US20020150323A1 - Optical switch - Google Patents
Optical switch Download PDFInfo
- Publication number
- US20020150323A1 US20020150323A1 US10/037,976 US3797602A US2002150323A1 US 20020150323 A1 US20020150323 A1 US 20020150323A1 US 3797602 A US3797602 A US 3797602A US 2002150323 A1 US2002150323 A1 US 2002150323A1
- Authority
- US
- United States
- Prior art keywords
- optical switch
- optical
- switching
- switch according
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3538—Optical coupling means having switching means based on displacement or deformation of a liquid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
- G02B6/29368—Light guide comprising the filter, e.g. filter deposited on a fibre end
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
- G02B6/355—1x2 switch, i.e. one input and a selectable single output of two possible outputs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3578—Piezoelectric force
Definitions
- the present invention relates to an optical switch for reflecting or transmitting light by a switching member disposed on an optical path of an optical waveguide, and changing the running direction of light by the moving of the switching member.
- a conventional optical switch is disclosed, for example, in Japanese Unexamined Patent Publication No. 2000-121967A.
- a micro mirror disposed on an optical path of luminous flux emitted from an optical fiber is supported by a movable plate, and the movable plate is moved by applying a voltage to move the micro mirror away from the optical path, so that forwarding and reflecting of light are changed over.
- U.S. Pat. No. 5,699,462 discloses an optical switch in which grooves obliquely crossing two intersecting optical waveguides are provided, bubbles are formed in the liquid filling the grooves, and bubbles are heated and moved by a micro heater.
- the refractive index of the filling liquid and the refractive index of the optical waveguide are set nearly equal, and therefore when the liquid is placed on the optical path of the optical waveguide, the light goes straightly forward, and when bubbles are placed, the light is reflected and the running direction is changed over.
- wavelength multiplex communication in which different pieces of information are put on light (carrier) of different wavelengths, and plural carriers are superposed, so that a large quantity of information can be transmitted by one optical fiber.
- the lights multiplexed in wavelength are uniformly reflected or transmitted, and pieces of information put on different carriers cannot be issued separately. Accordingly, information is taken out by filtering by a branching filter, and the optical communication system having the optical switch is complicated in configuration.
- the optical switch disclosed in the above mentioned Japanese Unexamined Patent Publication No. 2000-121967A requires a collimator lens in order to issue the exit light from the optical fiber to the optical fiber by reflecting or transmitting by the micro mirror.
- the optical switch disclosed in U.S. Pat. No. 5,699,462 requires a micro heater for heating and a mechanism for releasing its heat. As a result, the optical switch is complicated in either case.
- the optical switch reflecting one aspect of the invention is an optical switch for changing over the running direction of the light passing through an optical waveguide between a first direction and a second direction by moving a switching member disposed on an optical path of an optical waveguide, in which the switching member has plural switching positions, and these switching positions selectively guide each of lights of at least two different wavelengths into the first direction or second direction.
- the switching positions disposed on the optical path can be changed over, and lights of at least two different wavelengths can be guided selectively into the first direction or second direction. Further, by properly setting the position of the switching member, both switching positions can be kept away from the optical path. Therefore, for example, when the switching member is moved away from the optical path of the optical waveguide, the wavelength multiplexed incident light runs forward straightly, and when the switching member is disposed on the optical path of the optical waveguide, light of one wavelength passes and light of other wavelength is reflected.
- the switching member may be also configured to move within the groove intersecting with the optical waveguide.
- the groove may be filled with liquid, and in this case by moving the liquid in the groove by a micro pump coupled to the groove, the switching member may be moved.
- each switching position may be an interference filter.
- the optical switch reflecting other aspect of the invention comprises a groove intersecting with an optical waveguide and filled with liquid, a switching member movably provided in the groove, and a micro pump coupled to the groove for transferring the liquid in the groove.
- the micro pump may comprise a piezoelectric element, and in this case, by controlling the voltage applied to the piezoelectric element, optical switching operation may be realized.
- a plurality of any one of these optical switches may be disposed on a same optical path.
- wavelength multiplexed light is transmitted to one optical path having n optical switches arranged in series, and a light of a desired wavelength may be guided into a desired output port out of n output ports.
- FIG. 1 is a plan showing a state in transmission mode of optical switch in embodiment 1 of the invention.
- FIG. 2 is a side sectional view of optical switch in embodiment 1 of the invention.
- FIG. 3( a ) through FIG. 3( d ) are side sectional views showing a manufacturing method of main body of optical switch in embodiment 1 of the invention.
- FIG. 4( a ) and FIG. 4( b ) are diagrams showing a configuration of micro pump of optical switch in embodiment 1 of the invention.
- FIG. 5 is a diagram explaining operation of micro pump of optical switch in embodiment 1 of the invention.
- FIG. 6( a ) and FIG. 6( b ) are diagrams showing voltage applied to the piezoelectric element of micro pump of optical switch in embodiment 1 of the invention.
- FIG. 7( a ) through FIG. 7( f ) are side sectional views showing a manufacturing method of filter of optical switch in embodiment 1 of the invention.
- FIG. 8 is a diagram showing transmissivity of a first interference filter of optical switch in embodiment 1 of the invention.
- FIG. 9 is a diagram showing transmissivity of a second interference filter of optical switch in embodiment 1 of the invention.
- FIG. 10 is a diagram showing transmissivity of a third interference filter of optical switch in embodiment 1 of the invention.
- FIG. 11 is a plan showing a state of reflection mode of optical switch in embodiment 1 of the invention.
- FIG. 12 is a plan showing a partial transmission state of optical switch in embodiment 1 of the invention.
- FIG. 13 is a plan showing a partial transmission state of optical switch in embodiment 1 of the invention.
- FIG. 14 is a diagram showing transmissivity of other interference filter of optical switch in embodiment 1 of the invention.
- FIG. 15 is a plan showing an optical switch in embodiment 2 of the invention.
- FIG. 1 is a plan showing an optical switch in an embodiment of the invention, depicting a state after dismounting a diaphragm described below.
- An optical switch 1 has two waveguides 14 a , 14 b intersecting at a specified crossing angle ⁇ disposed on a main body 8 , and a groove 2 crossing the intersection 14 a is formed.
- a sectional view along the waveguide 14 a is shown in FIG. 2, in which the main body 8 is composed by forming a lower clad layer 11 , a waveguide 14 , and an upper clad layer 15 on a substrate 10 .
- the lower clad layer 11 made of quartz or the like is formed by CVD or other process.
- a core layer 12 made of quartz or the like is formed on the lower clad layer 11 . Since the lower clad layer 11 is doped with fluorine or the like, its refractive index is larger than that of the core layer 12 .
- the core layer 12 is coated with a resist 13 by spin coating or other process, and is patterned in a specified shape by exposure and development.
- a waveguide 14 of a specified shape is formed.
- the core layer 12 made of quartz, CHF 3 or CF 4 is used as reactive gas of RIE.
- an upper clad layer 15 of same material as the lower clad layer 11 is formed while doping fluorine or the like. This produces the main body 8 for guiding the incident light by the waveguide 14 being enclosed by the lower clad layer 11 and upper clad layer 15 low in refractive index.
- a diaphragm 16 having an electrode 18 made of ITO or the like patterned in a specified shape is adhered on the main body 8 .
- a piezoelectric element 17 made of PZT (lead zirconic acid titanate) or the like is adhered on this diaphragm 16 .
- PZT lead zirconic acid titanate
- FIG. 4( a ) and ( b ) are plan and sectional view showing essential parts of the groove 2 .
- the groove 2 is filled with matching oil 25 equal in refractive index to the waveguides 14 a , 14 b (see FIG. 1).
- At both ends of the groove 2 there are reservoirs 21 a , 21 b for holding the matching oil 25 (see FIG. 1).
- a pump compartment 22 is formed beneath the piezoelectric element 17 .
- the reservoir 21 a and pump compartment 22 are coupled by way of a first diffuser 23 a.
