US20060014475A1 - Grindstone tool - Google Patents

Grindstone tool Download PDF

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Publication number
US20060014475A1
US20060014475A1 US11/180,737 US18073705A US2006014475A1 US 20060014475 A1 US20060014475 A1 US 20060014475A1 US 18073705 A US18073705 A US 18073705A US 2006014475 A1 US2006014475 A1 US 2006014475A1
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United States
Prior art keywords
grindstone
tag
radio
embedded
resinoid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/180,737
Inventor
Kazuma Sekiya
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Disco Corp
Original Assignee
Disco Corp
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Filing date
Publication date
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Assigned to DISCO CORPORATION reassignment DISCO CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SEKIYA, KAZUMA
Publication of US20060014475A1 publication Critical patent/US20060014475A1/en
Abandoned legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00—Details of, or arrangements associated with, antennas
    • H01Q1/12—Supports; Mounting means
    • H01Q1/22—Supports; Mounting means by structural association with other equipment or articles
    • H01Q1/2208—Supports; Mounting means by structural association with other equipment or articles associated with components used in interrogation type services, i.e. in systems for information exchange between an interrogator/reader and a tag/transponder, e.g. in Radio Frequency Identification [RFID] systems
    • H01Q1/2225—Supports; Mounting means by structural association with other equipment or articles associated with components used in interrogation type services, i.e. in systems for information exchange between an interrogator/reader and a tag/transponder, e.g. in Radio Frequency Identification [RFID] systems used in active tags, i.e. provided with its own power source or in passive tags, i.e. deriving power from RF signal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/04—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the shape

