method for making the same
US7113322B2 (en) 2004-06-23 2006-09-26 Reflectivity, Inc Micromirror having offset addressing electrode
US7019880B1 (en) 2004-08-25 2006-03-28 Reflectivity, Inc Micromirrors and hinge structures for micromirror arrays in projection displays
US6980349B1 (en) 2004-08-25 2005-12-27 Reflectivity, Inc Micromirrors with novel mirror plates
US7215459B2 (en) 2004-08-25 2007-05-08 Reflectivity, Inc. Micromirror devices with in-plane deformable hinge
US7436572B2 (en) 2004-08-25 2008-10-14 Texas Instruments Incorporated Micromirrors and hinge structures for micromirror arrays in projection displays
US7119944B2 (en) 2004-08-25 2006-10-10 Reflectivity, Inc. Micromirror device and method for making the same
JP5509912B2 (en) * 2010-02-22 2014-06-04 株式会社ニコン Spatial light modulator, illumination device, exposure device, and manufacturing method thereof
US11109004B2 (en) 2018-07-31 2021-08-31 Texas Instruments Incorporated Display with increased pixel count
US11131796B2 (en) 2018-09-10 2021-09-28 Texas Instruments Incorporated Optical display with spatial light modulator
US20210111537A1 (en) * 2019-10-15 2021-04-15 Texas Instruments Incorporated Mems-based phase spatial light modulating architecture

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
EP0949527A1 (en) * 1998-04-10 1999-10-13 Samsung Electronics Co., Ltd. Micromirror device for image display apparatus
US6369931B1 (en) * 1997-12-22 2002-04-09 Robert Bosch Gmbh Method for manufacturing a micromechanical device
US20020117728A1 (en) * 2000-08-03 2002-08-29 Brosnihhan Timothy J. Bonded wafer optical MEMS process
US20020122238A1 (en) * 2000-12-28 2002-09-05 Knipe Richard L. Capacitively coupled micromirror
US20030095318A1 (en) * 2001-11-21 2003-05-22 Dicarlo Anthony Yokeless hidden hinge digital micromirror device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5312513A (en) * 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6323982B1 (en) * 1998-05-22 2001-11-27 Texas Instruments Incorporated Yield superstructure for digital micromirror device
US6867897B2 (en) * 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
US6873450B2 (en) * 2000-08-11 2005-03-29 Reflectivity, Inc Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
US6856446B2 (en) * 2001-12-12 2005-02-15 Texas Instruments Incorporated Digital micromirror device having mirror-attached spring tips
US20040004753A1 (en) * 2002-06-19 2004-01-08 Pan Shaoher X. Architecture of a reflective spatial light modulator
US7009745B2 (en) * 2002-10-31 2006-03-07 Texas Instruments Incorporated Coating for optical MEMS devices
US6900922B2 (en) * 2003-02-24 2005-05-31 Exajoule, Llc Multi-tilt micromirror systems with concealed hinge structures
TW591778B (en) * 2003-03-18 2004-06-11 Advanced Semiconductor Eng Package structure for a microsystem

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US6369931B1 (en) * 1997-12-22 2002-04-09 Robert Bosch Gmbh Method for manufacturing a micromechanical device
EP0949527A1 (en) * 1998-04-10 1999-10-13 Samsung Electronics Co., Ltd. Micromirror device for image display apparatus
US20020117728A1 (en) * 2000-08-03 2002-08-29 Brosnihhan Timothy J. Bonded wafer optical MEMS process
US20020122238A1 (en) * 2000-12-28 2002-09-05 Knipe Richard L. Capacitively coupled micromirror
US20030095318A1 (en) * 2001-11-21 2003-05-22 Dicarlo Anthony Yokeless hidden hinge digital micromirror device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2004109363A1 *

Also Published As

Publication number Publication date
EP1636628A1 (en) 2006-03-22
JP2006526805A (en) 2006-11-24
TW200528752A (en) 2005-09-01
TWI467231B (en) 2015-01-01
TW201144860A (en) 2011-12-16
KR20060014434A (en) 2006-02-15
TWI363882B (en) 2012-05-11
WO2004109363A1 (en) 2004-12-16

Similar Documents

Publication Publication Date Title
AU2003239924A8 (en) Reflective spatial light modulator
AU2003295983A1 (en) Spatial light modulators with light absorbing areas
IL177048A0 (en) Spatial light modulator with integrated optical structure
AU2003299149A1 (en) Reconfigurable spatial light modulators
EP1704424A4 (en) High contrast spatial light modulator and method
EP1514256A4 (en) Architecture of a reflective spatial light modulator
EP1692550A4 (en) Two dimensional spatial light modulator
GB2401690B (en) Electro-absorption modulator with broad optical bandwidth
EP1803023A4 (en) Spatial light modulation display system
GB2383886B (en) Spatial light modulators with improved inter-pixel performance
AU2002246714A1 (en) 3d display devices with transient light scattering shutters
EP1542063A4 (en) Optical modulator
AU2003284995A1 (en) Molecular light valve display using colour sequential illumination
GB0320366D0 (en) Display and reflector
EP1636628A4 (en) High fill ratio reflective spatial light modulator with hidden hinge
AU2003281799A1 (en) Spatial optical modulator
EP1636629A4 (en) Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
EP1666954A4 (en) Optical modulator
GB2408811B (en) Optical Modulator
AU2003208345A1 (en) Tea light
AU2001260647A1 (en) Spatial light modulator
AU3262901A (en) Spatial light modulator
AU2005902324A0 (en) Reflective mode spatial light modulator
GB0114972D0 (en) Optically addressed spatial light modulator
AU2002258761A1 (en) Monochromatic reflective spatial light modulator

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20051222

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

DAX Request for extension of the european patent (deleted)
RIN1 Information on inventor provided before grant (corrected)

Inventor name: YANG, XIAO

Inventor name: PAN, SHAOHER, X.

A4 Supplementary search report drawn up and despatched

Effective date: 20090317

17Q First examination report despatched

Effective date: 20090619

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20091030