US20020180857A1 - Fluid-dispensing chip - Google Patents
Fluid-dispensing chip Download PDFInfo
- Publication number
- US20020180857A1 US20020180857A1 US10/184,883 US18488302A US2002180857A1 US 20020180857 A1 US20020180857 A1 US 20020180857A1 US 18488302 A US18488302 A US 18488302A US 2002180857 A1 US2002180857 A1 US 2002180857A1
- Authority
- US
- United States
- Prior art keywords
- fluid
- planar electrode
- nozzle chamber
- dispensing chip
- planar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000004891 communication Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 6
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 238000010276 construction Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 238000007641 inkjet printing Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 238000007639 printing Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 235000009508 confectionery Nutrition 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 101150048848 ART10 gene Proteins 0.000 description 1
- 102100041023 Coronin-2A Human genes 0.000 description 1
- 101000748858 Homo sapiens Coronin-2A Proteins 0.000 description 1
- 101001106523 Homo sapiens Regulator of G-protein signaling 1 Proteins 0.000 description 1
- 102100021269 Regulator of G-protein signaling 1 Human genes 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 238000002032 lab-on-a-chip Methods 0.000 description 1
- 238000007648 laser printing Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/222—Studio circuitry; Studio devices; Studio equipment
- H04N5/262—Studio circuits, e.g. for mixing, switching-over, change of character of image, other special effects ; Cameras specially adapted for the electronic generation of special effects
- H04N5/2628—Alteration of picture size, shape, position or orientation, e.g. zooming, rotation, rolling, perspective, translation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17503—Ink cartridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17503—Ink cartridges
- B41J2/17513—Inner structure
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F21/70—Protecting specific internal or peripheral components, in which the protection of a component leads to protection of the entire computer
- G06F21/78—Protecting specific internal or peripheral components, in which the protection of a component leads to protection of the entire computer to assure secure storage of data
- G06F21/79—Protecting specific internal or peripheral components, in which the protection of a component leads to protection of the entire computer to assure secure storage of data in semiconductor storage media, e.g. directly-addressable memories
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F21/70—Protecting specific internal or peripheral components, in which the protection of a component leads to protection of the entire computer
- G06F21/86—Secure or tamper-resistant housings
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K1/00—Methods or arrangements for marking the record carrier in digital fashion
- G06K1/12—Methods or arrangements for marking the record carrier in digital fashion otherwise than by punching
- G06K1/121—Methods or arrangements for marking the record carrier in digital fashion otherwise than by punching by printing code marks
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/06009—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with optically detectable marking
- G06K19/06037—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with optically detectable marking multi-dimensional coding
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
- G06K19/073—Special arrangements for circuits, e.g. for protecting identification code in memory
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
- G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
- G06K7/14—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation using light without selection of wavelength, e.g. sensing reflected white light
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
- G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
- G06K7/14—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation using light without selection of wavelength, e.g. sensing reflected white light
- G06K7/1404—Methods for optical code recognition
- G06K7/1408—Methods for optical code recognition the method being specifically adapted for the type of code
- G06K7/1417—2D bar codes
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/21—Intermediate information storage
- H04N1/2104—Intermediate information storage for one or a few pictures
- H04N1/2112—Intermediate information storage for one or a few pictures using still video cameras
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/21—Intermediate information storage
- H04N1/2104—Intermediate information storage for one or a few pictures
- H04N1/2112—Intermediate information storage for one or a few pictures using still video cameras
- H04N1/2154—Intermediate information storage for one or a few pictures using still video cameras the still video camera incorporating a hardcopy reproducing device, e.g. a printer
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16585—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles for paper-width or non-reciprocating print heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17596—Ink pumps, ink valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2002/041—Electromagnetic transducer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/21—Line printing
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2221/00—Indexing scheme relating to security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F2221/21—Indexing scheme relating to G06F21/00 and subgroups addressing additional information or applications relating to security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F2221/2129—Authenticate client device independently of the user
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N2101/00—Still video cameras
Definitions
- the present invention relates to fluid dispensing.
- this invention discloses a fluid-dispensing chip.
- This invention is a development of a printing technology that has been developed by the Applicant. This development can be traced by considering the referenced patents/patent applications set out above.
- Ink Jet printers themselves come in many different types.
- the utilisation of a continuous stream of ink in ink jet printing appears to date back to at least 1929 wherein U.S. Pat. No. 1941001 by Hansell discloses a simple form of continuous stream electro-static ink jet printing.
- U.S. Pat. 3596275 by Sweet also discloses a process of continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also U.S. Pat. No. 3373437 by Sweet et al)
- Piezoelectric ink jet printers are also one form of commonly utilized ink jet printing device. Piezoelectric systems are disclosed by Kyser et al. in U.S. Pat. No. 3946398 (1970) which utilises a diaphragm mode of operation, by Zolten in U.S. Pat. 3683212 (1970) which discloses a squeeze mode of operation of a piezoelectric crystal, Stemme in U.S. Pat. No. 3747120 (1972) discloses a bend mode of piezo-electric operation, Howkins in U.S. Pat. No. 4459601 discloses a Piezoelectric push mode actuation of the ink jet stream and Fischbeck in U.S. Pat. No. 4584590 which discloses a sheer mode type of piezoelectric transducer element.
- thermal ink jet printing has become an extremely popular form of ink jet printing.
- the ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979) and Vaught et al in U.S. Pat. No. 4490728. Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media.
- Manufacturers such as Canon and Hewlett Packard manufacture printing devices utilising the electro-thermal actuator.
- Applicant has developed an ink jet printing technology that uses micro-electromechanical components to achieve the ejection of ink.
- micro-electromechanical components allows printhead chips to have a large number of densely packed nozzle arrangements without the problems associated with heat build-up.
- Applicant envisages that this technology can be used to dispense fluid. This invention is therefore intended to be a simple development of the technology that has already been the subject of many patent applications filed by the Applicant.
- a fluid-dispensing chip that comprises
- nozzle chamber walls and a roof wall that define a nozzle chamber and a fluid ejection port in the roof wall
- an electrostatic actuator that comprises
- a first planar electrode positioned on the wafer substrate
- a second planar electrode that is positioned in the nozzle chamber and is displaceable towards and away from the first planar electrode to eject fluid from the fluid ejection port, the first planar electrode and the second planar electrode being connected to the drive circuitry so that a potential difference can be applied between the planar electrodes to displace the second planar electrode towards and away from the first planar electrode,
- At least one of the nozzle chamber walls and the wafer substrate defining a fluid inlet in fluid communication with the nozzle chamber and a fluid supply source.
- Said first planar electrode and said second planar electrode may define an air gap between the first and second planar electrodes. At least one of the nozzle chamber walls and the substrate may define an air path in fluid communication with an external atmosphere so that air flows into and out of the air gap when the second planar electrode is displaced towards and away from the first planar electrode.
- the electrodes may have facing surfaces that are coated with a material having a low coefficient of friction to reduce possibilities of stiction.
- Said material may comprise substantially polytetrafluoroethylene.
- one of the first and second planar electrodes may have at least one projection that extends towards the other electrode to ensure that the electrodes do not touch when the second planar electrode is displaced towards the first planar electrode.