Definitions

  • the present invention relates to a grindstone tool which has a grindstone such as resinoid grindstone manufactured by kneading abrasive grains with a bonding material, molding the kneaded product into a predetermined form and baking it and is used to perform a predetermined processing on a workpiece.
  • a grindstone such as resinoid grindstone manufactured by kneading abrasive grains with a bonding material
  • a plurality of areas are sectioned by dividing lines called “streets” arranged in a lattice pattern on the front surface of a substantially disk-like semiconductor wafer, and a circuit such as IC or LSI is formed in each of the sectioned areas.
  • a circuit such as IC or LSI is formed in each of the sectioned areas.
  • a grinding stone is used to grind the back surface of the above semiconductor wafer, and a grindstone blade is also used to cut the semiconductor wafer along the dividing lines.
  • grindstones having different characteristic properties according to processing purposes are used.
  • a grindstone used in the grinding stone and the grindstone blade is used a resinoid grindstone manufactured by kneading abrasive grains which differ according to the material of a workpiece with a bonding material, molding the kneaded product and baking it, as disclosed by JP-A2004-181575 and JP-A 8-224730.
  • the resinoid grindstone is manufactured by kneading abrasive grains with a bonding material, molding the kneaded product into a predetermined form and baking it as described above, its quality may vary depending upon production conditions such as the temperature of a kiln in the production process, the number of grindstones baked in the kiln, the position of the grindstone in the kiln, weather, etc. Therefore, the quality of the grindstone cannot be checked at the time when it is manufactured. Consequently, when the resinoid grindstone is broken or damages a workpiece during its use, it is difficult to find the cause of the damage.
  • a user who uses a grindstone such as a resinoid grindstone and electroformed grindstone blade records information on the use time of the grindstone, the type of a processed workpiece, the abrasion of the grindstone, the amount of the residual grindstone, the life of the grindstone, the date when the grindstone has been used, the device used with the grindstone, the name of an operator who used the grindstone and the condition of a trouble for each grindstone. It is troublesome to store the use record of each grindstone, and it is difficult to record the above information surely.
  • the above object can be attained by a grindstone tool for performing predetermined processing on a workpiece, wherein
  • a radio IC tag from, and to, which information can be read, and written, without contact is embedded in the grindstone tool.
  • the above grindstone tool has resinoid grindstone manufactured by kneading abrasive grains with a bonding material, molding the kneaded product and baking it, and the radio IC tag is embedded in the resinoid grindstone.
  • the above radio IC tag is embedded in the unused area of the grindstone.
  • the above grindstone tool comprises a base and a grindstone mounted on the base, and the radio IC tag is embedded in the base.
  • the radio IC tag from, and to, which information can be read, or written, without contact is embedded in the grindstone tool of the present invention
  • data on the characteristic properties of the grindstone and the use record of the grindstone stored in the radio IC tag can be read even after processing work is carried out by storing data on the characteristic properties of the grindstone and the use record of the grindstone in the radio IC tag. Therefore, when the grindstone tool is damaged or damages a workpiece during its use, the cause of the damage can be detected by reading and checking data on the characteristic properties and the use record of the grindstone stored in the radio IC tag.
  • FIG. 1 is a perspective view of a grinding wheel having a grindstone as a grindstone tool according to a first embodiment of the present invention
  • FIG. 2 is a perspective view of a grindstone composed of a resinoid grindstone constituting the grinding wheel shown in FIG. 1 ;
  • FIG. 3 is a schematic constitution block diagram of a system for storing information in a radio IC tag embedded in the grindstone composed of a resinoid grindstone constituting the grinding wheel shown in FIG. 1 ;
  • FIG. 4 is an exploded perspective view of the spindle unit of a cutting machine equipped with a cutting blade composed of a resinoid grindstone as a grindstone tool according to a second embodiment of the present invention
  • FIG. 5 is a perspective view of a grinding wheel as a grindstone tool according to a third embodiment of the present invention.
  • FIG. 6 is a perspective view of an electroformed grindstone blade as a grindstone tool according to a fourth embodiment of the present invention.
  • FIG. 1 shows a grinding wheel having a grindstone as a grindstone tool according to a first embodiment of the present invention.
  • the grinding wheel 2 shown in FIG. 1 is constituted by an annular grindstone base 21 andapluralityof grindstones 22 mounted on the undersurface of the grindstone base 21 .
  • Each of the grindstones 22 is composed of a resinoid grindstone manufactured by kneading abrasive grains with a resin bonding material, molding the kneaded product into a rectangular parallelpiped form and baking it.
  • One of the grindstones 22 each composed of a resinoid grindstone has a recessed portion 221 in the top end face that is an unused area as shown in FIG. 2 , and a radio IC tag 3 is embedded in this recessed portion 221 .
  • the radio IC tag 3 comprises a memory from, and to, which information can be read, and written, with no contact, by means of electric waves or electromagnetic waves.
