EP1705692A3 - Procédé de fabrication d'un dispositif semiconducteur - Google Patents

Procédé de fabrication d'un dispositif semiconducteur Download PDF

Info

Publication number
EP1705692A3
EP1705692A3 EP20060011647 EP06011647A EP1705692A3 EP 1705692 A3 EP1705692 A3 EP 1705692A3 EP 20060011647 EP20060011647 EP 20060011647 EP 06011647 A EP06011647 A EP 06011647A EP 1705692 A3 EP1705692 A3 EP 1705692A3
Authority
EP
European Patent Office
Prior art keywords
coating liquid
semiconductor device
thin film
forming apparatus
pixel lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP20060011647
Other languages
German (de)
English (en)
Other versions
EP1705692A2 (fr
Inventor
Shunpei Yamazaki
Kunitaka Yamamoto
Masaaki Hiroki
Takeshi Fukunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Publication of EP1705692A2 publication Critical patent/EP1705692A2/fr
Publication of EP1705692A3 publication Critical patent/EP1705692A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/114—Poly-phenylenevinylene; Derivatives thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/141—Organic polymers or oligomers comprising aliphatic or olefinic chains, e.g. poly N-vinylcarbazol, PVC or PTFE
    • H10K85/146—Organic polymers or oligomers comprising aliphatic or olefinic chains, e.g. poly N-vinylcarbazol, PVC or PTFE poly N-vinylcarbazol; Derivatives thereof
EP20060011647 1999-10-13 2000-10-13 Procédé de fabrication d'un dispositif semiconducteur Withdrawn EP1705692A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP29168599 1999-10-13
EP00122446A EP1093156B1 (fr) 1999-10-13 2000-10-13 Dispositif pour la formation de couches minces

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP00122446A Division EP1093156B1 (fr) 1999-10-13 2000-10-13 Dispositif pour la formation de couches minces

Publications (2)

Publication Number Publication Date
EP1705692A2 EP1705692A2 (fr) 2006-09-27
EP1705692A3 true EP1705692A3 (fr) 2007-04-04

Family

ID=17772097

Family Applications (2)

Application Number Title Priority Date Filing Date
EP20060011647 Withdrawn EP1705692A3 (fr) 1999-10-13 2000-10-13 Procédé de fabrication d'un dispositif semiconducteur
EP00122446A Expired - Lifetime EP1093156B1 (fr) 1999-10-13 2000-10-13 Dispositif pour la formation de couches minces

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP00122446A Expired - Lifetime EP1093156B1 (fr) 1999-10-13 2000-10-13 Dispositif pour la formation de couches minces

Country Status (7)