- Said second planar electrode may include a layer of stiffening material for maintaining a stiffness of the second planar electrode.
- the stiffening material may be silicon nitride.
- the roof wall may define a plurality of etchant holes to facilitate etching of sacrificial layers during construction.
- FIG. 1 is a sectioned side view of one embodiment of a fluid-dispensing chip of the invention, in an operative condition.
- FIG. 2 is a sectioned side view of the fluid-dispensing chip of FIG. 1 in a quiescent condition.
- FIG. 3 is a perspective cross-sectional view of another embodiment of the fluid-dispensing chip of the invention.
- FIG. 4 is a close-up perspective cross-sectional view (portion A of FIG. 3), of the fluid-dispensing chip of FIG. 3.
- FIG. 5 is an exploded perspective view illustrating the construction of the fluid-dispensing chip of FIG. 3.
- reference numeral 10 generally indicates a sectioned side view of one embodiment of a fluid-dispensing chip of the invention.
- the fluid-dispensing chip may include a silicon wafer substrate 12 .
- a drive circuitry layer 14 is positioned on the wafer substrate 12 .
- the drive circuitry layer 14 is in the form of a CMOS two-level metal layer that includes the drive and control circuitry for the fluid-dispensing chip 10 .
- a passivation layer 16 of silicon nitride is positioned on the drive circuitry layer 14 to protect the drive circuitry layer 14 .
- a first planar electrode 18 is embedded in the layer 16 .
- the first planar electrode 18 is of aluminum and is connected to the drive circuitry layer 14 .
- the fluid-dispensing chip 10 includes a nozzle chamber wall 19 and a roof wall 20 that define a nozzle chamber 22 .
- the roof wall 20 defines a fluid ejection port 44 .
- a fluid-ejecting member 28 is positioned in the nozzle chamber 22 .
- the fluid-ejecting member 28 is planar and is aligned with and parallel to the first planar electrode 18 .
- the fluid-ejecting member 28 is positioned on a support formation 34 that extends from the passivation layer 16 .
- the support formation 34 is dimensioned so that the fluid-ejecting member 28 is spaced a suitable distance from the first electrode 18 .
- the support formation 34 is configured so that an air gap 40 is encapsulated between the fluid-ejecting member 28 and the first electrode 18 .
- the fluid-ejecting member 28 includes a second planar electrode 24 that is positioned in the nozzle chamber 22 .
- the second planar electrode 24 is also of aluminum and is also connected to the drive circuitry layer 14 .
- the drive circuitry layer 14 is connected to each of the electrodes 18 , 24 so that a potential can be set up between the electrodes 18 , 24 so that they are attracted to one another.
- a layer 26 of silicon nitride is positioned on the electrode 24 to impart a resilient flexibility to the fluid-ejecting member 28 .
- a layer 32 of polytetrafluoroethylene (PTFE) is positioned on the first electrode 18 .
- a layer 36 of PTFE is positioned on the second electrode 24 , intermediate the electrodes 18 , 24 . This ensures that the electrodes 18 , 24 do not stick to one another when the fluid-ejecting member 28 is deflected towards the first electrode 18 .
- a projection 38 is positioned on the fluid-ejecting member 28 . The projection 38 bears against the layer 32 to ensure that there is no contact between the layers 32 , 36 .
- the nozzle chamber wall 19 defines fluid inlet openings 30 that are in fluid communication with a fluid supply so that the nozzle chamber 22 can be supplied with fluid. Fluid flows into a space 41 defined by the roof wall 20 , the nozzle chamber wall 19 , the fluid-ejecting member 28 and the support formation 34 . It will be appreciated that this occurs when the fluid-ejecting member 28 is drawn towards the first electrode 18 . When the potential is reversed, the fluid-ejecting member 28 is urged away from the first electrode 18 so that a drop 42 of fluid is ejected from the fluid ejection port 44 .
- the fluid-ejecting member 28 could have sufficient resilience so that a reversal of potential is not necessary. In this case, release of elastic energy as the fluid-ejecting member 28 returns to its quiescent condition ensures the ejection of the fluid drop 42 .
- the roof wall 20 defines a rim 46 about the fluid ejection port 44 .
- reference numeral 50 generally indicates another embodiment of a fluid-dispensing chip of the invention.
- like reference numerals refer to like parts, unless otherwise specified.
- the fluid-ejecting member 28 has a peripheral portion 52 that is positioned between the nozzle chamber wall 19 and the layer 26 of silicon nitride.
- a corrugated annular portion 54 is positioned adjacent to the peripheral portion 52 .
- a fluid-ejecting portion 56 defines a remainder of the fluid-ejecting member 28 .
- the electrodes 18 , 24 and their respective PTFE layers 32 , 36 are dimensioned to define the air gap 40 .
- the corrugated portion 54 is configured to expand when the second electrode 24 is displaced towards the first electrode 18 .
- the silicon nitride layer 26 imparts a resilient flexibility to the corrugated portion 54 .
- the second electrode 24 returns to a quiescent condition when the electrical potential is removed.
- the nozzle chamber wall 19 is shaped to define four radially spaced fluid inlet supply channels 58 that are in fluid communication with the space 41 . These allow fluid to flow into the space 41 when the second electrode 24 is drawn towards the first electrode 18 .
- the nozzle chamber wall 19 defines air spaces 60 that are in fluid communication with the air gap 40 . These allow the passage of air when the second electrode 24 moves towards and away from the first electrode 18 .
- the roof wall 20 has a plurality of etchant openings 62 defined therein to facilitate the etching of sacrificial material used in the fabrication of the chip 50 .
- the etchant openings 62 are small enough to inhibit the passage of fluid as a result of surface tension effects.
- the fluid-dispensing chip 10 , 50 is essentially a micro-electromechanical systems (MEMS) device.
- MEMS micro-electromechanical systems
- Applicant envisages that the fluid-dispensing chip 10 , 50 will be particularly suited for lab-on-a-chip applications. It can also be applied to DNA/RNA arrays, protein chips and sensing and dosing. The fluid-dispensing chip 10 , 50 could also be used for drug delivery systems.
Abstract
Description
- The following Australian provisional patent applications are hereby incorporated by cross-reference. For the purposes of location and identification, US patent applications identified by their US patent application serial numbers (USSN) are listed alongside the Australian applications from which the US patent applications claim the right of priority.