- the pump compartment 22 is further coupled to a diffusion compartment 24 at the opposite side of the reservoir 21 a by way of a second diffuser 23 b .
- a voltage is applied to the piezoelectric element 17 in a specific period, as indicated by single dot chain line in the diagram, the diaphragm 17 locally vibrates up and down, so that the matching oil 25 flows in the groove 2 .
- the width (w) and depth (d) of the first and second diffusers 23 a , 23 b are formed smaller than those of the reservoir 21 a , pump compartment 22 , and diffusion compartment 24 , and therefore the passage resistance of the matching oil 25 is large.
- the length L 21 of the first diffuser 23 a is shorter than the length L 2 of the second diffuser 23 b . Accordingly, the matching oil 25 passing in the second diffuser 23 b is nearly a laminar flow, whereas turbulence or vortex is formed in the matching oil 25 passing in the first diffuser 23 a.
- the passage resistance of the first and second diffusers 23 a , 23 b is as shown in FIG. 5.
- the axis of ordinates represents the passage resistance (unit: ⁇ 10 12 Nsec/m 5 )
- the axis of abscissas denotes the differential pressure (unit: Pa) at both ends of the first and second diffusers 23 a , 23 b expressed on the logarithmic scale.
- the micro pump 20 is composed of groove 2 , diaphragm 16 , and piezoelectric element 17 .
- FIG. 1 a filter 3 disposed in the groove 3 , and is immersed in matching oil 25 . Along with flow of the matching oil 25 , the filter 3 can be moved in the groove 2 .
- the filter 3 is composed of three interference filters 3 a to 3 c different in optical characteristics.
- a manufacturing method of the filter 3 is shown in FIG. 7( a ) to ( f ).
- a substrate material such as fluorinated polyimide or the like is applied, heated, and cured, and a substrate 32 is formed.
- a mask 33 is disposed on the substrate 32 , and plural thin film materials different in refractive index are laminated by vapor deposition or the like, and an interference filter 3 a is formed.
- FIG. 7( c ) and ( d ) thin film materials are laminated by vapor deposition or the like, and interference filters 3 b , 3 c are formed. Then, as shown in FIG. 7( e ), cutting off at specified positions by dicing saw or the like, the substrate 32 is separated from the base 31 , and a filter 3 having interference filters 3 a to 3 c different in optical characteristics disposed parallel on the substrate 32 is obtained (FIG. 7( f )).
- the micro pump 20 drives and the filter 3 is moved away from the intersection 14 c of the waveguides 14 a , 14 b .
- the lights of wavelengths ⁇ 1 and ⁇ 2 pass through the matching oil 25 equal in refractive index to the waveguide 14 a , and goes straight forward in the waveguide 14 a .
- the lights come out from a first output port 5 a.
- the micro pump 20 drives and interference filter 3 a of the filter 3 is placed at the intersection 14 c of the waveguides 14 a , 14 b .
- the interference filter 3 a is about 0% in transmissivity at wavelengths ⁇ 1 and ⁇ 2 (see FIG. 8). Accordingly, the lights of wavelengths ⁇ 1 and ⁇ 2 entering from the input port 4 are reflected by the filter 3 , and run through the waveguide 14 b , and come out from a second output port 5 b.
- the interference filter 3 a is about 100% in transmissivity at wavelength ⁇ 1 and about 0% at wavelength ⁇ 2 (see FIG. 9). Accordingly, the light of wavelength ⁇ 1 entering from the input port 4 passes through the filter 3 , and goes straight forward in the waveguide 14 a , and comes out from the first output port 5 a . The light of wavelength ⁇ 2 is reflected by the filter 3 , and runs through the waveguide 14 b , and comes out from the second output port 5 b.
- the interference filter 3 a is about 0% in transmissivity at wavelength ⁇ 1 and about 100% at wavelength ⁇ 2 (see FIG. 10). Accordingly, the light of wavelength ⁇ 2 entering from the input port 4 passes through the filter 3 , and goes straight forward in the waveguide 14 a , and comes out from the first output port 5 a . The light of wavelength ⁇ l is reflected by the filter 3 , and runs through the waveguide 14 b , and comes out from the second output port 5 b.
- the wavelength multiplexed luminous flux superposing carriers of plural wavelengths can be changed over in any one of total reflection, total transmission, partial transmission, and partial reflection.
- the interference filter may be also designed in a narrow band so as to pass only light of wavelength of 1.55 ⁇ m.
- wavelength multiplexed incident lights can be switched by each wavelength and issued separately, and branching filter is not particularly required, and the optical communication system can be simplified.
- micro mirror or other switching member may be disposed in the groove.
- the switching member disposed at intersection of waveguides can be moved by a micro pump using a piezoelectric element, so that an optical switch not requiring collimator lens or heat release mechanism can be realized.
- FIG. 15 is a plan showing an optical switch in embodiment 2 of the invention.
- an optical switch row 41 is formed by disposing same optical switches as in embodiment 1 in a straight line.
- the optical switch row 41 crosses with a waveguide 42 and waveguides 43 a to 43 c , and at each intersection, a same micro pump 20 as in embodiment 1 is disposed.
- an optical fiber 44 is connected, and at the output side (right side in the drawing) of the waveguide 42 , an optical fiber 45 is connected.
- an optical fiber 45 is connected at the output side (lower side in the drawing) of the waveguides 43 a to 43 c .
- the micro pump 20 is driven to move the filter 3 disposed in the groove 2 (see FIG. 1), so that the lights can be issued from different optical fibers depending on the wavelength.
- n pieces of lights multiplexed in wavelength can be directly put into 1 ⁇ n pieces of optical switches without being branched into optical fibers, and lights of arbitrary wavelengths can be issued to n pieces of optical fibers for output. Therefore, the expensive AWG used in the prior art is not needed, and the number of optical switches is curtailed, and the loss of light can be reduced.
- the optical switch 1 of embodiment 1 was manufactured in the following specification, and the operation of the optical switch 1 was evaluated.
- the interference filters 3 a to 3 c were manufactured according to the optical characteristics shown in FIG. 8 to FIG. 10. TABLE Specification of Optical Switch 1 Main Substrate Material Silicon body Lower clad layer Material Quartz Thickness 20 ⁇ m Refractive index 1.4626 Waveguide Material Quartz Thickness 7 ⁇ m Refractive index 1.4670 Crossing angle ⁇ 10°
- Upper clad layer Material Quartz Thickness 20 ⁇ m Refractive index 1.4626 Groove Depth 100 ⁇ m Diffuser Depth d ⁇ width w 25 ⁇ m ⁇ 20 ⁇ m Diaphragm Material Borosilicate glass Thickness 70 ⁇ m Piezoelectric element Material PZT Max.
- the switching member disposed on the optical path of the optical waveguide guides the light in different directions depending on the wavelengths, so that the wavelength multiplexed incident lights can be switched and issued separately depending on the wavelength. Therefore, branching filter is not needed, and the optical communication system using the optical switch can be simplified.
- the optical switch not using the collimator lens or heat release mechanism as required in the prior art can be realized.
- the wavelength multiplexed lights can be directly put into optical switches arranged in series without being branched into optical fibers, and lights of arbitrary wavelengths can be issued to optical fibers for output.
- the expensive AWG (arrayed wave gating) used in the prior art is not needed, and the number of optical switches is curtailed, and the loss of light can be reduced.
Abstract
Description
- This application is based on Japanese Patent Application No. 2001-001724 filed in Japan on Jan. 9, 2001, the entire content of which is hereby incorporated by reference.
- 1. FIELD OF THE INVENTION
- The present invention relates to an optical switch for reflecting or transmitting light by a switching member disposed on an optical path of an optical waveguide, and changing the running direction of light by the moving of the switching member.
- 2. DESCRIPTION OF THE RELATED ART
- A conventional optical switch is disclosed, for example, in Japanese Unexamined Patent Publication No. 2000-121967A. In this optical switch, a micro mirror disposed on an optical path of luminous flux emitted from an optical fiber is supported by a movable plate, and the movable plate is moved by applying a voltage to move the micro mirror away from the optical path, so that forwarding and reflecting of light are changed over.
