US20060245933A1 - Valve and pump for microfluidic systems and methods for fabrication - Google Patents
Valve and pump for microfluidic systems and methods for fabrication Download PDFInfo
- Publication number
- US20060245933A1 US20060245933A1 US11/119,480 US11948005A US2006245933A1 US 20060245933 A1 US20060245933 A1 US 20060245933A1 US 11948005 A US11948005 A US 11948005A US 2006245933 A1 US2006245933 A1 US 2006245933A1
- Authority
- US
- United States
- Prior art keywords
- layer
- channel
- microfluidic device
- valve
- analyte
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0046—Electric operating means therefor using magnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
- F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/06—Valves, specific forms thereof
- B01L2400/0633—Valves, specific forms thereof with moving parts
- B01L2400/0638—Valves, specific forms thereof with moving parts membrane valves, flap valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0076—Fabrication methods specifically adapted for microvalves using electrical discharge machining [EDM], milling or drilling
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0078—Fabrication methods specifically adapted for microvalves using moulding or stamping
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/008—Multi-layer fabrications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
Definitions
- the present invention is directed generally to the field of microfluidic devices. More particularly the present invention is directed to novel valving components for microfluidic devices where such valve components are fabricated integrally on the device substrate.
- microfluidic chip valves are known. See U.S. Pat. Nos. 6,581,899; 6,575,188; 6,561,224; 6,527,003; 6,523,559; 6,448,090; 6,431,212; 6,406,605; 6,395,232; 6,382,254; 6,318,970; 6,068,751; 5,932,799, all of which are incorporated by reference herein as if made part of the present specification.
- valves suffer from being too large, too expensive, having poor respond time, or not being sufficiently robust.
- Use of magnet for movement in a laminated structure is known. See U.S. Pat. No. 5,472,539, which is incorporated by reference herein.
- the integration of magnet activation for a pump chamber incorporating valves in a laminated microfluidic device is not known.
- Embodiments of the invention address the limitations of known valves for microfluidic systems and are directed to a new type of valve for incorporation in microfluidic systems.
- Embodiments of the invention are further directed to a valve, preferably a microfluidic valve, fabricated on the same substrate as the microfluidic channels in a microfluidic device.
- embodiments of the invention are directed to a microfluidic device having a first layer made from a first material having a channel, and a second layer made from a second layer material.
- the second layer is in intimate contact with the first layer, and the second layer comprises an integral valve made from the same material as the second layer material.
- embodiments of the invention are directed to a microfluidic device having a multilayered structure with a first layer made from a first layer material and having at least one channel, and a second layer made from a second layer material, with second layer in intimate contact with the first layer.
- the second layer comprises an integral valve made from the second layer material, with the valve aligned and dimensioned to cover a channel.
- embodiments of the invention are directed to a method for analyzing an analyte by providing a microfluidic device comprising a multilayered structure.
- the structure includes a first layer made from a first layer material and having at least one channel, and a second layer made from a second layer material, with the second layer in intimate contact with the first layer.
- the second layer comprises an integral valve made from the second layer material, and the valve aligned and dimensioned to cover a channel.
- An amount of analyte is then provided and introduced to the microfluidic device, and is then analyzed.
- Embodiments of the invention are also directed to a method for analyzing an analyte including the steps of providing a microfluidic device having a first channel-containing layer and a second channel-containing layer with an intermediate layer interposed between, and in intimate contact with the first and second channel-containing layers.
- the intermediate layer comprises an integral valve aligned and dimensioned to cover at least one channel. An amount of analyte is provided and introduced to the microfluidic device, and is then analyzed.
- a structure for actively pumping a fluid through an integrated, layered device including above-mentioned channels and valves.
- the device has a chamber acting as a diaphram, with the volume of the chamber controlled by the interaction between a magnet placed on one side of the chamber and an electrical coil place on another side of the chamber. Activation of the coil to attract the magnet compresses the chamber, pushing fluid out through one check valve, while coil activation to repel the magnet expands the chamber, bringing fluid into it through another check valve.
- Such a structure can be used to control the amount and type of analyte provided to other areas of the microfluidic device.
- FIGS. 1A and 1B are schematic representations of one embodiment constructed in accordance with the invention showing an integrated valve of the device in operation as pressure differentials occur within channels.
- FIGS. 2A and 2B are schematic representations of another embodiment constructed in accordance with the invention showing an integrated valve of the device in operation.
- FIG. 3 is a cross-sectional side view of another embodiment of the microfluidic valve device of the present invention.
- FIGS. 4A and 4B are overhead and cross-sectional side views, respectively, of another embodiment of the microfluidic valve device of the invention showing the glass substrate and first channel layer.
- FIGS. 5A and 5B are overhead and cross-sectional side views, respectively, of the microfluidic valve device of FIGS. 4A and 4B showing the addition of connecting via layer on the first channel layer.
- FIGS. 6A and 6B are overhead and cross-sectional side views, respectively, of the microfluidic valve device of FIGS. 5A and 5B showing the addition of gold release and valve layers on the connecting via layer.
- FIGS. 7A and 7B are overhead and cross-sectional side views, respectively, of the microfluidic valve device of FIGS. 6A and 6B showing the second channel layer on the via layer.
- FIG. 8A is an overhead view of a device constructed in accordance with embodiments of the invention, the device having multiple check valves in place to form a microfluidic circuit.
- FIG. 8B is a schematic representation of the device shown in FIG. 6A .
- FIG. 9 is a cross-sectional schematic diagram of a microfluidic device constructed in accordance with embodiments of the invention and incorporating a diaphragm chamber activated by interaction between a magnet placed on top of the uppermost layer, and a coil patterned on the underlying substrate. Arrows on the schematic show the direction of fluidic flow during operation of the diaphragm chamber.
- Embodiments of the invention are directed to a valve incorporated in microfluidic systems with one or more of the following features.
- the microfluidic valve is located integrally within the microfluidic system and therefore is desirably dimensioned to selectively and predictably seal channels or otherwise direct flow within a channel of a microfluidic device.
- the valve is preferably made from the same material as the microfluidic device substrate and therefore has a desirably low cost and low fabrication processing cost.
- FIGS. 1A-1B and 2 A- 2 B Operation of the valve is depicted in FIGS. 1A-1B and 2 A- 2 B.
- P 0 is less than the critical opening pressure P C created by the main flow (with arrow indicating flow direction)
- P C critical opening pressure
- the valve remains closed and only the main flow is passing through the microfluidic channel (see FIG. 1A ).
- P 1 is applied to the valve where P 1 >P C
- the valve is open and the second flow is passing into the microfluidic channel (see FIG. 1B ).
- the valve can be used as a passive one-way flow controller.
- the pressure difference will force the valve to open and allow flow from the Channel 1 toward the Channel 2 .
- the pressure in the Channel 2 is greater than the pressure in the Channel 1
- the position of the valve will be dictated by the valve seat, resulting in a closure of the valve and no further liquid flow, in this case, from Channel 1 into Channel 2 or from Channel 2 into Channel 1 .
- FIG. 3 shows a cross-sectional side view of a microfluidic device having a check valve 9 .
- a first layer 10 made from a first layer material is in contact with, and preferably laminated to, a second layer 12 made from a second layer material.
- a substrate 24 such as a silicon—(Si), glass-, or plastic-based substrate, having a channel 20 , is provided and brought into contact with a third layer 22 made from a third layer material.