US Patent Application Cross-Referenced (Claiming Right of Priority Australian from Australian Provisional Patent No. Provisional Application) Docket No. PO7991 09/113,060 ART01 PO8505 09/113,070 ART02 PO7988 09/113,073 ARTO3 PO9395 09/112,748 ART04 PO8017 09/112,747 ART06 PO8014 09/112,776 ART07 PO8025 09/112,750 ART08 PO8032 09/112,746 ART09 PO7999 09/112,743 ART10 PO7998 09/112,742 ART11 PO8031 09/112,741 ART12 PO8030 09/112,740 ART13 PO7997 09/112,739 ART15 PO7979 09/113,053 ART16 PO8015 09/112,738 ART17 PO7978 09/113,067 ART18 PO7982 09/113,063 ART19 PO7989 09/113,069 ART20 PO8019 09/112,744 ART21 PO7980 09/113,058 ART22 PO8018 09/112,777 ART24 PO7938 09/113,224 ART25 PO8016 09/112,804 ART26 PO8024 09/112,805 ART27 PO7940 09/113,072 ART28 PO7939 09/112,785 ART29 PO8501 09/112,797 ART30 PO8500 09/112,796 ART31 PO7987 09/113,071 ART32 PO8022 09/112,824 ART33 PO8497 09/113,090 ART34 PO8020 09/112,823 ART38 PO8023 09/113,222 ART39 PO8504 09/112,786 ART42 PO8000 09/113,051 ART43 PO7977 09/112,782 ART44 PO7934 09/113,056 ART45 PO799O 09/113,059 ART46 PO8499 09/113,091 ART47 PO8502 09/112,753 ART48 PO7981 09/113,055 ART50 PO7986 09/113,057 ART51 PO7983 09/113,054 ART52 PO8026 09/112,752 ART53 PO8027 09/112,759 ART54 PO8028 09/112,757 ART56 PO9394 09/112,758 ART57 PO9396 09/113,107 ART58 PO9397 09/112,829 ART59 PO9398 09/112,792 ART60 PO9399 09/112,791 ART61 PO9400 09/112,790 ART62 PO9401 09/112,789 ART63 PO9402 09/112,788 ART64 PO9403 09/112,795 ART65 PO9405 09/112,749 ART66 PPO959 09/112,784 ART68 PP1397 09/112,783 ART69 PP2370 09/112,781 DOT01 PP2371 09/113,052 DOT02 PO8003 09/112,834 Fluid01 PO8005 09/113,103 Fluid02 PO9404 09/113,101 Fluid03 PO8066 09/112,751 IJ01 PO8072 09/112,787 IJ02 PO8040 09/112,802 IJ03 PO8071 09/112,803 IJ04 PO8047 09/113,097 IJ05 PO8035 09/113,099 IJ06 PO8044 09/113,084 IJ07 PO8063 09/113,066 IJ08 PO8057 09/112,778 IJ09 PO8056 09/112,779 IJ10 PO8069 09/113,077 IJ11 PO8049 09/113,061 IJ12 PO8036 09/112,818 IJ13 PO8048 09/112,816 IJ14 PO8070 09/112,772 IJ15 PO8067 09/112,819 IJ16 PO8001 09/112,815 IJ17 PO8038 09/113,096 IJ18 PO8033 09/113,068 IJ19 PO8002 09/113,095 IJ20 PO8068 09/112,808 IJ21 PO8062 09/112,809 IJ22 PO8034 09/112,780 IJ23 PO8039 09/113,083 IJ24 PO8041 09/113,121 IJ25 PO8004 09/113,122 IJ26 PO8037 09/112,793 IJ27 PO8043 09/112,794 IJ28 PO8042 09/113,128 IJ29 PO8064 09/113,127 IJ30 PO9389 09/112,756 IJ31 PO9391 09/112,755 IJ32 PP0888 09/112,754 IJ33 PP0891 09/112,811 IJ34 PP0890 09/112,812 IJ35 PP0873 09/112,813 IJ36 PP0993 09/112,814 IJ37 PP0890 09/112,764 IJ38 PP1398 09/112,765 IJ39 PP2592 09/112,767 IJ40 PP2593 09/112,768 IJ41 PP3991 09/112,807 IJ42 PP3987 09/112,806 IJ43 PP3985 09/112,820 IJ44 PP3983 09/112,821 IJ45 PO7935 09/112,822 IJM01 PO7936 09/112,825 IJM02 PO7937 09/112,826 IJM03 PO8061 09/112,827 IJM04 PO8054 09/112,828 IJM05 PO8065 09/113,111 IJM06 PO8055 09/113,108 IJM07 PO8053 09/113,109 IJM08 PO8078 09/113,123 IJM09 PO7933 09/113,114 IJM10 PO7950 09/113,115 IJM11 PO7949 09/113,129 IJM12 PO8060 09/113,124 IJM13 PO8059 09/113,125 IJM14 PO8073 09/113,126 IJM15 PO8076 09/113,119 IJM16 PO8075 09/113,120 IJM17 PO8079 09/113,221 IJM18 PO8050 09/113,116 IJM19 PO8052 09/113,118 IJM20 PO7948 09/113,117 IJM21 PO7951 09/113,113 IJM22 PO8074 09/113,130 IJM23 PO7941 09/113,110 IJM24 PO8077 09/113,112 IJM25 PO8058 09/113,087 IJM26 PO8051 09/113,074 IJM27 PO8045 09/113,089 IJM28 PO7952 09/113,088 IJM29 PO8046 09/112,771 IJM30 PO9390 09/112,769 IJM31 PO9392 09/112,770 IJM32 PP0889 09/112,798 IJM35 PP0887 09/112,801 IJM36 PP0882 09/112,800 IJM37 PP0874 09/112,799 IJM38 PP1396 09/113,098 IJM39 PP3989 09/112,833 IJM40 PP2591 09/112,832 IJM41 PP3990 09/112,831 IJM42 PP3986 09/112,830 IJM43 PP3984 09/112,836 IJM44 PP3982 09/112,835 IJM45 PP0895 09/113,102 IR01 PP0870 09/113,106 IR02 PP0869 09/113,105 IR04 PP0887 09/113,104 IR05 PP0885 09/112,810 IR06 PP0884 09/112,766 IR10 PP0886 09/113,085 IR12 PP0871 09/113,086 IR13 PP0876 09/113,094 IR14 PP0877 09/112,760 IR16 PP0878 09/112,773 IR17 PP0879 09/112,774 IR18 PP0883 09/112,775 IR19 PP0880 09/112,745 IR20 PP0881 09/113,092 IR21 PO8006 09/113,100 MEMS02 PO8007 09/113,093 MEMS03 PO8008 09/113,062 MEMS04 PO8010 09/113,064 MEMS05 PO8011 09/113,082 MEMS06 PO7947 09/113,081 MEMS07 PO7944 09/113,080 MEMS09 PO7946 09/113,079 MEMS10 PO9393 09/113,065 MEMS11 PP0875 09/113,078 MEMS12 PP0894 09/113,075 MEMS13 - Not applicable.
- The present invention relates to fluid dispensing. In particular, this invention discloses a fluid-dispensing chip.
- This invention is a development of a printing technology that has been developed by the Applicant. This development can be traced by considering the referenced patents/patent applications set out above.
- Many different types of printing have been invented, a large number of which are presently in use. The known forms of printing have a variety of methods for marking the print media with a relevant marking media. Commonly used forms of printing include offset printing, laser printing and copying devices, dot matrix type impact printers, thermal paper printers, film recorders, thermal wax printers, dye sublimation printers and ink jet printers both of the drop on demand and continuous flow type. Each type of printer has its own advantages and problems when considering cost, speed, quality, reliability, simplicity of construction and operation etc.
- In recent years, the field of ink jet printing, wherein each individual pixel of ink is derived from one or more ink nozzles has become increasingly popular primarily due to its inexpensive and versatile nature.