- On the other hand, U.S. Pat. No. 5,699,462 discloses an optical switch in which grooves obliquely crossing two intersecting optical waveguides are provided, bubbles are formed in the liquid filling the grooves, and bubbles are heated and moved by a micro heater. In this optical switch, the refractive index of the filling liquid and the refractive index of the optical waveguide are set nearly equal, and therefore when the liquid is placed on the optical path of the optical waveguide, the light goes straightly forward, and when bubbles are placed, the light is reflected and the running direction is changed over.
- Recently, the so-called wavelength multiplex communication is developed, in which different pieces of information are put on light (carrier) of different wavelengths, and plural carriers are superposed, so that a large quantity of information can be transmitted by one optical fiber. According to such conventional optical switch, however, the lights multiplexed in wavelength are uniformly reflected or transmitted, and pieces of information put on different carriers cannot be issued separately. Accordingly, information is taken out by filtering by a branching filter, and the optical communication system having the optical switch is complicated in configuration.
- Besides, the optical switch disclosed in the above mentioned Japanese Unexamined Patent Publication No. 2000-121967A requires a collimator lens in order to issue the exit light from the optical fiber to the optical fiber by reflecting or transmitting by the micro mirror. The optical switch disclosed in U.S. Pat. No. 5,699,462 requires a micro heater for heating and a mechanism for releasing its heat. As a result, the optical switch is complicated in either case.
- It is hence a primary object of the invention to present an optical switch capable of issuing wavelength multiplexed lights separately. It is also an object of the invention to present an optical switch simple in structure.
- To achieve the objects, the optical switch reflecting one aspect of the invention is an optical switch for changing over the running direction of the light passing through an optical waveguide between a first direction and a second direction by moving a switching member disposed on an optical path of an optical waveguide, in which the switching member has plural switching positions, and these switching positions selectively guide each of lights of at least two different wavelengths into the first direction or second direction.
- According to this configuration, by moving the switching member, the switching positions disposed on the optical path can be changed over, and lights of at least two different wavelengths can be guided selectively into the first direction or second direction. Further, by properly setting the position of the switching member, both switching positions can be kept away from the optical path. Therefore, for example, when the switching member is moved away from the optical path of the optical waveguide, the wavelength multiplexed incident light runs forward straightly, and when the switching member is disposed on the optical path of the optical waveguide, light of one wavelength passes and light of other wavelength is reflected.
- Moreover, in the configuration, the switching member may be also configured to move within the groove intersecting with the optical waveguide. The groove may be filled with liquid, and in this case by moving the liquid in the groove by a micro pump coupled to the groove, the switching member may be moved.
- Further, in the configuration, each switching position may be an interference filter.
- The optical switch reflecting other aspect of the invention comprises a groove intersecting with an optical waveguide and filled with liquid, a switching member movably provided in the groove, and a micro pump coupled to the groove for transferring the liquid in the groove.
- According to this configuration, when the micro pump is driven, the liquid in the groove intersecting with the optical waveguide is fed, and the switching member moves in the groove. As a result, when the liquid and optical wave guide, for example, are matched in refractive index, by moving the switching member away from the optical path of the optical waveguide, the wavelength multiplexed incident light runs straightly forward, or by placing the switching member on the optical path of the optical waveguide, the incident light is reflected.
- In this configuration, the micro pump may comprise a piezoelectric element, and in this case, by controlling the voltage applied to the piezoelectric element, optical switching operation may be realized.
- Further, a plurality of any one of these optical switches may be disposed on a same optical path. In this configuration, wavelength multiplexed light is transmitted to one optical path having n optical switches arranged in series, and a light of a desired wavelength may be guided into a desired output port out of n output ports.
- These and other objects, advantages and features of the invention will become apparent from the following description thereof taken in conjunction with the accompanying drawing s in which:
- FIG. 1 is a plan showing a state in transmission mode of optical switch in
embodiment 1 of the invention; - FIG. 2 is a side sectional view of optical switch in
embodiment 1 of the invention; - FIG. 3(a) through FIG. 3(d) are side sectional views showing a manufacturing method of main body of optical switch in
embodiment 1 of the invention; - FIG. 4(a) and FIG. 4(b) are diagrams showing a configuration of micro pump of optical switch in
embodiment 1 of the invention; - FIG. 5 is a diagram explaining operation of micro pump of optical switch in
embodiment 1 of the invention; - FIG. 6(a) and FIG. 6(b) are diagrams showing voltage applied to the piezoelectric element of micro pump of optical switch in
embodiment 1 of the invention; - FIG. 7(a) through FIG. 7(f) are side sectional views showing a manufacturing method of filter of optical switch in
embodiment 1 of the invention; - FIG. 8 is a diagram showing transmissivity of a first interference filter of optical switch in
embodiment 1 of the invention; - FIG. 9 is a diagram showing transmissivity of a second interference filter of optical switch in
embodiment 1 of the invention; - FIG. 10 is a diagram showing transmissivity of a third interference filter of optical switch in
embodiment 1 of the invention; - FIG. 11 is a plan showing a state of reflection mode of optical switch in
embodiment 1 of the invention; - FIG. 12 is a plan showing a partial transmission state of optical switch in
embodiment 1 of the invention; - FIG. 13 is a plan showing a partial transmission state of optical switch in
embodiment 1 of the invention; - FIG. 14 is a diagram showing transmissivity of other interference filter of optical switch in
embodiment 1 of the invention; and - FIG. 15 is a plan showing an optical switch in
embodiment 2 of the invention. - Referring now to the drawings, preferred embodiments of the invention are described below. FIG. 1 is a plan showing an optical switch in an embodiment of the invention, depicting a state after dismounting a diaphragm described below. An
optical switch 1 has twowaveguides main body 8, and agroove 2 crossing theintersection 14 a is formed. A sectional view along thewaveguide 14 a is shown in FIG. 2, in which themain body 8 is composed by forming alower clad layer 11, awaveguide 14, and anupper clad layer 15 on asubstrate 10. - A manufacturing method of the
main body 8 is shown in FIG. 3(a) through FIG. 3(d). As shown in FIG. 3(a), on thesubstrate 10 made of Si or the like, thelower clad layer 11 made of quartz or the like is formed by CVD or other process. On thelower clad layer 11, as shown in FIG. 3(b), acore layer 12 made of quartz or the like is formed. Since thelower clad layer 11 is doped with fluorine or the like, its refractive index is larger than that of thecore layer 12. Thecore layer 12 is coated with aresist 13 by spin coating or other process, and is patterned in a specified shape by exposure and development. - Next, as shown in FIG. 3(c), by etching the
core layer 12 by RIE or other process, awaveguide 14 of a specified shape is formed. In the case of thecore layer 12 made of quartz, CHF3 or CF4 is used as reactive gas of RIE. After peeling the resist 13, as shown in FIG. 3(d), an upper cladlayer 15 of same material as the lowerclad layer 11 is formed while doping fluorine or the like. This produces themain body 8 for guiding the incident light by thewaveguide 14 being enclosed by the lowerclad layer 11 and upper cladlayer 15 low in refractive index. - In FIG. 2, on the
main body 8, adiaphragm 16 having anelectrode 18 made of ITO or the like patterned in a specified shape is adhered. On thisdiaphragm 16, apiezoelectric element 17 made of PZT (lead zirconic acid titanate) or the like is adhered. When a voltage is applied between the upper surface of thepiezoelectric element 17 and theelectrode 18, thediaphragm 16 is deformed. - FIG. 4(a) and (b) are plan and sectional view showing essential parts of the