Country Link
US (3) US7115434B2 (fr)
EP (2) EP1705692A3 (fr)
JP (1) JP4827290B2 (fr)
KR (1) KR100783027B1 (fr)
CN (2) CN100468696C (fr)
DE (1) DE60028492T2 (fr)
TW (1) TW471011B (fr)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW512543B (en) 1999-06-28 2002-12-01 Semiconductor Energy Lab Method of manufacturing an electro-optical device
TW468283B (en) 1999-10-12 2001-12-11 Semiconductor Energy Lab EL display device and a method of manufacturing the same
TW480722B (en) * 1999-10-12 2002-03-21 Semiconductor Energy Lab Manufacturing method of electro-optical device
KR100812293B1 (ko) * 1999-10-13 2008-03-13 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체장치 제작방법
TW471011B (en) * 1999-10-13 2002-01-01 Semiconductor Energy Lab Thin film forming apparatus
TW495808B (en) 2000-02-04 2002-07-21 Semiconductor Energy Lab Thin film formation apparatus and method of manufacturing self-light-emitting device using thin film formation apparatus
EP1124252A2 (fr) * 2000-02-10 2001-08-16 Applied Materials, Inc. Appareil et méthode de traitement de substrats
US20020011205A1 (en) 2000-05-02 2002-01-31 Shunpei Yamazaki Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device
US6822629B2 (en) 2000-08-18 2004-11-23 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
JP4801278B2 (ja) * 2001-04-23 2011-10-26 株式会社半導体エネルギー研究所 発光装置及びその作製方法
JP2003036970A (ja) * 2001-07-23 2003-02-07 Sony Corp 電界発光素子の製造方法及び溶液滴下装置
WO2003036738A1 (fr) * 2001-10-19 2003-05-01 Koninklijke Philips Electronics N.V. Procede d'impression a buses multiples destine a des affichages pled
US7483001B2 (en) 2001-11-21 2009-01-27 Seiko Epson Corporation Active matrix substrate, electro-optical device, and electronic device
US20030146692A1 (en) * 2002-01-11 2003-08-07 Seiko Epson Corporation Organic EL device and manufacturing method therefor, electrooptic apparatus, and electronic apparatus
TWI258317B (en) 2002-01-25 2006-07-11 Semiconductor Energy Lab A display device and method for manufacturing thereof
NL1020312C2 (nl) * 2002-04-05 2003-10-07 Otb Groep B V Werkwijze en inrichting voor het vervaardigen van een display, zoals bijvoorbeeld een polymere OLED display, een display en een substraat ten gebruike bij de werkwijze.
JP2004063363A (ja) * 2002-07-31 2004-02-26 Semiconductor Energy Lab Co Ltd 電界発光素子用材料、およびそれを用いた電界発光素子
US20040108061A1 (en) * 2002-12-06 2004-06-10 Eastman Kodak Company Apparatus and method for making a light-emitting display
CN100459060C (zh) * 2003-02-05 2009-02-04 株式会社半导体能源研究所 显示装置的制造方法
WO2004070819A1 (fr) * 2003-02-05 2004-08-19 Semiconductor Energy Laboratory Co., Ltd. Procede de fabrication d'un affichage
KR101193015B1 (ko) * 2003-02-06 2012-10-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 플라즈마 장치
KR101032338B1 (ko) * 2003-02-06 2011-05-06 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시장치의 제작방법
KR101186919B1 (ko) * 2003-02-06 2012-10-02 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시장치의 제조 방법
US7153539B2 (en) * 2003-06-24 2006-12-26 Eastman Kodak Company Apparatus and method of color tuning a light-emitting display
JP2005071646A (ja) * 2003-08-28 2005-03-17 Chi Mei Electronics Corp 有機ｅｌディスプレイおよびその製造方法
JP4393402B2 (ja) * 2004-04-22 2010-01-06 キヤノン株式会社 有機電子素子の製造方法および製造装置
CN100502050C (zh) * 2004-08-13 2009-06-17 株式会社半导体能源研究所 半导体器件的制造方法
JP4616596B2 (ja) * 2004-08-27 2011-01-19 株式会社 日立ディスプレイズ 電子装置の製造方法
