US20030035902A1 - Process and device for coating silicon carbide fibers - Google Patents

Process and device for coating silicon carbide fibers Download PDF

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Publication number
US20030035902A1
US20030035902A1 US10/219,817 US21981702A US2003035902A1 US 20030035902 A1 US20030035902 A1 US 20030035902A1 US 21981702 A US21981702 A US 21981702A US 2003035902 A1 US2003035902 A1 US 2003035902A1
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plasma
titanium
process according
based alloy
gas
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US10/219,817
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Erwin Bayer
Joerg Hoeschele
Bertram Kopperger
Juergen Steinwandel
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MTU Aero Engines AG
Mercedes Benz Group AG
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Assigned to DAIMLERCHRYSLER AG, MTU AERO ENGINES GMBH reassignment DAIMLERCHRYSLER AG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: STEINWANDEL, JUERGEN, DR., HOESCHELE, JOERG, DR., BAYER, ERWIN, DR., KOPPERGER, BERTRAM
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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/18Non-metallic particles coated with metal
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4584Coating or impregnating of particulate or fibrous ceramic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/123Spraying molten metal
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134Plasma spraying
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy

Definitions

  • the present invention relates to a process for coating silicon carbide fibers with a titanium-based alloy by plasma spraying in which the titanium-based alloy is sprayed onto the silicon carbide fibers by way of an electrode-free high-pressure plasma.
  • the process includes generating the high-pressure plasma in a microwave- or radiowave-transparent working tube with a gas inlet opening and a gas outlet opening by ignition of a process gas which has been introduced into the working tube at a pressure p ⁇ 1 bar, maintaining the plasma by absorption of microwaves or radiowaves, and passing the plasma into the working space as a plasma jet through a nozzle arranged at the gas outlet opening of the working tube.
  • the invention also relates to a device for carrying out such a process which includes at least two high-pressure plasma torches, each of the high-pressure plasma torches producing one plasma jet without using electrodes.
  • the plasma torches are arranged symmetrically with respect to one another in such a manner that the plasma jets meet at least at one point through which the silicon carbide fibers which are to be coated are guided.
  • a process for forming fiber-reinforced metal matrix elements is known from European publication EP 0 358 799 B1.
  • a silicon carbide fiber is coated with a titanium-based metal in solid form.
  • the coating takes place by way of a low-pressure high-frequency plasma spraying.
  • the titanium-based metal solid is added to the process gas in powder form.
  • a drawback of this process is the ineffective and expensive production of the coatings.
  • the known plasma spraying process in the low-pressure range does not allow coating of the silicon carbide fibers in a production line.
  • a further object of the invention is that of providing a device for carrying out the process.
  • the silicon carbide fibers are coated with a titanium-based alloy by plasma spraying.
  • the titanium-based alloy is sprayed onto the silicon carbide fibers by way of an electrode-free high-pressure plasma.
  • the high-pressure plasma is ignited in a microwave- or radiowave-transparent working tube with a gas inlet opening and a gas outlet opening by way of a process gas which has been introduced into the working tube at a pressure p ⁇ 1 bar.
  • the high-pressure plasma is maintained by absorption of microwaves or radiowaves.
  • the high-pressure plasma is introduced into the working space as a plasma jet by a nozzle arranged at the gas outlet opening of the working tube.
  • One advantage is effective and rapid coating of the silicon carbide fibers. Unlike in the prior art, in the process according to the invention, there is no need to generate a vacuum. This results in further advantages with regard to improved productivity and efficiency of the process according to the invention, and consequently the process according to the invention is suitable for use in a production line.
  • the process gas for generating the high-pressure plasma according to the invention contains hydrogen.
  • the process gas is a mixture of hydrogen and an inert gas, e.g. argon.
  • the titanium-based alloy can be fed to the process gas in the form of a liquid and/or solid precursor.
  • the liquid precursor used may be titanium tetrachloride (TiCl 4 ) and the solid precursor used may be a titanium-based alloy powder.
  • Reaction (1) is thermodynamically limited, unlike reaction (2). This means that, on account of the high temperature in a high-pressure plasma (approx. 10 5 K), the molecular hydrogen (H 2 ) is virtually completely dissociated. Therefore, it is predominantly reaction (2) which takes place in the high-pressure plasma, and consequently predominantly atomic hydrogen (H) is present in the plasma.
  • Atomic titanium is known to have a high affinity for oxygen, with the result that titanium oxide is formed.
  • the high proportion of inert gas in the high-pressure plasma prevents formation of titanium oxide.
  • the working space additionally to be purged with an inert gas.
  • the process according to the invention is used to coat components for lightweight construction, in particular for fiber components made from Ti-MMC (titanium metal matrix composite) for use in aeronautical gas turbines.
  • Ti-MMC titanium metal matrix composite
  • the device according to the invention for coating silicon carbide fibers with a titanium-based alloy, at least two high-pressure plasma torches with, in each case, one plasma jet produced without the use of electrodes are arranged symmetrically with respect to one another.
  • the arrangement is such that the plasma jets meet at least at one point, specifically at the very point at which the silicon carbide fiber which is to be coated is running.
  • the symmetrical arrangement of the plasma torches allows homogeneous coating over the entire circumference of the fibers.
  • three high-pressure plasma torches are arranged in such a manner with respect to one another that the plasma torches form an angle of 120° with respect to one another. This results in optimum and homogeneous coating of the fibers.
  • more than three plasma torches it is also possible for more than three plasma torches to be arranged symmetrically with respect to one another.
  • a high-pressure plasma torch 1 an electrode-free high-pressure plasma 3 is produced in a working tube 2 and is passed into the working space 5 as plasma jet 6 by way of a nozzle 4 .
  • the high-pressure plasma ( 3 ) is generated by igniting a process gas which is passed through the gas inlet opening ( 8 ) of the working tube ( 2 ).
  • the liquid and/or solid precursors are fed through the gas inlet opening 8 of the working tube 2 to the process gas and therefore to the high-pressure plasma 3 .
  • the result is optimum partial melting of the particles.
  • the plasma torches 1 are arranged at an angle of 120° with respect to one another, the plasma jets 6 from the various plasma torches 1 meeting at a point at which the silicon carbide fiber 7 which is to be coated is running. This ensures homogeneous coating of the silicon carbide fiber 7 .