groove 2. Thegroove 2 is filled with matchingoil 25 equal in refractive index to thewaveguides groove 2, there arereservoirs pump compartment 22 is formed beneath thepiezoelectric element 17. Thereservoir 21 a andpump compartment 22 are coupled by way of afirst diffuser 23 a. - The
pump compartment 22 is further coupled to adiffusion compartment 24 at the opposite side of thereservoir 21 a by way of asecond diffuser 23 b. When a voltage is applied to thepiezoelectric element 17 in a specific period, as indicated by single dot chain line in the diagram, thediaphragm 17 locally vibrates up and down, so that the matchingoil 25 flows in thegroove 2. - The width (w) and depth (d) of the first and
second diffusers reservoir 21 a,pump compartment 22, anddiffusion compartment 24, and therefore the passage resistance of the matchingoil 25 is large. The length L21 of thefirst diffuser 23 a is shorter than the length L2 of thesecond diffuser 23 b. Accordingly, the matchingoil 25 passing in thesecond diffuser 23 b is nearly a laminar flow, whereas turbulence or vortex is formed in the matchingoil 25 passing in thefirst diffuser 23 a. - As a result, the passage resistance of the first and
second diffusers second diffusers reservoir 21 a,pump compartment 22 anddiffusion compartment 25 is matched with the depth (d) of the first andsecond diffusers - In the diagram, since the length L1 of the
first diffuser 23 a is short, when the differential pressure is small, the passage resistance is smaller than in thesecond diffuser 23 b. However, in thesecond diffuser 23 b, although the increase of passage resistance relative to the differential pressure is moderate, the increase is substantial in thefirst diffuser 23 a due to turbulence or vortex. Accordingly, as the differential pressure increases, thefirst diffuser 23 a becomes larger in passage resistance than thesecond diffuser 23 b. - Therefore, when the pressure in the
pump compartment 22 is small, the matchingoil 25 is more likely to flow into thefirst diffuser 23 a, and when the pressure in thepump compartment 22 is large, the matchingoil 25 more smoothly flows into thesecond diffuser 23 b. - As understood from these results, when the voltage applied to the
piezoelectric element 17 is a sharp rising sawtooth waveform as shown in FIG. 6(a), the pressure in thepump compartment 22 instantly hikes up. As a result, the amount of matchingoil 25 flowing out from thesecond diffuser 23 b is greater than the amount flowing out from thefirst diffuser 23 a, so that the matchingoil 25 flows, in average, to the right side in FIG. 4(a), (b). - By contrast, when the voltage applied to the
piezoelectric element 17 is a mild rising sawtooth waveform as shown in FIG. 6(b), the pressure in thepump compartment 22 increases gradually, and the amount of matchingoil 25 flowing out from thefirst diffuser 23 a is greater than the amount flowing out from thesecond diffuser 23 b, so that the matchingoil 25 flows, in average, to the left side in FIG. 4(a), (b). In this way, themicro pump 20 is composed ofgroove 2,diaphragm 16, andpiezoelectric element 17. - In FIG. 1, a
filter 3 disposed in thegroove 3, and is immersed in matchingoil 25. Along with flow of the matchingoil 25, thefilter 3 can be moved in thegroove 2. Thefilter 3 is composed of threeinterference filters 3 a to 3 c different in optical characteristics. A manufacturing method of thefilter 3 is shown in FIG. 7(a) to (f). - As shown in FIG. 7(a), on a
base 31 of silicon or the like, a substrate material such as fluorinated polyimide or the like is applied, heated, and cured, and asubstrate 32 is formed. Next, as shown in FIG. 7(b), amask 33 is disposed on thesubstrate 32, and plural thin film materials different in refractive index are laminated by vapor deposition or the like, and aninterference filter 3 a is formed. - Similarly, as shown in FIG. 7(c) and (d), thin film materials are laminated by vapor deposition or the like, and
interference filters substrate 32 is separated from thebase 31, and afilter 3 havinginterference filters 3 a to 3 c different in optical characteristics disposed parallel on thesubstrate 32 is obtained (FIG. 7(f)). - For example, the operation is explained in the case of the optical switch having the interference filters3 a to 3 c formed so as to exhibit the optical characteristics as shown in FIG. 8 to FIG. 10. Luminous flux entering the
optical switch 1 consists of light of wavelength λ1 (=1.3 μm) and light of wavelength λ2 (=1.55 μm), which are multiplexed in wavelength in one optical fiber by a fiber coupler, and entered from an input port 4 (see FIG. 1). - When the
optical switch 1 is put in transmission mode, as shown in FIG. 1, themicro pump 20 drives and thefilter 3 is moved away from theintersection 14 c of thewaveguides oil 25 equal in refractive index to thewaveguide 14 a, and goes straight forward in thewaveguide 14 a. The lights come out from afirst output port 5 a. - When the
optical switch 1 is in reflection mode, as shown in FIG. 11, themicro pump 20 drives andinterference filter 3 a of thefilter 3 is placed at theintersection 14 c of thewaveguides interference filter 3 a is about 0% in transmissivity at wavelengths λ1 and λ2 (see FIG. 8). Accordingly, the lights of wavelengths λ1 and λ2 entering from theinput port 4 are reflected by thefilter 3, and run through thewaveguide 14 b, and come out from asecond output port 5 b. - As shown in FIG. 12, as the
micro pump 20 drives, when theinterference filter 3 b of thefilter 3 is disposed at theintersection 14 c of thewaveguides interference filter 3 a is about 100% in transmissivity at wavelength λ1 and about 0% at wavelength λ2 (see FIG. 9). Accordingly, the light of wavelength λ1 entering from theinput port 4 passes through thefilter 3, and goes straight forward in thewaveguide 14 a, and comes out from thefirst output port 5 a. The light of wavelength λ2 is reflected by thefilter 3, and runs through thewaveguide 14 b, and comes out from thesecond output port 5 b. - As shown in FIG. 13, as the
micro pump 20 drives, when theinterference filter 3 c of thefilter 3 is disposed at theintersection 14 c of thewaveguides interference filter 3 a is about 0% in transmissivity at wavelength λ1 and about 100% at wavelength λ2 (see FIG. 10). Accordingly, the light of wavelength λ2 entering from theinput port 4 passes through thefilter 3, and goes straight forward in thewaveguide 14 a, and comes out from thefirst output port 5 a. The light of wavelength λl is reflected by thefilter 3, and runs through thewaveguide 14 b, and comes out from thesecond output port 5 b. - Therefore, by moving the
filter 3 by driving themicro pump 20, the wavelength multiplexed luminous flux superposing carriers of plural wavelengths can be changed over in any one of total reflection, total transmission, partial transmission, and partial reflection. Further, as shown in FIG. 14, the interference filter may be also designed in a narrow band so as to pass only light of wavelength of 1.55 μm. - According to the embodiment, wavelength multiplexed incident lights can be switched by each wavelength and issued separately, and branching filter is not particularly required, and the optical communication system can be simplified.
- Instead of the filter, meanwhile, micro mirror or other switching member may be disposed in the groove. In this configuration, although wavelength selectivity is not achieved, the switching member disposed at intersection of waveguides can be moved by a micro pump using a piezoelectric element, so that an optical switch not requiring collimator lens or heat release mechanism can be realized.
- FIG. 15 is a plan showing an optical switch in
embodiment 2 of the invention. In this embodiment, anoptical switch row 41 is formed by disposing same optical switches as inembodiment 1 in a straight line. Theoptical switch row 41 crosses with awaveguide 42 andwaveguides 43 a to 43 c, and at each intersection, a samemicro pump 20 as inembodiment 1 is disposed. - At the input side (left side in the drawing) of the
waveguide 42, anoptical fiber 44 is connected, and at the output side (right side in the drawing) of thewaveguide 42, anoptical fiber 45 is connected. At the output side (lower side in the drawing) of thewaveguides 43 a to 43 c, each optical fiber of anoptical fiber array 45 is connected. - When a wavelength multiplexed luminous flux superposing lights of plural wavelengths is entered from the
optical fiber 44, themicro pump 20 is driven to move thefilter 3 disposed in the groove 2 (see FIG. 1), so that the lights can be issued from different optical fibers depending on the wavelength. - For example, n pieces of lights multiplexed in wavelength can be directly put into 1×n pieces of optical switches without being branched into optical fibers, and lights of arbitrary wavelengths can be issued to n pieces of optical fibers for output. Therefore, the expensive AWG used in the prior art is not needed, and the number of optical switches is curtailed, and the loss of light can be reduced.