  • Data on the characteristic properties of the resinoid grindstone are stored in the radio IC tag 3 embedded in the recessed portion 221 of the grindstone 22 at the point when it is embedded in the grindstone 22 . That is, as shown in FIG. 3 , wave signals indicative of the characteristic properties of the resinoid grindstone are transmitted to the radio IC tag 3 embedded in the grinding wheel 22 from a controller 4 through an antenna 5 , which is a read/write head, to store data on the characteristic properties of the resinoid grindstone.
  • the characteristic properties of the resinoid grindstone include manufacture data (the temperature of a kiln, baking time, the number of resinoid grindstones baked in the kiln, the position in the kiln, weather, etc.), grindstone components (type and density of abrasive grains, type of a bonding material, etc.), lot No., application purpose, shape, size, the outer diameter of the grindstone base 21 , and the number of grindstones mounted on the grindstone base 21 .
  • the use record of the grindstone such as the use time of the grindstone, the kind of the processed workpiece, the abrasion of the grindstone, the amount of the residual grindstone, the life of the grindstone, the date when the grindstone is used, the machine used with the grindstone, the name of an operator using the grindstone, the condition of a trouble, etc. can be stored in the radio IC tag 3 embedded in the grindstone 22 by a user or the control means of a grinding machine. Since the use record of the grindstone 22 is thus stored, when the grindstone 22 is damaged or damages the workpiece during its use, the cause of the damage can be detected by reading and checking the use record of the grindstone 22 stored in the radio IC tag 3 .
  • the present invention is applied to a grindstone blade 61 as a cutting tool mounted onto the spindle unit 6 of a cutting machine for cutting a semiconductor wafer along a predetermined dividing line.
  • This grindstone blade 61 is composed of a resinoid grindstone manufactured by kneading abrasive grains with a resin bonding material, molding the kneaded product into an annular form and baking it.
  • the annular grindstone blade 61 composed of a resinoid grindstone has a hole 611 in its inner peripheral portion that is an unused area, and the radio IC tag 3 is embedded in this hole 611 .
  • the radio IC tag 3 is composed of a memory from and to which information can be read and written without contact by means of electric waves or electromagnetic waves as described above. Data on the characteristic properties such as the manufacture data, grindstone components, lot No., shape, size, etc. of the resinoid grindstone are stored in the radio IC tag 3 thus embedded in the grindstone blade 61 , as described above, at the time when it is embedded in the grindstone blade 61 or when it is mounted on the spindle unit of the cutting machine which will be described later.
  • the annular grindstone blade 61 which is composed of a resinoid grindstone embedded with the above radio IC tag 3 is mounted onto a mounter 63 fitted onto a rotary spindle 62 constituting the spindle unit 6 of the cutting machine. That is, the annular grindstone blade 61 is mounted onto the mounter 63 by fitting the annular grindstone blade 61 onto the cylindrical tool mounting portion 613 of the mounter 63 , fitting a sandwiching member 64 onto the mounting portion 613 and then, screwing a clamping ring 65 on a male screw portion formed on the mounter 63 .
  • the cause of the damage can be detected by reading and checking the use record stored in the radio IC tag 3 when the grindstone blade 61 is damaged or damages the workpiece during its use.
  • FIG. 5 A description is subsequently given of a third embodiment of the present invention with reference to FIG. 5 . Since the grinding wheel 2 in the embodiment shown in FIG. 5 is substantially the same as the grinding wheel 2 shown in FIG. 1 except for the mounting position of the radio IC tag 3 , the same members as those of the grinding wheel 2 shown in FIG. 1 are given the same reference symbols.
  • the grinding wheel 2 shown in FIG. 5 is constituted by an annular grindstone base 21 and grindstones 22 mounted on the undersurface of the grindstone base 21 , like the embodiment shown in FIG. 1 .
  • Each of the grindstones 22 is composed of a resinoid grindstone manufactured by kneading abrasive grains with a resin bonding material, molding the kneaded product into a rectangular parallelepiped form and baking it.
  • a recessed portion 211 is formed in the outer peripheral portion of the annular grindstone base 21 of the grinding wheel 2 in the embodiment shown in FIG. 5 , and the radio IC tag 3 is embedded in this recessed portion 211 and molded with a synthetic resin or the like.
  • the above data on the characteristic properties of the resinoid grindstones are stored and the above use record can be recorded in this radio IC tag 3 . Since the rotation balance of the grinding wheel 2 is slightly changed by embedding the radio IC tag 3 in the annular grindstone base 21 , it is desired that a balancing member 212 should be arranged at a position deviated by 180° from the position where the radio IC tag 3 is embedded in the annular grindstone base 21 .
  • FIG. 6 shows an electroformed grindstone blade 7 manufactured by fixing abrasive grains to the side face of a disk-like base 71 made of aluminum by nickel plating and removing the peripheral portion of the base 71 by etching to project a grindstone blade 72 which is a cutting blade.
  • a recessed portion 711 is formed at a predetermined location of the base 71 of the thus constituted electroformed grindstone blade 7 , and the radio IC tag 3 is embedded in this recessed portion 711 and molded with a synthetic resin or the like.
  • Data on the characteristic properties such as the thickness and edge projecting length of the grindstone blade 72 and the size and density of the abrasive grains are stored in the radio IC tag 3 , and the above use record can be recorded in the radio IC tag 3 .
  • a balancing member 712 should be arranged at a position deviated by 180° from the position where the radio IC tag 3 is embedded of the base 71 .