US20060144819A1 (en) * 2004-12-30 2006-07-06 Sawin Herbert H Remote chamber methods for removing surface deposits
US7469638B2 (en) * 2004-12-30 2008-12-30 E.I. Du Pont De Nemours And Company Electronic devices and processes for forming the same
JP2006216253A (ja) * 2005-02-01 2006-08-17 Dainippon Screen Mfg Co Ltd 除去装置
US8866707B2 (en) * 2005-03-31 2014-10-21 Semiconductor Energy Laboratory Co., Ltd. Display device, and apparatus using the display device having a polygonal pixel electrode
CN101238238A (zh) * 2005-08-02 2008-08-06 麻省理工学院 使用氟化硫从cvd/pecvd腔的内部除去表面沉积物的远程腔方法
KR100756581B1 (ko) * 2006-02-15 2007-09-10 삼성전자주식회사 표시장치의 제조장치 및 제조방법
US8083956B2 (en) * 2007-10-11 2011-12-27 Semiconductor Energy Laboratory Co., Ltd. Display device and method for manufacturing display device
KR20100106470A (ko) 2007-12-10 2010-10-01 이 아이 듀폰 디 네모아 앤드 캄파니 다색 전자 소자 및 이를 인쇄에 의해 형성하는 공정
WO2009087966A1 (fr) * 2008-01-07 2009-07-16 Panasonic Corporation Dispositif à électroluminescence organique et son procédé de fabrication
KR101254746B1 (ko) 2008-05-27 2013-04-15 엘지디스플레이 주식회사 유기전계발광표시장치의 제조방법과 유기전계발광표시장치
KR101629637B1 (ko) * 2008-05-29 2016-06-13 가부시키가이샤 한도오따이 에네루기 켄큐쇼 성막방법 및 발광장치의 제조방법
US10434804B2 (en) 2008-06-13 2019-10-08 Kateeva, Inc. Low particle gas enclosure systems and methods
WO2010048269A2 (fr) 2008-10-21 2010-04-29 E. I. Du Pont De Nemours And Company Dispositifs électroniques multicolores et procédés de formation de ceux-ci par impression
CN102341747B (zh) * 2009-03-06 2014-04-30 E.I.内穆尔杜邦公司 多色电子器件及通过印刷来形成该器件的方法
WO2010141699A2 (fr) * 2009-06-04 2010-12-09 E. I. Du Pont De Nemours And Company Dispositifs électroniques multicolores et procédés d'impression pour former ces derniers
EP2438638A4 (fr) 2009-06-04 2013-09-18 Du Pont Dispositifs électroniques multicolores et procédés d'impression pour former ces derniers
JP2011108578A (ja) * 2009-11-20 2011-06-02 Toppan Printing Co Ltd 有機ｅｌ発光素子およびその製造方法
CN102165592B (zh) * 2009-12-22 2014-10-15 松下电器产业株式会社 显示装置及其制造方法
JP5852810B2 (ja) 2010-08-26 2016-02-03 株式会社半導体エネルギー研究所 半導体装置の作製方法
CN102577613B (zh) 2010-10-15 2015-08-12 株式会社日本有机雷特显示器 有机发光面板及其制造方法、以及有机显示装置
CN102577615B (zh) 2010-10-15 2016-01-27 株式会社日本有机雷特显示器 有机发光面板及其制造方法以及有机显示装置
CN102960066B (zh) 2010-10-15 2015-09-30 株式会社日本有机雷特显示器 有机发光面板及其制造方法以及有机显示装置
CN102960067B (zh) 2010-10-15 2016-03-09 株式会社日本有机雷特显示器 有机发光面板及其制造方法以及有机显示装置
JP5677316B2 (ja) * 2010-10-15 2015-02-25 パナソニック株式会社 有機発光パネルとその製造方法、および有機表示装置
WO2012049719A1 (fr) * 2010-10-15 2012-04-19 パナソニック株式会社 Panneau électroluminescent organique, procédé de fabrication de celui-ci et dispositif d'affichage organique
CN102577614B (zh) * 2010-10-15 2015-11-25 株式会社日本有机雷特显示器 有机发光面板及其制造方法以及有机显示装置
EP3087623B1 (fr) 2013-12-26 2021-09-22 Kateeva, Inc. Traitement thermique de dispositifs électroniques
KR101813828B1 (ko) 2014-01-21 2017-12-29 카티바, 인크. 전자 장치 인캡슐레이션을 위한 기기 및 기술
US9343678B2 (en) 2014-01-21 2016-05-17 Kateeva, Inc. Apparatus and techniques for electronic device encapsulation
JP6461195B2 (ja) 2014-04-30 2019-01-30 カティーバ， インコーポレイテッド 基板コーティングのためのガスクッション装置および技法
TWI790965B (zh) 2014-05-30 2023-01-21 日商半導體能源研究所股份有限公司 觸控面板
KR102525822B1 (ko) 2017-07-06 2023-04-26 삼성디스플레이 주식회사 표시 소자 및 그 제조 방법
CN112599585A (zh) * 2020-12-30 2021-04-02 深圳市华星光电半导体显示技术有限公司 显示面板、显示母板及显示装置
CN112712762B (zh) * 2020-12-30 2022-05-03 深圳市华星光电半导体显示技术有限公司 显示面板、显示母板及显示装置