- Many different techniques of ink jet printing have been invented. For a survey of the field, reference is made to an article by J Moore, “Non-Impact Printing: Introduction and Historical Perspective”, Output Hard Copy Devices, Editors R Dubeck and S Sherr, pages 207-220 (1988).
- Ink Jet printers themselves come in many different types. The utilisation of a continuous stream of ink in ink jet printing appears to date back to at least 1929 wherein U.S. Pat. No. 1941001 by Hansell discloses a simple form of continuous stream electro-static ink jet printing.
- U.S. Pat. 3596275 by Sweet also discloses a process of continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also U.S. Pat. No. 3373437 by Sweet et al)
- Piezoelectric ink jet printers are also one form of commonly utilized ink jet printing device. Piezoelectric systems are disclosed by Kyser et al. in U.S. Pat. No. 3946398 (1970) which utilises a diaphragm mode of operation, by Zolten in U.S. Pat. 3683212 (1970) which discloses a squeeze mode of operation of a piezoelectric crystal, Stemme in U.S. Pat. No. 3747120 (1972) discloses a bend mode of piezo-electric operation, Howkins in U.S. Pat. No. 4459601 discloses a Piezoelectric push mode actuation of the ink jet stream and Fischbeck in U.S. Pat. No. 4584590 which discloses a sheer mode type of piezoelectric transducer element.
- Recently, thermal ink jet printing has become an extremely popular form of ink jet printing. The ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979) and Vaught et al in U.S. Pat. No. 4490728. Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media. Manufacturers such as Canon and Hewlett Packard manufacture printing devices utilising the electro-thermal actuator.
- As can be seen in the above referenced matters, Applicant has developed an ink jet printing technology that uses micro-electromechanical components to achieve the ejection of ink. The use of micro-electromechanical components allows printhead chips to have a large number of densely packed nozzle arrangements without the problems associated with heat build-up.
- Applicant envisages that this technology can be used to dispense fluid. This invention is therefore intended to be a simple development of the technology that has already been the subject of many patent applications filed by the Applicant.
- According to the invention, there is provided a fluid-dispensing chip that comprises
- a wafer substrate that incorporates drive circuitry, and
- a nozzle assembly positioned on the wafer substrate, the nozzle assembly comprising
- nozzle chamber walls and a roof wall that define a nozzle chamber and a fluid ejection port in the roof wall, and
- an electrostatic actuator that comprises
- a first planar electrode positioned on the wafer substrate, and
- a second planar electrode that is positioned in the nozzle chamber and is displaceable towards and away from the first planar electrode to eject fluid from the fluid ejection port, the first planar electrode and the second planar electrode being connected to the drive circuitry so that a potential difference can be applied between the planar electrodes to displace the second planar electrode towards and away from the first planar electrode,
- at least one of the nozzle chamber walls and the wafer substrate defining a fluid inlet in fluid communication with the nozzle chamber and a fluid supply source.
- Said first planar electrode and said second planar electrode may define an air gap between the first and second planar electrodes. At least one of the nozzle chamber walls and the substrate may define an air path in fluid communication with an external atmosphere so that air flows into and out of the air gap when the second planar electrode is displaced towards and away from the first planar electrode.
- The electrodes may have facing surfaces that are coated with a material having a low coefficient of friction to reduce possibilities of stiction. Said material may comprise substantially polytetrafluoroethylene.
- Instead, or in addition, one of the first and second planar electrodes may have at least one projection that extends towards the other electrode to ensure that the electrodes do not touch when the second planar electrode is displaced towards the first planar electrode.
- Said second planar electrode may include a layer of stiffening material for maintaining a stiffness of the second planar electrode. The stiffening material may be silicon nitride.
- The roof wall may define a plurality of etchant holes to facilitate etching of sacrificial layers during construction.
- Notwithstanding any other forms which may fall within the scope of the present invention, preferred forms of the invention will now be described, by way of example only, with reference to the accompanying drawings, in which:
- FIG. 1 is a sectioned side view of one embodiment of a fluid-dispensing chip of the invention, in an operative condition.
- FIG. 2 is a sectioned side view of the fluid-dispensing chip of FIG. 1 in a quiescent condition.
- FIG. 3 is a perspective cross-sectional view of another embodiment of the fluid-dispensing chip of the invention.
- FIG. 4 is a close-up perspective cross-sectional view (portion A of FIG. 3), of the fluid-dispensing chip of FIG. 3.
- FIG. 5 is an exploded perspective view illustrating the construction of the fluid-dispensing chip of FIG. 3.
- In FIGS. 1 and 2,
reference numeral 10 generally indicates a sectioned side view of one embodiment of a fluid-dispensing chip of the invention. - The fluid-dispensing chip may include a
silicon wafer substrate 12. Adrive circuitry layer 14 is positioned on thewafer substrate 12. Thedrive circuitry layer 14 is in the form of a CMOS two-level metal layer that includes the drive and control circuitry for the fluid-dispensingchip 10. - A
passivation layer 16 of silicon nitride is positioned on thedrive circuitry layer 14 to protect thedrive circuitry layer 14. A firstplanar electrode 18 is embedded in thelayer 16. The firstplanar electrode 18 is of aluminum and is connected to thedrive circuitry layer 14. - The fluid-dispensing
chip 10 includes anozzle chamber wall 19 and aroof wall 20 that define anozzle chamber 22. Theroof wall 20 defines afluid ejection port 44. A fluid-ejectingmember 28 is positioned in thenozzle chamber 22. The fluid-ejectingmember 28 is planar and is aligned with and parallel to the firstplanar electrode 18. - The fluid-ejecting
member 28 is positioned on asupport formation 34 that extends from thepassivation layer 16. Thesupport formation 34 is dimensioned so that the fluid-ejectingmember 28 is spaced a suitable distance from thefirst electrode 18. Thesupport formation 34 is configured so that anair gap 40 is encapsulated between the fluid-ejectingmember 28 and thefirst electrode 18. - The fluid-ejecting