- The
optical switch 1 ofembodiment 1 was manufactured in the following specification, and the operation of theoptical switch 1 was evaluated. The interference filters 3 a to 3 c were manufactured according to the optical characteristics shown in FIG. 8 to FIG. 10.TABLE Specification of Optical Switch 1Main Substrate Material Silicon body Lower clad layer Material Quartz Thickness 20 μm Refractive index 1.4626 Waveguide Material Quartz Thickness 7 μm Refractive index 1.4670 Crossing angle θ 10° Upper clad layer Material Quartz Thickness 20 μm Refractive index 1.4626 Groove Depth 100 μm Diffuser Depth d × width w 25 μm × 20 μm Diaphragm Material Borosilicate glass Thickness 70 μm Piezoelectric element Material PZT Max. voltage 60 V Frequency 11 kHz Matching oil Refractive index 1.4626 Filter Substrate Material Fluorinated polyimide Thickness 5 μm Refractive index 1.52 Interference filter Material Lamination of SiO2 and TiO2 Refractive index SiO2: 1.46, TiO2: 2.3 Number of layers 31 Width 20 μm × 3 Wavelengths of incident 1.3 μm, 1.55 μm lights λ1, λ2 - As a result, lights of wavelengths λ1, λ2 entering from the
input port 4 were issued from thefirst output port 5 a in transmission mode (see FIG. 1), and from thesecond output port 5 b in reflection mode (see FIG. 11). In the case of partial transmission and partial reflection (see FIG. 12 and FIG. 13), outputs were respectively obtained from the first andsecond output ports filter 3 is moved at a speed of 2×104 μm/sec, and the maximum moving distance necessary for changeover is 80 μm (20×4), and therefore the switching speed is 4 msec. - As clear from the explanation herein, according to the optical switch of the embodiment, since the switching member disposed on the optical path of the optical waveguide guides the light in different directions depending on the wavelengths, so that the wavelength multiplexed incident lights can be switched and issued separately depending on the wavelength. Therefore, branching filter is not needed, and the optical communication system using the optical switch can be simplified.
- Further, composing the switching member by using interference filters, by moving in the groove crossing with the optical waveguides, an optical switch having a wavelength selectivity can be easily composed.
- Moreover, by disposing the switching member at the intersection of optical waveguides, and by moving the switching member by a micro pump using a piezoelectric element, the optical switch not using the collimator lens or heat release mechanism as required in the prior art can be realized.
- Still more, by disposing a plurality of optical switches in one optical path, the wavelength multiplexed lights can be directly put into optical switches arranged in series without being branched into optical fibers, and lights of arbitrary wavelengths can be issued to optical fibers for output. The expensive AWG (arrayed wave gating) used in the prior art is not needed, and the number of optical switches is curtailed, and the loss of light can be reduced.
- Although the present invention has been fully described by way of examples with reference to the accompanying drawings, it is to be noted that various changes and modifications will be apparent to those skilled in the art. Therefore, unless otherwise such changes and modifications depart from the scope of the present invention, they should be construed as being included therein.
Claims (14)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001-001724 | 2001-01-09 | ||
JP2001001724A JP2002207181A (en) | 2001-01-09 | 2001-01-09 | Optical switch |
Publications (2)
Publication Number | Publication Date |
---|---|
US20020150323A1 true US20020150323A1 (en) | 2002-10-17 |
US6807330B2 US6807330B2 (en) | 2004-10-19 |
Family
ID=18870332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/037,976 Expired - Fee Related US6807330B2 (en) | 2001-01-09 | 2002-01-03 | Optical switch using an optical waveguide |
Country Status (2)
Country | Link |
---|---|
US (1) | US6807330B2 (en) |
JP (1) | JP2002207181A (en) |
Cited By (69)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030189773A1 (en) * | 2002-03-28 | 2003-10-09 | Wong Marvin Glenn | Piezoelectric optical relay |
US20030194170A1 (en) * | 2002-04-10 | 2003-10-16 | Wong Marvin Glenn | Piezoelectric optical demultiplexing switch |
US20040066259A1 (en) * | 2002-10-08 | 2004-04-08 | Dove Lewis R. | Electrically isolated liquid metal micro-switches for integrally shielded microcircuits |
US6730866B1 (en) | 2003-04-14 | 2004-05-04 | Agilent Technologies, Inc. | High-frequency, liquid metal, latching relay array |
US6740829B1 (en) | 2003-04-14 | 2004-05-25 | Agilent Technologies, Inc. | Insertion-type liquid metal latching relay |
US6747222B1 (en) | 2003-02-04 | 2004-06-08 | Agilent Technologies, Inc. | Feature formation in a nonphotoimagable material and switch incorporating same |
US6750413B1 (en) | 2003-04-25 | 2004-06-15 | Agilent Technologies, Inc. | Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate |
US20040112727A1 (en) * | 2002-12-12 | 2004-06-17 | Wong Marvin Glenn | Laser cut channel plate for a switch |
US20040112726A1 (en) * | 2002-12-12 | 2004-06-17 | Wong Marvin Glenn | Ultrasonically milled channel plate for a switch |
US20040112728A1 (en) * | 2002-12-12 | 2004-06-17 | Wong Marvin Glenn | Ceramic channel plate for a switch |
US6756551B2 (en) | 2002-05-09 | 2004-06-29 | Agilent Technologies, Inc. | Piezoelectrically actuated liquid metal switch |
US6759610B1 (en) | 2003-06-05 | 2004-07-06 | Agilent Technologies, Inc. | Multi-layer assembly of stacked LIMMS devices with liquid metal vias |
US6759611B1 (en) | 2003-06-16 | 2004-07-06 | Agilent Technologies, Inc. | Fluid-based switches and methods for producing the same |
US6762378B1 (en) | 2003-04-14 | 2004-07-13 | Agilent Technologies, Inc. | Liquid metal, latching relay with face contact |
US6765161B1 (en) | 2003-04-14 | 2004-07-20 | Agilent Technologies, Inc. | Method and structure for a slug caterpillar piezoelectric latching reflective optical relay |
US20040140187A1 (en) * | 2003-01-22 | 2004-07-22 | Wong Marvin Glenn | Method for registering a deposited material with channel plate channels, and switch produced using same |
US6768068B1 (en) | 2003-04-14 | 2004-07-27 | Agilent Technologies, Inc. | Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch |
US20040144632A1 (en) * | 2003-01-13 | 2004-07-29 | Wong Marvin Glenn | Photoimaged channel plate for a switch |
US6774325B1 (en) | 2003-04-14 | 2004-08-10 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
US6774324B2 (en) | 2002-12-12 | 2004-08-10 | Agilent Technologies, Inc. | Switch and production thereof |
US6777630B1 (en) | 2003-04-30 | 2004-08-17 | Agilent Technologies, Inc. | Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates |
US6781074B1 (en) | 2003-07-30 | 2004-08-24 | Agilent Technologies, Inc. | Preventing corrosion degradation in a fluid-based switch |
US6787720B1 (en) | 2003-07-31 | 2004-09-07 | Agilent Technologies, Inc. | Gettering agent and method to prevent corrosion in a fluid switch |
US6794591B1 (en) | 2003-04-14 | 2004-09-21 | Agilent Technologies, Inc. | Fluid-based switches |
US6798937B1 (en) | 2003-04-14 | 2004-09-28 | Agilent Technologies, Inc. | Pressure actuated solid slug optical latching relay |
US6803842B1 (en) | 2003-04-14 | 2004-10-12 | Agilent Technologies, Inc. | Longitudinal mode solid slug optical latching relay |
US20040201311A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | High frequency bending-mode latching relay |
US20040200707A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Bent switching fluid cavity |
US20040200703A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Bending mode liquid metal switch |
US20040201907A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Liquid metal optical relay |
US20040201313A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | High-frequency, liquid metal, latching relay with face contact |
US20040202408A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Pressure actuated optical latching relay |
US20040201318A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glen | Latching relay with switch bar |