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0683406A1 (fr) * 1994-05-20 1995-11-22 Canon Kabushiki Kaisha Filtre coloré, procédé de fabrication, et dispositif d'affichage à cristal liquide
JPH1012377A (ja) * 1996-06-19 1998-01-16 Seiko Epson Corp アクティブマトリックス型有機ｅｌ表示体の製造方法
JPH1125852A (ja) * 1997-05-09 1999-01-29 Canon Inc 電子源の製造方法、電子源、画像形成装置の製造方法、画像形成装置及び電子源基板の製造装置
WO1999021233A1 (fr) * 1997-10-17 1999-04-29 The Regents Of The University Of California Procede de fabrication de dispositifs a semi-conducteurs organiques au moyen d'une technique par jet d'encre et dispositif et systeme afferents
EP0930641A2 (fr) * 1998-01-19 1999-07-21 Seiko Epson Corporation Procédé de formation de motifs et appareil de fabrication de substrats
EP0940796A1 (fr) * 1997-08-21 1999-09-08 Seiko Epson Corporation Dispositif d'affichage a matrice active
WO1999048339A1 (fr) * 1998-03-17 1999-09-23 Seiko Epson Corporation Substrat de formation de motifs sur film mince et son traitement de surface
GB2336553A (en) * 1998-04-24 1999-10-27 Cambridge Display Tech Ltd Selective deposition of organic films
WO2001016251A1 (fr) * 1999-08-31 2001-03-08 Cambridge Display Technology Limited Formulation conçue pour deposer une couche polymere electroluminescente
EP1093166A2 (fr) * 1999-10-12 2001-04-18 Sel Semiconductor Energy Laboratory Co., Ltd. Dispositif d'affichage organique électroluminescent et procédé de fabrication