member 28 includes a secondplanar electrode 24 that is positioned in thenozzle chamber 22. The secondplanar electrode 24 is also of aluminum and is also connected to thedrive circuitry layer 14. Thedrive circuitry layer 14 is connected to each of theelectrodes electrodes layer 26 of silicon nitride is positioned on theelectrode 24 to impart a resilient flexibility to the fluid-ejectingmember 28. Thus, when a potential is set up between theelectrodes member 28 is deflected towards thefirst electrode 18, as shown in FIG. 1. When the potential is removed, thefirst electrode 18 returns to a quiescent position as shown in FIG. 2. - A
layer 32 of polytetrafluoroethylene (PTFE) is positioned on thefirst electrode 18. Alayer 36 of PTFE is positioned on thesecond electrode 24, intermediate theelectrodes electrodes member 28 is deflected towards thefirst electrode 18. In order further to prevent stiction between theelectrodes projection 38 is positioned on the fluid-ejectingmember 28. Theprojection 38 bears against thelayer 32 to ensure that there is no contact between thelayers - The
nozzle chamber wall 19 definesfluid inlet openings 30 that are in fluid communication with a fluid supply so that thenozzle chamber 22 can be supplied with fluid. Fluid flows into aspace 41 defined by theroof wall 20, thenozzle chamber wall 19, the fluid-ejectingmember 28 and thesupport formation 34. It will be appreciated that this occurs when the fluid-ejectingmember 28 is drawn towards thefirst electrode 18. When the potential is reversed, the fluid-ejectingmember 28 is urged away from thefirst electrode 18 so that adrop 42 of fluid is ejected from thefluid ejection port 44. The fluid-ejectingmember 28 could have sufficient resilience so that a reversal of potential is not necessary. In this case, release of elastic energy as the fluid-ejectingmember 28 returns to its quiescent condition ensures the ejection of thefluid drop 42. - The
roof wall 20 defines arim 46 about thefluid ejection port 44. - In FIGS.3 to 5,
reference numeral 50 generally indicates another embodiment of a fluid-dispensing chip of the invention. With reference to FIGS. 1 and 2, like reference numerals refer to like parts, unless otherwise specified. - The fluid-ejecting
member 28 has aperipheral portion 52 that is positioned between thenozzle chamber wall 19 and thelayer 26 of silicon nitride. A corrugatedannular portion 54 is positioned adjacent to theperipheral portion 52. A fluid-ejectingportion 56 defines a remainder of the fluid-ejectingmember 28. - The
electrodes air gap 40. - The corrugated
portion 54 is configured to expand when thesecond electrode 24 is displaced towards thefirst electrode 18. Thesilicon nitride layer 26 imparts a resilient flexibility to thecorrugated portion 54. Thus, thesecond electrode 24 returns to a quiescent condition when the electrical potential is removed. - The
nozzle chamber wall 19 is shaped to define four radially spaced fluidinlet supply channels 58 that are in fluid communication with thespace 41. These allow fluid to flow into thespace 41 when thesecond electrode 24 is drawn towards thefirst electrode 18. - The
nozzle chamber wall 19 definesair spaces 60 that are in fluid communication with theair gap 40. These allow the passage of air when thesecond electrode 24 moves towards and away from thefirst electrode 18. - The
roof wall 20 has a plurality ofetchant openings 62 defined therein to facilitate the etching of sacrificial material used in the fabrication of thechip 50. Theetchant openings 62 are small enough to inhibit the passage of fluid as a result of surface tension effects. - It is important to note that the fluid-dispensing
chip - Applicant envisages that the fluid-dispensing
chip chip - Numerous variations and/or modifications may be made to the present invention as shown in the preferred embodiment without departing from the spirit or scope of the invention as broadly described. The preferred embodiment is, therefore, to be considered in all respects to be illustrative and not restrictive.
Claims (9)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/184,883 US6820968B2 (en) | 1997-07-15 | 2002-07-01 | Fluid-dispensing chip |
US10/957,718 US7140723B2 (en) | 1997-07-15 | 2004-10-05 | Micro-electromechanical device for dispensing fluid |
US11/583,826 US7695108B2 (en) | 1997-07-15 | 2006-10-20 | Fluid-ejecting integrated circuit utilizing electromagnetic displacement |
US12/750,578 US7988262B2 (en) | 1997-07-15 | 2010-03-30 | Fluid-ejecting integrated circuit utilizing electromagnetic displacement |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AUPO7991A AUPO799197A0 (en) | 1997-07-15 | 1997-07-15 | Image processing method and apparatus (ART01) |
AUPO7991 | 1997-07-15 | ||
AUPO7988 | 1997-07-15 | ||
AUPO7988A AUPO798897A0 (en) | 1997-07-15 | 1997-07-15 | Image processing method and apparatus (ART02) |
US09/113,070 US6476863B1 (en) | 1997-07-15 | 1998-07-10 | Image transformation means including user interface |
US10/184,883 US6820968B2 (en) | 1997-07-15 | 2002-07-01 | Fluid-dispensing chip |
Related Parent Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/113,070 Continuation US6476863B1 (en) | 1997-07-15 | 1998-07-10 | Image transformation means including user interface |
US09/113,070 Continuation-In-Part US6476863B1 (en) | 1997-07-15 | 1998-07-10 | Image transformation means including user interface |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/957,718 Continuation US7140723B2 (en) | 1997-07-15 | 2004-10-05 | Micro-electromechanical device for dispensing fluid |
Publications (2)
Publication Number | Publication Date |
---|---|
US20020180857A1 true US20020180857A1 (en) | 2002-12-05 |
US6820968B2 US6820968B2 (en) | 2004-11-23 |
Family
ID=27158006
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/184,883 Expired - Fee Related US6820968B2 (en) | 1997-07-15 | 2002-07-01 | Fluid-dispensing chip |
US10/957,718 Expired - Fee Related US7140723B2 (en) | 1997-07-15 | 2004-10-05 | Micro-electromechanical device for dispensing fluid |
US11/583,826 Expired - Fee Related US7695108B2 (en) | 1997-07-15 | 2006-10-20 | Fluid-ejecting integrated circuit utilizing electromagnetic displacement |
US12/750,578 Expired - Fee Related US7988262B2 (en) | 1997-07-15 | 2010-03-30 | Fluid-ejecting integrated circuit utilizing electromagnetic displacement |
Family Applications After (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/957,718 Expired - Fee Related US7140723B2 (en) | 1997-07-15 | 2004-10-05 | Micro-electromechanical device for dispensing fluid |