- the substrate 24 is adhered to the third layer 22 .
- the third layer 22 also has a channel 18 . At least a portion of the channel 20 of the glass substrate 24 overlaps at least a portion of the channel 18 of the third layer 22 .
- a metal, preferably gold, or other non-stick layer 16 of a predetermined size is positioned to cover the channel 18 and preferably extends beyond the channel 18 .
- the layers are preferably adhered together.
- a laser cut 14 made in the second layer 12 thereby forming a check valve, or flap-like structure 9 .
- the laser cut is typically made in a “U” shape to allow formation of a flap thus making the check valve 9 .
- the solid arrow indicate the fluid flow direction.
- the check valve 9 opens in response to vacuum.
- the small area opening 21 on the input side of the device may be designed to inhibit pressure to push the check valve open.
- the check valve 9 should, however, preferably allow a slight vacuum on the output side 23 of the device to open the check valve 9 .
- the presence of the check valve 9 insures unidirectional movement of the fluid flowing through the channel 20 .
- FIGS. 4A and 4B respectively show a top view and a cross-sectional side view of a partial construction of a device made according to one embodiment of the invention.
- a glass substrate 26 is in contact with a layer 28 having a first channel 29 .
- the first channel 29 is laser micro-machined into layer 28 .
- Fluid can access channel 29 through substrate 26 from channel 17 .
- FIGS. 5A and 5B respectively show a top view and cross-sectional side view of the construction of FIGS. 4A and 4B .
- An additional layer 22 is in contact with layer 28 with opening via 30 machined through layer 22 .
- FIGS. 6A and 6B show the progressive construction shown in FIGS. 5A and 5B with an additional metal release layer 16 placed over via 30 and thus, over a portion of layer 22 .
- a valve layer 12 is then placed over the metal release layer 16 .
- a “U”-shaped cut 14 is made through valve layer 12 to the metal release layer 16 as shown in a top view in FIG. 6A forming check valve 9 .
- a second channel layer 42 having a channel 37 with fluid input 38 a and fluid output 38 b is aligned over valve 9 and applied to form the microfluidic device. It is understood that adhesive layers 25 are applied between substrate. Representative thicknesses are exaggerated for illustrative purposes and not for the purpose of depicting actual or relative layer thicknesses.
- FIGS. 7A-7B and 8 A- 8 B show various embodiments of the microfluidic devices having multiple channels.
- a vacuum can be applied to one or more channels for such devices by pulling fluid through the microfluidic device.
- the placement of the integral check valve(s) allows the predictable and desired regulation of fluid flow through the channels.
- FIG. 9 shows an integrated microfluidic device incorporating both check valves, 9 a and 9 b at two different levels of the layered device having a chamber 54 in layer 55 .
- the substrate 26 on which the device is fabricated has an electrical coil structure 52 patterned thereon, over which subsequent layers are applied. Fabrication of the channels and valve structures are carried out as previously described.
- After completion of the microfluidic portion of the device which includes substrate 26 with patterned electrical coil structure 52 , fluidic channel 20 , chamber 54 , valves 9 a and 9 b , output channel 58 , and magnet 56 are applied to the top of the device and positioned over chamber 54 and coils 52 .
- the magnet may be a molded magnet structure that is subsequently magnetized in an electric field, or consists of a permanent magnet that is positioned and preferably held in place by an adhesive.
- a magnetic field is produced which either attracts or repels the magnet 56 , vertically moving the layers of the device 55 , 57 , and 59 either toward or away from the layers 12 , 19 , and 22 , consequently predictably changing the volume of chamber 54 .
- the volume change will cause fluid movement through check valves 9 a and 9 b , resulting in a pumping action through the microfluidic device.
- Magnet 56 is a micromolded permanent magnet adhered to a substrate.
- substrate 24 is representative of a variety of substrates that may comprise movable elements of micromechanical structures.
- Magnet 56 preferably is a rare earth NdFeB magnet comprising powdered NdFeB metal suspended in a thermosetting plastic, cured, and magnetized employing, for example, a magnetic field strength in the order of about 20 kOe, produced by a suitable electromagnet.
- the fluids presented to the channels and chambers in the devices of the present invention may comprise an analyte, which is understood to be a substance or chemical constituent that is undergoing analysis.
- the analyte can be of chemical, biological or physical nature. Examples of analytes include molecules, living cells, bacteria, other organisms and fractions of organisms and tissue, clusters of molecules and atoms, nanocrystals, etc.
- the preferred diaphragm/magnet assembly is analogous to a heart chamber with the channels/valves/fluid taking on the role of a circulatory system, possibly containing cells (e.g. blood).
- a further embodiment is contemplated to be useful in modeling a biological system for use in bio-research, potentially reducing the need for animal testing.
- a flexible structure was made from Kapton® (polyimide) as a microfluidic valve component.
- Kapton® polyimide
- FIG. 3 shows a cross section of a device fabrication where a Kapton® layer 22 was laminated onto a Si, glass or plastic substrate 24 .
- a patterned gold release layer 16 was deposited onto the Kapton® layer surface 22 , followed by the deposition of the layer 12 in which the flap valve was to be cut.
- a laser cut “U”shape 14 was made through the flap layer 12 to the gold release layer 16 forming a flexible structure with an effective hinge at one end (the base of the “U”).
- these aforementioned structures are preferably fabricated out of thermally laminated Kapton® structures with laser micro-machining to produce channels and valve structures, but could be made from any suitable microfluidic system substrate material as would be understood by one skilled in the field of microfluidics.
- suitable microfluidic system substrate material such as Bayer Apec Polycarbonate, Solvay Udel, or Radel Polysulfone, or Dyneon THV-220 Fluorothermoplastic can be used in place of the Kapton® film.
- each layer is preferably hot press laminated to the previous laser-machined layer.
- the preferred adhesives used for laminating the multiple layers used in the microfluidic devices preferably must adhere well to the underlying substrate on which the fluidic device is fabricated, and to the layers of material forming the device. They must be thermally stable during multiple lamination processes. They must be resistant to the fluids used in the channels during device operation that might include water of different pH and/or chemical solvents. Further, the preferred adhesives must be laser-processable to allow formation of the channels and valves. Adhesives which can be used for this application preferably include thermoplastic polymers such as polyimide, polysulfone, polycarbonate and acrylic materials and blends of such polymers with cycloaliphatic epoxy with a thermal epoxy curing catalyst present such that a thermoset layer is formed during lamination.
- One preferred adhesive to be used for lamination is a GE developed material, composed of a siloxane containing polyimide, SPI-135, available from MicroSi Corp, Phoenix, Ariz., blended with ERL-4221 epoxy, available from Dow Chemical, Midland, Mich. and UV9380C catalyst, available from General Electric Specialty Materials, Waterford, N.Y.
- This adhesive blend has excellent adhesion to Kapton®, is resistant to attack from water and most solvents, but releases cleanly from a metal surface, especially a gold surface.
- the adhesives used in connection with embodiments of the invention preferably facilitate the use of Kapton® structures where selected flaps can move to create micro-fluidic check valves, when photolithography is used to define small gold areas that act as release layers.
- the “U”-shaped cuts made in the films of embodiments of the invention are preferably made with a tripled (355 nm) or quadrupled (266 nm) YAG laser, or an excimer laser at 308 nm or 248 nm.