Family Cites Families (124)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3484793A (en) 1966-05-02 1969-12-16 Xerox Corp Image recording apparatus ink droplet recorder with optical input
US3878517A (en) 1973-06-01 1975-04-15 Sharp Kk Ink jet system of charge amplitude controlling type
US4067020A (en) 1976-09-20 1978-01-03 A. B. Dick Company Noninterrupt ink transfer system for ink jet printer
US4281332A (en) 1978-12-28 1981-07-28 Ricoh Company, Ltd. Deflection compensated ink ejection printing apparatus
US4357557A (en) 1979-03-16 1982-11-02 Sharp Kabushiki Kaisha Glass sealed thin-film electroluminescent display panel free of moisture and the fabrication method thereof
JPS6290260A (ja) 1985-10-16 1987-04-24 Tdk Corp サ−マルヘツド用耐摩耗性保護膜
US4737803A (en) 1986-07-09 1988-04-12 Fuji Xerox Co., Ltd. Thermal electrostatic ink-jet recording apparatus
US4788629A (en) 1986-10-29 1988-11-29 Loctite Luminescent Systems, Inc. Instrument panel members
US5142677A (en) 1989-05-04 1992-08-25 Texas Instruments Incorporated Context switching devices, systems and methods
US5059148A (en) 1987-12-21 1991-10-22 Gte Products Corporation Thin film flat panel displays and method of manufacture
CA1335424C (fr) 1987-12-29 1995-05-02 Tohei Moritani Materiaux d'emballage multicouches offrant une excellente impermeabilite aux gaz
US4882518A (en) 1988-05-25 1989-11-21 The Cherry Corporation Back cap for an electroluminescent display
ATE110923T1 (de) * 1988-06-13 1994-09-15 Nordson Corp Verfahren zum anbringen einer isolierenden feuchtigkeitsgeschützten schicht auf gedruckten leiterplatten.
US5770892A (en) 1989-01-18 1998-06-23 Sgs-Thomson Microelectronics, Inc. Field effect device with polycrystalline silicon channel
US5189405A (en) 1989-01-26 1993-02-23 Sharp Kabushiki Kaisha Thin film electroluminescent panel
GB8909011D0 (en) 1989-04-20 1989-06-07 Friend Richard H Electroluminescent devices
US4951064A (en) 1989-05-15 1990-08-21 Westinghouse Electric Corp. Thin film electroluminescent edge emitter assembly and integral packaging
DE3932171A1 (de) 1989-09-27 1991-04-04 Henkel Kgaa Universalklebespachtel
US4994540A (en) 1990-01-16 1991-02-19 Mobay Corporation Sag resistant, unfilled, low viscosity urethane structural adhesive
US5304419A (en) 1990-07-06 1994-04-19 Alpha Fry Ltd Moisture and particle getter for enclosures
US5334539A (en) 1993-01-29 1994-08-02 Iowa State University Research Foundation, Inc. Fabrication of poly(p-phenyleneacetylene) light-emitting diodes
JP3048789B2 (ja) * 1993-05-31 2000-06-05 平田機工株式会社 流体塗布装置
JP3431033B2 (ja) 1993-10-29 2003-07-28 株式会社半導体エネルギー研究所 半導体作製方法
TW264575B (fr) 1993-10-29 1995-12-01 Handotai Energy Kenkyusho Kk
US5923962A (en) 1993-10-29 1999-07-13 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a semiconductor device
JPH07168013A (ja) * 1993-12-13 1995-07-04 Fujitsu Ltd カラーフィルタの製造方法
JPH07230085A (ja) * 1994-02-17 1995-08-29 Matsushita Electric Ind Co Ltd 液晶表示装置の製造方法及び製造装置
US5821003A (en) 1994-03-16 1998-10-13 Sumitomo Electric Industries, Ltd. Organic electroluminescent device
KR100246496B1 (ko) * 1994-03-16 2000-04-01 구라우치 노리타카 유기일렉트로루미너 센스소자
JP3034438B2 (ja) 1994-03-31 2000-04-17 キヤノン株式会社 カラーフィルタの製造装置
JP2701738B2 (ja) 1994-05-17 1998-01-21 日本電気株式会社 有機薄膜ｅｌ素子
US5757396A (en) 1994-06-30 1998-05-26 Compaq Computer Corporation Ink jet printhead having an ultrasonic maintenance system incorporated therein and an associated method of maintaining an ink jet printhead by purging foreign matter therefrom
US5962962A (en) 1994-09-08 1999-10-05 Idemitsu Kosan Co., Ltd. Method of encapsulating organic electroluminescence device and organic electroluminescence device
JP3254335B2 (ja) 1994-09-08 2002-02-04 出光興産株式会社 有機ｅｌ素子の封止方法および有機ｅｌ素子
US5985356A (en) 1994-10-18 1999-11-16 The Regents Of The University Of California Combinatorial synthesis of novel materials
US5684365A (en) 1994-12-14 1997-11-04 Eastman Kodak Company TFT-el display panel using organic electroluminescent media
JP2850820B2 (ja) 1995-02-09 1999-01-27 株式会社デンソー Ｅｌ素子
US5663573A (en) 1995-03-17 1997-09-02 The Ohio State University Bipolar electroluminescent device
KR100265179B1 (ko) 1995-03-27 2000-09-15 야마자끼 순페이 반도체장치와 그의 제작방법
US6074050A (en) 1997-12-03 2000-06-13 Hewlett-Packard Company Method and apparatus for venting an ink container
JP3124722B2 (ja) * 1995-07-31 2001-01-15 キヤノン株式会社 カラーフィルタの製造方法及び製造装置及びカラーフィルタの区画された領域間の混色の低減方法及びカラーフィルタの区画された領域へのインク付与位置の精度向上方法及びカラーフィルタの区画された領域の着色ムラ低減方法