US11/583,826 Expired - Fee Related US7695108B2 (en) | 1997-07-15 | 2006-10-20 | Fluid-ejecting integrated circuit utilizing electromagnetic displacement |
US12/750,578 Expired - Fee Related US7988262B2 (en) | 1997-07-15 | 2010-03-30 | Fluid-ejecting integrated circuit utilizing electromagnetic displacement |
Country Status (1)
Country | Link |
---|---|
US (4) | US6820968B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050134644A1 (en) * | 2003-12-22 | 2005-06-23 | Rolltronics Corporation | Electrostatic printers using micro electro-mechanical switching elements |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6786420B1 (en) | 1997-07-15 | 2004-09-07 | Silverbrook Research Pty. Ltd. | Data distribution mechanism in the form of ink dots on cards |
US6618117B2 (en) | 1997-07-12 | 2003-09-09 | Silverbrook Research Pty Ltd | Image sensing apparatus including a microcontroller |
US6879341B1 (en) | 1997-07-15 | 2005-04-12 | Silverbrook Research Pty Ltd | Digital camera system containing a VLIW vector processor |
US7527357B2 (en) | 1997-07-15 | 2009-05-05 | Silverbrook Research Pty Ltd | Inkjet nozzle array with individual feed channel for each nozzle |
US6985207B2 (en) | 1997-07-15 | 2006-01-10 | Silverbrook Research Pty Ltd | Photographic prints having magnetically recordable media |
US7410250B2 (en) * | 1997-07-15 | 2008-08-12 | Silverbrook Research Pty Ltd | Inkjet nozzle with supply duct dimensioned for viscous damping |
US6624848B1 (en) | 1997-07-15 | 2003-09-23 | Silverbrook Research Pty Ltd | Cascading image modification using multiple digital cameras incorporating image processing |
US6690419B1 (en) | 1997-07-15 | 2004-02-10 | Silverbrook Research Pty Ltd | Utilising eye detection methods for image processing in a digital image camera |
AUPO802797A0 (en) | 1997-07-15 | 1997-08-07 | Silverbrook Research Pty Ltd | Image processing method and apparatus (ART54) |
AUPO850597A0 (en) | 1997-08-11 | 1997-09-04 | Silverbrook Research Pty Ltd | Image processing method and apparatus (art01a) |
US7110024B1 (en) | 1997-07-15 | 2006-09-19 | Silverbrook Research Pty Ltd | Digital camera system having motion deblurring means |
US20040119829A1 (en) | 1997-07-15 | 2004-06-24 | Silverbrook Research Pty Ltd | Printhead assembly for a print on demand digital camera system |
US6820968B2 (en) * | 1997-07-15 | 2004-11-23 | Silverbrook Research Pty Ltd | Fluid-dispensing chip |
AUPP702098A0 (en) | 1998-11-09 | 1998-12-03 | Silverbrook Research Pty Ltd | Image creation method and apparatus (ART73) |
AUPQ056099A0 (en) | 1999-05-25 | 1999-06-17 | Silverbrook Research Pty Ltd | A method and apparatus (pprint01) |
TWI258392B (en) * | 2005-11-30 | 2006-07-21 | Benq Corp | Droplet generators |
US8414786B2 (en) * | 2008-11-05 | 2013-04-09 | Lexmark International, Inc. | Planar heater stack and method for making planar heater stack with cavity within planar heater substrata above substrate |
US10099473B2 (en) | 2014-01-30 | 2018-10-16 | Hewlett-Packard Development Company, L.P. | Evaluating print nozzle condition |
CA3136986A1 (en) | 2019-05-06 | 2020-11-12 | Kamran Ansari | Therapeutic arrays of planar coils configured to generate pulsed electromagnetic fields and integrated into clothing |
US11020603B2 (en) | 2019-05-06 | 2021-06-01 | Kamran Ansari | Systems and methods of modulating electrical impulses in an animal brain using arrays of planar coils configured to generate pulsed electromagnetic fields and integrated into clothing |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5356971A (en) * | 1991-10-11 | 1994-10-18 | Nof Corporation | Thermosetting powder coating material |
US5534900A (en) * | 1990-09-21 | 1996-07-09 | Seiko Epson Corporation | Ink-jet recording apparatus |
US5825383A (en) * | 1994-12-20 | 1998-10-20 | Sharp Kabushiki Kaisha | Ink jet head compact and allowing ink to be discharged with great force by using deformable structure |
US6234608B1 (en) * | 1997-06-05 | 2001-05-22 | Xerox Corporation | Magnetically actuated ink jet printing device |
Family Cites Families (89)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US763390A (en) * | 1904-02-11 | 1904-06-28 | Edward A Gray | Electric railway-switch. |
US4000239A (en) * | 1971-12-13 | 1976-12-28 | Teijin Limited | Process for spinning naphthalate polyester fibers |
JPS595273B2 (en) * | 1974-03-08 | 1984-02-03 | サトウ シゲオ | An inexpensive mouthpiece that completely precipitates and cools smoke impurities in the holes and spaces, making the cigarette sweet and enjoyable. |
DE3024672A1 (en) * | 1980-06-30 | 1982-01-28 | Jens Ing.(grad.) 6458 Rodenbach Drefahl | ROOF COVER |
US4494862A (en) * | 1980-09-30 | 1985-01-22 | Minolta Camera Kabushiki Kaisha | Computerized information processing system equipped with copying apparatus |
US4488563A (en) * | 1982-04-29 | 1984-12-18 | Mitsubishi Acetate Co., Ltd. | Filter plug |
US4783823A (en) * | 1985-09-16 | 1988-11-08 | Omron Tateisi Electronics, Co. | Card identifying method and apparatus |
EP0227207B1 (en) * | 1985-12-26 | 1992-12-23 | SHIMIZU CONSTRUCTION Co. LTD. | Concrete reinforcing unit |
EP0237940B1 (en) * | 1986-03-19 | 1993-09-08 | Sharp Kabushiki Kaisha | Manual copying apparatus |
US4837628A (en) * | 1986-07-14 | 1989-06-06 | Kabushiki Kaisha Toshiba | Electronic still camera for recording still picture on memory card with mode selecting shutter release |
US4845770A (en) * | 1986-11-20 | 1989-07-04 | Oki Electric Industry Co., Ltd. | Method and apparatus for processing embossed card |
US4914452A (en) * | 1987-05-08 | 1990-04-03 | Ricoh Company, Ltd. | Ink sheet/recording paper cassette |
US4791443A (en) * | 1987-06-12 | 1988-12-13 | Eastman Kodak Company | Photographic processor with auxiliary power supply |
JPH07118755B2 (en) * | 1987-08-19 | 1995-12-18 | 株式会社日立製作所 | Mail system |
US4987030A (en) * | 1987-10-07 | 1991-01-22 | Toray Industries, Inc. | High-tenacity conjugated fiber and process for preparation thereof |
US4975969A (en) * | 1987-10-22 | 1990-12-04 | Peter Tal | Method and apparatus for uniquely identifying individuals by particular physical characteristics and security system utilizing the same |
NL8800053A (en) * | 1988-01-11 | 1989-08-01 | Philips Nv | VIDEO PROCESSOR SYSTEM, IMAGE SYSTEM AND IMAGE STORAGE SYSTEM, PROVIDED WITH SUCH A VIDEO PROCESSOR SYSTEM. |
US5216490A (en) * | 1988-01-13 | 1993-06-01 | Charles Stark Draper Laboratory, Inc. | Bridge electrodes for microelectromechanical devices |
NL8801440A (en) * | 1988-06-06 | 1990-01-02 | Philips Nv | DEVICE FOR REPRODUCING DIGITALIZED VIDEO IMAGES WITH SLOPE FLAT ERROR. |