US20040200704A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Fluid-based switch |
US20040200708A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch |
US20040201316A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Method and structure for a solid slug caterpillar piezoelectric relay |
US20040201322A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Longitudinal mode optical latching relay |
US20040201321A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | High frequency latching relay with bending switch bar |
US20040201329A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Damped longitudinal mode latching relay |
US20040201323A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Shear mode liquid metal switch |
US20040201319A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | High frequency push-mode latching relay |
US20040202404A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Polymeric liquid metal optical switch |
US20040200705A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch |
US20040201314A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Wetting finger latching piezoelectric relay |
US20040200706A1 (en) * | 2003-04-14 | 2004-10-14 | Dove Lewis R. | Substrate with liquid electrode |
US20040201317A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Method and structure for a pusher-mode piezoelectrically actuated liquid switch metal switch |
US20040202413A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Method and structure for a solid slug caterpillar piezoelectric optical relay |
US20040201315A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Bending-mode latching relay |
US20040201320A1 (en) * | 2003-04-14 | 2004-10-14 | Carson Paul Thomas | Inserting-finger liquid metal relay |
US20040202411A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch |
US20040202558A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Closed-loop piezoelectric pump |
US20040201310A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Damped longitudinal mode optical latching relay |
US20040202410A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Longitudinal electromagnetic latching optical relay |
US20040200702A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Push-mode latching relay |
US20040201330A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Method and apparatus for maintaining a liquid metal switch in a ready-to-switch condition |
US20040202844A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Feature formation in thick-film inks |
US20040201312A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch |
US20040201440A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Longitudinal electromagnetic latching relay |
US20040201309A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Insertion-type liquid metal latching relay array |
US20040202414A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Reflecting wedge optical wavelength multiplexer/demultiplexer |
US6825429B2 (en) | 2003-03-31 | 2004-11-30 | Agilent Technologies, Inc. | Hermetic seal and controlled impedance RF connections for a liquid metal micro switch |
US20040251117A1 (en) * | 2003-06-16 | 2004-12-16 | Wong Marvin Glenn | Suspended thin-film resistor |
US20050034962A1 (en) * | 2003-04-14 | 2005-02-17 | Wong Marvin Glenn | Reducing oxides on a switching fluid in a fluid-based switch |
US6927529B2 (en) | 2002-05-02 | 2005-08-09 | Agilent Technologies, Inc. | Solid slug longitudinal piezoelectric latching relay |
US20050263379A1 (en) * | 2003-04-14 | 2005-12-01 | John Ralph Lindsey | Reduction of oxides in a fluid-based switch |
US7078849B2 (en) | 2001-10-31 | 2006-07-18 | Agilent Technologies, Inc. | Longitudinal piezoelectric optical latching relay |
US20110103415A1 (en) * | 2009-11-03 | 2011-05-05 | Alcatel-Lucent Usa, Incorporated | Optical device for wavelength locking |
US20120087623A1 (en) * | 2010-10-07 | 2012-04-12 | Alcatel-Lucent Usa Inc. | Optical assembly for a wdm receiver or transmitter |
US9008515B2 (en) | 2010-10-07 | 2015-04-14 | Alcatel Lucent | Direct laser modulation |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4853945B2 (en) * | 2006-02-23 | 2012-01-11 | 彰 齋藤 | Manufacturing method of display device |
US8200478B2 (en) | 2009-01-30 | 2012-06-12 | Mitsubishi Electric Corporation | Voice recognition device which recognizes contents of speech |
JP6319985B2 (en) * | 2013-10-11 | 2018-05-09 | インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Machines Corporation | Optical module and optical module manufacturing method. |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6363183B1 (en) * | 2000-01-04 | 2002-03-26 | Seungug Koh | Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof |
US20020044721A1 (en) * | 2000-06-09 | 2002-04-18 | Bjorklund Gary C. | Mems device having multiple DWDM filters |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2548795B1 (en) * | 1983-07-04 | 1986-11-21 | Thomson Csf | OPTICAL SWITCHING DEVICE WITH FLUID DISPLACEMENT AND DEVICE FOR COMPOSING A POINT LINE |
US4991925A (en) * | 1988-10-04 | 1991-02-12 | Metricor | Spectrum shifting optical switch |
JPH06177838A (en) | 1992-12-10 | 1994-06-24 | Sumitomo Electric Ind Ltd | Light beam path monitor system |
US5632876A (en) * | 1995-06-06 | 1997-05-27 | David Sarnoff Research Center, Inc. | Apparatus and methods for controlling fluid flow in microchannels |
US5699462A (en) | 1996-06-14 | 1997-12-16 | Hewlett-Packard Company | Total internal reflection optical switches employing thermal activation |
US6055344A (en) * | 1998-02-18 | 2000-04-25 | Hewlett-Packard Company | Fabrication of a total internal reflection optical switch with vertical fluid fill-holes |
JP3451395B2 (en) | 1998-10-16 | 2003-09-29 | 日本航空電子工業株式会社 | Optical switch and method of manufacturing the same |
US6389189B1 (en) * | 1998-10-23 | 2002-05-14 | Corning Incorporated | Fluid-encapsulated MEMS optical switch |
US6360775B1 (en) * | 1998-12-23 | 2002-03-26 | Agilent Technologies, Inc. | Capillary fluid switch with asymmetric bubble chamber |
WO2000039626A1 (en) * | 1998-12-31 | 2000-07-06 | Optical Coating Laboratory, Inc. | Wavelength selective optical switch |
US6445845B1 (en) * | 1999-04-27 | 2002-09-03 | Nippon Telegraph And Telephone Corporation | Optical switch |
CN1423757A (en) * | 1999-11-23 | 2003-06-11 | L3光学公司 | An optical switch having a planar waveguide and a shutter actuator |
TW452643B (en) * | 1999-11-23 | 2001-09-01 | Nanovation Tech Inc | Optical switches using an integrated Mach-Zehnder interferometer having a movable phase shifter and asymmetric arms |
US6356679B1 (en) * | 2000-03-30 | 2002-03-12 | K2 Optronics, Inc. | Optical routing element for use in fiber optic systems |
US20020048425A1 (en) * | 2000-09-20 | 2002-04-25 | Sarnoff Corporation | Microfluidic optical electrohydrodynamic switch |
US20020076140A1 (en) * | 2000-12-14 | 2002-06-20 | Onix Microsystems, Inc. | MEMS optical switch with pneumatic actuation |
-
2001
- 2001-01-09 JP JP2001001724A patent/JP2002207181A/en active Pending
-
2002
- 2002-01-03 US US10/037,976 patent/US6807330B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6363183B1 (en) * | 2000-01-04 | 2002-03-26 | Seungug Koh | Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof |
US20020044721A1 (en) * | 2000-06-09 | 2002-04-18 | Bjorklund Gary C. | Mems device having multiple DWDM filters |
Cited By (122)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7078849B2 (en) | 2001-10-31 | 2006-07-18 | Agilent Technologies, Inc. | Longitudinal piezoelectric optical latching relay |
US6741767B2 (en) * | 2002-03-28 | 2004-05-25 | Agilent Technologies, Inc. | Piezoelectric optical relay |
US20030189773A1 (en) * | 2002-03-28 | 2003-10-09 | Wong Marvin Glenn | Piezoelectric optical relay |
US20030194170A1 (en) * | 2002-04-10 | 2003-10-16 | Wong Marvin Glenn | Piezoelectric optical demultiplexing switch |
US6927529B2 (en) | 2002-05-02 | 2005-08-09 | Agilent Technologies, Inc. | Solid slug longitudinal piezoelectric latching relay |
US6756551B2 (en) | 2002-05-09 | 2004-06-29 | Agilent Technologies, Inc. | Piezoelectrically actuated liquid metal switch |
US6781075B2 (en) | 2002-10-08 | 2004-08-24 | Agilent Technologies, Inc. | Electrically isolated liquid metal micro-switches for integrally shielded microcircuits |