Abstract

A grindstone tool forperformpredeterminedprocessing on a workpiece, wherein a radio IC tag from, and to, which information can be read, and written, without contact is embedded in the grindstone tool.

Description

    FIELD OF THE INVENTION
  • The present invention relates to a grindstone tool which has a grindstone such as resinoid grindstone manufactured by kneading abrasive grains with a bonding material, molding the kneaded product into a predetermined form and baking it and is used to perform a predetermined processing on a workpiece.
    • DESCRIPTION OF THE PRIOR ART
  • In the production process of a semiconductor device, a plurality of areas are sectioned by dividing lines called “streets” arranged in a lattice pattern on the front surface of a substantially disk-like semiconductor wafer, and a circuit such as IC or LSI is formed in each of the sectioned areas. After the back surface of this semiconductor wafer is ground to a predetermined thickness by a grinding machine, the semiconductor wafer is cut along the dividing lines to be divided into individual semiconductor chips.
  • A grinding stone is used to grind the back surface of the above semiconductor wafer, and a grindstone blade is also used to cut the semiconductor wafer along the dividing lines. For the above processing, grindstones having different characteristic properties according to processing purposes are used. As a grindstone used in the grinding stone and the grindstone blade is used a resinoid grindstone manufactured by kneading abrasive grains which differ according to the material of a workpiece with a bonding material, molding the kneaded product and baking it, as disclosed by JP-A2004-181575 and JP-A 8-224730.
  • Since the resinoid grindstone is manufactured by kneading abrasive grains with a bonding material, molding the kneaded product into a predetermined form and baking it as described above, its quality may vary depending upon production conditions such as the temperature of a kiln in the production process, the number of grindstones baked in the kiln, the position of the grindstone in the kiln, weather, etc. Therefore, the quality of the grindstone cannot be checked at the time when it is manufactured. Consequently, when the resinoid grindstone is broken or damages a workpiece during its use, it is difficult to find the cause of the damage.
  • Further, it is impossible to check the characteristic properties such as the thickness of a cutting edge, the length of a projecting edge of the blade, the size and density of abrasive grains of an electroformed grindstone blade mounted onto a base or a grinding stone mounted onto abase. Therefore, it is difficult to detect the cause of the damage of the grindstone blade or the grinding stone or the cause of a damage to the workpiece during its use.
  • Further, a user who uses a grindstone such as a resinoid grindstone and electroformed grindstone blade records information on the use time of the grindstone, the type of a processed workpiece, the abrasion of the grindstone, the amount of the residual grindstone, the life of the grindstone, the date when the grindstone has been used, the device used with the grindstone, the name of an operator who used the grindstone and the condition of a trouble for each grindstone. It is troublesome to store the use record of each grindstone, and it is difficult to record the above information surely.
    • SUMMARY OF THE INVENTION
  • It is an object of the present invention to provide a grindstone tool, which enables the checking of the characteristic properties such as production conditions of a grindstone after use and the recording of the use record of the grindstone.
  • According to the present invention, the above object can be attained by a grindstone tool for performing predetermined processing on a workpiece, wherein
  • a radio IC tag from, and to, which information can be read, and written, without contact is embedded in the grindstone tool.
  • The above grindstone tool has resinoid grindstone manufactured by kneading abrasive grains with a bonding material, molding the kneaded product and baking it, and the radio IC tag is embedded in the resinoid grindstone. The above radio IC tag is embedded in the unused area of the grindstone.
  • The above grindstone tool comprises a base and a grindstone mounted on the base, and the radio IC tag is embedded in the base.
  • Data on the characteristic properties of the grindstone are recorded in the above radio IC tag. The use record of the grindstone is recorded in the above radio IC tag.
  • Since the radio IC tag from, and to, which information can be read, or written, without contact is embedded in the grindstone tool of the present invention, data on the characteristic properties of the grindstone and the use record of the grindstone stored in the radio IC tag can be read even after processing work is carried out by storing data on the characteristic properties of the grindstone and the use record of the grindstone in the radio IC tag. Therefore, when the grindstone tool is damaged or damages a workpiece during its use, the cause of the damage can be detected by reading and checking data on the characteristic properties and the use record of the grindstone stored in the radio IC tag.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a perspective view of a grinding wheel having a grindstone as a grindstone tool according to a first embodiment of the present invention;