US4902880A (en) * | 1988-09-30 | 1990-02-20 | Peripheral Dynamics, Inc. | Card reader system and method with printing and verification capability |
US4937676A (en) | 1989-02-10 | 1990-06-26 | Polariod Corporation | Electronic camera system with detachable printer |
DE69028038T2 (en) | 1989-05-17 | 1997-01-30 | Minolta Camera Kk | Recording and repro camera |
IT1232551B (en) * | 1989-07-13 | 1992-02-19 | Olivetti & Co Spa | PRINT HEAD FOR A INK-JET THERMAL PRINTER |
US6070003A (en) * | 1989-11-17 | 2000-05-30 | Texas Instruments Incorporated | System and method of memory access in apparatus having plural processors and plural memories |
JPH03261276A (en) * | 1990-03-12 | 1991-11-21 | Seiko Epson Corp | Print camera |
JP2567492B2 (en) * | 1990-04-19 | 1996-12-25 | 富士写真フイルム株式会社 | Shooting mode input device |
JP3093781B2 (en) * | 1990-11-09 | 2000-10-03 | オリンパス光学工業株式会社 | Focus position detection device |
US5493409A (en) * | 1990-11-29 | 1996-02-20 | Minolta Camera Kabushiki Kaisha | Still video camera having a printer capable of printing a photographed image in a plurality of printing modes |
JPH04358291A (en) * | 1991-06-04 | 1992-12-11 | Hitachi Ltd | Color image changing method |
US5463470A (en) * | 1991-10-09 | 1995-10-31 | Fuji Photo Film Co., Ltd. | Methods of collecting photometric image data and determining light exposure by extracting feature image data from an original image |
US5581773A (en) * | 1992-05-12 | 1996-12-03 | Glover; Michael A. | Massively parallel SIMD processor which selectively transfers individual contiguously disposed serial memory elements |
US5398131A (en) * | 1992-08-13 | 1995-03-14 | Hall; Dennis R. | Stereoscopic hardcopy methods |
US5604537A (en) * | 1992-09-10 | 1997-02-18 | Canon Kabushiki Kaisha | Imaging apparatus having an automatic focusing means |
JPH06149051A (en) | 1992-11-08 | 1994-05-27 | Ricoh Co Ltd | Developer container, processing cartridge, judgement device for recycling of such container or cartridge and image forming device |
FR2698195B1 (en) * | 1992-11-19 | 1994-12-16 | Gemplus Card Int | Encryption and authentication method and circuit for synchronous memory card. |
US5398315A (en) * | 1992-12-30 | 1995-03-14 | North American Philips Corporation | Multi-processor video display apparatus |
GB2278480A (en) * | 1993-05-25 | 1994-11-30 | Sharp Kk | Optical apparatus |
US5644341A (en) * | 1993-07-14 | 1997-07-01 | Seiko Epson Corporation | Ink jet head drive apparatus and drive method, and a printer using these |
KR950003362A (en) * | 1993-07-21 | 1995-02-16 | 마에다 가츠노스케 | Fiber Reinforced Thermoplastic Structures, Manufacturing Method and Extruder |
JPH0776080A (en) * | 1993-09-08 | 1995-03-20 | Canon Inc | Substrate for recording head, recording head, recording head cartridge, recording apparatus and production of substrate for recording head |
JPH07123317A (en) * | 1993-10-21 | 1995-05-12 | Canon Inc | Photographing device with vibration proofing function |
US6116768A (en) * | 1993-11-30 | 2000-09-12 | Texas Instruments Incorporated | Three input arithmetic logic unit with barrel rotator |
GB9325076D0 (en) | 1993-12-07 | 1994-02-02 | The Technology Partnership Plc | Electronic camera |
US5748326A (en) * | 1993-12-07 | 1998-05-05 | Fisher-Price Inc. | Instant special effects electronic camera |
US5726435A (en) * | 1994-03-14 | 1998-03-10 | Nippondenso Co., Ltd. | Optically readable two-dimensional code and method and apparatus using the same |
JPH08186757A (en) * | 1994-12-28 | 1996-07-16 | Canon Inc | Electronic camera |
US5642226A (en) * | 1995-01-18 | 1997-06-24 | Rosenthal; Bruce A. | Lenticular optical system |
JP3542397B2 (en) * | 1995-03-20 | 2004-07-14 | キヤノン株式会社 | Imaging device |
WO1996032265A1 (en) | 1995-04-12 | 1996-10-17 | Eastman Kodak Company | A color video printer and a photocd system with integrated printer |
US5768482A (en) * | 1995-06-14 | 1998-06-16 | Hewlett-Packard Company | Resolution-triggered sharpening for scaling of a digital-matrix image |
US5999203A (en) | 1995-08-18 | 1999-12-07 | Ttp Group, Plc | Printer assembly with easily loaded paper cartridge |
JPH09116843A (en) | 1995-10-20 | 1997-05-02 | Canon Inc | Image pickup device with printer |
US5847836A (en) * | 1995-08-29 | 1998-12-08 | Canon Kabushiki Kaisha | Printer-built-in image-sensing apparatus and using strobe-light means electric-consumption control method thereof |
JPH0971015A (en) | 1995-09-05 | 1997-03-18 | Ricoh Co Ltd | Recording device and image communication device |
JP3313952B2 (en) * | 1995-09-14 | 2002-08-12 | キヤノン株式会社 | Ink jet recording device |
EP0763930B1 (en) | 1995-09-15 | 2002-10-16 | Agfa-Gevaert | Method for calculating color gamuts |
US5917963A (en) * | 1995-09-21 | 1999-06-29 | Canon Kabushiki Kaisha | Image processing apparatus and image processing method |
US5745175A (en) * | 1995-10-02 | 1998-04-28 | Flashpoint Technologies, Inc. | Method and system for providing automatic focus control for a still digital camera |
JP3303255B2 (en) | 1995-12-28 | 2002-07-15 | 富士写真光機株式会社 | Driving device for zoom lens |
US6009188A (en) * | 1996-02-16 | 1999-12-28 | Microsoft Corporation | Method and system for digital plenoptic imaging |
US5818023A (en) * | 1996-03-05 | 1998-10-06 | Metanetics Corporation | Portable ID card verification apparatus |
JP3423532B2 (en) * | 1996-05-24 | 2003-07-07 | キヤノン株式会社 | Image reading device |
US5852502A (en) * | 1996-05-31 | 1998-12-22 | American Digital Imaging, Inc. | Apparatus and method for digital camera and recorder having a high resolution color composite image output |
US5726693A (en) * | 1996-07-22 | 1998-03-10 | Eastman Kodak Company | Ink printing apparatus using ink surfactants |
US5866253A (en) * | 1996-08-19 | 1999-02-02 | Isorca, Inc. | Synthetic reinforcing strands with spaced filaments |
US5734154A (en) * | 1996-09-03 | 1998-03-31 | Motorola, Inc. | Smart card with Iintegrated reader and visual image display |
US5757388A (en) * | 1996-12-16 | 1998-05-26 | Eastman Kodak Company | Electronic camera and integral ink jet printer |
US6573927B2 (en) * | 1997-02-20 | 2003-06-03 | Eastman Kodak Company | Electronic still camera for capturing digital image and creating a print order |
US5894309A (en) * | 1997-02-27 | 1999-04-13 | Mitsubishi Electric Information Technology Center America, Inc. | System for modifying lighting in photographs |
US6421050B1 (en) * | 1997-02-27 | 2002-07-16 | Mitsubishi Electric Research Laboratories, Inc. | User interface for creation of image generation and transformation functions |
AUPO799197A0 (en) * | 1997-07-15 | 1997-08-07 | Silverbrook Research Pty Ltd | Image processing method and apparatus (ART01) |
AUPP398798A0 (en) * | 1998-06-09 | 1998-07-02 | Silverbrook Research Pty Ltd | Image creation method and apparatus (ij43) |