US20040066259A1 (en) * | 2002-10-08 | 2004-04-08 | Dove Lewis R. | Electrically isolated liquid metal micro-switches for integrally shielded microcircuits |
US6849144B2 (en) | 2002-12-12 | 2005-02-01 | Agilent Technologies, Inc. | Method for making switch with ultrasonically milled channel plate |
US7022926B2 (en) | 2002-12-12 | 2006-04-04 | Agilent Technologies, Inc. | Ultrasonically milled channel plate for a switch |
US20040112727A1 (en) * | 2002-12-12 | 2004-06-17 | Wong Marvin Glenn | Laser cut channel plate for a switch |
US20040112726A1 (en) * | 2002-12-12 | 2004-06-17 | Wong Marvin Glenn | Ultrasonically milled channel plate for a switch |
US20040112728A1 (en) * | 2002-12-12 | 2004-06-17 | Wong Marvin Glenn | Ceramic channel plate for a switch |
US6924444B2 (en) | 2002-12-12 | 2005-08-02 | Agilent Technologies, Inc. | Ceramic channel plate for a fluid-based switch, and method for making same |
US6855898B2 (en) | 2002-12-12 | 2005-02-15 | Agilent Technologies, Inc. | Ceramic channel plate for a switch |
US6909059B2 (en) | 2002-12-12 | 2005-06-21 | Agilent Technologies, Inc. | Liquid switch production and assembly |
US6774324B2 (en) | 2002-12-12 | 2004-08-10 | Agilent Technologies, Inc. | Switch and production thereof |
US20040144632A1 (en) * | 2003-01-13 | 2004-07-29 | Wong Marvin Glenn | Photoimaged channel plate for a switch |
US20050126899A1 (en) * | 2003-01-13 | 2005-06-16 | Wong Marvin G. | Photoimaged channel plate for a switch, and method for making a switch using same |
US6897387B2 (en) | 2003-01-13 | 2005-05-24 | Agilent Technologies, Inc. | Photoimaged channel plate for a switch |
US7098413B2 (en) | 2003-01-13 | 2006-08-29 | Agilent Technologies, Inc. | Photoimaged channel plate for a switch, and method for making a switch using same |
US20040140187A1 (en) * | 2003-01-22 | 2004-07-22 | Wong Marvin Glenn | Method for registering a deposited material with channel plate channels, and switch produced using same |
US6911611B2 (en) | 2003-01-22 | 2005-06-28 | Agilent Technologies, Inc. | Method for registering a deposited material with channel plate channels |
US6809277B2 (en) | 2003-01-22 | 2004-10-26 | Agilent Technologies, Inc. | Method for registering a deposited material with channel plate channels, and switch produced using same |
US6747222B1 (en) | 2003-02-04 | 2004-06-08 | Agilent Technologies, Inc. | Feature formation in a nonphotoimagable material and switch incorporating same |
US6825429B2 (en) | 2003-03-31 | 2004-11-30 | Agilent Technologies, Inc. | Hermetic seal and controlled impedance RF connections for a liquid metal micro switch |
US20040201312A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch |
US6906271B2 (en) | 2003-04-14 | 2005-06-14 | Agilent Technologies, Inc. | Fluid-based switch |
US20040201311A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | High frequency bending-mode latching relay |
US20040200707A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Bent switching fluid cavity |
US20040200703A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Bending mode liquid metal switch |
US20040201907A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Liquid metal optical relay |
US20040201313A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | High-frequency, liquid metal, latching relay with face contact |
US20040202408A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Pressure actuated optical latching relay |
US20040202412A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Pressure actuated solid slug optical latching relay |
US20040201318A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glen | Latching relay with switch bar |
US20040200704A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Fluid-based switch |
US20040200708A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch |
US20040201316A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Method and structure for a solid slug caterpillar piezoelectric relay |
US20040201322A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Longitudinal mode optical latching relay |
US20040201321A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | High frequency latching relay with bending switch bar |
US20040201329A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Damped longitudinal mode latching relay |
US20040201323A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Shear mode liquid metal switch |
US20040201319A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | High frequency push-mode latching relay |
US20040202404A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Polymeric liquid metal optical switch |
US20040200705A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch |
US20040201314A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Wetting finger latching piezoelectric relay |
US20040200706A1 (en) * | 2003-04-14 | 2004-10-14 | Dove Lewis R. | Substrate with liquid electrode |
US20040201317A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Method and structure for a pusher-mode piezoelectrically actuated liquid switch metal switch |
US20040202413A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Method and structure for a solid slug caterpillar piezoelectric optical relay |
US20040201315A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Bending-mode latching relay |
US20040201320A1 (en) * | 2003-04-14 | 2004-10-14 | Carson Paul Thomas | Inserting-finger liquid metal relay |
US20040202411A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch |
US20040202558A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Closed-loop piezoelectric pump |
US20040201310A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Damped longitudinal mode optical latching relay |
US20040201906A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Longitudinal mode solid slug optical latching relay |
US20040202410A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Longitudinal electromagnetic latching optical relay |
US20040200702A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Push-mode latching relay |
US20040201330A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Method and apparatus for maintaining a liquid metal switch in a ready-to-switch condition |
US20040202844A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Feature formation in thick-film inks |
US6798937B1 (en) | 2003-04-14 | 2004-09-28 | Agilent Technologies, Inc. | Pressure actuated solid slug optical latching relay |
US20040201440A1 (en) * | 2003-04-14 | 2004-10-14 | Arthur Fong | Longitudinal electromagnetic latching relay |
US20040201309A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Insertion-type liquid metal latching relay array |
US20040202414A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Reflecting wedge optical wavelength multiplexer/demultiplexer |
US6794591B1 (en) | 2003-04-14 | 2004-09-21 | Agilent Technologies, Inc. | Fluid-based switches |
US6816641B2 (en) | 2003-04-14 | 2004-11-09 | Agilent Technologies, Inc. | Method and structure for a solid slug caterpillar piezoelectric optical relay |
US6818844B2 (en) | 2003-04-14 | 2004-11-16 | Agilent Technologies, Inc. | Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch |
US6730866B1 (en) | 2003-04-14 | 2004-05-04 | Agilent Technologies, Inc. | High-frequency, liquid metal, latching relay array |
US6831532B2 (en) | 2003-04-14 | 2004-12-14 | Agilent Technologies, Inc. | Push-mode latching relay |
US6740829B1 (en) | 2003-04-14 | 2004-05-25 | Agilent Technologies, Inc. | Insertion-type liquid metal latching relay |
US7070908B2 (en) | 2003-04-14 | 2006-07-04 | Agilent Technologies, Inc. | Feature formation in thick-film inks |
US6838959B2 (en) | 2003-04-14 | 2005-01-04 | Agilent Technologies, Inc. | Longitudinal electromagnetic latching relay |
US6841746B2 (en) | 2003-04-14 | 2005-01-11 | Agilent Technologies, Inc. | Bent switching fluid cavity |
US7071432B2 (en) | 2003-04-14 | 2006-07-04 | Agilent Technologies, Inc. | Reduction of oxides in a fluid-based switch |
US7048519B2 (en) | 2003-04-14 | 2006-05-23 | Agilent Technologies, Inc. | Closed-loop piezoelectric pump |
US20050034962A1 (en) * | 2003-04-14 | 2005-02-17 | Wong Marvin Glenn | Reducing oxides on a switching fluid in a fluid-based switch |