Abstract

In a process for coating silicon carbide fibers with a titanium-based alloy by plasma spraying, the titanium-based alloy is sprayed onto the silicon carbide fibers by way of an electrode-free high-pressure plasma. The high-pressure plasma is generated in a microwave- or radiowave-transparent working tube with a gas inlet opening and a gas outlet opening by ignition of a process gas which has been introduced into the working tube at a pressure p≧1 bar. The plasma is maintained by absorption of microwaves or radiowaves and is passed into the working space as a plasma jet through a nozzle arranged at the gas outlet opening of the working tube.

Description

  • This application claims the priority of [0001] German application 101 40 465.4, filed Aug. 17, 2001, the disclosure of which is expressly incorporated by reference herein.
  • BACKGROUND AND SUMMARY OF THE INVENTION
  • The present invention relates to a process for coating silicon carbide fibers with a titanium-based alloy by plasma spraying in which the titanium-based alloy is sprayed onto the silicon carbide fibers by way of an electrode-free high-pressure plasma. The process includes generating the high-pressure plasma in a microwave- or radiowave-transparent working tube with a gas inlet opening and a gas outlet opening by ignition of a process gas which has been introduced into the working tube at a pressure p≧1 bar, maintaining the plasma by absorption of microwaves or radiowaves, and passing the plasma into the working space as a plasma jet through a nozzle arranged at the gas outlet opening of the working tube. The invention also relates to a device for carrying out such a process which includes at least two high-pressure plasma torches, each of the high-pressure plasma torches producing one plasma jet without using electrodes. The plasma torches are arranged symmetrically with respect to one another in such a manner that the plasma jets meet at least at one point through which the silicon carbide fibers which are to be coated are guided. [0002]
  • It is known from European publication EP 0 615 966 B1 that PVD (physical vapor deposition) processes or sputtering processes are used to coat silicon carbide fibers with a metal matrix. [0003]
  • A process for forming fiber-reinforced metal matrix elements is known from European publication EP 0 358 799 B1. In this process, a silicon carbide fiber is coated with a titanium-based metal in solid form. In this known process, the coating takes place by way of a low-pressure high-frequency plasma spraying. The titanium-based metal solid is added to the process gas in powder form. [0004]
  • A drawback of this process is the ineffective and expensive production of the coatings. Moreover, the known plasma spraying process in the low-pressure range does not allow coating of the silicon carbide fibers in a production line. [0005]
  • It is an object of the invention to provide a novel process which makes it possible to provide a simple and effective coating of silicon carbide fibers in a production line. A further object of the invention is that of providing a device for carrying out the process. [0006]
  • These objects are achieved in accordance with the invention. Advantageous embodiments of the invention form the subject matter of dependent claims. [0007]
  • According to the invention, the silicon carbide fibers are coated with a titanium-based alloy by plasma spraying. The titanium-based alloy is sprayed onto the silicon carbide fibers by way of an electrode-free high-pressure plasma. The high-pressure plasma is ignited in a microwave- or radiowave-transparent working tube with a gas inlet opening and a gas outlet opening by way of a process gas which has been introduced into the working tube at a pressure p≧1 bar. The high-pressure plasma is maintained by absorption of microwaves or radiowaves. Moreover, the high-pressure plasma is introduced into the working space as a plasma jet by a nozzle arranged at the gas outlet opening of the working tube. [0008]
  • One advantage is effective and rapid coating of the silicon carbide fibers. Unlike in the prior art, in the process according to the invention, there is no need to generate a vacuum. This results in further advantages with regard to improved productivity and efficiency of the process according to the invention, and consequently the process according to the invention is suitable for use in a production line. [0009]
  • In an advantageous embodiment of the invention, the process gas for generating the high-pressure plasma according to the invention contains hydrogen. In particular, the process gas is a mixture of hydrogen and an inert gas, e.g. argon. [0010]
  • In a further advantageous embodiment of the invention, the titanium-based alloy can be fed to the process gas in the form of a liquid and/or solid precursor. The liquid precursor used may be titanium tetrachloride (TiCl[0011] 4) and the solid precursor used may be a titanium-based alloy powder.
  • If TiCl[0012] 4 is used as liquid precursor in the process gas, the following reactions occur in the plasma:
  • TiCl4+2H2→Ti+4HCl  (1)
  • TiCl4+4H→Ti+4HCl  (2)
  • Reaction (1) is thermodynamically limited, unlike reaction (2). This means that, on account of the high temperature in a high-pressure plasma (approx. 10[0013] 5K), the molecular hydrogen (H2) is virtually completely dissociated. Therefore, it is predominantly reaction (2) which takes place in the high-pressure plasma, and consequently predominantly atomic hydrogen (H) is present in the plasma.
  • Atomic titanium is known to have a high affinity for oxygen, with the result that titanium oxide is formed. The high proportion of inert gas in the high-pressure plasma prevents formation of titanium oxide. Of course, to prevent formation of titanium oxide it is also possible for the working space additionally to be purged with an inert gas. [0014]
  • The process according to the invention is used to coat components for lightweight construction, in particular for fiber components made from Ti-MMC (titanium metal matrix composite) for use in aeronautical gas turbines. [0015]
  • In the device according to the invention, for coating silicon carbide fibers with a titanium-based alloy, at least two high-pressure plasma torches with, in each case, one plasma jet produced without the use of electrodes are arranged symmetrically with respect to one another. The arrangement is such that the plasma jets meet at least at one point, specifically at the very point at which the silicon carbide fiber which is to be coated is running. The symmetrical arrangement of the plasma torches allows homogeneous coating over the entire circumference of the fibers. [0016]
  • In an advantageous embodiment of the device according to the invention, three high-pressure plasma torches are arranged in such a manner with respect to one another that the plasma torches form an angle of 120° with respect to one another. This results in optimum and homogeneous coating of the fibers. Of course, it is also possible for more than three plasma torches to be arranged symmetrically with respect to one another. [0017]
  • BRIEF DESCRIPTION OF THE DRAWING FIGURE
  • The only drawing shows an exemplary embodiment of the device according to the invention with three plasma torches.[0018]
  • DETAILED DESCRIPTION OF THE INVENTION
  • In a high-[0019] pressure plasma torch 1, an electrode-free high-pressure plasma 3 is produced in a working tube 2 and is passed into the working space 5 as plasma jet 6 by way of a nozzle 4. The high-pressure plasma (3) is generated by igniting a process gas which is passed through the gas inlet opening (8) of the working tube (2). In addition, the liquid and/or solid precursors are fed through the gas inlet opening 8 of the working tube 2 to the process gas and therefore to the high-pressure plasma 3. Particularly when solid precursor is being used, the result is optimum partial melting of the particles.
  • The [0020] plasma torches 1 are arranged at an angle of 120° with respect to one another, the plasma jets 6 from the various plasma torches 1 meeting at a point at which the silicon carbide fiber 7 which is to be coated is running. This ensures homogeneous coating of the silicon carbide fiber 7.
  • The foregoing disclosure has been set forth merely to illustrate the invention and is not intended to be limiting. Since modifications of the disclosed embodiments incorporating the spirit and substance of the invention may occur to persons skilled in the art, the invention should be construed to include everything within the scope of the appended claims and equivalents thereof. [0021]

Claims (11)

I claim:
1. A process for coating silicon carbide fibers with a titanium-based alloy by plasma spraying, the titanium-based alloy being sprayed onto the silicon carbide fibers by way of an electrode-free high-pressure plasma, comprising:
generating the high-pressure plasma in a microwave- or radiowave-transparent working tube with a gas inlet opening and a gas outlet opening by ignition of a process gas which has been introduced into the working tube at a pressure p≧1 bar,
maintaining the plasma by absorption of microwaves or radiowaves, and
passing the plasma into the working space as a plasma jet through a nozzle arranged at the gas outlet opening of the working tube.
2. The process according to claim 1, wherein the process gas for generating the high-pressure plasma contains hydrogen.
3. The process according to claim 1, wherein the titanium-based alloy is fed to the process gas in the form of a liquid precursor, a solid precursor, or both a liquid and solid precursor.
4. The process according to claim 3, wherein the liquid precursor is titanium tetrachloride.
5. The process according to claim 3, wherein the solid precursor is a titanium-based alloy powder.
6. The process according to claim 2, wherein the process gas contains a mixture of hydrogen and an inert gas.
7. The process according to claim 2, wherein the titanium-based alloy is fed to the process gas in the form of a liquid precursor, a solid precursor, or both a liquid and solid precursor.
8. The process according to claim 7, wherein the liquid precursor is titanium tetrachloride.
9. The process according to claim 7, wherein the solid precursor is a titanium-based alloy powder.
10. A device for carrying out a process according to one of the preceding claims, comprising at least two high-pressure plasma torches, each of the high-pressure plasma torches producing one plasma jet without using electrodes, the plasma torches being arranged symmetrically with respect to one another in such a manner that the plasma jets meet at least at one point through which the silicon carbide fibers which are to be coated are guided.
11. The device according to claim 10, wherein three of said high-pressure plasma torches are arranged in such a manner that they are at angles of 120° with respect to one another.
US10/219,817 2001-08-17 2002-08-16 Process and device for coating silicon carbide fibers Abandoned US20030035902A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10140465A DE10140465B4 (en) 2001-08-17 2001-08-17 Process for coating a silicon carbide fiber
DE10140465.4 2001-08-17

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US (1) US20030035902A1 (en)
EP (1) EP1285900B1 (en)
JP (1) JP2003183803A (en)
AT (1) ATE289286T1 (en)
CA (1) CA2398085A1 (en)
DE (2) DE10140465B4 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115074644A (en) * 2022-06-29 2022-09-20 中国航发北京航空材料研究院 Preparation method for reducing forming temperature of metal-based composite material

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6777909B2 (en) * 2016-04-20 2020-10-28 康男 小澤 Manufacturing method of surface modification treatment material and manufacturing equipment of surface modification treatment material
CN108322984A (en) * 2018-01-29 2018-07-24 中国科学院电工研究所 Focus the device and method of cold plasma processing 3D objects
DE102018206644A1 (en) * 2018-04-27 2019-10-31 Enrico Flade Apparatus, method and computer program for coating at least one fiber
DE102018206646B4 (en) * 2018-04-27 2023-07-20 Ecocoat Gmbh Device and method for coating at least one fiber

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US3264508A (en) * 1962-06-27 1966-08-02 Lai William Plasma torch
US3483107A (en) * 1966-12-05 1969-12-09 Hercules Inc Method for improving the performance of radio frequency plasma jets and the production of acetylene
US4786566A (en) * 1987-02-04 1988-11-22 General Electric Company Silicon-carbide reinforced composites of titanium aluminide
US5032193A (en) * 1986-01-21 1991-07-16 Energy Conversion Devices, Inc. Method of making synthetically engineered materials
US5364562A (en) * 1990-04-17 1994-11-15 Xingwu Wang Aerosol-plasma deposition of insulating oxide powder
US6214420B1 (en) * 1996-05-02 2001-04-10 Pont-A-Mousson Process and plant for metallization of cast-iron pipes
US6365515B1 (en) * 2000-08-28 2002-04-02 Micron Technology, Inc. Chemical vapor deposition process

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US4943345A (en) * 1989-03-23 1990-07-24 Board Of Trustees Operating Michigan State University Plasma reactor apparatus and method for treating a substrate
US4978585A (en) * 1990-01-02 1990-12-18 General Electric Company Silicon carbide fiber-reinforced titanium base composites of improved tensile properties
DE4018340C2 (en) * 1990-06-08 1993-10-07 Deutsche Forsch Luft Raumfahrt Method and device for coating high-temperature-resistant long fibers

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Publication number Priority date Publication date Assignee Title
US3264508A (en) * 1962-06-27 1966-08-02 Lai William Plasma torch
US3483107A (en) * 1966-12-05 1969-12-09 Hercules Inc Method for improving the performance of radio frequency plasma jets and the production of acetylene
US5032193A (en) * 1986-01-21 1991-07-16 Energy Conversion Devices, Inc. Method of making synthetically engineered materials
US4786566A (en) * 1987-02-04 1988-11-22 General Electric Company Silicon-carbide reinforced composites of titanium aluminide
US5364562A (en) * 1990-04-17 1994-11-15 Xingwu Wang Aerosol-plasma deposition of insulating oxide powder
US6214420B1 (en) * 1996-05-02 2001-04-10 Pont-A-Mousson Process and plant for metallization of cast-iron pipes
US6365515B1 (en) * 2000-08-28 2002-04-02 Micron Technology, Inc. Chemical vapor deposition process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115074644A (en) * 2022-06-29 2022-09-20 中国航发北京航空材料研究院 Preparation method for reducing forming temperature of metal-based composite material

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EP1285900B1 (en) 2005-02-16
EP1285900A2 (en) 2003-02-26
ATE289286T1 (en) 2005-03-15
DE10140465A1 (en) 2003-03-06
EP1285900A3 (en) 2003-09-24
DE50202263D1 (en) 2005-03-24
CA2398085A1 (en) 2003-02-17
DE10140465B4 (en) 2005-06-30
JP2003183803A (en) 2003-07-03

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