- the thickness of the layers to be laser-machined may be from about 12 to about 25 ⁇ m thick, with the precise thickness dependent upon the material characteristic, such as, for example, flexibility.
- the layers must have similar properties relative to the selected adhesive, such as resistance to water and solvents, thermal stability relative to multiple lamination cycles (to retain channel integrity), and laser processability.
- preferred materials include polyimides such as Kapton®, Upilex® and Ultem®, high temperature polycarbonates such as Bayer Apec (especially if clear, transparent and colorless fluidic devices are desired for possible optical analysis), polysulfone films, PEEK (polyether ether ketone) and possibly PVDF film made from Kynar® plastic, also available from Westlake Plastics.
Abstract
Description
- The present invention is directed generally to the field of microfluidic devices. More particularly the present invention is directed to novel valving components for microfluidic devices where such valve components are fabricated integrally on the device substrate.
- In microfluidic systems, development of on-chip propulsion and valving components is important, for example, to reduce or eliminate the sample dead volumes and, thus, to improve the analytical performance of a microfluidic system. Use of microfluidic chip valves is known. See U.S. Pat. Nos. 6,581,899; 6,575,188; 6,561,224; 6,527,003; 6,523,559; 6,448,090; 6,431,212; 6,406,605; 6,395,232; 6,382,254; 6,318,970; 6,068,751; 5,932,799, all of which are incorporated by reference herein as if made part of the present specification. However, the need exists in improving parameters of existing reported valves for microfluidic systems. In particular, existing valves suffer from being too large, too expensive, having poor respond time, or not being sufficiently robust. In addition, there is a need to integrate such valves with a diaphram chamber, to achieve the positive flow or pumping of the fluid in a microfluidic device Use of magnet for movement in a laminated structure is known. See U.S. Pat. No. 5,472,539, which is incorporated by reference herein. However, the integration of magnet activation for a pump chamber incorporating valves in a laminated microfluidic device is not known.
- It is highly desirable to develop a valve that is intrinsically located on a microfluidic chip and meets the requirements of small size and low fabrication cost. Embodiments of the invention address the limitations of known valves for microfluidic systems and are directed to a new type of valve for incorporation in microfluidic systems.
- Embodiments of the invention are further directed to a valve, preferably a microfluidic valve, fabricated on the same substrate as the microfluidic channels in a microfluidic device.
- In addition, embodiments of the invention are directed to a microfluidic device having a first layer made from a first material having a channel, and a second layer made from a second layer material. The second layer is in intimate contact with the first layer, and the second layer comprises an integral valve made from the same material as the second layer material.
- Still further, embodiments of the invention are directed to a microfluidic device having a multilayered structure with a first layer made from a first layer material and having at least one channel, and a second layer made from a second layer material, with second layer in intimate contact with the first layer. The second layer comprises an integral valve made from the second layer material, with the valve aligned and dimensioned to cover a channel.
- Yet, still further, embodiments of the invention are directed to a method for analyzing an analyte by providing a microfluidic device comprising a multilayered structure. The structure includes a first layer made from a first layer material and having at least one channel, and a second layer made from a second layer material, with the second layer in intimate contact with the first layer. The second layer comprises an integral valve made from the second layer material, and the valve aligned and dimensioned to cover a channel. An amount of analyte is then provided and introduced to the microfluidic device, and is then analyzed.
- Embodiments of the invention are also directed to a method for analyzing an analyte including the steps of providing a microfluidic device having a first channel-containing layer and a second channel-containing layer with an intermediate layer interposed between, and in intimate contact with the first and second channel-containing layers. The intermediate layer comprises an integral valve aligned and dimensioned to cover at least one channel. An amount of analyte is provided and introduced to the microfluidic device, and is then analyzed.
- According to another embodiments, there is provided a structure for actively pumping a fluid through an integrated, layered device including above-mentioned channels and valves. In such a preferred structure, the device has a chamber acting as a diaphram, with the volume of the chamber controlled by the interaction between a magnet placed on one side of the chamber and an electrical coil place on another side of the chamber. Activation of the coil to attract the magnet compresses the chamber, pushing fluid out through one check valve, while coil activation to repel the magnet expands the chamber, bringing fluid into it through another check valve. Such a structure can be used to control the amount and type of analyte provided to other areas of the microfluidic device.
- These and other advantages and features will be more readily understood from the following detailed description of preferred embodiments of the invention that is provided in connection with the accompanying drawings.
-
FIGS. 1A and 1B are schematic representations of one embodiment constructed in accordance with the invention showing an integrated valve of the device in operation as pressure differentials occur within channels. -
FIGS. 2A and 2B are schematic representations of another embodiment constructed in accordance with the invention showing an integrated valve of the device in operation. -
FIG. 3 is a cross-sectional side view of another embodiment of the microfluidic valve device of the present invention. -
FIGS. 4A and 4B are overhead and cross-sectional side views, respectively, of another embodiment of the microfluidic valve device of the invention showing the glass substrate and first channel layer. -
FIGS. 5A and 5B are overhead and cross-sectional side views, respectively, of the microfluidic valve device ofFIGS. 4A and 4B showing the addition of connecting via layer on the first channel layer. -
FIGS. 6A and 6B are overhead and cross-sectional side views, respectively, of the microfluidic valve device ofFIGS. 5A and 5B showing the addition of gold release and valve layers on the connecting via layer. -
FIGS. 7A and 7B are overhead and cross-sectional side views, respectively, of the microfluidic valve device ofFIGS. 6A and 6B showing the second channel layer on the via layer. -
FIG. 8A is an overhead view of a device constructed in accordance with embodiments of the invention, the device having multiple check valves in place to form a microfluidic circuit. -
FIG. 8B is a schematic representation of the device shown inFIG. 6A . -
FIG. 9 is a cross-sectional schematic diagram of a microfluidic device constructed in accordance with embodiments of the invention and incorporating a diaphragm chamber activated by interaction between a magnet placed on top of the uppermost layer, and a coil patterned on the underlying substrate. Arrows on the schematic show the direction of fluidic flow during operation of the diaphragm chamber. - Embodiments of the invention are directed to a valve incorporated in microfluidic systems with one or more of the following features. The microfluidic valve is located integrally within the microfluidic system and therefore is desirably dimensioned to selectively and predictably seal channels or otherwise direct flow within a channel of a microfluidic device. The valve is preferably made from the same material as the microfluidic device substrate and therefore has a desirably low cost and low fabrication processing cost.