US7050143B1 (en) * | 1998-07-10 | 2006-05-23 | Silverbrook Research Pty Ltd | Camera system with computer language interpreter |
AUPO801997A0 (en) * | 1997-07-15 | 1997-08-07 | Silverbrook Research Pty Ltd | Media processing method and apparatus (ART21) |
US6213588B1 (en) * | 1997-07-15 | 2001-04-10 | Silverbrook Research Pty Ltd | Electrostatic ink jet printing mechanism |
US6820968B2 (en) * | 1997-07-15 | 2004-11-23 | Silverbrook Research Pty Ltd | Fluid-dispensing chip |
US6727948B1 (en) * | 1997-07-15 | 2004-04-27 | Silverbrook Research Pty Ltd | Utilizing autofocus information for image processing in a digital camera |
US6665454B1 (en) * | 1997-07-15 | 2003-12-16 | Silverbrook Research Pty Ltd | Dot adjacency compensation in optical storage systems using ink dots |
US6918654B2 (en) * | 1997-07-15 | 2005-07-19 | Silverbrook Research Pty Ltd | Ink distribution assembly for an ink jet printhead |
US6879341B1 (en) * | 1997-07-15 | 2005-04-12 | Silverbrook Research Pty Ltd | Digital camera system containing a VLIW vector processor |
US7110024B1 (en) * | 1997-07-15 | 2006-09-19 | Silverbrook Research Pty Ltd | Digital camera system having motion deblurring means |
AUPO802797A0 (en) | 1997-07-15 | 1997-08-07 | Silverbrook Research Pty Ltd | Image processing method and apparatus (ART54) |
US6985207B2 (en) * | 1997-07-15 | 2006-01-10 | Silverbrook Research Pty Ltd | Photographic prints having magnetically recordable media |
US7284843B2 (en) * | 1997-07-15 | 2007-10-23 | Silverbrook Research Pty Ltd | Ink distribution assembly for an ink jet printhead |
US6217165B1 (en) * | 1997-07-15 | 2001-04-17 | Silverbrook Research Pty. Ltd. | Ink and media cartridge with axial ink chambers |
US6357865B1 (en) * | 1998-10-15 | 2002-03-19 | Xerox Corporation | Micro-electro-mechanical fluid ejector and method of operating same |
JP3586119B2 (en) * | 1998-10-27 | 2004-11-10 | キヤノン株式会社 | Head substrate, inkjet head, inkjet printer |
US6304684B1 (en) * | 2000-02-15 | 2001-10-16 | Cyberecord, Inc. | Information processing system and method of using same |
JP2005193384A (en) * | 2003-12-26 | 2005-07-21 | Ricoh Co Ltd | Image processing method, apparatus, and image forming apparatus |
-
2002
- 2002-07-01 US US10/184,883 patent/US6820968B2/en not_active Expired - Fee Related
-
2004
- 2004-10-05 US US10/957,718 patent/US7140723B2/en not_active Expired - Fee Related
-
2006
- 2006-10-20 US US11/583,826 patent/US7695108B2/en not_active Expired - Fee Related
-
2010
- 2010-03-30 US US12/750,578 patent/US7988262B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5534900A (en) * | 1990-09-21 | 1996-07-09 | Seiko Epson Corporation | Ink-jet recording apparatus |
US5356971A (en) * | 1991-10-11 | 1994-10-18 | Nof Corporation | Thermosetting powder coating material |
US5825383A (en) * | 1994-12-20 | 1998-10-20 | Sharp Kabushiki Kaisha | Ink jet head compact and allowing ink to be discharged with great force by using deformable structure |
US6234608B1 (en) * | 1997-06-05 | 2001-05-22 | Xerox Corporation | Magnetically actuated ink jet printing device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050134644A1 (en) * | 2003-12-22 | 2005-06-23 | Rolltronics Corporation | Electrostatic printers using micro electro-mechanical switching elements |
US7173641B2 (en) * | 2003-12-22 | 2007-02-06 | Pasch Nicholas F | Electrostatic printers using micro electro-mechanical switching elements |
Also Published As
Publication number | Publication date |
---|---|
US20070035585A1 (en) | 2007-02-15 |
US6820968B2 (en) | 2004-11-23 |
US7140723B2 (en) | 2006-11-28 |
US7988262B2 (en) | 2011-08-02 |
US7695108B2 (en) | 2010-04-13 |
US20050110837A1 (en) | 2005-05-26 |
US20100182379A1 (en) | 2010-07-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7631956B2 (en) | Ink jet printhead with glass nozzle chambers | |
US7063940B2 (en) | Curl resistant media | |
US7907178B2 (en) | Camera system for with velocity sensor and de-blurring processor | |
US6260953B1 (en) | Surface bend actuator vented ink supply ink jet printing mechanism | |
US7210767B2 (en) | Inkjet printhead having a thermal actuator coil | |
US6245247B1 (en) | Method of manufacture of a surface bend actuator vented ink supply ink jet printer | |
US6246970B1 (en) | Method for making a chip tamper-resistant | |
US6331258B1 (en) | Method of manufacture of a buckle plate ink jet printer | |
US20100002055A1 (en) | Printhead Nozzle Arrangement With Radially Disposed Actuators | |
US6820968B2 (en) | Fluid-dispensing chip | |
US6235212B1 (en) | Method of manufacture of an electrostatic ink jet printer | |
US6304291B1 (en) | Artcard for the administration of the operation of a camera device | |
US6299300B1 (en) | Micro electro-mechanical system for ejection of fluids | |
US6329990B1 (en) | Brush stroke palette feedback method for automatic digital “painting” effects | |
US6491833B1 (en) | Method of manufacture of a dual chamber single vertical actuator ink jet printer | |
US6196541B1 (en) | De-curling print media in a digital instant printing camera | |
US6264307B1 (en) | Buckle grill oscillating pressure ink jet printing mechanism | |
US6227653B1 (en) | Bend actuator direct ink supply ink jet printing mechanism | |
US6234609B1 (en) | High Young's modulus thermoelastic ink jet printing mechanism | |
US6231772B1 (en) | Method of manufacture of an iris motion ink jet printer | |
US6231163B1 (en) | Stacked electrostatic ink jet printing mechanism | |
US6264306B1 (en) | Linear spring electromagnetic grill ink jet printing mechanism | |
US6431704B1 (en) | Miniature color printer using ink and paper cartridges | |
US6486886B1 (en) | Bump map compositing for simulated digital painting effects | |
US6235211B1 (en) | Method of manufacture of an image creation apparatus |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: SILVERBROOK RESEARCH PTY. LTD., AUSTRIA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SILVERBROOK, KIA;REEL/FRAME:013065/0259 Effective date: 20020625 |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
FPAY | Fee payment |
Year of fee payment: 8 |
|
AS | Assignment |
Owner name: ZAMTEC LIMITED, IRELAND Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SILVERBROOK RESEARCH PTY. LIMITED;REEL/FRAME:031506/0489 Effective date: 20120503 |
|
AS | Assignment |
Owner name: MEMJET TECHNOLOGY LIMITED, IRELAND Free format text: CHANGE OF NAME;ASSIGNOR:ZAMTEC LIMITED;REEL/FRAME:033244/0276 Effective date: 20140609 |
|
REMI | Maintenance fee reminder mailed | ||
LAPS | Lapse for failure to pay maintenance fees | ||
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
|
FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20161123 |