US6870111B2 (en) | 2003-04-14 | 2005-03-22 | Agilent Technologies, Inc. | Bending mode liquid metal switch |
US6872904B2 (en) | 2003-04-14 | 2005-03-29 | Agilent Technologies, Inc. | Fluid-based switch |
US6876132B2 (en) | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Method and structure for a solid slug caterpillar piezoelectric relay |
US6876131B2 (en) | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | High-frequency, liquid metal, latching relay with face contact |
US6876133B2 (en) | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Latching relay with switch bar |
US6879088B2 (en) | 2003-04-14 | 2005-04-12 | Agilent Technologies, Inc. | Insertion-type liquid metal latching relay array |
US6879089B2 (en) | 2003-04-14 | 2005-04-12 | Agilent Technologies, Inc. | Damped longitudinal mode optical latching relay |
US6882088B2 (en) | 2003-04-14 | 2005-04-19 | Agilent Technologies, Inc. | Bending-mode latching relay |
US6885133B2 (en) | 2003-04-14 | 2005-04-26 | Agilent Technologies, Inc. | High frequency bending-mode latching relay |
US6888977B2 (en) | 2003-04-14 | 2005-05-03 | Agilent Technologies, Inc. | Polymeric liquid metal optical switch |
US6891315B2 (en) | 2003-04-14 | 2005-05-10 | Agilent Technologies, Inc. | Shear mode liquid metal switch |
US6891116B2 (en) | 2003-04-14 | 2005-05-10 | Agilent Technologies, Inc. | Substrate with liquid electrode |
US6894424B2 (en) | 2003-04-14 | 2005-05-17 | Agilent Technologies, Inc. | High frequency push-mode latching relay |
US6894237B2 (en) | 2003-04-14 | 2005-05-17 | Agilent Technologies, Inc. | Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch |
US6774325B1 (en) | 2003-04-14 | 2004-08-10 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
US6900578B2 (en) | 2003-04-14 | 2005-05-31 | Agilent Technologies, Inc. | High frequency latching relay with bending switch bar |
US6903492B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Wetting finger latching piezoelectric relay |
US6903493B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Inserting-finger liquid metal relay |
US6903490B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Longitudinal mode optical latching relay |
US6903287B2 (en) | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Liquid metal optical relay |
US6803842B1 (en) | 2003-04-14 | 2004-10-12 | Agilent Technologies, Inc. | Longitudinal mode solid slug optical latching relay |
US6768068B1 (en) | 2003-04-14 | 2004-07-27 | Agilent Technologies, Inc. | Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch |
US6765161B1 (en) | 2003-04-14 | 2004-07-20 | Agilent Technologies, Inc. | Method and structure for a slug caterpillar piezoelectric latching reflective optical relay |
US6762378B1 (en) | 2003-04-14 | 2004-07-13 | Agilent Technologies, Inc. | Liquid metal, latching relay with face contact |
US6920259B2 (en) | 2003-04-14 | 2005-07-19 | Agilent Technologies, Inc. | Longitudinal electromagnetic latching optical relay |
US7012354B2 (en) | 2003-04-14 | 2006-03-14 | Agilent Technologies, Inc. | Method and structure for a pusher-mode piezoelectrically actuated liquid metal switch |
US6925223B2 (en) | 2003-04-14 | 2005-08-02 | Agilent Technologies, Inc. | Pressure actuated optical latching relay |
US6924443B2 (en) | 2003-04-14 | 2005-08-02 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
US20050263379A1 (en) * | 2003-04-14 | 2005-12-01 | John Ralph Lindsey | Reduction of oxides in a fluid-based switch |
US6956990B2 (en) | 2003-04-14 | 2005-10-18 | Agilent Technologies, Inc. | Reflecting wedge optical wavelength multiplexer/demultiplexer |
US6961487B2 (en) | 2003-04-14 | 2005-11-01 | Agilent Technologies, Inc. | Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch |
US6750413B1 (en) | 2003-04-25 | 2004-06-15 | Agilent Technologies, Inc. | Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate |
US6777630B1 (en) | 2003-04-30 | 2004-08-17 | Agilent Technologies, Inc. | Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates |
US6759610B1 (en) | 2003-06-05 | 2004-07-06 | Agilent Technologies, Inc. | Multi-layer assembly of stacked LIMMS devices with liquid metal vias |
US20040251117A1 (en) * | 2003-06-16 | 2004-12-16 | Wong Marvin Glenn | Suspended thin-film resistor |
US6833520B1 (en) | 2003-06-16 | 2004-12-21 | Agilent Technologies, Inc. | Suspended thin-film resistor |
US6759611B1 (en) | 2003-06-16 | 2004-07-06 | Agilent Technologies, Inc. | Fluid-based switches and methods for producing the same |
US6781074B1 (en) | 2003-07-30 | 2004-08-24 | Agilent Technologies, Inc. | Preventing corrosion degradation in a fluid-based switch |
US6787720B1 (en) | 2003-07-31 | 2004-09-07 | Agilent Technologies, Inc. | Gettering agent and method to prevent corrosion in a fluid switch |
US20110103415A1 (en) * | 2009-11-03 | 2011-05-05 | Alcatel-Lucent Usa, Incorporated | Optical device for wavelength locking |
US8532441B2 (en) | 2009-11-03 | 2013-09-10 | Alcatel Lucent | Optical device for wavelength locking |
US9057839B2 (en) | 2009-11-03 | 2015-06-16 | Alcatel Lucent | Method of using an optical device for wavelength locking |
US20120087623A1 (en) * | 2010-10-07 | 2012-04-12 | Alcatel-Lucent Usa Inc. | Optical assembly for a wdm receiver or transmitter |
US8639070B2 (en) * | 2010-10-07 | 2014-01-28 | Alcatel Lucent | Optical assembly for a WDM receiver or transmitter |
US8787775B2 (en) | 2010-10-07 | 2014-07-22 | Alcatel Lucent | Opto-electronic assembly for a line card |
US9008515B2 (en) | 2010-10-07 | 2015-04-14 | Alcatel Lucent | Direct laser modulation |
Also Published As
Publication number | Publication date |
---|---|
US6807330B2 (en) | 2004-10-19 |
JP2002207181A (en) | 2002-07-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6807330B2 (en) | Optical switch using an optical waveguide | |
JP3302458B2 (en) | Integrated optical device and manufacturing method | |
US5723176A (en) | Method and apparatus for making optical components by direct dispensing of curable liquid | |
US6449404B1 (en) | Optical switch | |
US6571035B1 (en) | Fiber optical switches based on optical evanescent coupling between two fibers | |
US7561765B2 (en) | Optical integrated circuit and optical integrated circuit module | |
KR101464816B1 (en) | Optical beam couplers and splitters | |
JPH11287962A (en) | Switching element | |
CA2199895A1 (en) | Photoplethysmographic instrument having an integrated multimode optical coupler device | |
US6438291B1 (en) | Coupling of light into a monolithic waveguide device | |
JP5983479B2 (en) | Optical element | |
KR100558438B1 (en) | Optical Switch manufacturing method | |
JPH05203830A (en) | Optical multiplexer demultiplexer | |
US7103244B2 (en) | Miniaturized reconfigurable DWDM add/drop system for optical communication system | |
JP5104568B2 (en) | Light guide plate and optical module | |
JP3788397B2 (en) | Optical waveguide device and communication device using optical waveguide device | |
JPH10300956A (en) | Optical branching waveguide and optical waveguide circuit | |
US6563965B1 (en) | Analog optical switch using an integrated Mach-Zehnder interferometer having a moveable phase shifter | |
JP2000193838A (en) | Optical waveguide structure | |
CA2116875C (en) | Method and apparatus for making optical components by direct dispensing of curable liquid | |
US20030198438A1 (en) | Tunable add/drop multiplexer | |
JP2005249966A (en) | Optical member, its manufacturing method, and optical module | |
WO2004068206A1 (en) | Optical waveguide and optical transmitting/receiving module | |
JP2008026555A (en) | Optical waveguide | |
JPH11190809A (en) | Multiplexer demultiplexer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: MINOLTA CO., LTD., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:NISHIDA, NAOKI;HATANO, TAKUJI;TAKAHARA, KOJI;AND OTHERS;REEL/FRAME:013004/0351;SIGNING DATES FROM 20020522 TO 20020601 |
|
FEPP | Fee payment procedure |
Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
FPAY | Fee payment |
Year of fee payment: 8 |
|
REMI | Maintenance fee reminder mailed | ||
LAPS | Lapse for failure to pay maintenance fees | ||
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
|
FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20161019 |