- Operation of the valve is depicted in
FIGS. 1A-1B and 2A-2B. Upon applying pressure P0 to a valve where P0 is less than the critical opening pressure PC created by the main flow (with arrow indicating flow direction), the valve remains closed and only the main flow is passing through the microfluidic channel (seeFIG. 1A ). Upon applying pressure P1 to the valve where P1>PC, the valve is open and the second flow is passing into the microfluidic channel (seeFIG. 1B ). - Alternatively, the valve can be used as a passive one-way flow controller. For example, as shown in
FIGS. 2A and 2B , when the pressure in aChannel 1 is greater than the pressure in thesecond Channel 2, the pressure difference will force the valve to open and allow flow from theChannel 1 toward theChannel 2. However, when the pressure in theChannel 2 is greater than the pressure in theChannel 1, the position of the valve will be dictated by the valve seat, resulting in a closure of the valve and no further liquid flow, in this case, fromChannel 1 intoChannel 2 or fromChannel 2 intoChannel 1. -
FIG. 3 shows a cross-sectional side view of a microfluidic device having acheck valve 9. Afirst layer 10 made from a first layer material, is in contact with, and preferably laminated to, asecond layer 12 made from a second layer material. Asubstrate 24, such as a silicon—(Si), glass-, or plastic-based substrate, having achannel 20, is provided and brought into contact with athird layer 22 made from a third layer material. Preferably thesubstrate 24 is adhered to thethird layer 22. Thethird layer 22 also has achannel 18. At least a portion of thechannel 20 of theglass substrate 24 overlaps at least a portion of thechannel 18 of thethird layer 22. A metal, preferably gold, or othernon-stick layer 16 of a predetermined size is positioned to cover thechannel 18 and preferably extends beyond thechannel 18. The layers are preferably adhered together. A laser cut 14 made in thesecond layer 12, thereby forming a check valve, or flap-like structure 9. According to the present invention, the laser cut is typically made in a “U” shape to allow formation of a flap thus making thecheck valve 9. - As shown in
FIG. 3 , the solid arrow indicate the fluid flow direction. Thecheck valve 9 opens in response to vacuum. The small area opening 21 on the input side of the device may be designed to inhibit pressure to push the check valve open. Thecheck valve 9 should, however, preferably allow a slight vacuum on theoutput side 23 of the device to open thecheck valve 9. Thus, according to this embodiment, the presence of thecheck valve 9 insures unidirectional movement of the fluid flowing through thechannel 20. -
FIGS. 4A and 4B respectively show a top view and a cross-sectional side view of a partial construction of a device made according to one embodiment of the invention. As shown, aglass substrate 26 is in contact with alayer 28 having afirst channel 29. Preferably, thefirst channel 29 is laser micro-machined intolayer 28. Fluid can accesschannel 29 throughsubstrate 26 fromchannel 17. -
FIGS. 5A and 5B respectively show a top view and cross-sectional side view of the construction ofFIGS. 4A and 4B . Anadditional layer 22 is in contact withlayer 28 with opening via 30 machined throughlayer 22. -
FIGS. 6A and 6B show the progressive construction shown inFIGS. 5A and 5B with an additionalmetal release layer 16 placed over via 30 and thus, over a portion oflayer 22. Avalve layer 12 is then placed over themetal release layer 16. A “U”-shapedcut 14 is made throughvalve layer 12 to themetal release layer 16 as shown in a top view inFIG. 6A formingcheck valve 9. Finally, as shown inFIGS. 7A and 7B , asecond channel layer 42 having achannel 37 withfluid input 38 a andfluid output 38 b is aligned overvalve 9 and applied to form the microfluidic device. It is understood thatadhesive layers 25 are applied between substrate. Representative thicknesses are exaggerated for illustrative purposes and not for the purpose of depicting actual or relative layer thicknesses. -
FIGS. 7A-7B and 8A-8B show various embodiments of the microfluidic devices having multiple channels. A vacuum can be applied to one or more channels for such devices by pulling fluid through the microfluidic device. According to the present invention, the placement of the integral check valve(s) allows the predictable and desired regulation of fluid flow through the channels. -
FIG. 9 shows an integrated microfluidic device incorporating both check valves, 9 a and 9 b at two different levels of the layered device having achamber 54 inlayer 55. Thesubstrate 26 on which the device is fabricated has anelectrical coil structure 52 patterned thereon, over which subsequent layers are applied. Fabrication of the channels and valve structures are carried out as previously described. After completion of the microfluidic portion of the device, which includessubstrate 26 with patternedelectrical coil structure 52,fluidic channel 20,chamber 54,valves output channel 58, and magnet 56 are applied to the top of the device and positioned overchamber 54 and coils 52. Preferably, the magnet may be a molded magnet structure that is subsequently magnetized in an electric field, or consists of a permanent magnet that is positioned and preferably held in place by an adhesive. As will be appreciated by one skilled in the field, depending upon the polarity applied to thecoils 52, a magnetic field is produced which either attracts or repels the magnet 56, vertically moving the layers of thedevice layers chamber 54. The volume change will cause fluid movement throughcheck valves - Magnet 56 is a micromolded permanent magnet adhered to a substrate. As will be appreciated by one skilled in the field,
substrate 24 is representative of a variety of substrates that may comprise movable elements of micromechanical structures. Magnet 56 preferably is a rare earth NdFeB magnet comprising powdered NdFeB metal suspended in a thermosetting plastic, cured, and magnetized employing, for example, a magnetic field strength in the order of about 20 kOe, produced by a suitable electromagnet. - The fluids presented to the channels and chambers in the devices of the present invention may comprise an analyte, which is understood to be a substance or chemical constituent that is undergoing analysis. Typically, the analyte can be of chemical, biological or physical nature. Examples of analytes include molecules, living cells, bacteria, other organisms and fractions of organisms and tissue, clusters of molecules and atoms, nanocrystals, etc. In one embodiment, the preferred diaphragm/magnet assembly is analogous to a heart chamber with the channels/valves/fluid taking on the role of a circulatory system, possibly containing cells (e.g. blood). A further embodiment is contemplated to be useful in modeling a biological system for use in bio-research, potentially reducing the need for animal testing.
- A flexible structure was made from Kapton® (polyimide) as a microfluidic valve component. The Kapton® structure, combined with a gold release layer, and an opening to direct fluid flow, created the reliable integral microfluidic check valve of the present invention.
-
FIG. 3 shows a cross section of a device fabrication where aKapton® layer 22 was laminated onto a Si, glass orplastic substrate 24. As shown inFIGS. 6A-6B , a patternedgold release layer 16 was deposited onto the Kapton® layer surface 22, followed by the deposition of thelayer 12 in which the flap valve was to be cut. A laser cut “U”shape 14 was made through theflap layer 12 to thegold release layer 16 forming a flexible structure with an effective hinge at one end (the base of the “U”). - According to one embodiment, these aforementioned structures are preferably fabricated out of thermally laminated Kapton® structures with laser micro-machining to produce channels and valve structures, but could be made from any suitable microfluidic system substrate material as would be understood by one skilled in the field of microfluidics. For example, if light transmission through the laminated structure is desired down to 350 nm or below, more (near UV) transparent films, such as Bayer Apec Polycarbonate, Solvay Udel, or Radel Polysulfone, or Dyneon THV-220 Fluorothermoplastic can be used in place of the Kapton® film. According to one embodiment, each layer is preferably hot press laminated to the previous laser-machined layer. In this way, registration of all except the top most layer, is not necessary during the lamination process. All alignment preferably is done at the laser operation, such that each laser-machining step is in registration relative to the previous layers. In this way, the structure is built up much like an integrated circuit chip rather than a multi-level circuit board where pre-patterned layers are pinned together and only laminated as a final step. The top-most layer, in which a channel has been pre-micro-machined, must be aligned over the check valve to provide it to a cavity to operate while also providing a channel for fluid to flow.
