EP2511911A3 - Diffraction grating for x-ray talbot interferometer, method of manufacturing the same, and x-ray talbot interferometer - Google Patents

Diffraction grating for x-ray talbot interferometer, method of manufacturing the same, and x-ray talbot interferometer Download PDF

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Publication number
EP2511911A3
EP2511911A3 EP12164090.8A EP12164090A EP2511911A3 EP 2511911 A3 EP2511911 A3 EP 2511911A3 EP 12164090 A EP12164090 A EP 12164090A EP 2511911 A3 EP2511911 A3 EP 2511911A3
Authority
EP
European Patent Office
Prior art keywords
talbot interferometer
ray talbot
diffraction grating
manufacturing
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12164090.8A
Other languages
German (de)
French (fr)
Other versions
EP2511911A2 (en
Inventor
Yoshitomo Nakagawa
Yoshiharu Shirakawabe
Satoshi Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Science Corp
Original Assignee
Hitachi High Tech Science Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Science Corp filed Critical Hitachi High Tech Science Corp
Publication of EP2511911A2 publication Critical patent/EP2511911A2/en
Publication of EP2511911A3 publication Critical patent/EP2511911A3/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
    • G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

A diffraction grating (20) for an X-ray Talbot interferometer includes: a plurality of ridge-like X-ray absorbing portions (20b) made of a metal and formed on a substrate (22) along one direction at predetermined intervals; and a resin (26) interposed in a groove portion (20a) between neighboring X-ray absorbing portions of the plurality of ridge-like X-ray absorbing portions. The plurality of ridge-like X-ray absorbing portions are each formed of at least two unit metal layers (2b, 4b, and 6b) laminated perpendicularly to a surface of the substrate. The at least two unit metal layers are formed through cutting of a metal film.
EP12164090.8A 2011-04-15 2012-04-13 Diffraction grating for x-ray talbot interferometer, method of manufacturing the same, and x-ray talbot interferometer Withdrawn EP2511911A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011090607A JP2012225966A (en) 2011-04-15 2011-04-15 Diffraction grating for x-ray talbot interferometer, method for manufacturing the same, and x-ray talbot interferometer

Publications (2)

Publication Number Publication Date
EP2511911A2 EP2511911A2 (en) 2012-10-17
EP2511911A3 true EP2511911A3 (en) 2013-11-13

Family

ID=46026652

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12164090.8A Withdrawn EP2511911A3 (en) 2011-04-15 2012-04-13 Diffraction grating for x-ray talbot interferometer, method of manufacturing the same, and x-ray talbot interferometer

Country Status (2)

Country Link
EP (1) EP2511911A3 (en)
JP (1) JP2012225966A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5714968B2 (en) * 2011-04-15 2015-05-07 株式会社日立ハイテクサイエンス Diffraction grating for X-ray Talbot interferometer, manufacturing method thereof, and X-ray Talbot interferometer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050286680A1 (en) * 2002-12-26 2005-12-29 Atsushi Momose X-ray imaging system and imaging method
JP2009107088A (en) * 2007-10-31 2009-05-21 Nippon Zeon Co Ltd Manufacturing method for die, and manufacturing method for optical element
JP2009282322A (en) * 2008-05-22 2009-12-03 Konica Minolta Medical & Graphic Inc Method of manufacturing amplitude type diffraction grating
US20110051889A1 (en) * 2009-08-26 2011-03-03 Canon Kabushiki Kaisha X-ray phase grating and method for producing the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4608679B2 (en) 2005-03-17 2011-01-12 財団法人新産業創造研究機構 Manufacturing method of phase type diffraction grating and amplitude type diffraction grating used in X-ray Talbot interferometer
JP2009042528A (en) 2007-08-09 2009-02-26 Hyogo Prefecture Method of manufacturing diffraction grating

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050286680A1 (en) * 2002-12-26 2005-12-29 Atsushi Momose X-ray imaging system and imaging method
JP2009107088A (en) * 2007-10-31 2009-05-21 Nippon Zeon Co Ltd Manufacturing method for die, and manufacturing method for optical element
JP2009282322A (en) * 2008-05-22 2009-12-03 Konica Minolta Medical & Graphic Inc Method of manufacturing amplitude type diffraction grating
US20110051889A1 (en) * 2009-08-26 2011-03-03 Canon Kabushiki Kaisha X-ray phase grating and method for producing the same

Also Published As

Publication number Publication date
EP2511911A2 (en) 2012-10-17
JP2012225966A (en) 2012-11-15

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