US5834894A (en) 1995-09-14 1998-11-10 Casio Computer Co., Ltd. Carrier injection type organic electro-luminescent device which emits light in response to an application of a voltage
US5736754A (en) 1995-11-17 1998-04-07 Motorola, Inc. Full color organic light emitting diode array
JPH09148066A (ja) 1995-11-24 1997-06-06 Pioneer Electron Corp 有機ｅｌ素子
JP3289125B2 (ja) 1996-03-15 2002-06-04 ソニーケミカル株式会社 光情報記録媒体
US5981092A (en) 1996-03-25 1999-11-09 Tdk Corporation Organic El device
US5817366A (en) * 1996-07-29 1998-10-06 Tdk Corporation Method for manufacturing organic electroluminescent element and apparatus therefor
KR100572238B1 (ko) 1996-09-19 2006-04-24 세이코 엡슨 가부시키가이샤 Ｅｌ 장치의 제조 방법
US20020075422A1 (en) * 1996-09-19 2002-06-20 Seiko Epson Corporation Matrix type display device and manufacturing method thereof
JP3899566B2 (ja) 1996-11-25 2007-03-28 セイコーエプソン株式会社 有機ｅｌ表示装置の製造方法
JPH10156228A (ja) * 1996-12-03 1998-06-16 Agency Of Ind Science & Technol 薄膜の製造方法および薄膜製造装置
WO1998027570A1 (fr) 1996-12-17 1998-06-25 Toray Industries, Inc. Procede de fabrication d'ecran a plasma et dispositif correspondant
US6117529A (en) 1996-12-18 2000-09-12 Gunther Leising Organic electroluminescence devices and displays
JP3408090B2 (ja) 1996-12-18 2003-05-19 ステラケミファ株式会社 エッチング剤
US6091195A (en) 1997-02-03 2000-07-18 The Trustees Of Princeton University Displays having mesa pixel configuration
US6013982A (en) 1996-12-23 2000-01-11 The Trustees Of Princeton University Multicolor display devices
KR100226548B1 (ko) 1996-12-24 1999-10-15 김영환 웨이퍼 습식 처리 장치
US5928794A (en) 1996-12-24 1999-07-27 Dow Corning Gmbh Addition curable composition having self adhesion to substrates
US5990615A (en) 1997-02-03 1999-11-23 Nec Corporation Organic electroluminescent display with protective layer on cathode and an inert medium
US5869929A (en) 1997-02-04 1999-02-09 Idemitsu Kosan Co., Ltd. Multicolor luminescent device
US6049167A (en) 1997-02-17 2000-04-11 Tdk Corporation Organic electroluminescent display device, and method and system for making the same
US6220912B1 (en) 1997-05-09 2001-04-24 Canon Kabushiki Kaisha Method and apparatus for producing electron source using dispenser to produce electron emitting portions
JP3290375B2 (ja) 1997-05-12 2002-06-10 松下電器産業株式会社 有機電界発光素子
US6175345B1 (en) 1997-06-02 2001-01-16 Canon Kabushiki Kaisha Electroluminescence device, electroluminescence apparatus, and production methods thereof
US5972419A (en) 1997-06-13 1999-10-26 Hewlett-Packard Company Electroluminescent display and method for making the same
US5920080A (en) 1997-06-23 1999-07-06 Fed Corporation Emissive display using organic light emitting diodes
US6843937B1 (en) 1997-07-16 2005-01-18 Seiko Epson Corporation Composition for an organic EL element and method of manufacturing the organic EL element
JPH1140346A (ja) 1997-07-22 1999-02-12 Pioneer Electron Corp 有機エレクトロルミネセンス表示装置
US6274979B1 (en) 1997-09-17 2001-08-14 Texas Instruments Incorporated Organic light emitting diodes
US6134020A (en) 1997-11-17 2000-10-17 Canon Kabushiki Kaisha Serial printer with addressable print buffer
KR100249784B1 (ko) 1997-11-20 2000-04-01 정선종 고분자복합막을이용한유기물혹은고분자전기발광소자의패키징방법
JP2848383B1 (ja) * 1997-11-26 1999-01-20 日本電気株式会社 有機ｅｌ素子の製造方法
JP3827839B2 (ja) 1997-11-27 2006-09-27 富士通株式会社 半導体装置の製造方法
JPH11185674A (ja) 1997-12-24 1999-07-09 Futaba Corp 表示管用陽極基板とその製造方法
EP0929104B1 (fr) 1998-01-09 2009-08-05 Sony Corporation Dispositif électroluminescent et son procédé de fabrication
JPH11219133A (ja) 1998-02-02 1999-08-10 Tdk Corp 画像表示装置
US6476783B2 (en) 1998-02-17 2002-11-05 Sarnoff Corporation Contrast enhancement for an electronic display device by using a black matrix and lens array on outer surface of display
GB9803763D0 (en) 1998-02-23 1998-04-15 Cambridge Display Tech Ltd Display devices
JP3543170B2 (ja) 1998-02-24 2004-07-14 カシオ計算機株式会社 電界発光素子及びその製造方法
JPH11251059A (ja) 1998-02-27 1999-09-17 Sanyo Electric Co Ltd カラー表示装置
US6394578B1 (en) 1998-09-02 2002-05-28 Canon Kabushiki Kaisha Production process of color filter, liquid crystal display device using the color filter produced by the production process, and ink-jet head
DE69831243T2 (de) 1998-10-13 2006-08-10 Sony Deutschland Gmbh Herstellungsverfahren einer Licht emittierenden Anzeigevorrichtung mit aktiver Matrix
US6274887B1 (en) 1998-11-02 2001-08-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method therefor
US6617644B1 (en) 1998-11-09 2003-09-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