- The preferred adhesives used for laminating the multiple layers used in the microfluidic devices preferably must adhere well to the underlying substrate on which the fluidic device is fabricated, and to the layers of material forming the device. They must be thermally stable during multiple lamination processes. They must be resistant to the fluids used in the channels during device operation that might include water of different pH and/or chemical solvents. Further, the preferred adhesives must be laser-processable to allow formation of the channels and valves. Adhesives which can be used for this application preferably include thermoplastic polymers such as polyimide, polysulfone, polycarbonate and acrylic materials and blends of such polymers with cycloaliphatic epoxy with a thermal epoxy curing catalyst present such that a thermoset layer is formed during lamination. One preferred adhesive to be used for lamination is a GE developed material, composed of a siloxane containing polyimide, SPI-135, available from MicroSi Corp, Phoenix, Ariz., blended with ERL-4221 epoxy, available from Dow Chemical, Midland, Mich. and UV9380C catalyst, available from General Electric Specialty Materials, Waterford, N.Y. This adhesive blend has excellent adhesion to Kapton®, is resistant to attack from water and most solvents, but releases cleanly from a metal surface, especially a gold surface.
- The adhesives used in connection with embodiments of the invention preferably facilitate the use of Kapton® structures where selected flaps can move to create micro-fluidic check valves, when photolithography is used to define small gold areas that act as release layers.
- The “U”-shaped cuts made in the films of embodiments of the invention are preferably made with a tripled (355 nm) or quadrupled (266 nm) YAG laser, or an excimer laser at 308 nm or 248 nm. The thickness of the layers to be laser-machined may be from about 12 to about 25 μm thick, with the precise thickness dependent upon the material characteristic, such as, for example, flexibility.
- The layers must have similar properties relative to the selected adhesive, such as resistance to water and solvents, thermal stability relative to multiple lamination cycles (to retain channel integrity), and laser processability. Such preferred materials include polyimides such as Kapton®, Upilex® and Ultem®, high temperature polycarbonates such as Bayer Apec (especially if clear, transparent and colorless fluidic devices are desired for possible optical analysis), polysulfone films, PEEK (polyether ether ketone) and possibly PVDF film made from Kynar® plastic, also available from Westlake Plastics.
- While the invention has been described in detail in connection with only a limited number of embodiments, it should be readily understood that the invention is not limited to such disclosed embodiments. Rather the invention can be modified to incorporate any number of variations, alterations, substitutions or equivalent arrangements not heretofore described, but which are commensurate with the spirit and scope of the invention. Additionally, while various embodiments of the invention have been described, it is to be understood that aspects of the invention may include only some of he described embodiments. Accordingly, the invention is not to be seen as limited by the foregoing description, but is only limited by the scope of the appended claims.
Claims (21)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/119,480 US20060245933A1 (en) | 2005-05-02 | 2005-05-02 | Valve and pump for microfluidic systems and methods for fabrication |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/119,480 US20060245933A1 (en) | 2005-05-02 | 2005-05-02 | Valve and pump for microfluidic systems and methods for fabrication |
Publications (1)
Publication Number | Publication Date |
---|---|
US20060245933A1 true US20060245933A1 (en) | 2006-11-02 |
Family
ID=37234625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/119,480 Abandoned US20060245933A1 (en) | 2005-05-02 | 2005-05-02 | Valve and pump for microfluidic systems and methods for fabrication |
Country Status (1)
Country | Link |
---|---|
US (1) | US20060245933A1 (en) |
Cited By (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070048154A1 (en) * | 2005-08-26 | 2007-03-01 | Itzhak Sapir | MEMS cooling device |
US20080021364A1 (en) * | 2006-07-17 | 2008-01-24 | Industrial Technology Research Institute | Fluidic device |
US20080047608A1 (en) * | 2006-07-17 | 2008-02-28 | Industrial Technology Research Institute | Fluidic device |
US20080058192A1 (en) * | 2006-09-05 | 2008-03-06 | Samsung Electronics Co., Ltd. | Centrifugal force based microfluidic device having thermal activation unit, microfluidic system including the same and method of operating the microfluidic system |
US20080171342A1 (en) * | 2006-07-17 | 2008-07-17 | Industrial Technology Research Institute | Fluidic devices and controlling methods thereof |
US20090074615A1 (en) * | 2007-09-17 | 2009-03-19 | Ysi Incorporated | Microfluidic module including an adhesiveless self-bonding rebondable polyimide |
US20100059120A1 (en) * | 2008-09-11 | 2010-03-11 | General Electric Company | Microfluidic device and methods for droplet generation and manipulation |
US20100261193A1 (en) * | 2003-05-14 | 2010-10-14 | James Russell Webster | Valve Structure for Consistent Valve Operation of a Miniaturized Fluid Delivery and Analysis System |
US8051878B2 (en) | 2008-12-06 | 2011-11-08 | International Business Machines Corporation | Magnetic valves for performing multi-dimensional assays using one microfluidic chip |
US20130149216A1 (en) * | 2011-12-07 | 2013-06-13 | Electronics And Telecommunications Research Institute | Device for storing reagent and method of discharging reagent thereof |
WO2016029094A1 (en) * | 2014-08-22 | 2016-02-25 | Ta Instruments- Waters L.L.C. | Specimen conditioning and imaging system |
US10422362B2 (en) * | 2017-09-05 | 2019-09-24 | Facebook Technologies, Llc | Fluidic pump and latch gate |
US10473659B2 (en) | 2016-10-17 | 2019-11-12 | Reliant Immune Diagnostics, Inc. | System and method for immediate health assessment response system |
US10527555B2 (en) | 2016-12-14 | 2020-01-07 | Reliant Immune Disgnostics, Inc. | System and method for visual trigger to perform diagnostic test |
US10591933B1 (en) | 2017-11-10 | 2020-03-17 | Facebook Technologies, Llc | Composable PFET fluidic device |
US10631031B2 (en) | 2016-12-14 | 2020-04-21 | Reliant Immune Diagnostics, Inc. | System and method for television network in response to input |
US10636527B2 (en) | 2018-06-06 | 2020-04-28 | Reliant Immune Diagnostics, Inc. | System and method for quantifying, ensuring, and triggering the prescriptive authority for a telemedicine session |
US10835122B2 (en) | 2018-05-14 | 2020-11-17 | Reliant Immune Diagnostics, Inc. | System and method for image processing of medical test results using generalized curve field transform |