  • FIG. 2 is a perspective view of a grindstone composed of a resinoid grindstone constituting the grinding wheel shown in FIG. 1;
  • FIG. 3 is a schematic constitution block diagram of a system for storing information in a radio IC tag embedded in the grindstone composed of a resinoid grindstone constituting the grinding wheel shown in FIG. 1;
  • FIG. 4 is an exploded perspective view of the spindle unit of a cutting machine equipped with a cutting blade composed of a resinoid grindstone as a grindstone tool according to a second embodiment of the present invention;
  • FIG. 5 is a perspective view of a grinding wheel as a grindstone tool according to a third embodiment of the present invention; and
  • FIG. 6 is a perspective view of an electroformed grindstone blade as a grindstone tool according to a fourth embodiment of the present invention.
    • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • Preferred embodiments of the present invention will be described in detail hereinunder with reference to the accompanying drawings.
  • FIG. 1 shows a grinding wheel having a grindstone as a grindstone tool according to a first embodiment of the present invention.
  • The grinding wheel 2 shown in FIG. 1 is constituted by an annular grindstone base 21 andapluralityof grindstones 22 mounted on the undersurface of the grindstone base 21. Each of the grindstones 22 is composed of a resinoid grindstone manufactured by kneading abrasive grains with a resin bonding material, molding the kneaded product into a rectangular parallelpiped form and baking it. One of the grindstones 22 each composed of a resinoid grindstone has a recessed portion 221 in the top end face that is an unused area as shown in FIG. 2, and a radio IC tag 3 is embedded in this recessed portion 221. The radio IC tag 3 comprises a memory from, and to, which information can be read, and written, with no contact, by means of electric waves or electromagnetic waves.
  • Data on the characteristic properties of the resinoid grindstone are stored in the radio IC tag 3 embedded in the recessed portion 221 of the grindstone 22 at the point when it is embedded in the grindstone 22. That is, as shown in FIG. 3, wave signals indicative of the characteristic properties of the resinoid grindstone are transmitted to the radio IC tag 3 embedded in the grinding wheel 22 from a controller 4 through an antenna 5, which is a read/write head, to store data on the characteristic properties of the resinoid grindstone. The characteristic properties of the resinoid grindstone include manufacture data (the temperature of a kiln, baking time, the number of resinoid grindstones baked in the kiln, the position in the kiln, weather, etc.), grindstone components (type and density of abrasive grains, type of a bonding material, etc.), lot No., application purpose, shape, size, the outer diameter of the grindstone base 21, and the number of grindstones mounted on the grindstone base 21.
  • Since data on the characteristic properties of the resinoid grindstone are stored in the radio IC tag 3 embedded in the grindstone 22 as described above, even after grinding work is carried out by using the grinding wheel 2 mounting the grindstones 22, data on the characteristic properties of the resinoid grindstone stored in the radio IC tag 3 can be read. Therefore, when the grindstone 22 is damaged or damages the workpiece during its use, the cause of the damage can be detected by reading and checking data on the characteristic properties of the resinoid grindstone stored in the radio IC tag 3.
  • The use record of the grindstone such as the use time of the grindstone, the kind of the processed workpiece, the abrasion of the grindstone, the amount of the residual grindstone, the life of the grindstone, the date when the grindstone is used, the machine used with the grindstone, the name of an operator using the grindstone, the condition of a trouble, etc. can be stored in the radio IC tag 3 embedded in the grindstone 22 by a user or the control means of a grinding machine. Since the use record of the grindstone 22 is thus stored, when the grindstone 22 is damaged or damages the workpiece during its use, the cause of the damage can be detected by reading and checking the use record of the grindstone 22 stored in the radio IC tag 3.
  • A description is subsequently given of a second embodiment of the present invention with reference to FIG. 4.
  • In the embodiment shown in FIG. 4, the present invention is applied to a grindstone blade 61 as a cutting tool mounted onto the spindle unit 6 of a cutting machine for cutting a semiconductor wafer along a predetermined dividing line. This grindstone blade 61 is composed of a resinoid grindstone manufactured by kneading abrasive grains with a resin bonding material, molding the kneaded product into an annular form and baking it. The annular grindstone blade 61 composed of a resinoid grindstone has a hole 611 in its inner peripheral portion that is an unused area, and the radio IC tag 3 is embedded in this hole 611. The radio IC tag 3 is composed of a memory from and to which information can be read and written without contact by means of electric waves or electromagnetic waves as described above. Data on the characteristic properties such as the manufacture data, grindstone components, lot No., shape, size, etc. of the resinoid grindstone are stored in the radio IC tag 3 thus embedded in the grindstone blade 61, as described above, at the time when it is embedded in the grindstone blade 61 or when it is mounted on the spindle unit of the cutting machine which will be described later.
  • The annular grindstone blade 61 which is composed of a resinoid grindstone embedded with the above radio IC tag 3 is mounted onto a mounter 63 fitted onto a rotary spindle 62 constituting the spindle unit 6 of the cutting machine. That is, the annular grindstone blade 61 is mounted onto the mounter 63 by fitting the annular grindstone blade 61 onto the cylindrical tool mounting portion 613 of the mounter 63, fitting a sandwiching member 64 onto the mounting portion 613 and then, screwing a clamping ring 65 on a male screw portion formed on the mounter 63.
  • Since data on the characteristic properties of the resinoid grindstone are stored in the radio IC tag 3 embedded in the grindstone blade 61 as described above, even after the grindstone blade 61 is mounted on the spindle unit 6 of the cutting machine to carry out cutting work, data on the characteristic properties of the resinoid grindstone stored in the radio IC tag 3 can be read. Therefore, when the grindstone blade 61 is damaged or damages the workpiece during its use, the cause of the damage can be detected by reading and checking data on the characteristic properties of the resinoid grindstone stored in the radio IC tag 3.
  • By recording the use record of the grindstone blade 61 in the radio IC tag 3 embedded in the grindstone blade 61, the cause of the damage can be detected by reading and checking the use record stored in the radio IC tag 3 when the grindstone blade 61 is damaged or damages the workpiece during its use.
  • A description is subsequently given of a third embodiment of the present invention with reference to FIG. 5. Since the grinding wheel 2 in the embodiment shown in FIG. 5 is substantially the same as the grinding wheel 2 shown in FIG. 1 except for the mounting position of the radio IC tag 3, the same members as those of the grinding wheel 2 shown in FIG. 1 are given the same reference symbols.
  • The grinding wheel 2 shown in FIG. 5 is constituted by an annular grindstone base 21 and grindstones 22 mounted on the undersurface of the grindstone base 21, like the embodiment shown in FIG. 1. Each of the grindstones 22 is composed of a resinoid grindstone manufactured by kneading abrasive grains with a resin bonding material, molding the kneaded product into a rectangular parallelepiped form and baking it. A recessed portion 211 is formed in the outer peripheral portion of the annular grindstone base 21 of the grinding wheel 2 in the embodiment shown in FIG. 5, and the radio IC tag 3 is embedded in this recessed portion 211 and molded with a synthetic resin or the like. The above data on the characteristic properties of the resinoid grindstones are stored and the above use record can be recorded in this radio IC tag 3. Since the rotation balance of the grinding wheel 2 is slightly changed by embedding the radio IC tag 3 in the annular grindstone base 21, it is desired that a balancing member 212 should be arranged at a position deviated by 180° from the position where the radio IC tag 3 is embedded in the annular grindstone base 21.
  • A description is subsequently given of a fourth embodiment of the present invention with reference to FIG. 6.
  • FIG. 6 shows an electroformed grindstone blade 7 manufactured by fixing abrasive grains to the side face of a disk-like base 71 made of aluminum by nickel plating and removing the peripheral portion of the base 71 by etching to project a grindstone blade 72 which is a cutting blade. A recessed portion 711 is formed at a predetermined location of the base 71 of the thus constituted electroformed grindstone blade 7, and the radio IC tag 3 is embedded in this recessed portion 711 and molded with a synthetic resin or the like. Data on the characteristic properties such as the thickness and edge projecting length of the grindstone blade 72 and the size and density of the abrasive grains are stored in the radio IC tag 3, and the above use record can be recorded in the radio IC tag 3. Since the rotation balance of the electroformed grindstone blade 7 is slightly changed by embedding the radio IC tag 3 in the disk-like base 71, it is desired that a balancing member 712 should be arranged at a position deviated by 180° from the position where the radio IC tag 3 is embedded of the base 71.