US6277679B1 (en) 1998-11-25 2001-08-21 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing thin film transistor
US6365917B1 (en) 1998-11-25 2002-04-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US6545359B1 (en) 1998-12-18 2003-04-08 Semiconductor Energy Laboratory Co., Ltd. Wiring line and manufacture process thereof, and semiconductor device and manufacturing process thereof
US6380007B1 (en) 1998-12-28 2002-04-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method of the same
US6506635B1 (en) 1999-02-12 2003-01-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, and method of forming the same
KR100654927B1 (ko) 1999-03-04 2006-12-08 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그의 제작방법
JP4578609B2 (ja) 1999-03-19 2010-11-10 株式会社半導体エネルギー研究所 電気光学装置
US6531713B1 (en) 1999-03-19 2003-03-11 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and manufacturing method thereof
TW512543B (en) 1999-06-28 2002-12-01 Semiconductor Energy Lab Method of manufacturing an electro-optical device
JP2001035659A (ja) 1999-07-15 2001-02-09 Nec Corp 有機エレクトロルミネセント素子およびその製造方法
US6641933B1 (en) 1999-09-24 2003-11-04 Semiconductor Energy Laboratory Co., Ltd. Light-emitting EL display device
US6833668B1 (en) 1999-09-29 2004-12-21 Sanyo Electric Co., Ltd. Electroluminescence display device having a desiccant
TW480722B (en) 1999-10-12 2002-03-21 Semiconductor Energy Lab Manufacturing method of electro-optical device
TW471011B (en) 1999-10-13 2002-01-01 Semiconductor Energy Lab Thin film forming apparatus
KR100313248B1 (ko) 1999-12-14 2001-11-07 구본준, 론 위라하디락사 칼라필터
TW493152B (en) 1999-12-24 2002-07-01 Semiconductor Energy Lab Electronic device
US6750835B2 (en) 1999-12-27 2004-06-15 Semiconductor Energy Laboratory Co., Ltd. Image display device and driving method thereof
US6228555B1 (en) 1999-12-28 2001-05-08 3M Innovative Properties Company Thermal mass transfer donor element
TW480727B (en) 2000-01-11 2002-03-21 Semiconductor Energy Laboratro Semiconductor display device
US6747638B2 (en) 2000-01-31 2004-06-08 Semiconductor Energy Laboratory Co., Ltd. Adhesion type area sensor and display device having adhesion type area sensor
US6702407B2 (en) 2000-01-31 2004-03-09 Semiconductor Energy Laboratory Co., Ltd. Color image display device, method of driving the same, and electronic equipment
TW495808B (en) 2000-02-04 2002-07-21 Semiconductor Energy Lab Thin film formation apparatus and method of manufacturing self-light-emitting device using thin film formation apparatus
TW521303B (en) 2000-02-28 2003-02-21 Semiconductor Energy Lab Electronic device
TW495809B (en) 2000-02-28 2002-07-21 Semiconductor Energy Lab Thin film forming device, thin film forming method, and self-light emitting device
JP2001318627A (ja) 2000-02-29 2001-11-16 Semiconductor Energy Lab Co Ltd 発光装置
TW495812B (en) 2000-03-06 2002-07-21 Semiconductor Energy Lab Thin film forming device, method of forming a thin film, and self-light-emitting device
TW495854B (en) 2000-03-06 2002-07-21 Semiconductor Energy Lab Semiconductor device and manufacturing method thereof
TWI226205B (en) 2000-03-27 2005-01-01 Semiconductor Energy Lab Self-light emitting device and method of manufacturing the same
US6226890B1 (en) 2000-04-07 2001-05-08 Eastman Kodak Company Desiccation of moisture-sensitive electronic devices
US7579203B2 (en) 2000-04-25 2009-08-25 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
US6611108B2 (en) 2000-04-26 2003-08-26 Semiconductor Energy Laboratory Co., Ltd. Electronic device and driving method thereof
TW554637B (en) 2000-05-12 2003-09-21 Semiconductor Energy Lab Display device and light emitting device
US6528951B2 (en) 2000-06-13 2003-03-04 Semiconductor Energy Laboratory Co., Ltd. Display device
US6822629B2 (en) 2000-08-18 2004-11-23 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
US6605826B2 (en) 2000-08-18 2003-08-12 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and display device
JP4086498B2 (ja) 2000-11-29 2008-05-14 キヤノン株式会社 金属配位化合物、発光素子及び表示装置
TWI264963B (en) * 2001-03-29 2006-10-21 Hitachi Ltd Organic EL display and production device of color filter
JP3724725B2 (ja) 2001-11-01 2005-12-07 ソニー株式会社 表示装置の製造方法
US6770502B2 (en) 2002-04-04 2004-08-03 Eastman Kodak Company Method of manufacturing a top-emitting OLED display device with desiccant structures
US6911772B2 (en) 2002-06-12 2005-06-28 Eastman Kodak Company Oled display having color filters for improving contrast