US10902951B2 (en) | 2016-10-17 | 2021-01-26 | Reliant Immune Diagnostics, Inc. | System and method for machine learning application for providing medical test results using visual indicia |
US10930381B2 (en) | 2017-11-10 | 2021-02-23 | Reliant Immune Diagnostics, Inc. | Microfluidic testing system for mobile veterinary applications |
US10930380B2 (en) | 2017-11-10 | 2021-02-23 | Reliant Immune Diagnostics, Inc. | Communication loop and record loop system for parallel/serial dual microfluidic chip |
US11041185B2 (en) | 2017-11-10 | 2021-06-22 | Reliant Immune Diagnostics, Inc. | Modular parallel/serial dual microfluidic chip |
US11107585B2 (en) | 2016-10-17 | 2021-08-31 | Reliant Immune Diagnostics, Inc | System and method for a digital consumer medical wallet and storehouse |
US11112406B2 (en) | 2018-06-15 | 2021-09-07 | Reliant Immune Diagnostics, Inc. | System and method for digital remote primary, secondary, and tertiary color calibration via smart device in analysis of medical test results |
US11112017B2 (en) | 2019-06-20 | 2021-09-07 | Sonoco Development, Inc. | Flexible laminate structure with integrated one-way valve |
US11124821B2 (en) | 2017-11-10 | 2021-09-21 | Reliant Immune Diagnostics, Inc. | Microfluidic testing system with cell capture/analysis regions for processing in a parallel and serial manner |
US11125746B2 (en) | 2016-12-14 | 2021-09-21 | Reliant Immune Diagnostics, Inc. | Two-sided flow-through immunoassay |
US11125749B2 (en) | 2018-06-06 | 2021-09-21 | Reliant Immune Diagnostics, Inc. | System and method for remote colorimetry and ratiometric comparison and quantification in analysis of medical test results |
US11164680B2 (en) | 2016-12-14 | 2021-11-02 | Reliant Immune Diagnostics, Inc. | System and method for initiating telemedicine conference using self-diagnostic test |
US11170877B2 (en) | 2016-12-14 | 2021-11-09 | Reliant Immune Diagnostics, LLC | System and method for correlating retail testing product to medical diagnostic code |
US11200986B2 (en) | 2017-11-10 | 2021-12-14 | Reliant Immune Diagnostics, Inc. | Database and machine learning in response to parallel serial dual microfluidic chip |
US11232872B2 (en) | 2018-06-06 | 2022-01-25 | Reliant Immune Diagnostics, Inc. | Code trigger telemedicine session |
US11295859B2 (en) | 2016-12-14 | 2022-04-05 | Reliant Immune Diagnostics, Inc. | System and method for handing diagnostic test results to telemedicine provider |
US11437142B2 (en) | 2017-11-10 | 2022-09-06 | Reliant Immune Diagnostics, Inc. | Biofluidic triggering system and method |
US11527324B2 (en) | 2017-11-10 | 2022-12-13 | Reliant Immune Diagnostics, Inc. | Artificial intelligence response system based on testing with parallel/serial dual microfluidic chip |
US11579145B2 (en) | 2016-10-17 | 2023-02-14 | Reliant Immune Diagnostics, Inc. | System and method for image analysis of medical test results |
US11594337B2 (en) | 2016-12-14 | 2023-02-28 | Reliant Immune Diagnostics, Inc. | System and method for advertising in response to diagnostic test results |
US11599908B2 (en) | 2016-12-14 | 2023-03-07 | Reliant Immune Diagnostics, Inc. | System and method for advertising in response to diagnostic test |
US11651866B2 (en) | 2016-10-17 | 2023-05-16 | Reliant Immune Diagnostics, Inc. | System and method for real-time insurance quote in response to a self-diagnostic test |
US11693002B2 (en) | 2016-10-17 | 2023-07-04 | Reliant Immune Diagnostics, Inc. | System and method for variable function mobile application for providing medical test results using visual indicia to determine medical test function type |
US11802868B2 (en) | 2016-10-17 | 2023-10-31 | Reliant Immune Diagnostics, Inc. | System and method for variable function mobile application for providing medical test results |
US11915810B2 (en) | 2016-12-14 | 2024-02-27 | Reliant Immune Diagnostics, Inc. | System and method for transmitting prescription to pharmacy using self-diagnostic test and telemedicine |
Citations (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5472539A (en) * | 1994-06-06 | 1995-12-05 | General Electric Company | Methods for forming and positioning moldable permanent magnets on electromagnetically actuated microfabricated components |
US5932799A (en) * | 1997-07-21 | 1999-08-03 | Ysi Incorporated | Microfluidic analyzer module |
US6068751A (en) * | 1995-12-18 | 2000-05-30 | Neukermans; Armand P. | Microfluidic valve and integrated microfluidic system |
US6318970B1 (en) * | 1998-03-12 | 2001-11-20 | Micralyne Inc. | Fluidic devices |
US6375871B1 (en) * | 1998-06-18 | 2002-04-23 | 3M Innovative Properties Company | Methods of manufacturing microfluidic articles |
US6382254B1 (en) * | 2000-12-12 | 2002-05-07 | Eastman Kodak Company | Microfluidic valve and method for controlling the flow of a liquid |
US6395232B1 (en) * | 1999-07-09 | 2002-05-28 | Orchid Biosciences, Inc. | Fluid delivery system for a microfluidic device using a pressure pulse |
US6406605B1 (en) * | 1999-06-01 | 2002-06-18 | Ysi Incorporated | Electroosmotic flow controlled microfluidic devices |
US6431212B1 (en) * | 2000-05-24 | 2002-08-13 | Jon W. Hayenga | Valve for use in microfluidic structures |
US6448090B1 (en) * | 1999-07-09 | 2002-09-10 | Orchid Biosciences, Inc. | Fluid delivery system for a microfluidic device using alternating pressure waveforms |
US6523559B2 (en) * | 2001-07-27 | 2003-02-25 | Wisconsin Alumni Research Foundation | Self-regulating microfluidic device and method of using the same |
US6527003B1 (en) * | 2000-11-22 | 2003-03-04 | Industrial Technology Research | Micro valve actuator |
US6561224B1 (en) * | 2002-02-14 | 2003-05-13 | Abbott Laboratories | Microfluidic valve and system therefor |
US6575188B2 (en) * | 2001-07-26 | 2003-06-10 | Handylab, Inc. | Methods and systems for fluid control in microfluidic devices |
US6581899B2 (en) * | 2000-06-23 | 2003-06-24 | Micronics, Inc. | Valve for use in microfluidic structures |
US20040045891A1 (en) * | 2002-09-09 | 2004-03-11 | Teragenics, Inc. | Implementation of microfluidic components in a microfluidic system |
-
2005
- 2005-05-02 US US11/119,480 patent/US20060245933A1/en not_active Abandoned
Patent Citations (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5472539A (en) * | 1994-06-06 | 1995-12-05 | General Electric Company | Methods for forming and positioning moldable permanent magnets on electromagnetically actuated microfabricated components |
US6068751A (en) * | 1995-12-18 | 2000-05-30 | Neukermans; Armand P. | Microfluidic valve and integrated microfluidic system |
US5932799A (en) * | 1997-07-21 | 1999-08-03 | Ysi Incorporated | Microfluidic analyzer module |
US6318970B1 (en) * | 1998-03-12 | 2001-11-20 | Micralyne Inc. | Fluidic devices |
US6375871B1 (en) * | 1998-06-18 | 2002-04-23 | 3M Innovative Properties Company | Methods of manufacturing microfluidic articles |
US6406605B1 (en) * | 1999-06-01 | 2002-06-18 | Ysi Incorporated | Electroosmotic flow controlled microfluidic devices |