Claims (6)

1. A grindstone tool for performing predetermined processing on a workpiece, wherein
a radio IC tag from, and to, which information can be read, and written, without contact is embedded in the grindstone tool.
2. The grindstone tool according to claim 1, which has resinoid grindstone manufactured by kneading abrasive grains with a bonding material, molding the kneaded product and baking it, and the radio IC tag is embedded in the resinoid grindstone.
3. The grindstone tool according to claim 2, wherein the radio IC tag is embedded in the unused area of the grindstone.
4. The grindstone tool according to claim 1, wherein the grindstone tool comprises a base and grindstone mounted on the base, and the radio IC tag is embedded in the base.
5. The grindstone tool according to claim 1, wherein data on the characteristic properties of the grindstone are recorded in the radio IC tag.
6. The grindstone tool according to claim 1, wherein the use record of the grindstone is recorded in the radio IC tag.
US11/180,737 2004-07-15 2005-07-14 Grindstone tool Abandoned US20060014475A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004208585 2004-07-15
JP2004-208585 2004-07-15

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US20060014475A1 true US20060014475A1 (en) 2006-01-19

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DE (1) DE102005033253A1 (en)
TW (1) TW200610615A (en)

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EP1975985A1 (en) * 2006-01-25 2008-10-01 JSR Corporation Chemical mechanical polishing pad and method for manufacturing same
US20090114549A1 (en) * 2007-11-05 2009-05-07 P.R. Hoffman Machine Products Inc. Rfid-containing carriers used for silicon wafer quality
US20090137187A1 (en) * 2007-11-21 2009-05-28 Chien-Min Sung Diagnostic Methods During CMP Pad Dressing and Associated Systems
US20130052917A1 (en) * 2010-03-19 2013-02-28 Jaehong Park Polishing apparatus, polishing pad, and polishing information management system
US20140320267A1 (en) * 2013-04-26 2014-10-30 Weber Maschinenbau Gmbh Breidenbach Food slicing blade with a radio transponder
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US11446788B2 (en) 2014-10-17 2022-09-20 Applied Materials, Inc. Precursor formulations for polishing pads produced by an additive manufacturing process
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
US11724362B2 (en) 2014-10-17 2023-08-15 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
US11772229B2 (en) 2016-01-19 2023-10-03 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
US10207379B2 (en) * 2016-01-21 2019-02-19 Colibri Spindles Ltd. Live tool collar having wireless sensor
US20170337402A1 (en) * 2016-05-18 2017-11-23 Hand Held Products, Inc. Tool verification systems and methods for a workflow process
WO2019007727A1 (en) * 2017-07-04 2019-01-10 Euromicron Werkzeuge Gmbh Method for polishing optical waveguides, and polishing disc for a polishing machine
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
US10919123B2 (en) 2018-02-05 2021-02-16 Applied Materials, Inc. Piezo-electric end-pointing for 3D printed CMP pads
US20200039027A1 (en) * 2018-08-02 2020-02-06 Saint-Gobain Abrasives, Inc. Abrasive article including a wear detection sensor
US20220111490A1 (en) * 2018-08-27 2022-04-14 3M Innovative Properties Company Embedded electronic circuit in grinding wheels and methods of embedding
US11229987B2 (en) * 2018-08-27 2022-01-25 3M Innovative Properties Company Embedded electronic circuit in grinding wheels and methods of embedding
US11628541B2 (en) * 2018-08-27 2023-04-18 3M Innovative Properties Company Embedded electronic circuit in grinding wheels and methods of embedding
US11685014B2 (en) 2018-09-04 2023-06-27 Applied Materials, Inc. Formulations for advanced polishing pads
EP3946809A4 (en) * 2019-04-03 2022-12-07 Saint-Gobain Abrasives, Inc. Abrasive article, abrasive system and method for using and forming same
WO2021054876A1 (en) * 2019-09-19 2021-03-25 Husqvarna Ab Wireless identification tags and corresponding readers
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