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0683406A1 (fr) * 1994-05-20 1995-11-22 Canon Kabushiki Kaisha Filtre coloré, procédé de fabrication, et dispositif d'affichage à cristal liquide
JPH1012377A (ja) * 1996-06-19 1998-01-16 Seiko Epson Corp アクティブマトリックス型有機ｅｌ表示体の製造方法
JPH1125852A (ja) * 1997-05-09 1999-01-29 Canon Inc 電子源の製造方法、電子源、画像形成装置の製造方法、画像形成装置及び電子源基板の製造装置
EP0940796A1 (fr) * 1997-08-21 1999-09-08 Seiko Epson Corporation Dispositif d'affichage a matrice active
WO1999021233A1 (fr) * 1997-10-17 1999-04-29 The Regents Of The University Of California Procede de fabrication de dispositifs a semi-conducteurs organiques au moyen d'une technique par jet d'encre et dispositif et systeme afferents
EP0930641A2 (fr) * 1998-01-19 1999-07-21 Seiko Epson Corporation Procédé de formation de motifs et appareil de fabrication de substrats
WO1999048339A1 (fr) * 1998-03-17 1999-09-23 Seiko Epson Corporation Substrat de formation de motifs sur film mince et son traitement de surface
EP0989778A1 (fr) * 1998-03-17 2000-03-29 Seiko Epson Corporation Substrat de formation de motifs sur film mince et son traitement de surface
GB2336553A (en) * 1998-04-24 1999-10-27 Cambridge Display Tech Ltd Selective deposition of organic films
WO2001016251A1 (fr) * 1999-08-31 2001-03-08 Cambridge Display Technology Limited Formulation conçue pour deposer une couche polymere electroluminescente
EP1093166A2 (fr) * 1999-10-12 2001-04-18 Sel Semiconductor Energy Laboratory Co., Ltd. Dispositif d'affichage organique électroluminescent et procédé de fabrication

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 04 30 April 1999 (1999-04-30) *

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US7494837B2 (en) 2009-02-24
KR100783027B1 (ko) 2007-12-07
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CN1293530A (zh) 2001-05-02
CN1266985C (zh) 2006-07-26
JP2001185355A (ja) 2001-07-06
KR20010071141A (ko) 2001-07-28
TW471011B (en) 2002-01-01
CN1734746A (zh) 2006-02-15
DE60028492D1 (de) 2006-07-20
JP4827290B2 (ja) 2011-11-30
US20090186439A1 (en) 2009-07-23
CN100468696C (zh) 2009-03-11
EP1093156A3 (fr) 2001-08-08
EP1705692A2 (fr) 2006-09-27
US7919341B2 (en) 2011-04-05
US20060283384A1 (en) 2006-12-21
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US7115434B2 (en) 2006-10-03
EP1093156A2 (fr) 2001-04-18

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