US6448090B1 (en) * | 1999-07-09 | 2002-09-10 | Orchid Biosciences, Inc. | Fluid delivery system for a microfluidic device using alternating pressure waveforms |
US6395232B1 (en) * | 1999-07-09 | 2002-05-28 | Orchid Biosciences, Inc. | Fluid delivery system for a microfluidic device using a pressure pulse |
US6431212B1 (en) * | 2000-05-24 | 2002-08-13 | Jon W. Hayenga | Valve for use in microfluidic structures |
US6581899B2 (en) * | 2000-06-23 | 2003-06-24 | Micronics, Inc. | Valve for use in microfluidic structures |
US6527003B1 (en) * | 2000-11-22 | 2003-03-04 | Industrial Technology Research | Micro valve actuator |
US6382254B1 (en) * | 2000-12-12 | 2002-05-07 | Eastman Kodak Company | Microfluidic valve and method for controlling the flow of a liquid |
US6575188B2 (en) * | 2001-07-26 | 2003-06-10 | Handylab, Inc. | Methods and systems for fluid control in microfluidic devices |
US6523559B2 (en) * | 2001-07-27 | 2003-02-25 | Wisconsin Alumni Research Foundation | Self-regulating microfluidic device and method of using the same |
US6561224B1 (en) * | 2002-02-14 | 2003-05-13 | Abbott Laboratories | Microfluidic valve and system therefor |
US20040045891A1 (en) * | 2002-09-09 | 2004-03-11 | Teragenics, Inc. | Implementation of microfluidic components in a microfluidic system |
Cited By (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8309039B2 (en) * | 2003-05-14 | 2012-11-13 | James Russell Webster | Valve structure for consistent valve operation of a miniaturized fluid delivery and analysis system |
US20100261193A1 (en) * | 2003-05-14 | 2010-10-14 | James Russell Webster | Valve Structure for Consistent Valve Operation of a Miniaturized Fluid Delivery and Analysis System |
US20070048154A1 (en) * | 2005-08-26 | 2007-03-01 | Itzhak Sapir | MEMS cooling device |
US7823403B2 (en) * | 2005-08-26 | 2010-11-02 | Itzhak Sapir | MEMS cooling device |
US20080171342A1 (en) * | 2006-07-17 | 2008-07-17 | Industrial Technology Research Institute | Fluidic devices and controlling methods thereof |
US7959876B2 (en) | 2006-07-17 | 2011-06-14 | Industrial Technology Research Institute | Fluidic device |
US20080021364A1 (en) * | 2006-07-17 | 2008-01-24 | Industrial Technology Research Institute | Fluidic device |
US7897113B2 (en) | 2006-07-17 | 2011-03-01 | Industrial Technology Research Institute | Fluidic devices and controlling methods thereof |
US20080047608A1 (en) * | 2006-07-17 | 2008-02-28 | Industrial Technology Research Institute | Fluidic device |
US20080058192A1 (en) * | 2006-09-05 | 2008-03-06 | Samsung Electronics Co., Ltd. | Centrifugal force based microfluidic device having thermal activation unit, microfluidic system including the same and method of operating the microfluidic system |
US20110132870A1 (en) * | 2007-09-17 | 2011-06-09 | Ysi Incorporated | Microfluidic Module Including An Adhesiveless Self-Bonding Rebondable Polyimide |
US20090074615A1 (en) * | 2007-09-17 | 2009-03-19 | Ysi Incorporated | Microfluidic module including an adhesiveless self-bonding rebondable polyimide |
US8137641B2 (en) | 2007-09-17 | 2012-03-20 | Ysi Incorporated | Microfluidic module including an adhesiveless self-bonding rebondable polyimide |
US20100059120A1 (en) * | 2008-09-11 | 2010-03-11 | General Electric Company | Microfluidic device and methods for droplet generation and manipulation |
US8051878B2 (en) | 2008-12-06 | 2011-11-08 | International Business Machines Corporation | Magnetic valves for performing multi-dimensional assays using one microfluidic chip |
US20130149216A1 (en) * | 2011-12-07 | 2013-06-13 | Electronics And Telecommunications Research Institute | Device for storing reagent and method of discharging reagent thereof |
US8834811B2 (en) * | 2011-12-07 | 2014-09-16 | Electronics And Telecommunications Research Institute | Device for storing reagent and method of discharging reagent thereof |
WO2016029094A1 (en) * | 2014-08-22 | 2016-02-25 | Ta Instruments- Waters L.L.C. | Specimen conditioning and imaging system |
US9753104B2 (en) | 2014-08-22 | 2017-09-05 | Ta Instruments-Waters L.L.C. | Specimen conditioning and imaging system |
US10473659B2 (en) | 2016-10-17 | 2019-11-12 | Reliant Immune Diagnostics, Inc. | System and method for immediate health assessment response system |
US11802868B2 (en) | 2016-10-17 | 2023-10-31 | Reliant Immune Diagnostics, Inc. | System and method for variable function mobile application for providing medical test results |
US11468991B2 (en) | 2016-10-17 | 2022-10-11 | Reliant Immune Diagnostics, Inc. | System and method for machine learning application for providing medical test results using visual indicia |
US11935657B2 (en) | 2016-10-17 | 2024-03-19 | Reliant Immune Diagnostics, Inc. | System and method for a digital consumer medical wallet and storehouse |
US11567070B2 (en) | 2016-10-17 | 2023-01-31 | Reliant Immune Diagnostics, Inc. | System and method for collection and dissemination of biologic sample test results data |
US11579145B2 (en) | 2016-10-17 | 2023-02-14 | Reliant Immune Diagnostics, Inc. | System and method for image analysis of medical test results |
US11651866B2 (en) | 2016-10-17 | 2023-05-16 | Reliant Immune Diagnostics, Inc. | System and method for real-time insurance quote in response to a self-diagnostic test |
US11107585B2 (en) | 2016-10-17 | 2021-08-31 | Reliant Immune Diagnostics, Inc | System and method for a digital consumer medical wallet and storehouse |
US10902951B2 (en) | 2016-10-17 | 2021-01-26 | Reliant Immune Diagnostics, Inc. | System and method for machine learning application for providing medical test results using visual indicia |
US10928390B2 (en) | 2016-10-17 | 2021-02-23 | Reliant Immune Diagnostics, Inc. | Medical apparatus for testing for medical conditions including zika and pregnancy |
US11693002B2 (en) | 2016-10-17 | 2023-07-04 | Reliant Immune Diagnostics, Inc. | System and method for variable function mobile application for providing medical test results using visual indicia to determine medical test function type |
US11867635B2 (en) | 2016-12-14 | 2024-01-09 | Reliant Immune Diagnostics, Inc. | System and method for visual trigger to perform diagnostic test |
US10890534B2 (en) | 2016-12-14 | 2021-01-12 | Reliant Immune Diagnostics, Inc. | System and method for visual trigger to perform diagnostic test |
US11295859B2 (en) | 2016-12-14 | 2022-04-05 | Reliant Immune Diagnostics, Inc. | System and method for handing diagnostic test results to telemedicine provider |
US11599908B2 (en) | 2016-12-14 | 2023-03-07 | Reliant Immune Diagnostics, Inc. | System and method for advertising in response to diagnostic test |
US11594337B2 (en) | 2016-12-14 | 2023-02-28 | Reliant Immune Diagnostics, Inc. | System and method for advertising in response to diagnostic test results |
US11125746B2 (en) | 2016-12-14 | 2021-09-21 | Reliant Immune Diagnostics, Inc. | Two-sided flow-through immunoassay |
US11915810B2 (en) | 2016-12-14 | 2024-02-27 | Reliant Immune Diagnostics, Inc. | System and method for transmitting prescription to pharmacy using self-diagnostic test and telemedicine |
US11164680B2 (en) | 2016-12-14 | 2021-11-02 | Reliant Immune Diagnostics, Inc. | System and method for initiating telemedicine conference using self-diagnostic test |
US11170877B2 (en) | 2016-12-14 | 2021-11-09 | Reliant Immune Diagnostics, LLC | System and method for correlating retail testing product to medical diagnostic code |
US10631031B2 (en) | 2016-12-14 | 2020-04-21 | Reliant Immune Diagnostics, Inc. | System and method for television network in response to input |
US10527555B2 (en) | 2016-12-14 | 2020-01-07 | Reliant Immune Disgnostics, Inc. | System and method for visual trigger to perform diagnostic test |
US10989233B2 (en) | 2017-09-05 | 2021-04-27 | Facebook Technologies, Llc | Fluidic pump and latch gate |
US10422362B2 (en) * | 2017-09-05 | 2019-09-24 | Facebook Technologies, Llc | Fluidic pump and latch gate |
US10930381B2 (en) | 2017-11-10 | 2021-02-23 | Reliant Immune Diagnostics, Inc. | Microfluidic testing system for mobile veterinary applications |
US11587658B2 (en) | 2017-11-10 | 2023-02-21 | Reliant Immune Diagnostics, Inc. | Communication loop and record loop system for parallel/serial dual microfluidic chip |
US11437142B2 (en) | 2017-11-10 | 2022-09-06 | Reliant Immune Diagnostics, Inc. | Biofluidic triggering system and method |
US10930380B2 (en) | 2017-11-10 | 2021-02-23 | Reliant Immune Diagnostics, Inc. | Communication loop and record loop system for parallel/serial dual microfluidic chip |
US11527324B2 (en) | 2017-11-10 | 2022-12-13 | Reliant Immune Diagnostics, Inc. | Artificial intelligence response system based on testing with parallel/serial dual microfluidic chip |
US11200986B2 (en) | 2017-11-10 | 2021-12-14 | Reliant Immune Diagnostics, Inc. | Database and machine learning in response to parallel serial dual microfluidic chip |
US10591933B1 (en) | 2017-11-10 | 2020-03-17 | Facebook Technologies, Llc | Composable PFET fluidic device |
US11041185B2 (en) | 2017-11-10 | 2021-06-22 | Reliant Immune Diagnostics, Inc. | Modular parallel/serial dual microfluidic chip |
US11124821B2 (en) | 2017-11-10 | 2021-09-21 | Reliant Immune Diagnostics, Inc. | Microfluidic testing system with cell capture/analysis regions for processing in a parallel and serial manner |
US11605450B2 (en) | 2017-11-10 | 2023-03-14 | Reliant Immune Diagnostics, Inc. | Microfluidic testing system for mobile veterinary applications |
US11412931B2 (en) | 2018-05-14 | 2022-08-16 | Reliant Immune Diagnostics, Inc. | System and method for image processing of medical test results using generalized curve field transform |
US10835122B2 (en) | 2018-05-14 | 2020-11-17 | Reliant Immune Diagnostics, Inc. | System and method for image processing of medical test results using generalized curve field transform |
US10636527B2 (en) | 2018-06-06 | 2020-04-28 | Reliant Immune Diagnostics, Inc. | System and method for quantifying, ensuring, and triggering the prescriptive authority for a telemedicine session |
US11125749B2 (en) | 2018-06-06 | 2021-09-21 | Reliant Immune Diagnostics, Inc. | System and method for remote colorimetry and ratiometric comparison and quantification in analysis of medical test results |
US11232872B2 (en) | 2018-06-06 | 2022-01-25 | Reliant Immune Diagnostics, Inc. | Code trigger telemedicine session |
US11112406B2 (en) | 2018-06-15 | 2021-09-07 | Reliant Immune Diagnostics, Inc. | System and method for digital remote primary, secondary, and tertiary color calibration via smart device in analysis of medical test results |
US11112017B2 (en) | 2019-06-20 | 2021-09-07 | Sonoco Development, Inc. | Flexible laminate structure with integrated one-way valve |
US11703138B2 (en) | 2019-06-20 | 2023-07-18 | Sonoco Development, Inc. | Flexible laminate structure with integrated one-way valve |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20060245933A1 (en) | Valve and pump for microfluidic systems and methods for fabrication | |
US6644944B2 (en) | Uni-directional flow microfluidic components | |
US10119619B2 (en) | Microfluidic pump and valve structures and fabrication methods | |
US7291512B2 (en) | Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes | |
US8388908B2 (en) | Fluidic devices with diaphragm valves | |
Hosokawa et al. | A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer technique | |
WO2002085522A1 (en) | Microfluidic device with partially restrained element | |
US20010054702A1 (en) | Valve for use in microfluidic structures | |
US8550119B2 (en) | Microfabricated elastomeric valve and pump systems | |
US7258774B2 (en) | Microfluidic devices and methods of use | |
US8512502B2 (en) | Microfluidic pump and valve structures and fabrication methods | |
US8585013B2 (en) | Magnetic microvalve using metal ball and method of manufacturing the same | |
US7357898B2 (en) | Microfluidics packages and methods of using same | |
US20140346378A1 (en) | Microfluidic valve module and system for implementation | |
US20060054228A1 (en) | Microfabricated elastomeric valve and pump systems | |
Murray et al. | Electro-adaptive microfluidics for active tuning of channel geometry using polymer actuators | |
US20120181460A1 (en) | Valves with Hydraulic Actuation System | |
EP1345551A2 (en) | Microfabricated elastomeric valve and pump systems | |
DE102010032799B4 (en) | Micro valve with elastically deformable valve lip, manufacturing process and micropump | |
Ni et al. | An integrated planar magnetic micropump | |
Huang et al. | Fabrication of micro pneumatic valves with double-layer elastic poly (dimethylsiloxane) membranes in rigid poly (methyl methacrylate) microfluidic chips | |
JP6662776B2 (en) | Microfluidic device using valve | |
US8096786B2 (en) | Three dimensional micro-fluidic pumps and valves | |
JP2005321266A (en) | Chip for microchemical system | |
Tanaka et al. | Assembly and simple demonstration of a micropump installing PDMS-based thin membranes as flexible micro check valves |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: GENERAL ELECTRIC COMPANY, NEW YORK Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BALCH, ERNEST WYNE;GORCZYCA, THOMAS BERT;POTYRAILO, RADISLAV ALEXANDROVICH;AND OTHERS;REEL/FRAME:016837/0476;SIGNING DATES FROM 20050322 TO 20050329 |
|
AS | Assignment |
Owner name: CITIBANK, N.A., AS COLLATERAL AGENT, NEW YORK Free format text: SECURITY AGREEMENT;ASSIGNOR:SABIC INNOVATIVE PLASTICS IP B.V.;REEL/FRAME:021423/0001 Effective date: 20080307 Owner name: CITIBANK, N.A., AS COLLATERAL AGENT,NEW YORK Free format text: SECURITY AGREEMENT;ASSIGNOR:SABIC INNOVATIVE PLASTICS IP B.V.;REEL/FRAME:021423/0001 Effective date: 20080307 |
|
AS | Assignment |
Owner name: SABIC INNOVATIVE PLASTICS IP B.V., MASSACHUSETTS Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:CITIBANK, N.A.;REEL/FRAME:022846/0411 Effective date: 20090615 Owner name: SABIC INNOVATIVE PLASTICS IP B.V.,MASSACHUSETTS Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:CITIBANK, N.A.;REEL/FRAME:022846/0411 Effective date: 20090615 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |